Updated on 2021/09/24

写真a

 
SUZUKI Takamasa
 
Organization
Academic Assembly Institute of Science and Technology JOUHOU DENSHI KOUGAKU KEIRETU Professor
Graduate School of Science and Technology Electrical and Information Engineering Electrical and Electronic Engineering Professor
Faculty of Engineering Department of Engineering Professor
Title
Professor
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Degree

  • 博士(工学) ( 1994.3   東京工業大学 )

Research Areas

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Measurement engineering

Research History

  • Niigata University   Graduate School of Science and Technology Electrical and Information Engineering Electrical and Electronic Engineering   Professor

    2010.4

  • Niigata University   Faculty of Engineering Department of Electrical and Electronic Engineering   Professor

    2010.4

  • Niigata University   Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Material Science and Engineering Technology   Professor

    2007.9 - 2010.3

  • Niigata University   Faculty of Engineering Department of Electrical and Electronic Engineering   Associate Professor

    2004.4 - 2007.8

  • Niigata University   Faculty of Engineering   Associate Professor (as old post name)

    1994.7 - 2004.3

  • Niigata University   Faculty of Engineering   Lecturer

    1993.4 - 1994.6

  • Niigata University   Faculty of Engineering   Research Assistant

    1987.1 - 1993.3

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Committee Memberships

  •   Chair for the Fabrication, Design and Instrumentation division in OSA  

    2018.1 - 2020.12   

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  •   アメリカ光学会 光学設計・製造研究部門 委員長  

    2018.1 - 2020.12   

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  •   アメリカ光学会 国際会議開催部門 委員  

    2018.1 - 2020.12   

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  •   Committee member of the Board of Meetings in OSA  

    2018.1 - 2020.12   

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  • 日本光学会   信越地区幹事  

    2006.4 - 2008.3   

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  • 応用物理学会   代議員  

    2006.2 - 2008.1   

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  • 応用物理学会   北陸信越支部幹事  

    2003.4 - 2005.3   

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  • 電子情報通信学会   本部評議員  

    2002.5 - 2003.4   

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  • 日本光学会   信越地区幹事  

    2002.4 - 2004.3   

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  • アメリカ光学会(OSA)   ディビッド・リチャードソン・メダル選考委員会委員  

    2002.1 - 2003.12   

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  •   member of the David Richardson Medal Committee  

    2002.1 - 2003.12   

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  • 電子情報通信学会   信越支部評議員  

    2001.5 - 2003.4   

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Papers

  • Vibration distribution measurement using downsampling phase-shifting interferometer

    Y. Ohara, T. Suzuki, S. Choi, O. Sasaki

    Opt. Eng.   59 ( 3 )   034112_1 - 034112_10   2020.3

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1117/1.OE.59.3.034112

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  • Dual scanning white-light interferometer for exact thickness measurement of glass plate with large thickness Reviewed

    K. Zhang, O. Sasaki, S. Luo, T. Suzuki, Y. Liu, J. Pu

    Meas. Sci. and Tech.   31 ( 4 )   045009_1   2020.1

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    DOI: 10.1088/1361-6501/ab4642

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  • An arm length stabilization system for KAGRA and future

    T Akutsu

    Class. and Quantum Grav.   37 ( 3 )   1 - 21   2019.11

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  • Near-Infrared Photoimmunotherapy Using a Small Protein Mimetic for HER2-Overexpressing Breast Cancer Reviewed

    H. Yamaguchi, N. Pantarat, T. Suzuki, A. Evdokiou

    Int. J. Mol. Sci.   20 ( 23 )   5838_1 - 5838_14   2019.11

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.3390/ijms20235835

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  • Precise vibration measurement techniques based on laser diode interferometry Invited Reviewed

    T. Suzuki, Y. Ohara, T. Sumizawa, S. Choi

    Proc. of ISOM ’19   Tu-I-01 - Tu-I-01   2019.10

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  • Acousto-optically tuned external-cavity laser diode for optical coherence tomography with continuous wavelet transform Reviewed

    T. Suzuki, N. Sugawara, S. Choi, O. Sasaki

    Opt. Eng.   58 ( 10 )   104108_1 - 104108_6   2019.10

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    DOI: 10.1117/1.OE.58.10.104108

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  • Vibration distribution measurement using down sampling phase shifting interferometer Reviewed

    Y. Ohara, T. Suzuki, S. Choi

    Proc of ISMTII2019   ID-55_1-5 - ID-55_5   2019.9

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  • Step profile measurement using full field SD-OCT based on wavelet transform Reviewed

    H. Yamaoka, T. Suzuki, S. Choi

    Proc of ISMTII2019   ID-99_1 - ID-99_6   2019.9

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  • Real-time vibration measurement with a fiber coupler laser diode interferometer utilizing synchronous detection Reviewed

    T. Sumizawa, T. Suzuki, S. Choi

    Proc of ISMTII2019   ID-68_1 - ID-68_6   2019.9

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  • Thickness distribution measurement with a full-field pulsed SD-OCT Reviewed

    T. Suzuki, B. Liu, S. Choi, O. Sasaki

    Technical digest of OIE2019   73 - 74   2019.8

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  • 3D thickness measurement using pulse-driven optical coherence tomography based on wavelet transform Reviewed

    T. Suzuki, B. Liu, S. Choi

    Proc. of SPIE Vol. 11102   111021A_1 - 111021A_8   2019.8

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  • Full-field optical coherence tomography with an acousto-optically tuned external-cavity laser diode Invited Reviewed

    T. Suzuki, N. Sugawara, S. Choi

    Proc. of SPIE Vol. 11209   1120922_1 - 1120922_8   2019.8

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  • First cryogenic test operation of underground km-scale gravitational-wave observatory KAGRA Reviewed

    T Akutsu

    Class. and Quantum Grav.   36 ( 16 )   1 - 23   2019.7

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1088/1361-6382/ab28a9

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  • Signal correction by detection of scanning position in a white-light interferometer for exact surface profile measurement Reviewed

    Songjie Luo, Takamasa Suzuki, Osami Sasaki, Samuel Choi, Ziyang Chen, Jixiong Pu

    Appl. Opt.   58 ( 13 )   3544 - 3558   2019.4

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1364/AO.58.003548

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  • Imaging of metastatic cancer cells in sentinel lymph nodes using affibody probes and possibility of a theranostic approach Reviewed

    M. Tsuchimochi, H. Yamaguchi, K. Hayama, Y. Okada Y, T. Kawase, T. Suzuki, N. Tsubokawa, N. Wada, A. Ochiai, S. Fujii, H. Fujii

    Int. J. Mol. Sci.   20 ( 2 )   427_1 - 427_24   2019.1

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.3390/ijms20020427

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  • Improvement of wavelength-scanning range in acousto-optically tuned external-cavity laser diode Reviewed

    N. Sugawara, T. Suzuki, S. Choi

    Proc. of2018 Joint Symposia on Optics   31aAJ8 - 31aAJ8   2018.10

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  • Advanced signal processing in a white-light scanning interferometer for exact surface profile measurement Reviewed

    S. Luo, O. Sasaki, S. Choi, T. Suzuki, J. Pu

    Proc. of SPIE 10819   108190N_1 - 108190N_7   2018.10

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  • Full-field optical coherence tomography using acousto-optically tuned external-cavity laser diode and wavelet transform Reviewed

    T. Suzuki, G. Suda, S. Choi, O. Sasaki

    Proc. of Frontiers in Optics 2018   FM3D.3 - FM3D.3   2018.9

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  • Student exchange program in Faculty of Engineering of Niigata University from exchange coordinators' point of view Reviewed

    佐藤孝, 鈴木孝昌, 清水忠明, 坂本秀一, 佐々木朋裕, 岡徹雄

    電気学会研究会資料   2018 ( 1 )   65 - 69   2018.3

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  • Full-field optical coherence tomography using acousto-optically tuned external-cavity laser diode in Littrow configuration Reviewed

    G. Suda, T. Suzuki, S. Choi, O. Sasaki

    Proc. of OIE'17   P5 - P5   2017.9

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  • Wavelength scanning VCSEL interferometer using wavelet analysis Invited Reviewed

    T. Suzuki, R. Shintate, C. Samuel, O. Sasaki

    Proc. of OIE'17   S7 - S7   2017.9

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  • Multi-frequency swept en-face optical coherence microscopy with supercontinuum comb for in-vivo measurement of inner ear Invited Reviewed

    S. Choi, F. Nin, T. Ota, K. Sato, T. Suzuki, H. Hibino

    Proc. of OIE'17   S6 - S6   2017.9

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  • Measurement of vibration distribution using down-sampling phase-shifting interferometer Reviewed

    K. Kurita, T. Suzuki, S. Choi, O. Sasaki

    Proc. of OIE'17   P8 - P8   2017.9

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  • Compensation technique for nonlinear interference signal Reviewed

    T. Hanyu, T. Suzuki, S. Choi, O. Sasaki

    Proc. of OIE'17   P7 - P7   2017.9

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  • Time-domain super luminescent diode interferometer using wavelet transform Reviewed

    T. Sugai, T. Suzuki, S. Choi, O. Sasaki

    Proc. of OIE'17   P6 - P6   2017.9

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  • A signal analyzing technique using continuous wavelet transform in spectral interferometry Reviewed

    T. Serizawa, T. Suzuki, S. Choi, O. Sasaki

    Proc. of ICO-24   M1D-04   2017.8

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  • 3-D surface profile measurement using spectral interferometry based on continuous wavelet transform Reviewed

    Takuma Serizawa, Takamasa Suzuki, Samuel Choi, Osami Sasaki

    OPTICS COMMUNICATIONS   396   216 - 220   2017.8

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:ELSEVIER SCIENCE BV  

    This study proposes a signal analysis technique that uses continuous wavelet transform for signal processing in a spectral domain optical coherence tomography system. Our method enables us to calculate the optical path difference simply by taking advantage of the fact that the product of the phase and wavelength becomes constant. Experimental results obtained using a pair of gauge blocks with a thickness difference of 40 mu m confirm that the repetitive measurement accuracy was 65.1 nm. A demonstration of the three-dimensional surface profile measurement indicates that the rms measurement error is 0.17 mu m.

    DOI: 10.1016/j.optcom.2017.03.053

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  • Acousto-optically tuned eternal-cavity laser diode based on littrow configuration Reviewed

    G. Suda, T. Suzuki, S. Choi, O. Sasaki

    Proc. of International conference on Optoacoustics (ICOA2017)   8 - 8   2017.5

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  • Time-domain super luminescent diode interferometer using wavelet transform Reviewed

    T. Sugai, T. Suzuki, S. Choi, O. Sasaki

    Proc. of International conference on Optoacoustics (ICOA2017)   11 - 11   2017.5

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  • Vibration distribution measurement using down sampling phase shifting interferometer Reviewed

    K. Kurita, T. Suzuki, S. Choi, O. Sasaki

    Proc. of International conference on Optoacoustics (ICOA2017)   10 - 10   2017.5

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  • Time-domain low-coherence interferometry compensating nonlinearity of modulation Reviewed

    T. Hanyu, T. Suzuki, S. Choi, O. Sasaki

    Proc. of International conference on Optoacoustics (ICOA2017)   9 - 9   2017.5

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  • Vibration distribution measurement using phase-shifting interferometry and down-sampling technique Reviewed

    Takamasa Suzuki, Ryo Umeki, Samuel Choi, Osami Sasaki

    Optics InfoBase Conference Papers   2017   2017

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:OSA - The Optical Society  

    A technique for vibration distribution measurement using a combination of phaseshifting interferometry and the down-sampling technique is proposed and demonstrated. Our system is capable of high-speed vibration measurements and does not require expensive highspeed cameras.

    DOI: 10.1364/OFT.2017.OW4B.4

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  • Simultaneous measurement of thickness and refractive index using phase shifted Coherent Gradient Sensor Reviewed

    Reena Disawal, Takamasa Suzuki, Shashi Prakash

    OPTICS AND LASER TECHNOLOGY   86   85 - 92   2016.12

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:ELSEVIER SCI LTD  

    We report simultaneous measurement of thickness and refractive index (RI) using Coherent Gradient Sensing (CGS) based interferometric setup. The collimated light beam transmitted through the specimen is analyzed using two gratings in tandem and a spatial filtering arrangement. At the imaging plane, the desired orders superpose yielding interference fringes. Phase shifting interferometric (PSI) technique has been used to obtain the phase information directly. For decoding the information of thickness and RI, the specimen is rotated and the variation in interferometric phase before and after the specimen rotation determined. Simultaneous measurement on a glass plate of thickness 6.019 mm and refractive index of 1.4570 has been demonstrated. Detailed uncertainty analysis is also reported. The expanded uncertainty for thickness and RI in the measurement process was determined to be +/- 0.005 mm and +/- 0.00008 respectively. (C) 2016 Elsevier Ltd. All rights reserved.

    DOI: 10.1016/j.optlastec.2016.06.015

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  • Laser diode interferometer utilizing polarization technique Invited Reviewed

    T. Suzuki, S. Choi, O. Sasaki

    Proc. of SIOT2016   SS2-11, p1 - SS2-11, p2   2016.11

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  • Spectral domain optical coherence tomography using wavelet transform Reviewed

    T. Serizawa, T. Suzuki, S. Choi, O. Sasaki

    Proc. of OPIC 2016   BISCp6-18   2016.5

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  • WIDE-FIELD HETERODYNE VIBROMETRY FOR MEASUREMENT OF SURFACE VIBRATIONS IN BIOLOGICAL TISSUES Reviewed

    Samuel Choi, Fumiaki Nin, Takamasa Suzuki, Hiroshi Hibino

    2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN)   2016

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:IEEE  

    Nanovibrations in bio-tissues play pivotal roles in organ functions, but techniques for their measurement have been premature. To address this, a wide-field vibrometry is adopted in a laser microscope. 2D surface vibration distributions of paw tissues of rats could be measured without x-y mechanical beam scanning. The measurable vibration frequency and amplitude were 10 kHz and approximately 240 nm.

    DOI: 10.1109/OMN.2016.7565864

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  • Wide-field heterodyne interferometric vibrometry for two-dimensional surface vibration measurement Reviewed

    Samuel Choi, Yuta Maruyama, Takamasa Suzuki, Fumiaki Nin, Hiroshi Hibino, Osami Sasaki

    OPTICS COMMUNICATIONS   356   343 - 349   2015.12

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    Conventional laser Doppler vibrometry and heterodyne interferometry suffer during the simultaneous measurement of the spatial distribution of vibration parameters such as the amplitude, frequency and phase in a wide field of view. Although demand is increasing for methods that can measure vibrations over a wide field of view for a wide range of applications from industrial product inspections to biological measurements, full-field (FF) techniques for high-speed vibration measurements without a spatial scan are untapped. We propose a new method for high-speed FF vibration measurement that can easily be combined with profilometry and tomographic interferometry using a conventional CCD or CMOS camera. In principle, the measurable vibration frequency is unrestricted because the heterodyne signal produced by the modulated interferogram can be controlled to accommodate the CCD frame rate. The validity of the proposed method and the measurement accuracy of the spatial vibration amplitude were evaluated through simulations and experiments. In experiments, the spatial vibration parameters of a mirror vibrated at a frequency of 1 kHz and amplitude of approximately 5-65 nm were successfully measured with a spatial fluctuation of 3%-6.5%. (C) 2015 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.optcom.2015.08.016

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  • Profile measurement of thin films by backpropagation of multiple-wavelength optical fields with two sinusoidal phase-modulating interferometers Reviewed

    Osami Sasaki, Jian Xin, Samuel Choi, Takamasa Suzuki

    OPTICS COMMUNICATIONS   356   578 - 581   2015.12

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    Optical wavelength is scanned linearly with time, and an optical field produced by a thin film on a detection plane is detected with a sinusoidal phase-modulating interferometer. Scanned wavelength is detected with another interferometer. The detected multiple-optical fields are backpropagated along the optical axis in a computer by use of the detected wavelengths. An optical field is reconstructed by summing the backpropagated fields over the multiple wavelengths. The intensity and phase distributions of the reconstructed optical field provide the positions of the thin film surfaces with an accuracy of a few nanometers. (C) 2015 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.optcom.2015.08.066

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  • Self-pulsation laser diode interferometer based on spectral-domain optical coherence tomography Invited Reviewed

    T. Suzuki, Y. Ueno, S. Choi

    Technical digest of OIE2015   28 - 29   2015.9

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  • Phase-shifting interferometer with pulse modulation based on a downsampling technique Reviewed

    Takuma Serizawa, Takamasa Suzuki, Samuel Choi

    OPTICAL ENGINEERING   54 ( 8 )   085107_1 - 085107_4   2015.8

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS  

    A phase-shifting interferometer that uses pulse modulation and downsampling is proposed and demonstrated. Pulse modulation is a direct modulating technique that realizes a rapid, large change in the wavelength of a laser diode with a constant optical power. For instance, an interference signal of 10 kHz is observed after the injection of pulse current. However, an expensive high-speed charge coupled device (CCD) camera is required to acquire a high-speed interference signal. If we consider a periodical signal, the same waveform repeats at every period. Therefore, the signal varying with high frequency can be captured by a low-frequency sampling pulse. This signal processing technique, the so-called downsampling, enables us to acquire rapid interference signals with a standard CCD camera. The experimental results using a flat mirror and a concave mirror showed measurement errors of 10 and 28 nm in root mean square (RMS), respectively. The repeatability of the experimental result between the first and the second is 13 nm in RMS. (C) 2015 Society of Photo-Optical Instrumentation Engineers (SPIE)

    DOI: 10.1117/1.OE.54.8.085107

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  • Multifrequency swept common-path en-face OCT for wide-field measurement of interior surface vibrations in thick biological tissues Reviewed

    Samuel Choi, Tomoya Watanabe, Takamasa Suzuki, Fumiaki Nin, Hiroshi Hibino, Osami Sasaki

    OPTICS EXPRESS   23 ( 16 )   21078 - 21089   2015.8

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:OPTICAL SOC AMER  

    Microvibrations that occur in bio-tissues are considered to play pivotal roles in organ function; however techniques for their measurement have remained underdeveloped. To address this issue, in the present study we have developed a novel optical coherence tomography (OCT) method that utilizes multifrequency swept interferometry. The OCT volume data can be acquired by sweeping the multifrequency modes produced by combining a tunable Fabry-Perot filter and an 840 nm super-luminescent diode with a bandwidth of 160 nm. The system employing the wide-field heterodyne method does not require mechanical scanning probes, which are usually incorporated in conventional Doppler OCTs and heterodyne-type interferometers. These arrangements allow obtaining not only 3D tomographic images but also various vibration parameters such as spatial amplitude, phase, and frequency, with high temporal and transverse resolutions over a wide field. Indeed, our OCT achieved the axial resolution of similar to 2.5 mu m when scanning the surface of a glass plate. Moreover, when examining a mechanically resonant multilayered bio-tissue in full-field configuration, we captured 22 nm vibrations of its internal surfaces at 1 kHz by reconstructing temporal phase variations. This so-called "multifrequency swept common-path en-face OCT" can be applied for measuring microdynamics of a variety of biological samples, thus contributing to the progress in life sciences research. (C) 2015 Optical Society of America

    DOI: 10.1364/OE.23.021078

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  • Optical multi-frequency swept sensing for wide-field vibration measurement of interior surfaces in biological tissue Reviewed

    S. Choi, F. Nin, H. Hibino, T. Suzuki

    BIOPHOTONICS JAPAN 2015   9792   2015

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:SPIE-INT SOC OPTICAL ENGINEERING  

    Multifrequency sensing technique adopting the wide field heterodyne detection technique is demonstrated for interior surface vibration measurements in thick biological tissue. These arrangements allow obtaining not only 3D tomographic images but also various vibration parameters such as spatial amplitude, phase, and frequency, with high temporal and transverse resolutions over a wide field. The axial resolution and the accuracy of vibration amplitude measurement were estimated to be 2.5 mu m and 3 nm, respectively. This wide-field tomographic sensing method can be applied for measuring microdynamics of a variety of biological samples, thus contributing to the progress in life sciences research.

    DOI: 10.1117/12.2204984

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  • Two-dimensional thickness measurement using acousto-optically tuned external-cavity laser diode Reviewed

    Takamasa Suzuki, Shingo Abe, Samuel Choi

    OPTICAL SYSTEMS DESIGN 2015: OPTICAL FABRICATION, TESTING, AND METROLOGY V   9628   96281K_1 - 96281K_8   2015

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:SPIE-INT SOC OPTICAL ENGINEERING  

    We propose a swept source optical coherence tomography that uses an original external-cavity laser diode and demonstrate measurements of thickness distribution in two dimensions using this equipment. We first conducted high-speed, wide-range wavelength scanning with an external-cavity laser diode that was equipped with a special antireflection-coated laser diode working at 770 nm. Using an acousto-optic deflector enabled a tuning range and rate of 22 nm and 20 kHz, respectively, with no mechanical elements. Next, we applied this source to an optical coherence tomography and measured the two-dimensional distribution of thickness of a thin glass plate.

    DOI: 10.1117/12.2193027

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  • Three-dimensional step-height measurement using sinusoidal wavelength scanning interferometer with four-step phase-shift method Reviewed

    Samuel Choi, Shouhei Takahashi, Osami Sasaki, Takamasa Suzuki

    OPTICAL ENGINEERING   53 ( 8 )   084110_1 - 084110_6   2014.8

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS  

    A sinusoidal wavelength scanning interferometer with the four-step phase-shift method is demonstrated for a three-dimensional profile measurement. The interference phase-shift signal generated by the sinusoidal wavelength scanning contains information about optical path difference covering a nm-mu m scale structure. The interference phase-shift signal was obtained by the four-step phase-shifting method. The sinusoidal wavelength shifting with a frequency of approximately 180 Hz and tunable range of 5.7 nm was performed by the Littman-Metcalf external resonator-type tunable laser with a center of 772.1 nm. The full-field surface profile measurement was conducted by a charge coupled device image sensor with an accuracy on a nm scale. The surface profiles of gauge blocks with a step height up to about 10 mu m were successfully measured with a surface profile irregularity of 3.8 x 10(-2) mu m. The deviations of two measured surfaces of upper and lower steps were estimated to be 1.6 x 10(-2) mu m and 3.1 x 10(-2) mu m, respectively. (C) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)

    DOI: 10.1117/1.OE.53.8.084110

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  • Multi-frequency scanning interferometry using variable spatial spectral filter Reviewed

    Samuel Choi, Ryoko Sato, Heiichi Kato, Osami Sasaki, Takamasa Suzuki

    OPTICS COMMUNICATIONS   316   168 - 173   2014.4

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:ELSEVIER SCIENCE BV  

    Recently, a variety of the optical comb-based interferometries has been developed for profilometry and tomography. However the interference amplitude and phase characteristics involving the center frequency and mode spacing of the optical comb have not been sufficiently studied. To investigate these multi-frequency interference characteristics, we proposed a broadband frequency variable quasi-comb generator utilizing 4-f optical system and a spatial spectral filter which can perform unrestricted scanning of the center frequency and mode spacing. By using a sinusoidal phase modulating interferometer with the quasi-comb generator, fundamental proof-of-principle experiments were successfully demonstrated. The interference phase fixation during the symmetrical varying of the mode spacing produced the interference amplitude peak envelope without fringes. On the other hand, it was confirmed that the interference phase was changed linearly without the amplitude change by the center frequency shift of the multi-frequency spectrum. (C) 2013 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.optcom.2013.12.015

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  • Low-coherence interferomety based on continuous wavelet transform Reviewed

    Takamasa Suzuki, Hiroo Matsui, Samuel Choi, Osami Sasaki

    OPTICS COMMUNICATIONS   311   172 - 176   2014.1

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:ELSEVIER SCIENCE BV  

    The present paper proposes a low-coherence interferometry system based on continuous wavelet transform, which can simultaneously detect the peak position and frequency of a signal. Although the proposed system is analogous to conventional time-domain optical coherence tomography, it realizes accurate wide-range surface profile measurement because the wavelet transform enables accurate evaluation of the position of the reference mirror. The performance of the proposed system was evaluated through step-height measurement. (C) 2013 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.optcom.2013.08.018

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  • Full-field step profile measurement with sinusoidal wavelength scanning interferometer Reviewed

    Samuel Choi, Osami Sasaki, Takamasa Suzuki

    Proceedings of SPIE - The International Society for Optical Engineering   9110   2014

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    A sinusoidal wavelength scanning interferometer is proposed for 3-D profile measurement. The interference phase-shift signal generated by the sinusoidal wavelength scanning contains information of optical path difference (OPD) covering nm-mm scale structure. The interference phase-shift signal was obtained by the four-step phase shifting method. The sinusoidal wavelength shifting bandwidth of 5.7 nm with a frequency of approximately 180 Hz was performed by the Littman-Metcalf external resonator-type tunable laser with a center of 772.1 nm. The full-field step-height surface profile measurement and 3-D surface measurement were conducted by a CCD image sensor with an accuracy of few tens nm. The surface profile of gauge blocks with a step-height of up to 10 μm was successfully measured. © 2014 SPIE.

    DOI: 10.1117/12.2053539

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  • Low-coherence interferometer using a pulsation laser diode Invited Reviewed

    Takamasa Suzuki, Yusuke Ueno, Samuel Choi, Osami Sasaki

    DIMENSIONAL OPTICAL METROLOGY AND INSPECTION FOR PRACTICAL APPLICATIONS III   9110   911009_1 - 911009_6   2014

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    A self-pulsation laser diode interferometer based on spectral-domain optical coherence tomography is proposed. A visible multimode laser diode allows easy optical alignment and an economical, configurable system. A cylindrical lens and acousto-optic deflector used in our system enable rapid and stable scanning. Experimental results confirm that full-field measurement is possible without mechanical scanning devices.

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  • Wide-range wavelength tuning in a VCSEL based on pulsed modulation Invited Reviewed

    T. Suzuki, T. Ishizuka, S. Choi, O. Sasaki

    Technical digest of OIE13   23 - 24   2013.9

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  • Wavelength-scanning interferometers for shape measurement of thin films by backpropagation of multiple-wavelength optical fields Invited Reviewed

    O. Sasaki, J. Xin, S. Choi, T. Suzuki

    Technical digest of OIE13   27 - 28   2013.9

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  • Wavelength-scanning interferometers for shape measurement of thin films by backpropagation of multiple-wavelength optical fields Reviewed

    O. Sasaki, X. Jian, C. Samuel, T. Suzuki

    Proc. CLEO-PR 2013   TuF4-4   2013.7

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  • Profile measurement of glass sheet using multiple wavelength backpropagation interferometry Reviewed

    Samuel Choi, Kohei Otsuki, Osami Sasaki, Takamasa Suzuki

    Applied Optics   52 ( 16 )   3726 - 3731   2013.6

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    Multiple-wavelength backpropagation interferometry based on a spectral interferometer is proposed for measuring thin glass sheets with nanometer accuracy. The multiwavelength backpropagation method introduced to the spectral interferometer eliminates time-encoded wavelength sweeping and mechanical scanning, which enables high-speed profile measurements. The applicability of the proposed method is experimentally demonstrated through cross-sectional profile and vibrating surface displacement measurements of a glass sheet. © 2013 Optical Society of America.

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  • Lens Distortion Estimation and Compensation for Sheet-Metal Inspection System Reviewed

    Norihisa Terasawa, Shinya Kitazawa, Hidenori Watanabe, Shogo Muramatsu, Takamasa Suzuki, Mitsuyoshi Murata, Toshiro Oitate

    Proc. of 2013 International Workshop on Advanced Image Technology (IWAIT)   648 - 653   2013.1

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  • One-dimensional surface profile measurement by detection of reflecting direction of a scanned laser beam Reviewed

    Osami Sasaki, Ryo Shinozaki, Takamasa Suzuki

    INTERNATIONAL CONFERENCE ON OPTICS IN PRECISION ENGINEERING AND NANOTECHNOLOGY (ICOPEN2013)   8769   2013

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    A laser beam is scanned on an object surface with a fast scanning system which consists of a rotating mirror, a flat mirror, and a concave spherical mirror. Propagation direction of the laser beam reflected by a sample surface is detected with a lens and a position sensitive detector. A one-dimensional surface profile of the sample surface is measured by integrating a slop distribution obtained from the propagation direction of the reflected beam. The measurement is insensitivity to mechanical vibrations because of a high-speed scanning of a few milliseconds. The required positioning accuracy of the sample surface is lower than a few millimeters. The measurement repeatability is less than 10 nm.

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  • Coaxial phase-shifting laser diode interferometer based on pulse modulation Invited Reviewed

    Takamasa Suzuki, Takuma Serizawa, Osami Sasaki, Samuel Choi

    DIMENSIONAL OPTICAL METROLOGY AND INSPECTION FOR PRACTICAL APPLICATIONS II   8839   88390A_1 - 88390A_6   2013

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    A pulse-modulated phase-shifting interferometer that employs two coaxial interferometers and an undersampling technique is proposed and demonstrated. The former improves the robustness of the optical system, while the latter makes it economical. Several measurements on flat and concave mirrors confirmed a measurement accuracy of similar to 18 nm.

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  • Surface profile measurement of a diffraction grating by a laser beam scanning interferometer using sinusoidal phase modulation Invited Reviewed

    Osami Sasaki, Takuya Kubota, Samuel Choi, Takamasa Suzuki

    DIMENSIONAL OPTICAL METROLOGY AND INSPECTION FOR PRACTICAL APPLICATIONS II   8839   883906_1 - 883906_7   2013

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    It is difficult in interferometric metrology to maintain high spatial resolution over a large measurement region. In this paper this characteristic is achieved by scanning two focused laser beams of about 6 microns diameter over an object surface and a reference mirror surface, respectively, with a rotating mirror, a lens, and a polarization beam splitter. An electric-optic phase modulator generates the phase difference of a sinusoidal waveform of 10 MHz between the two focused beams to calculate the phase of the interference signal. Because the beam focused onto a diffraction grating of 50 microns period is not diffracted strongly, a surface profile of the grating can be exactly measured by this interferometer over the measurement region of 16 mm with the spatial resolution of 2 microns.

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  • Multi-frequency Light Source Using Spatial Light Modulator for Profilometry Reviewed

    Samuel Choi, Shunsuke Takatsuka, Osami Sasaki, Takamasa Suzuki

    2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR)   2013

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    A multi-frequency light source with a spatial light modulator that generated a broadband spectrum with variable interval and center frequency was demonstrated. It can carry out the arbitrary multi-frequency scan for interferometric profile measurement.

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  • OCT based on multi-frequency sweeping Fizeau interferometer with phase modulating method Reviewed

    S. Choi, T. Watanabe, O. Sasaki, T. Suzuki

    DIMENSIONAL OPTICAL METROLOGY AND INSPECTION FOR PRACTICAL APPLICATIONS II   8839   2013

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    The Multi-frequency sweeping Fizeau-type interferometer (MFS-FI) for optical coherence tomography (OCT) is demonstrated. The multi-frequency sweeping by a variable Fabry-Perot filter permits detection of high-order low-coherence interferometric signals in the Fizeau interferometer. The sinusoidal phase modulation technique was utilized to detect accurate interference amplitude and phase distributions of back scattered light from surfaces of a sample. OCT measurements by the MFS-FI were conducted for vibrating glass plates with a frequency of 1 kHz, and cellular tissues fixed with formalin and embedded in paraffin. The tomographic 3-dimensional volume and cross-sectional surface displacements were detected with an accuracy of nano-meters.

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  • Step-height measurement with a low coherence interferometer using continuous wavelet transform Reviewed

    Zhang Jian, Takamasa Suzuki, Samuel Choi, Osami Sasaki

    2013 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS   9046   9046-96_1 - 9046-96_7   2013

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    With the development of electronic technology in recent years, electronic components become increasingly miniaturized. At the same time a more accurate measurement method becomes indispensable. In the current measurement of nano-level, the Michelson interferometer with the laser diode is widely used, the method can measure the object accurately without touching the object. However it can't measure the step height that is larger than a half-wavelength. In this study, we improve the conventional Michelson interferometer by using a super luminecent diode and continuous wavelet transform, which can detect the time that maximizes the amplitude of the interference signal. We can accurately measure the surface-position of the object with this time. The method used in this experiment measured the step height of 20 microns.

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  • Time-Shared Multiple Optical Traps Using a Pulsed Laser Diode Reviewed

    Takamasa Suzuki, Hiroyuki Takayama, Osami Sasaki, Samuel Choi

    2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS PACIFIC RIM (CLEO-PR)   WJ3-4   2013

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    Multiple traps using a combination of a piezoelectric bimorph-type actuator and a pulsed laser diode are demonstrated. Three polystyrene beads were simultaneously trapped using a laser diode driven by a pulsed current.

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  • Phase-shifting laser diode interferometer using pulse modulation Reviewed

    Takamasa Suzuki, Tsubasa Adachi, Osami Sasaki, Samuel Choi

    APPLIED OPTICS   51 ( 18 )   4109 - 4112   2012.6

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    A phase-shifting laser diode interferometer that uses direct pulse modulation is proposed and demonstrated. We found that a laser beam with a wide range of wavelength variation at constant optical power could be generated when a pulsed current was injected into the laser diode. We constructed a highly accurate interferometer by using a pair of interferometers. Several experiments, such as observations of temporal interference signals and spatial interferograms, measurement of a concave mirror, and duplicate measurements, confirmed the characteristics of pulse modulation and demonstrated the effectiveness of our technique. (C) 2012 Optical Society of America

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  • Step-height measurement by low-coherence interferometry based on wavelet transform Reviewed

    T. Suzuki, S. Atsumi, O. Sasaki, S. Choi

    Imaging and Applied Optics Technical Digest   2012.6

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  • Utilization of frequency information in a linear wavenumber-scanning interferometer for profile measurement of a thin film Reviewed

    Osami Sasaki, Satoshi Hirakubo, Samuel Choi, Takamasa Suzuki

    Applied Optics   51 ( 13 )   2429 - 2435   2012.5

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    The positions of the front and rear surfaces of a silicon dioxide film with 4 μm thickness is measured with a novel and simple method in which both amplitude and phase of a sinusoidal wave signal corresponding to one optical path difference of a reflecting surface is utilized in a linear wavenumber-scanning interferometer. For this utilization, the scanning width and the position of the reference mirror are adjusted exactly to distinguish the two sinusoidal waves corresponding to the two surfaces of the film. The scanning width of the wavenumber and wavelength of the light source are 0.326×10-3 nm-1 and 140 nm, respectively. © 2012 Optical Society of America.

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  • Multi-frequency sweeping sinusoidal phase modulated Fizeau interferometer for OCT Reviewed

    S. Choi, J. Hukumoto, O. Sasaki, T. Suzuki

    Technical Digest - 2012 17th Opto-Electronics and Communications Conference, OECC 2012   568 - 569   2012

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    A novel Fizeau-type low-coherence interferometer for optical coherence tomography (OCT) is demonstrated. The multi-frequency sweeping by a Fabry-Perot filter (FPF) permits detection of high-order interference signals in the Fizeau interferometer. The sinusoidal phase modulation (SPM) technique was utilized to detect accurate interference amplitude and phase distributions. © 2012 IEEE.

    DOI: 10.1109/OECC.2012.6276575

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  • Sinusoidal wavelength-scanning interferometer for profile measurement of metal surfaces Reviewed

    Sasaki Osami, Kurashige Takahiro, Choi Samuel, Suzuki Takamasa

    INTERFEROMETRY XVI: TECHNIQUES AND ANALYSIS   8493   2012

  • Multi-frequency sweeping interferometry using spatial optical frequency modulation Reviewed

    Samuel Choi, Heiichi Kato, Osami Sasaki, Takamasa Suzuki

    OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS II   8563   2012

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    We investigated the interference amplitude and phase characteristics of a multi-frequency sweeping interferometer with sinusoidal phase modulating technique. A novel multi frequency sweeping light source that generated an interval and center frequency variable frequency comb with a bandwidth of 14 nm was demonstrated. The interference phase and amplitude distributions were investigated by observing the zeroth and first order interference signals. In addition, the zeroth and first order interference phase variations caused by center frequency sweeping were measured.

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  • Computerized Sheet-Metal Inspection Based on the Cross Network Communication Reviewed

    Takamasa Suzuki, Kotaro Sato, Shogo Muramatsu, Mitsuyoshi Murata, Toshiro Oitate

    MECHANICAL ENGINEERING AND MATERIALS, PTS 1-3   152-154   331 - +   2012

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    A non-traditional processing cycle for sheet-metal working based on the computerized image processing techniques is proposed. This novel system enables the effective fabrication cycle that realizes automatic inspection, quick delivery, and cost reduction.

    DOI: 10.4028/www.scientific.net/AMM.152-154.331

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  • Real-time displacement measurement using VCSEL interferometer Reviewed

    Takamasa Suzuki, Noriaki Yamada, Osami Sasaki, Samuel Choi

    OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS II   8563   2012

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    A displacement sensor that uses a vertical cavity surface emitting laser (VCSEL), which is superior in terms of remediation of the mode-hop issue and modulation efficiency, is proposed. The interference signal in the sensor is processed with the phase-locked technique. This device allows real-time measurement of displacement. No unstable signals due to mode-hop were observed in the experiments. Displacement measurements recorded with this device indicated that it has an rms measurement accuracy of 0.3 mu m and 50 nm for displacements of 150 mu m and 1.2 mu m, respectively.

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  • Image detection of inner wall surface of holes in metal sheets through polarization using a 3D TV monitor Reviewed

    Takamasa Suzuki, Katsunori Nakano, Shogo Muramatsu, Toshiro Oitate

    OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS II   8563   2012

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    We propose an effective technique for optically detecting images of the inner hole-surface of a hole (hereafter, referred to as the hole-surface) using the polarization property of a 3D television (TV) monitor. The polarized light emitted by the TV monitor illuminates the hole-surfaces present in the test target placed on the screen of the monitor. When the polarizer placed in front of a camera lens is adjusted such that the camera captures a dark image for the transmitted light, only the highlighted hole-surfaces are visible in the captured image.

    DOI: 10.1117/12.999726

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  • Absolute measurement of optical surface profile with a Fizeau interferometer Reviewed

    Osami Sasaki, Akihiro Watanabe, Samuel Choi, Takamasa Suzuki

    OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS II   8563   2012

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    An optical surface profile is measured with a laser diode Fizeau interferometer using a method of absolute measurement. Wavefront aberration in the interferometer causes an undesirable phase distribution in the interference signal. To eliminate this phase distribution, the object surface is shifted in two directions orthogonal to each other and the difference wavefront of the surface profile of the object is obtained. An absolute surface profile is estimated by representing the object surface with a polynomial function and by solving the difference equations with least-squares method.

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  • Rapid wavelength scanning based on acousto-optically tuned external-cavity laser diode Reviewed

    Takamasa Suzuki, Ryu-ichi Nagai, Osami Sasaki, Samuel Choi

    OPTICS COMMUNICATIONS   284 ( 19 )   4615 - 4618   2011.9

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    High-speed, wide-range wavelength scanning is demonstrated using a laser diode with an antireflection coating and an external cavity employing an acousto-optic deflector. The narrow spectral width of 0.2 nm observed in the experiment indicates the availability of a highly coherent laser beam. The scanning range of 15 nm under rapid modulation is confirmed in the prototype system. A tuning rate of more than 100 kHz is achieved without any mode hops. To the best of our knowledge, no such high-speed wavelength tuning based on an acousto-optical configuration has been demonstrated thus far. (C) 2011 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.optcom.2011.06.012

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  • Phase-shifting interferometer using a pulsed laser diode Reviewed

    T. Suzuki, T. Adachi, O. Sasaki, S. Choi

    Proc. The ninth Japan-Finland Joint Symposium on Optics in Engineering   2011.9

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  • Frequency comb generator using spatial frequency optical filter and its interferometeric characteristics Reviewed

    S. Choi, H. Kato, O. Sasaki, T. Suzuki

    Proc. The ninth Japan-Finland Joint Symposium on Optics in Engineering   2011.9

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  • Sinusoidal wavelength-scanning interferometers for shape measurement of thin films Reviewed

    O. Sasaki, H. Ueno, T. Suzuki

    Proc. The ninth Japan-Finland Joint Symposium on Optics in Engineering   2011.9

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  • Statistical Edge Detector with GMM Classifier Reviewed

    Hidenori Watanabe, Yuji Kikuchi, Shogo Muramatsu, Toshiro Oitate, Mitsuyoshi Murata, Takamasa Suzuki

    Proc. of 2011 26th International Technical Conference on Circuits/Systems, Computers and Communications (ITC-CSCC)   611 - 614   2011.6

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  • Enhancement of optical gradient force employed in optical tweezers using a pulsed laser diode Reviewed

    T. Suzuki, T. Maeda, O. Sasaki, S. Choi

    Proc. 2011 OSA Optics & Photonics Congress   OTMD4p   2011.4

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  • Spectral interferometer using sinusoidal phase modulation and back-propagation method Reviewed

    S. Choi, K. Otsuki, O. Sasaki, T. Suzuki

    2011 Int. Quantum Electron. Conf., IQEC 2011 and Conf. Lasers and Electro-Optics, CLEO Pacific Rim 2011 Incorporating the Australasian Conf. Optics, Lasers and Spectroscopy and the Australian Conf.   325 - 326   2011

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    The multi-wavelength back-propagation (MWB) method has been developed for measuring positions of multiple reflecting surfaces longer than the optical wavelength. In this study, we demonstrate one dimensional profile measurement of a glass film by a sinusoidal phase modulating (SPM) spectral interferometer with MWB method. Displacements of front and rare surfaces of the glass film vibrating with 9.7 Hz are exactly measured. The measurement repeatability obtained from 9 repeatedly-measured results is 4.7 nm in a standard deviation. © 2011 IEEE.

    DOI: 10.1109/IQEC-CLEO.2011.6194003

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  • Beam scanning laser interferometer with high spatial resolution over a large field of view Invited Reviewed

    Osami Sasaki, Tsuyoshi Saito, Samuel Choi, Takamasa Suzuki

    2011 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS   8201   0J-1 - 0J-7   2011

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    It is difficult in interferometric metrology to maintain high spatial resolution over a large field of view. In this paper this characteristic is achieved by scanning two focused laser beams over an object surface and a reference mirror surface, respectively, with a rotating mirror, a lens, and a polarization beam splitter. An electric-optic phase modulator generates the phase difference of a sinusoidal waveform of 10 MHz between the two focused beams. Sinusoidal phase-modulating interferometry is used to calculate the phase of the interference signal caused by the two focused beams. The scanning speed of the beams is 20 m/s, and the sampling interval of the interference signal is 1/80 microseconds. The spatial resolution is 2.0 microns over the measurement region of 18.8mm. The measurement results show that the measurement error is less than 5nm.

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  • Profile measurement of thin films by linear wavenumber-scanning interferometry Reviewed

    Osami Sasaki, Satoshi Hirakubo, Samuel Choi, Takamasa Suzuki

    DIMENSIONAL OPTICAL METROLOGY AND INSPECTION FOR PRACTICAL APPLICATIONS   8133   0K   2011

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    Conventional methods to measure the positions of the front and rear surfaces of thin films with multiple-wavelength interferometers are reviewed to make it clear how the method proposed here is novel and simple. Characteristics of the linear wavenumber-scanning interferometry used in the proposed method are analyzed in detail to make the measurement accuracy clearly. The positions of the front and rear surfaces of a silicon dioxide film with 4 mu m thickness is measured by utilizing the phases of the sinusoidal waves forms corresponding to each of the optical path differences contained in the interference signal. The experiments and the theoretical analysis show that the measurement error is about 15 nm.

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  • Online optical verification system for sheet-metal processing Invited Reviewed

    Takamasa Suzuki, Kotaro Sato, Shogo Muramatsu, Mitsuyoshi Murata, Toshiro Oitate

    2011 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS   8201   0B-1 - 0B-12   2011

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    We propose and demonstrate a novel processing cycle for sheet-metal working based on the computerized image processing techniques. The interconnected test system based on the cross network communication enables the effective fabrication cycle that realizes automatic inspection, quick delivery, and cost reduction.

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  • Profilometry using optical comb light source and sinusoidal phase modulation technique in Fizeau-type interferometer Reviewed

    S. Choi, H. Miyatsuka, O. Sasaki, T. Suzuki

    Proc. of Photonics Asia 2010   7855   19   2010.10

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  • Profile measurement with a spectral interferometer and the multiwavelength back-propagation method Reviewed

    K. Otsuki, S. Choi, O. Sasaki, T. Suzuki

    Proc. of Photonics Asia 2010   7855   26   2010.10

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  • Three-dimensional profile measurement by use of phase-shifting digital holography based on a feedback technique Reviewed

    T. Suzuki, S. Suzuki, O Sasaki

    Abstract Booklet of the 2010 International Symposium on Organic and Inorganic Materials and Related Nonotechnologies   32   2010.6

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  • Step height measurement using a wavelength-selective multimode laser diode Reviewed

    T. Suzuki, A. Nomura, O Sasaki

    Technical Digest of OSA Topical Meeting   OMA4   2010.6

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  • Static wavelength scanning using tunable external cavity laser diode Reviewed

    Takamasa Suzuki, Ryuichi Nagai, Osami Sasaki

    OPTICAL ENGINEERING   49 ( 2 )   020502_1 - 020502_3   2010.2

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    An external-cavity laser diode that performs static wavelength scanning eliminates problems such as repeatability and tuning rate that arise due to mechanical movements induced in the external cavity of conventional systems, because it requires no mechanical elements. Experiments reveal that the scanning range and tuning rate are 1.1 nm and 1 kHz, respectively. (C) 2010 Society of Photo-Optical Instrumentation Engineers. [DOI: 10.1117/1.3306642]

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  • Disturbance-free laser diode Sagnac interferometer using direct phase modulation Reviewed

    Takamasa Suzuki, Yasuhito Ban-nai, Masato Shirai, Osami Sasaki

    OPTICS COMMUNICATIONS   283 ( 1 )   104 - 108   2010.1

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    We exploited the wavelength tunability of the laser diode of a phase-shifting Sagnac interferometer to realize disturbance-free measurements. The Sagnac interferometer is robust against mechanical disturbances because it has a common path configuration and requires no special references. An unbalanced optical path was introduced between p- and s-polarized beams to enable easy phase shifting by direct current modulation. The experimental results indicate that the proposed system is effective for performing precise disturbance-free measurements. (C) 2009 Elsevier B.V. All rights reserved.

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  • Multiple-wavelength interferometers using backpropagation of optical fields for profile measurement of thin glass sheets Reviewed

    Osami Sasaki, Choi Samuel, Takamasa Suzuki

    INTERFEROMETRY XV: TECHNIQUES AND ANALYSIS   7790   77900U   2010

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    Multiple-wavelength optical fields at a detecting plane of an interferometer are generated by a computer from the detected interference signals of a thin glass sheet. The generated optical fields are backpropagated towards the glass sheet along the optical axis. An optical field along the optical axis is reconstructed by summing the backpropagated fields over the multiple wavelengths. The amplitude and phase distributions of the reconstructed optical field provide the positions of the two surfaces of the glass sheet where peak values of the amplitude and zero or p values of the phase appear. The accuracy of the position measurement is several nanometers.

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  • Profilometry using Fizeau-interferometer based on optical comb interferometry and sinusoidal phase modulation method Reviewed

    Samuel Choi, Hidetaka Miyatsuka, Osami Sasaki, Takamasa Suzuki

    Proceedings of SPIE - The International Society for Optical Engineering   7855   2010

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    A profilometry based on Fizeau interferometer using the optical comb and the sinusoidal phase modulation technique is demonstrated. The optical comb generated with the Fabry-Perot etalon and a SLD is introduced in the Fizeau interferometer. The interval wave number of comb is swept by controlling the resonance length of the Fabry-Perot etalon. The sweeping range is about 500 μm. The displacement measurement is performed by determination of zerophase or π-phase positions. The accuracy estimated from 5 repeated experiments is about 0.2 rad. © 2010 Copyright SPIE - The International Society for Optical Engineering.

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  • Profile measurement based on spectral interferometer with multi-wavelength back-propagation methods Reviewed

    Kohei Otsuki, Samuel Choi, Osami Sasaki, Takamasa Suzuki

    OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS   7855   26   2010

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    The multi-wavelength back-propagation (MWB) method enables to determine precisely the optical path different (OPD) longer than the optical wavelength from detecting the amplitude and phase of the interference signal for the multiple wavelengths. In this study, we demonstrate a 1-dimensional thickness profile measurement by the MWB and sinusoidal phase modulation (SPM) technique with a spectral interferometer. The OPD for the front and rear reflecting surfaces of a glass film with the thickness of 100 mu m are measured. The thickness profile is successfully measured with repeatability of 2 nm estimated from a standard error between 9 repeatedly-measured profiles.

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  • Sinusoidal wavelength-scanning common-path interferometer with a beam-scanning system for measurement of film thickness variations Reviewed

    Osami Sasaki, Takafumi Morimatsu, Samuel Choi, Takamasa Suzuki

    OPTICAL METROLOGY AND INSPECTION FOR INDUSTRIAL APPLICATIONS   7855   78550K   2010

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    Two light beams reflected from a front and rear surfaces of a glass film of 20 micron thickness interfere with each other in a common path interferometer. Sinusoidal wavelength-scanning light with the scanning amplitude of 5 nm and frequency of 15 KHz is used to generate a sinusoidal phase-modulated interference signal with the modulation amplitude of 2.6 rad. The phase of the interference signal provides the thickness variation of the film, whose measurement accuracy is a few nanometers. Moreover, in order to achieve a high spatial resolution and a wide measurement region a focused beam is scanned on the surface of the film with a rotating mirror.

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  • VCSEL's frequency stabilization of an external cavity diode laser - Countermeasures against atmospheric temperature variations Reviewed

    Mutsuki Motojima, Kohei Doi, Takashi Sato, Masashi Ohkawa, Takamasa Suzuki

    Proceedings of SPIE - The International Society for Optical Engineering   7597   2010

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    We introduced the vertical cavity surface emitting laser (VCSEL) as the laser diode in tour external cavity system. Because VCSELs are now commercially available, and the External cavity diode laser (ECDL) systems using them are expected to improve their frequency stability, we have replaced a Fabry-Perot type laser diode with a VCSEL, and examined its oscillation-frequency stability. Therefore we were able to expect that the VCSELs with our double optical feedback system have good oscillation frequency stability. The obtained VCSEL's oscillation-frequency stability, i.e., the square root of Allan variance σ was 4×10-10, at an averaging time of τ=1 sec. © 2010 Copyright SPIE - The International Society for Optical Engineering.

    DOI: 10.1117/12.840609

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  • Disturbance-free phase-shifting laser diode interferometer using adaptive feedback control Reviewed

    Takamasa Suzuki, Tsutomu Takahashi, Osami Sasaki

    APPLIED OPTICS   48 ( 29 )   5561 - 5566   2009.10

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    A feedback-control-equipped phase-shifting laser diode interferometer that eliminates external disturbance is proposed. The feedback loop is stabilized by adaptive control of the polarity of the interference signal. Conventional phase-shifting interferometry can be used with the feedback control, resulting in simplified signal processing and accurate measurement. Several experiments confirm the stability of the feedback control with a measurement repeatability of 1.8nm. (C) 2009 Optical Society of America

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  • Evaluation of photoreactive azo dye molecular thin films utilizing an optical interferometer with evanescent wave illumination Reviewed

    Yasuo Ohdaira, Kazumasa Banba, Kengo Murotani, Takamasa Suzuki, Osami Sasaki, Akira Baba, Kazunari Shinbo, Keizo Kato, Futao Kaneko

    Molecular Crystals and Liquid Crystals   504 ( 1 )   114 - 123   2009.1

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    A new Mach-Zehnder type optical-interferometer utilizing evanescent wave illuminations of a reflected beam at a prism surface was constructed to evaluate photoreactive molecular thin films on a prism surface. Refractive index changes of the films due to photoisomerization of azo molecules on the prism caused by an irradiation beam were observed from phase changes between an incident beam and the reflected one at the prism surface. Real-time measurements were also demonstrated using the interferometer microscopy, exhibiting two dimensional distributions of the refractive indices in the molecular films partially excited by the focused irradiation laser beam. Copyright © Taylor &amp
    Francis Group, LLC.

    DOI: 10.1080/15421400902946103

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  • Coherence controlled light source based on a multimode laser diode Reviewed

    T. Suzuki, A. Nomura, O. Sasaki

    Proc. of International Symposium on Fusion Technology 2009   26   2009.1

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  • Measurement of thin film shape with a sinusoidal wavelength scanning interferometer using a white light source Reviewed

    Osami Sasaki, Hiroshi Ueno, Takamasa Suzuki

    Proceedings of SPIE - The International Society for Optical Engineering   7511   7511B   2009

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    A halogen lamp and an acousto-optic tunable filter are used to construct a sinusoidal wavelength-scanning interferometer with the scanning width of 210 nm. A linear wavelength-scanning with the scanning width of 220 nm is utilized to determine amplitudes of three different interference signals produced from multiple-reflection lights by front and rear surfaces of a thin film. Amplitudes of time-varying phases produced by a sinusoidal wavelength-scanning and constant phases in the interference signals are estimated by minimizing a difference between detected signals and theoretical ones. From the estimated values, the positions of the front and rear surface of the thin film with a thickness of about 460 nm are measured with an error less than 4 nm. © 2009 SPIE.

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  • Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter with double feedback control for real-time distance measurement Reviewed

    Osami Sasaki, Daiki Matsubara, Takamasa Suzuki

    2008 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND APPLICATIONS   7160   2009

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    Optical path difference (OPD) and amplitude of a sinusoidal wavelength-scanning (SWS) are controlled with double feedback control system in an SWS interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength. An acousto-optic tunable filter (AOTF) is adopted as a wavelength-scanning device. The frequency of the SWS is 10 KHZ, and the measurement time required to reach a stable point of the control system is about 7ms. The measurement range is from 65 mu m to 190 mu m with the measurement error less than 4nm.

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  • Interference fringe analysis using wavelet transform Invited Reviewed

    Takamasa Suzuki, Ryo Kiyohara, Mika Ichikawa, Osami Sasaki

    2008 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND APPLICATIONS   7160   716002_1 - 716002_12   2009

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    Fringe analysis methods that employ wavelet transform are described. The performances of the methods are examined from the viewpoints of required calculation time and accuracy. Further, accuracies of calculations performed using linear and logarithmic scales in wavelet transform are compared. Experimental results show that wavelet signal processing is effective in measuring profiles having large and gradual asperities.

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  • Inner surface profile measurement of a hydrodynamic bearing by an oblique incidence and two-wavelength interferometer Reviewed

    Osami Sasaki, Ryota Yamamura, Kazushi Yokoyama, Takamasa Suzuki

    OPTICAL INSPECTION AND METROLOGY FOR NON-OPTICS INDUSTRIES   7432   74320   2009

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    A collimated line beam is incident at an oblique incident angle of 0.61 rad into an inner surface of a hydrodynamic bearing whose inner diameter and length are 3 mm and 3.5 mm, respectively. Lights reflected in specified directions from the inner surface are selected to obtain an optical field whose phase distribution is proportional to the inner surface profile. This optical field interferes with a reference optical field in a two-wavelength interferometer using a tunable external cavity laser diode. Shapes of grooves with depth of about 5 mu m and width of about 0.15 mm formed on the inner surface can be measured with an error less than 0.3 mu m.

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  • Real-Time Displacement Measurement by Use of a Coaxial Type of Laser Diode Interferometer Reviewed

    Takamasa Suzuki, Shohei Sato, Osami Sasaki

    2009 LASERS & ELECTRO-OPTICS & THE PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1 AND 2   381 - +   2009

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    A real-time displacement sensor based on a laser diode interferometer that has a coaxial structure is proposed and demonstrated. Several measurements indicate measurement accuracy of 0.1 mu m.

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  • A tunable external cavity laser diode with no mechanical movement Invited Reviewed

    Takamasa Suzuki, Ryuichi Nagai, Osami Sasaki

    Proceedings of SPIE - The International Society for Optical Engineering   7511   1 - 9   2009

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    An external-cavity laser diode that performs static wavelength scanning is proposed. It eliminates problems such as repeatability and tuning rate that arise due to mechanical movements induced in the external cavity of conventional systems because it requires no mechanical elements. Experiments have revealed that the scanning range and tuning rate are 1.3 nm and 1 kHz, respectively. © 2009 SPIE.

    DOI: 10.1117/12.839828

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  • A tunable external cavity laser diode with no mechanical movement Invited Reviewed

    Takamasa Suzuki, Ryuichi Nagai, Osami Sasaki

    Proceedings of SPIE - The International Society for Optical Engineering   7511   7511O-1 - 7511O-9   2009

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    An external-cavity laser diode that performs static wavelength scanning is proposed. It eliminates problems such as repeatability and tuning rate that arise due to mechanical movements induced in the external cavity of conventional systems because it requires no mechanical elements. Experiments have revealed that the scanning range and tuning rate are 1.3 nm and 1 kHz, respectively. © 2009 SPIE.

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  • Wavelength-scanning interferometry using backpropagation of optical fields for shape measurement of thin plate Reviewed

    O. Sasaki, H. Ashitate, T. Suzuki

    Proc. of ICO21-2008 Congress   284   2008.7

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  • A static wavelength scanning in a tunable external cavity laser diode Reviewed

    T. Suzuki, S. Nagasaki, O. Sasaki

    Proc. of ICO21-2008 Congress   237   2008.7

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  • Stabilization of the spectral intensity of a laser diode in the dual color mode Reviewed

    T. Suzuki, Y. Sano, O. Sasaki

    Proc. of ICO21-2008 Congress   282   2008.7

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  • Multi-period fringe projection interferometry using back-propagation method for shape measurement of glass plate Reviewed

    Hai Huan, Osami Sasaki, Takamasa Suzuki

    ADVANCED MATERIALS AND DEVICES FOR SENSING AND IMAGING III   6829   68290C   2008

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    A multi-period fringe-projection interferometry with back-propagation method is described to measure surface profiles of a glass plate. Phase distribution of the multi-period fringe formed by interfering the two calumniated laser beams is utilized to determine the position of the two surfaces of the glass plate. The multiple optical fields of the different fringe periods on the two surfaces, which are obtained from the sinusoidal phase-modulated interference signals, are back-propagated to a position where all of the phases of the multiple optical fields become zero. At the same time, the amplitude of the sum of the multiple back-propagated fields becomes maximum. The distances of the back-propagation provide the positions of the two surfaces of the glass plate. In the experiment a glass plates of 2mm-thickness is measured with a precision of 2.3 mu m.

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  • Phase-shifting laser diode Sagnac interferometer for surface profile measurement - art. no. 68290A Reviewed

    Takamasa Suzuki, Masato Shirai, Osami Sasaki

    ADVANCED MATERIALS AND DEVICES FOR SENSING AND IMAGING III   6829   A8290 - A8290   2008

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    DOI: 10.1117/12.756447

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  • Multiperiod fringe projection interferometry using a backpropagation method for surface profile measurement Reviewed

    Hai Huan, Osami Sasaki, Takamasa Suzuki

    Applied Optics   46 ( 29 )   7268 - 7274   2007.10

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    Interference fringes with different periods are projected on an object surface. There is a constant phase point where the phase of the fringe is kept at a constant value while the period is scanning. Multiple optical fields with different periods on the object surface are made from detected phases of the fringes. The multiple optical fields are backpropagated to the constant phase point of the phase where all of the phases of the multiple backpropagated fields become the same value and the amplitude of the sum of the multiple backpropagated fields becomes maximum, The distance of the backpropagation provides the position of the object surface. Some experiments show that this method can measure an object surface with discontinuities of several millimeters with high accuracy of several micrometers. © 2007 Optical Society of America.

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  • Step-profile measurement by backpropagation of multiple-wavelength optical fields Reviewed

    Osami Sasaki, Hisashi Tai, Takamasa Suzuki

    Optics Letters   32 ( 18 )   2683 - 2685   2007.9

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    Multiple-wavelength optical fields on a detecting plane of an interferometer are generated from the interference signals detected for an object surface. The generated optical fields are backpropagated along the optical axis. An optical field along the optical axis is reconstructed by summing the backpropagated fields over the multiple wavelengths. The intensity and phase distributions of the reconstructed optical field provide the position of the object surface with an accuracy of a few nanometers. © 2007 Optical Society of America.

    DOI: 10.1364/OL.32.002683

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  • Extension of distance measurement range in a sinusoidal wavelength-scanning interferometer using a liquid-crystal wavelength filter with double feedback control Reviewed

    Osami Sasaki, Akihiro Saito, Takamasa Suzuki, Mitsuo Takeda, Takashi Kurokawa

    Applied Optics   46 ( 23 )   5800 - 5804   2007.8

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    The optical path difference (OPD) and amplitude of a sinusoidal wavelength scanning (SWS) are controlled with a double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength. A liquid-crystal Fabry-Perot interferometer (LC-FPI) is adopted as a wavelength-scanning device, and double sinusoidal phase modulation is incorporated in the SWS interferometer. Because of a high resolution of the LC-FPI, the upper limit of the measurement range can be extended to 280 μm by the use of the phase lock where the amplitude of the SWS is doubled in the feedback control. The ruler marking every wavelength is generated between 80 μm and 280 μm, and distances are measured with a high accuracy of the order of a nanometer in real time. © 2007 Optical Society of America.

    DOI: 10.1364/AO.46.005800

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  • Two-Wavelength Snap-Shot Interferometer for Disturbance-Free Step-Height Measurement Reviewed

    T. Suzuki, H. Takahashi, K. Yokoyama, O. Sasaki

    Proc. of the 7th Pacific Rim CLEO2007 on CD-ROM   790 - 791   2007.8

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  • A tunable external cavity laser diode possessing a stable wavelength Reviewed

    Takamasa Suzuki, Takanori Endo, Tatsuo Iwana, Osami Sasaki

    OPTICAL REVIEW   14 ( 1 )   23 - 28   2007.1

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    In this work we describe a simple external-cavity laser diode equipped with a feedback control system, in which a high-resolution position-sensitive detector detects the slight misalignment of the light within the cavity. Our system not only provides a stable wavelength that can be tuned within a maximum scanning range of 1.87 nm, but also allows for faster scanning, through precise control of the reflection angle within the cavity. The simultaneous controls on the rotation-angle of the external mirror and the injection current enabled us to realize continuous wavelength-tuning. (c) 2007 The Optical Society of Japan.

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  • Two-wavelength snap-shot interferometer for disturbance-free step-height measurement Reviewed

    T. Suzuki, H. Takahashi, K. Yokoyama, O. Sasaki

    2007 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS, VOLS 1-4   1420 - 1421   2007

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    Two-wavelength interferometer that is applicable to step-height measurement under the large disturbance is proposed and demonstrated. A step-height of 2 mu m was measured for the high-speed rotating object without any special devices. The applicable rotating speed reached over 1000 rpm in our demonstration.

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  • Movement measurement with a grating interferometer using sinusoidal phase-modulation Reviewed

    Hai Huan, Osami Sasaki, Takamasa Suzuki

    OPTICS COMMUNICATIONS   267 ( 2 )   341 - 346   2006.11

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    Movements of a surface profile are measured with a two-grating interferometer using sinusoidal phase-modulation. Since sinusoidal phase-modulating (SPM) interferometry can record a phase change due to the movement of an object in the interference signal, the SPM interferometer is suitable for measuring the movement of the object. Some experiments show that the two-grating interferometer can measure a sinusoidal vibration with amplitude of several tens of microns and a step movement with a magnitude of several microns. (c) 2006 Elsevier B.V. All rights reserved.

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  • Disturbance free phase-shifting laser diode interferometer Reviewed

    T. Suzuki, T. Takahashi, O. Sasaki

    Proc. of Frontiers in Optics 2006 on CD-ROM   OFWD3 - OFWD3   2006.10

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  • Selection of measuring position of ball-screw temperature distribution for estimation of thermal elongation Reviewed

    K. Yokoyama, T. Kodera, Y. Nagai, T. Suzuki

    41 ( 8 )   417 - 422   2006.8

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  • Two-dimensional small-rotation-angle measurement using an imaging method Reviewed

    T Suzuki, T Endo, O Sasaki, JE Greivenkamp

    OPTICAL ENGINEERING   45 ( 4 )   043604_1 - 043604_7   2006.4

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    A two-dimensional small-rotation-angle measurement system based on fringe projection is proposed and demonstrated. Simple and effective signal processing is described and applied to the angular calculation. Several measurements indicate a measurement accuracy of approximate to 0.4 arcsec, which is comparable to that of a high-priced autocollimator. The two-dimensional two-pitch grating used in our prototype system provides a wide measurement range, which is expected to reach 1300 arcsec for both x- and y-direction rotations. (c) 2006 Society of Photo-Optical Instrumentation Engineers.

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  • Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern Reviewed

    JH Li, O Sasaki, T Suzuki

    OPTICS COMMUNICATIONS   260 ( 2 )   398 - 402   2006.4

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    A method for measuring external diameters of metal cylinders is proposed in which a sinusoidally vibrating interference pattern (SVIP) of 100-mu m period is used as an exact scale. Lights from the end-points of a metal cylinder are extracted with a spatial filtering in an imaging system to form a cross-sectional image of the metal cylinder. On the image a sinusoidally phase-modulated signal owing to the SVIP is detected with a CCD image sensor to measure the phases of the SVIP at the two end-points of the cylinder. The coordinates of the two end-points are obtained from the phases at the two end-points.. the phase distribution of the SVIP, and the coordinates of the pixels of the CCD image sensor. Metal cylinder diameters of 7.99, 8.00, and 9.00 mm are measured along their length directions with an error less than 1 mu m. (c) 2005 Elsevier B.V. All rights reserved.

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  • Measurement of sectional profile of V-shaped metal cylinders using a sinusoidally vibrating interference pattern Reviewed

    JH Li, O Sasaki, T Suzuki

    OPTICAL ENGINEERING   45 ( 2 )   023601_1 - 023601_5   2006.2

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    A method is proposed for accurately measuring a sectional profile of a metal cylinder. In this method a sinusoidally vibrating sinusoidal interference pattern is used to generate an exact spatial scale along one direction. Light from top points of a metal cylinder surface is extracted by spatial filtering in an afocal imaging system to form an image of the top points. A time-varying signal is detected in the image, and a sectional profile of the metal cylinder is measured from the phase of the detected signal on a position where the amplitude of the signal has a maximum value. Detection of the amplitude and the phase is carried out easily and exactly with sinusoidal phase-modulating interferometry. (c) 2006 Society of Photo-Optical Instrumentation Engineers.

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  • In-process inspection of surface-profile properties by detecting laser beam deflection Reviewed

    R Shinozaki, O Sasaki, T Suzuki

    OPTICAL ENGINEERING   45 ( 1 )   013601_1 - 013601_5   2006.1

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    An inspection system for the surface-profile properties of an organic photoconductor (OPC) drum substrate is studied. Defective substrates have approximately 1-mm-period waves in their surface profiles along the axial direction. The slope distribution of the surface profile is measured with an optical inspection system, which detects the angular deflection of a laser beam scanned over the surface at a high speed of 15 mm/ms. To discriminate between good and defective substrates, a threshold decision is made on components of the experimentally measured power spectrum of the slope distribution around 1-mm spatial period. The inspection system provides the same results as visual inspection with an accuracy better than 6 sigma. The setup dose not require any vibration isolators, because of its short inspection time of 2 ms. (c) 2006 Society of Photo-Optical Instrumentation Engineers.

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  • Sinusoidal phase modulating laser diode interferometer for on-machine surface profile measurement Reviewed

    XF Zhao, T Suzuki, T Masutomi, O Sasaki

    OPTICAL ENGINEERING   44 ( 12 )   125602_1 - 125602_7   2005.12

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    A disturbance-free sinusoidal phase modulating laser diode interferometer using an accelerated integrating-buckets processing system is described. Several techniques make it suitable for use in on-machine measurements: the charge-coupled device (CCD)-based additive operation on integrating buckets shares the burden of data processing imposed on the computer to shorten the measurement time; the use of high-speed shutter function of the CCD camera enables each bucket to be collected without disturbance, while the interference signal's stability is enhanced with the feedback control during the entire data-collecting time; by using a dedicated waveform generator, the phase modulating system is more compact and the modulating signal matches the CCD camera's exposure time easily and exactly. A surface profile measurement on a diamond-turned aluminum disk is demonstrated to evaluate the performance of this system. (c) 2005 Society of Photo-Optical Instrumentation Engineers.

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  • Improvement of estimation accuracy on thermal elongation of ball-screw Reviewed

    T. Kosaka, K. Yokoyama, K. Saito, T. Suzuki

    71 ( 12 )   1525 - 1530   2005.12

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    DOI: 10.2493/jspe.71.1525

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  • Sinusoidal wavelength-scanning interferometer using an acousto-optic tunable filter for measurement of thickness and surface profile of a thin film Reviewed

    H Akiyama, O Sasaki, T Suzuki

    OPTICS EXPRESS   13 ( 25 )   10066 - 10074   2005.12

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    A sinusoidal wavelength-scanning interferometer for measuring thickness and surfaces profiles of a thin film has been proposed in which a superluminescent laser diode and an acousto-optic tunable filter are used. The interference signal contains an amplitude Zb of a time-varying phase and a constant phase a. Two values of an optical path difference (OPD) obtained from Zb and a, respectively, are combined to measure an OPD longer than a wavelength. The values of Zb and a are estimated by minimizing the difference between the detected signals and theoretical ones. From the estimated values, thickness and surface of a silicon dioxide film coated on an IC wafer with different thicknesses of 1 mu m and 4 mu m are measured with an error less than 5 nm. (c) 2005 Optical Society of America.

    DOI: 10.1364/OPEX.13.010066

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  • Wavelength control in tunable external cavity laser diode Reviewed

    T. Suzuki, T. Iwana, O. Sasaki

    Proc. of The 89th OSA annual meeting on CD-ROM   JTuC8 - JTuC8   2005.10

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  • Displacement sensor by a sinusoidal phase-modulating laser diode interferometer using optical fibers Reviewed

    O. Sasaki, Y. Arakawa, T. Suzuki

    IQEC and CLEO-PR 2005, Abstract on CD-ROM   1695 - 1696   2005.7

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  • Thickness and surface profile measurement by a sinusoidal wavelength-scanning interferometer Reviewed

    Hisashi Akiyama, Osami Sasaki, Takamasa Suzuki

    Optical Review   12 ( 4 )   319 - 323   2005.7

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    We propose a sinusoidal wavelength-scanning interferometer for measuring thickness and surface profile of a thin film. The interference signal contains phase modulation amplitude Z and phase α which are related to the positions and profiles of the reflecting surfaces, respectively. By reducing the difference between the detected signal and the estimated signal using the multidimensional nonlinear least-squares algorithm, we estimate values of Z and α. Experimental results show that the front and rear surfaces of a silica glass plate of 20 μm-thickness could be measured with an error less than 10 nm. © 2005 The Optical Society of Japan.

    DOI: 10.1007/s10043-005-0319-0

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  • Two-grating interferometer with sinusoidal phase modulation for surface profile measurement Reviewed

    YD Xu, O Sasaki, T Suzuki

    OPTICAL ENGINEERING   44 ( 4 )   043601_1 - 043601_6   2005.4

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    A two-grating interferometer for measurement of profiles of polished surfaces is proposed. The +/- first-order beams diffracted by the first grating produce parallel fringes of about 50-mu m spacing on an object surface. By using the second grating, we eliminate the parallel fringes and extract a phase distribution produced by the surface profile of the object. Moreover, the vibration of the second grating of a small size enables us to use the sinusoidal phase-modulating interferometry. Measurement resolution is higher than 0.3 mu m at the equivalent wavelength of 35 mu m. (c) 2005 Society of Photo-Optical Instrumentation Engineers.

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  • One-dimensional surface profile measurement with a fast scanning method by detecting angular deflection of a laser beam Reviewed

    R Shinozaki, O Sasaki, T Suzuki

    Advanced Materials and Devices for Sensing and Imaging II   5633   31 - 39   2005

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    The rough surface of a aluminum cylindrical drum cut by turning tool is measured with a fast scanning method by detecting angular deflection of a laser beam. Reflection pattern from the surface extended into a large region; and contained two kinds of components of narrow and wide patterns. To detect rough surface's slope, the barycentric position of the wide pattern was measured with a PSD, and a beam diameter of 5mm on the surface was adopted. After a proportionality coefficient to convert from PSD output to the surface's slope was determined, an one-dimensional surface profile measurement of the rough surface was performed without a vibration isolator. Measurement error was estimated to be 0.27 mu m.

    DOI: 10.1117/12.577647

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  • Measurement of sectional profile of a thread gauge using a sinusoidally vibrating light with sinusoidal intensity Reviewed

    JH Li, O Sasaki, T Suzuki

    Advanced Materials and Devices for Sensing and Imaging II   5633   17 - 22   2005

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    A method is proposed for accurately measuring a sectional profile of a thread gauge. In this method a sinusoidally vibrating sinusoidal intensity (SVSI) is used to generate an exact spatial scale along one direction. Lights from top points of a thread gauge surface are extracted by spatial filtering in an afocal imaging system to form an image of the top points. A time-varying signal is detected in the image, and a sectional profile of the thread gauge is measured from the phase of the detected signal on a position where the amplitude of the signal has a maximum value. Detection of the amplitude and the phase is carried out easily and exactly with sinusoidal phase-modulating interferometry.

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  • Measurement of diameter of metal cylinders using a sinusoidally vibrating interference pattern Reviewed

    Jinhuan Li, Osami Sasaki, Takamasa Suzuki

    Proceedings of SPIE - The International Society for Optical Engineering   6024   0101-31 - 0101-31   2005

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    A method for measuring diameters of metal cylinders is proposed. In this method a sinusoidally vibrating interference pattern (SVIP) of 100μm-period is used to generate an exact spatial scale along x-axis. Detection of the amplitude and the phase of the SVIP are carried out easily and exactly with sinusoidal phase-modulating interferometry. First, phase values of the SVIP on the pixels of the CCD image sensor are measured as the exact scale along the x-axis. Next, an image of the end-points of the cylinder surface is formed by extracting lights from the end-points of the cylinder. The phase of the SVIP on the end-point of the cylinder appears at a position where the amplitude of the image has maximum value along the x-axis. The x-coordinate of the end-point of the metal cylinder is calculated from the phase value of the end-point and the exact scale. The diameter is obtained from the x-coordinates of the two end-points. Metal cylinders of 9mm and 8mm-diameters are measured with an error of about ±2μm.

    DOI: 10.1117/12.666832

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  • Wide range two-dimensional small rotation-angle measurement by use of fringe projection Reviewed

    T Suzuki, T Endo, JE Greivenkamp, O Sasaki

    Advanced Materials and Devices for Sensing and Imaging II   5633   185 - 192   2005

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    A system for two-dimensional small rotation-angle measurement is proposed and demonstrated. Because the measurement is not conducted by the interference but the fringe projection, it is basically robust for the external disturbance. While the setup is very simple, there is no requirement on the size of the object. We also proposed two-dimensional two-grating method and a unit that miniaturizes the system. Several measurements confirm us that the measurement accuracy of our proposed system is similar to 0.4 arcsec.

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  • Direct phase modulating laser diode interferometer for in-process measurement using sinusoidal signal synchronized with the CCD camera's exposure time Reviewed

    XF Zhao, T Suzuki, T Masutomi, O Sasaki

    ADVANCED MATERIALS AND DEVICES FOR SENSING AND IMAGING II   5633   272 - 279   2005

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    A disturbance-free sinusoidal phase modulating laser diode interferometer using integrating bucket method is described. Several techniques make it suitable for use in the in-process measurement: the charge-coupled device (CCD) based additive operation on integrating-buckets shares the burden of data processing imposed on the computer; the modulating signal is matched with the CCD camera's exposure time easily and exactly by using a dedicated waveform generator; the use of high speed shutter function of the CCD camera enables each bucket collection to be insensitive to the noise, while the interference signal's stability is enhanced with the feedback control during entire measurement time. A surface profile measurement on a diamond-turned aluminum disk was demonstrated to evaluate the performance of this system.

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  • Displacement measurement with a dual-colored sinusoidal phase-modulating interferometer Reviewed

    Takamasa Suzuki, Toshihiko Sato, Osami Sasaki

    Proceedings of SPIE - The International Society for Optical Engineering   6024   0101-12 - 0101-12   2005

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    Interferometric displacement sensor based on a two-wavelength interferometry is proposed and demonstrated. A combination of time-shared two-wavelength laser diode and sinusoidal phase-modulating interferometry enables us to realize accurate and wide-range displacement measurement with a simple optical setup.

    DOI: 10.1117/12.666819

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  • Vibration insensitive interferometer using sinusoidal phase-modulation and feedback control Reviewed

    Osami Sasaki, Hidetaka Iwai, Takamasa Suzuki

    Proceedings of SPIE - The International Society for Optical Engineering   6024   0101-25 - 0101-25   2005

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    It is easy to extract a signal proportional to a phase fluctuation from a sinusoidally phase-modulated interference signal, This fluctuation is caused by mechanical vibration or air turbulence. In a sinusoidal phase-modulating interferometer using a laser diode (LD) the phase fluctuation is reduced by changing the injection current of the LD with a feedback control system. This control is very useful to a Fizeau type interferometer for surface profile measurement of a large size object. IC wafers of 100 mm diameter are measured with an interferometer insensitive to mechanical vibration and air turbulence. The phase fluctuation with nearly constant amplitude which corresponds to 30nm in surface height is reduced by about 10%. However the reduction in the phase fluctuation is not performed well for an instantaneous and large phase fluctuation. In order to be insensitive to all kinds of phase fluctuations the feedback signal is always observed, so that the interference signal is captured when the amplitude of the feedback signal is less than a specified level during the capturing time of 0.53 s. Thus surface profiles of the IC wafers can be measured with a high repeatability of a few nm even when any kind of vibration exists.

    DOI: 10.1117/12.666829

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  • Sinusoidal wavelength-scanning interferometer for measurement of thickness and surface profile of thin films Reviewed

    Hisashi Akiyama, Osami Sasaki, Takamasa Suzuki

    Proceedings of SPIE - The International Society for Optical Engineering   6024   0101-3 - 0101-3   2005

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    We propose a sinusoidal wavelength scanning interferometer for measuring thickness and surfaces profiles with a thin film. An acousto-optic tunable filter (AOTF) is used to produce sinusoidally wavelength-scanned light from a superluminescent laser diode (SLD) with a wide spectral bandwidth of 46nm. The interference signal contains an amplitude Zb of a time-varying phase and a constant phase α. Two measured values of OPD, which are denoted by Lz and Lα, are obtained from Zb and α. By combining Lz and Lα, an OPD longer than a wavelength is measured with an error less than a few nanometers. When the object has two reflective surfaces, the detected interference signal contains two interference signals which are caused by the front and rear surfaces. In this case we must determine the values of Zb1, Zb2, α1, and α2 where suffixes of 1 and 2 are corresponding to the front and rear surfaces, respectively. We define an error function that is the difference between the detected signal and the theoretical signal, and reduce the value of the error function with the multidimensional nonlinear least-squares algorithm to search the values of Zb1, Z b2, α1, and α2. Experimental results show that the thickness and surfaces profiles of a silica glass plate of 20μm-thickness are measured with error less than 1.5nm.

    DOI: 10.1117/12.666811

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  • Displacement sensor by a sinusoidal phase-modulating laser diode interferometer using optical fibers Reviewed

    O Sasaki, Y Arakawa, T Suzuki

    2005 PACIFIC RIM CONFERENCE ON LASERS AND ELECTRO-OPTICS   1014 - 1015   2005

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    A sensor using sinusoidal phase-modulation of 1.5MHz generated by modulating the injection current of a laser diode measures a phase of the interference signal with a measuring time of 0.25 mu s and an error less than 20nm in displacement.

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  • Real-time estimation of ball-screw thermal elongation based upon temperature distribution of ball-screw Reviewed

    Takehiko Kodera, Kazuhiro Yokoyama, Kazuo Miyaguchi, Yutaka Nagai, Takamasa Suzuki, Masami Masuda, Takanori Yazawa

    JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing   47 ( 4 )   1175 - 1181   2004.12

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    The optical telemeter system has been developed, which converts the temperature of rotating spindle to the digital data and carries the digital data from LED on the rotating side toward PD on the stationary side by the optical data transmission. Based upon the temperature distribution of hollow ball-screw obtained by the telemeter system, the thermal elongation of the ball-screw is estimated as the one-dimensional thermal elongation Estimation accuracy, which is the difference between the estimated thermal elongation and the measured thermal elongation, is 3.1∼+3.2 μm for the thermal elongation of 50-60 μm over the length of 935.5 mm of the ball-screw.

    DOI: 10.1299/jsmec.47.1175

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  • Remote-control data-transmission system of rotating spindle temperature Reviewed

    K. Yokoyama, T. Suzuki, S. Kobayashi, Y. Nagai

    70 ( 12 )   1559 - 1564   2004.12

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    DOI: 10.2493/jspe.70.1559

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  • Interferometric displacement sensors using sinusoidal phase-modulation and optical fibers Reviewed

    O. Sasaki, T. Suzuki

    Proc. of Photonics Asia 2004   Vol.5633   120 - 129   2004.11

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  • Real-time range finder based on phase- and modulation-amplitude-locked laser diode interferometry Reviewed

    T Suzuki, T Iwana, O Sasaki

    OPTICAL ENGINEERING   43 ( 11 )   2742 - 2746   2004.11

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    An interferometric range finder that uses both phase-locked and modulation-amplitude-locked techniques in a sinusoidal phase-modulating interference signal is described. It allows us to perform unambiguous and real-time distance measurement. Also, external disturbance superimposed on the interference signal is eliminated by the feedback control. Our preliminary experiments indicate a measurement error of 17.7 mum rms. (C) 2004 Society of Photo-Optical Instrumentation Engineers.

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  • Disturbance-free distributed Bragg reflector laser-diode interferometer with a double sinusoidal phase-modulating technique for measurement of absolute distance Reviewed

    T Suzuki, T Ohizumi, T Sekimoto, O Sasaki

    APPLIED OPTICS   43 ( 23 )   4482 - 4487   2004.8

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    A new range-finding technique that uses both double sinusoidal phase modulation and quasi-two-wavelength interferometry is described. Two independent interference signals are generated with respect to two different wavelengths on a time-sharing basis. We clarify that external disturbances of these interference signals are eliminated by both feedback control and differential detection and that the feedback control does not affect the distance measurement. A single distributed Bragg reflector laser diode allows us to simplify the optical setup and to improve the measurement accuracy. After discussing a measurement range, we estimate a measurement error by making several measurements. (C) 2004 Optical Society of America.

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  • Optical telemeter system of strain-gauge output in rotating object Reviewed

    K. Yokoyama, M. Sato, T. Suzuki

    70 ( 8 )   1101 - 1105   2004.8

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    DOI: 10.2493/jspe.70.1101

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  • Measurement of sectional profile of a metal cylinder using a sinusoidally vibrating light with sinusidal intensity Reviewed

    J. Li, O. Sasaki, T. Suzuki

    Proc. of ICO 2004   437 - 438   2004.7

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  • Two-grating interferometer with sinusoidal phase modulation for surface profile Reviewed

    Y. Xu, O. Sasaki, T. Suzuki

    Proc. of ICO 2004   3 - 4   2004.7

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  • Absolute distance measurement with a disturbance-free DSPM DBR laser diode interferometer Reviewed

    T. Suzuki, T. Ohizumi, O. Sasaki

    Proc. of ICO 2004   209 - 210   2004.7

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  • Position measurement of reflecting surfaces by back-propagation of multiple-wavelength optical fields Reviewed

    O. Sasaki, K. Masui, T. Suzuki

    Proc. of ICO 2004   417 - 418   2004.7

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  • Thickness and surface profile measurement by a sinusoidal wavelength-scanning interferometer Reviewed

    H. Akiyama, O. Sasaki, T. Suzuki

    Proc. of ICO 2004   419 - 420   2004.7

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  • Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam Reviewed

    R Shinozaki, O Sasaki, T Suzuki

    APPLIED OPTICS   43 ( 21 )   4157 - 4163   2004.7

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    A fast scanning method for one-dimensional surface profile measurement is proposed. The profile is measured by integration of a slope distribution of the surface obtained from angular deflection of a scanning laser beam. A scanning optical system that consists principally of a spherical concave mirror and a rotating scanner mirror has reasonably low cost and is insensitive to mechanical vibration because of its high-speed scanning, of the order of milliseconds. A surface profile of a polygonal mirror along a 5-mm width was measured with the scanning method and with an interferometer. The root-mean-square difference between the two measured results is 0.98 nm. (C) 2004 Optical Society of America.

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  • Real-time measurement of one-dimensional step profile with a sinusoidal wavelength-scanning interferometer using double feedback control Reviewed

    O Sasaki, K Honma, T Suzuki

    OPTICAL ENGINEERING   43 ( 6 )   1329 - 1333   2004.6

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    A linear CCD image sensor is used to electrically scan a measuring point and measure 1-D step-profiles in real time with a sinusoidal wavelength-scanning (SWS) interferometer using double feedback control. In this interferometer, the optical path difference (OPD) and the amplitude of the SWS are controlled so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. Two different step profiles with step heights of 1 and 20 mum, respectively, are measured with a measurement error of less than 8 nm. Measuring time for one measuring point is 0.04 S. (C) 2004 Society of Photo-Optical Instrumentation Engineers.

    DOI: 10.1117/1.1737375

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  • Two-dimensional small rotation-angle measurement by use of fringe projection Reviewed

    T. Endo, T. Suzuki, O. Sasaki

    Proc. of EM-NANO 2004   110 - 110   2004.6

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  • Direct phase modulating interferometer by use of injection mode-locking laser diode Reviewed

    K. Aoki, T. Suzuki, Y. Ohdaira, O. Sasaki

    Proc. of EM-NANO 2004   111 - 111   2004.6

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  • Sinusoidal phase modulating laser diode interferometer with double feedback loops for distance measurement Reviewed

    T. Iwana, T. Suzuki, O. Sasaki

    Proc. of EM-NANO 2004   114 - 114   2004.6

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  • In-process surface profile measurement with a stroboscopic two wavelength interferometer Reviewed

    M. Ohida, T. Suzuki, O. Sasaki

    Proc. of EM-NANO 2004   250 - 250   2004.6

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  • Polarizing Sagnac interferometer with a direct-modulated laser diode Reviewed

    M. Shirai, T. Suzuki, O. Sasaki

    Proc. of EM-NANO 2004   251 - 251   2004.6

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  • Direct phase modulating laser diode interferometer using sinusoidal signal synchronized to the CCD camera’s shutter pulse Reviewed

    X. Zhao, T. Masutomi, T. Suzuki, O. Sasaki

    Proc. of EM-NANO 2004   252 - 252   2004.6

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  • Interferometric fringe analysis by use of wavelet transform Reviewed

    T. Suzuki, J. Sato, O. Sasaki

    Proc. of EM-NANO 2004   86 - 86   2004.6

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  • Interferometric displacement measurement by use of a time-shared two-wavelength laser diode Reviewed

    T. Suzuki, M. Mitomi, O. Sasaki

    Proc. of CLEO/IQEC conference 2004 on technical digest CD-ROM, CTuX3   CTuX3   2004.5

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  • Sinusoidal phase-modulating laser diode interferometer capable of accelerated operations on four integrating buckets Reviewed

    XF Zhao, T Suzuki, O Sasaki

    OPTICAL ENGINEERING   43 ( 3 )   678 - 683   2004.3

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    We propose a sinusoidal phase-modulating laser diode interferometer that uses a charge-coupled device (CCD)-based additive operation on four integrating buckets. By shifting the injection-current bias of a laser diode to introduce additional phase shifts, a portion of the subtractive operations on the integrating buckets become additive operations, which are achieved in the CCD. This approach serves to reduce both data processing and measurement time. (C) 2004 Society of PhotoOptical Instrumentation Engineers.

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  • Sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method Reviewed

    X. Zhao, T. Suzuki, O. Sasaki

    Optical Engineering   43 ( 3 )   678 - 683   2004.3

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  • Double-grating interferometer for measurement of cylinder diameters Reviewed

    YD Xu, O Sasaki, T Suzuki

    APPLIED OPTICS   43 ( 3 )   537 - 541   2004.1

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    We describe a double-grating interferometer for the measurement of cylinder diameters. The unique characteristic of this interferometer is that one can freely change the period of the interference fringes by turning the grating, which permits the measurement range of the interferometer also to be changed freely according to the cylinder diameter to be measured. A clear image of the cylinder can be obtained because the aperture diaphragm blocks the beams diffracted from the edge of the cylinder. The outside and inside diameters of the M4 X 0.7 nun hand tap are measured with this double-grating interferometer. (C) 2004 Optical Society of America.

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  • Modulation-amplitude-locked laser diode interferometry for distance measurement Reviewed

    T Suzuki, T Iwana, O Sasaki

    TWO- AND THREE-DIMENSIONAL VISION SYSTEMS FOR INSPECTION, CONTROL, AND METROLOGY   5265   120 - 126   2004

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    This paper describes a range-finder that uses two feedback loops. Each feedback loop is respectively used to control the phase and the modulation-amplitude in a sinusoidal phase-modulating interference signal. It enables us to perform unambiguous measurement and real-time processing on the interference signal. Also external disturbance superimposed on the interference signal is eliminated by the feedback control. A distributed-Bragg-reflector laser diode that has wide range in wavelength-tuning allows us to improve the measurement accuracy.

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  • Stroboscopic step height measurement with two-wavelength interferometer using single diode laser source Reviewed

    XF Zhao, T Suzuki, S Sasaki

    TWO- AND THREE-DIMENSIONAL VISION SYSTEMS FOR INSPECTION, CONTROL, AND METROLOGY   5265   127 - 133   2004

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    We propose a two-wavelength interferometer that is used to a stroboscopic step height measurement. Different from most two-wavelength interferometers, in present experiment, two slightly different wavelengths are simultaneously oscillated by currently and thermally controlling a laser diode to work at mode hop region. By use of this two-wavelength laser source, a Twyman-Green interferometer, whose reference arm and object arm have known step height r and unknown step height h, respectively, is constructed. Three independent interference patterns corresponding to different OPDs are formed and they can be simultaneously taken by a CCD camera. Furthermore, tilting the reference, spatial frequencies are introduced into the interference patterns. Taking the Fourier transform of these patterns, three fringe amplitudes are obtained and their expressions can be solved for the unknown step height. As we can capture clear image of the interference patterns in a very short time by use of the high speed shutter function of the CCD camera, the error induced by the external disturbance is farthest reduced.

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  • Dual-color operation of a laser diode under current and temperature control Reviewed

    T Suzuki, N Hido, XF Zhao, O Sasaki

    APPLIED OPTICS   42 ( 33 )   6640 - 6644   2003.11

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    We describe a novel method that operates a laser diode with dual colors. Our system requires no external optical parts but does require current and temperature control. We can use either a single color on a time-sharing basis or dual colors simultaneously. The difference between the wavelengths is similar to0.6 nm, which is as much as 10 times that generated by current control alone. Temporal stability of the generated two wavelengths and the response time of the wavelength change were confirmed through a number of experiments. (C) 2003 Optical Society of America.

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  • Optical & Non-contact Data-transmission System of Rotating Spindle Temperature by Adopting One-chip Micro-controller (3rd Report) - Data-transmission and Power-supply through Cylindrical Surface - Reviewed

    K. Yokoyama, Y. Nagai, T. Suzuki

    69 ( 11 )   1600 - 1604   2003.11

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    DOI: 10.2493/jjspe.69.1600

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  • Real time estimation of ball-screw thermal elongation base upon temperature distributuion of ball screw Reviewed

    T. Kodera, K. Yokoyama, K. Miyaguchi, Y. Nagaii, T. suzuki, M. Masuda, T. Yazawa

    Proc. of International conference on Leading Edge Manufacturing in 21st Century (LEM21)   495 - 500   2003.11

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  • Optical telemeter system of rotating spindle temperature by adopting one-chip micro-controller - development of the system and measurement accuracy - Reviewed

    K. Yokoyama, Y. Nagaii, T. suzuki, S. Kobayashi, T. Kodera

    Proc. of International conference on Leading Edge Manufacturing in 21st Century (LEM21)   489 - 494   2003.11

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  • Grating interferometer using +/- 1st order beams for step-profile altitude difference measurement Reviewed

    Y Xu, O Sasaki, T Suzuki

    OPTICAL REVIEW   10 ( 6 )   514 - 517   2003.11

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    We propose a grating interferometer for step-profile altitude difference measurement. There are two main characteristics in this interferometer. The first is that the intensity distribution of the interference pattern is independent of the wavelength of the laser-diode used. No change of the intensity distribution occurs when the wavelength fluctuates. The second is that the measuring range is much larger than the wavelength of the light source because the spatial period of the grating is much larger than the wavelength. Sinusoidal phase modulating interferometry is easily applied to detect the phase variation of the interference pattern by vibrating the grating sinusoidally. The thickness of a 3.5-inch disk is measured with an accuracy of less than 0.5 mum.

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  • Optical & Non-contact Data-transmission System of Rotating Spindle Temperature by Adopting One-chip Micro-controller (2nd Report) - Measurement Accuracy - Reviewed

    Y. Nagai, K. Yokoyama, T. Suzuki, T. Kodera

    69 ( 10 )   1480 - 1486   2003.10

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    DOI: 10.2493/jjspe.69.1480

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  • Double-grating interferometer with a one-to-one correspondence with a Michelson interferometer Reviewed

    YD Xu, O Sasaki, T Suzuki

    OPTICS LETTERS   28 ( 19 )   1751 - 1753   2003.10

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    We describe a double-grating interferometer that has a one-to-one correspondence with a Michelson interferometer. The half spatial periods of the gratings are equivalent to the wavelengths of the interferometer. The widths of the interference fringes can be changed easily. The intensity distribution of the interference pattern is independent of the wavelength of the light source used. The surface profile of an object can be measured because two interference beams can coincide precisely on the image plane of the object. The measuring range is much larger than that of a Michelson interferometer. (C) 2003 Optical Society of America.

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  • Optical method for detecting displacement of a car in stereo images Reviewed

    S Sasaki, K Sakata, T Suzuki

    OPTICAL ENGINEERING   42 ( 7 )   2092 - 2095   2003.7

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    We propose an optical method for detecting the displacement of an object in stereo images. Two images are displayed on two liquid crystal displays (LCDs), respectively, which are placed at a constant distance. Several plane waves of different propagating directions are illuminated to the LCDs. We can measure the displacement of the object by detecting which plane wave presents the strongest intensity after the plane waves pass through the LCDs. The method is applied to measuring the distance between cars from stereo images of a car. (C) 2003 society of Photo-Optical Instrumentation Engineers.

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  • Two-dmensional rotation angle measurement using a sinusoidal phase-modulating baser diode interferometer Reviewed

    O Sasaki, C Togashi, T Suzuki

    OPTICAL ENGINEERING   42 ( 4 )   1132 - 1136   2003.4

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    We propose a simple setup for measurement of a small 2-D rotation angle using a Twyman-Green laser diode interferometer. Sinusoidal phase-modulating interferometry is adopted to detect the phase of the interference signal with a high accuracy and to perform the phase lock to eliminate the phase fluctuation at the standard detection point. By detecting the phases at three points along an axis, the 1-D rotation angle is measured with an accuracy of 0.5 arcsec in the range of 282 arcsec and with a spatial resolution of 3 mm. The 2-D rotation angle measurement is easily made by adding two more detection points. 0 2003 Society of Photo-Optical Instrumentation Engineers.

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  • Double sinusoidal phase-modulating distributed-Bragg-reflector laser-diode interferometer for distance measurement Reviewed

    T Suzuki, H Suda, O Sasaki

    APPLIED OPTICS   42 ( 1 )   60 - 66   2003.1

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    A previously proposed double sinusoidal phase-modulating (DSPM) laser-diode interferometer measures distances larger than a half-wavelength by detecting modulation depth. Although it requires a vibrating mirror to provide the second modulation to the interference signal, such vibrations naturally affect measurement accuracy. We propose a static-type DSPM laser-diode interferometer that uses no mechanical modulation. Our experimental results indicate a measurement error of +/-1.6 mum. (C) 2003 Optical Society of America.

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  • Stroboscopic two-wavelength interferometer for in-line displacement measurement Reviewed

    Takamasa Suzuki, Masanori Ohida, Kazuhiro Yokohama, Osami Sasaki

    Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest   2   638 - 638   2003

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    We propose a stroboscopic two-wavelength interferometer that is applicable to displacement measurement of rotating object. The system we propose uses two different wavelengths and two CCD cameras which are equipped with a high-speed electrical shutter. It allows us to measure displacement through the disturbance-free phase measurement.

    DOI: 10.1109/CLEOPR.2003.1277184

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  • Generation of a ruler marked out every a wavelength by a sinusoidal wavelength-scanning interferometer with double feedback control Reviewed

    O Sasaki, K Akiyama, T Suzuki

    OPTICS FOR THE QUALITY OF LIFE, PTS 1 AND 2   4829   853 - 855   2003

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    Phase modulation amplitude Z(b) caused by a sinusoidal wavelength-scanning and conventional phase alpha of an interference signal are kept at pi and 3pi/2, respectively, with feedback control systems for a displacement of an object larger than a half-wavelength. A voltage applied to a device that provides the wavelength-scanning becomes a ruler marked out every a wavelength. Real-time distance measurement is. carried outwith this interferometer.

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  • Generation of a ruler marked out every a wavelength by a sinusoidal wavelength-scanning interferometer with double feedback control Reviewed

    O. Sasaki, K. Akiyama, T. Suzuki

    Proc. of SPIE 19th congress of the international commision for Optics   Vol.4829   829 - 830   2002.8

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  • Sinusoidal-wavelength-scanning interferometer with double feedback control for real-time distance measurement Reviewed

    O Sasaki, K Akiyama, T Suzuki

    APPLIED OPTICS   41 ( 19 )   3906 - 3910   2002.7

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    addition to a conventional phase a the interference signal of a sinusoidal-wavelength-scanning interferometer has a phase-modulation amplitude Z(b) that is proportional to the optical path difference L and amplitude b of the wavelength scan. L and b are controlled by a double feedback system so that the phase a and the amplitude Zb are kept at 3pi/2 and pi, respectively. The voltage applied to a device that displaces a reference mirror to change the optical path difference becomes a ruler with scales smaller than a wavelength. Voltage applied to a device that determines the amplitude of the wavelength scan becomes a ruler marking every wavelength. These two rulers enable one to measure an absolute distance longer than a wavelength in real time. (C) 2002 Optical Society of America.

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  • Measurement of sectional profile of a cylinder using a sinusoidally vibrating light with sinusoidal intensity Reviewed

    JH Li, O Sasaki, T Suzuki

    OPTICAL REVIEW   9 ( 4 )   159 - 162   2002.7

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    A method for accurately measuring a sectional profile of a cylinder is proposed in which a sinusoidally vibrating sinusoidal grating is used to generate a sinusoidally vibrating sinusoidal intensity distribution. A light coming from the top point of the cylinder surface is extracted with an optical system to make an image of this point. A sectional profile of the cylinder is measured by detecting a phase of a time-varying signal contained in the image intensity at a position where the amplitude of the signal is maximum. Detection of the amplitude and the phase is carried out easily and exactly.

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  • Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation Reviewed

    T Suzuki, T Yazawa, O Sasaki

    APPLIED OPTICS   41 ( 10 )   1972 - 1976   2002.4

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    We describe an interferometer system that uses two separate wavelengths to measure step height. The overlapping interference images detected by a CCD camera are easily separated by an ordinary integrating-bucket method and time-sharing sinusoidal phase modulation, in which two laser diodes are alternately modulated with a sinusoidal signal. A phase map is obtained only for the laser diode into which the modulation signal is injected. In this instance, a 1-mum step height was accurately detected. (C) 2002 Optical Society of America.

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  • Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer Reviewed

    T Suzuki, T Maki, Zhao, X, O Sasaki

    APPLIED OPTICS   41 ( 10 )   1949 - 1953   2002.4

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    A surface profiler that incorporates a feedback controller to eliminate external disturbances is proposed and demonstrated. Its overall performance is dependent on the frequency response of the feedback loop. The frequency of the modulating signal strongly influences the response of the feedback controller. When we used the integrating-bucket method, the CCD camera had to be operated at a low-frequency video rate. Our technique uses a CCD camera equipped with an electronic shutter. The shutter function enables us to apply high-speed sinusoidal phase modulation to the conventional integrating-bucket method under the standard video rate. (C) 2002 Optical Society of America.

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  • Evaluation method of resistant torque acting on rotating spindle system including rolling bearing (evaluation under high-d<inf>m</inf> · N condition) Reviewed

    Kazuhiro Yokoyama, Takamasa Suzuki, Masami Masuda, Hiroyasu Iwabe, Takanori Yazawa

    Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering   68 ( 1 )   93 - 97   2002.1

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    This paper describes that the proposed method is able to evaluate accurately the resistant torque acting on rotating spindle system which includes rolling bearing, under high-dm · N condition lower than two million mm · rpm. The resistant torque is calculated as the product of the angular acceleration during free-running and the equivalent moment of inertia of spindle. The acceleration is calculated from the accurate measurement of change in series of each rotation-cycle under free-running. The equivalent moment of inertia is the sum of the moment of inertia of spindle rotor, the effect of rolling elements and the effect of retainer for the elements.

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  • Photothermal phase-modulating laser diode interferometer with high-speed feedback control Reviewed

    XF Zhao, T Suzuki, O Sasaki

    OPTICAL REVIEW   9 ( 1 )   13 - 17   2002.1

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    We propose a photothermal phase-modulating laser diode interferometer equipped with a high-speed feedback control system. The CCD camera&apos;s shutter-function raises the modulating frequency, which in turn elicits a higher feedback response, thus enabling us to eliminate nearly all external disturbance. With the recent application of a system purpose-built for discriminating between numerous fringe sequences, we have also reduced processing time.

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  • Coaxial type of self-mixing interferometer equipped with a wavelength stabilizing system Reviewed

    T Suzuki, T Irisawa, K Yokoyama, O Sasaki

    INTERFEROMETRY XI: TECHNIQUES AND ANALYSIS   4777   49 - 56   2002

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    Because the wavelength of a laser diode (LD) has the temperature-sensitivity, in conventional LD interferometers, a temperature control is required to stabilize the wavelength in long-term measurements. We propose a self-mixing laser diode interferometer that has two coaxial measurement arms. Two interference signals are used for the measurement of displacement and wavelength stabilization in our system. As the wavelength is not stabilized thermostatically, but by adjusting current feedback, compensation is simple and response-time minimal. The feedback controls for displacement measurement and wavelength stabilization were implemented on a time-sharing basis. The devise we propose enables us to conduct long-term measurements of microscopic levels of displacement.

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  • Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement Reviewed

    S Sasaki, Y Shimakura, T Suzuki

    ADVANCED MATERIALS AND DEVICES FOR SENSING AND IMAGING   4919   220 - 226   2002

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    Two-dimensional step-profile measurement is carried out with a sinusoidal wavelength-scanning interferometer where a large scanning width of 41 nm is easily achieved using a superluminescent laser diode of a wide spectral bandwidth of 46 nm. To detect a time-varying interference signal with a short integration time of 118 mus, a shutter function of a two-dimensional CCD image sensor is utilized. A step profile with a step height of 1 mum is measured with an error less than a few nanometers. A Step profile with a step height of 20 mum is also measured with a scanning width of 23 nm.

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  • Sinusoidal wavelength-scanning interferometer with double feedback control for real-time measurement of one-dimensional step-profile Reviewed

    S Sasaki, K Honma, T Suzuki

    ADVANCED MATERIALS AND DEVICES FOR SENSING AND IMAGING   4919   227 - 234   2002

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    An optical path difference (OPD) and the amplitude of sinusoidal wavelength-scanning are controlled with double feedback control system in an interferometer, so that a ruler marking every wavelength and a ruler with scales smaller than a wavelength are generated. These two rulers enable us to measure an OPD longer than a wavelength in real time. A linear CCD image sensor is used to measure one-dimensional step-profiles in real-time. Two different step profiles with a step height of 1 mum and 20 mum, respectively, are measured with the measurement error less than 8 nm. Measuring time for one measuring point is 0.04 s.

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  • Laser diode interferometers equipped with an electrical feedback loop Invited Reviewed

    T Suzuki, O Sasaki

    ADVANCED MATERIALS AND DEVICES FOR SENSING AND IMAGING   4919   256 - 268   2002

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    The tunability of the laser diode's operative wavelength is very attractive to realize active interferometer. We review here, a system that possesses this important capability, by virtue of its built-in electrical feedback loop. After describing the basic principles of its phase-control and feedback-signal generation. some selected examples of its implementation'. such as displacement-, profile- and distance-measurements, as well as disturbance elimination are presented.

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  • Sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method Reviewed

    XF Zhao, T Suzuki, O Sasaki

    ADVANCED MATERIALS AND DEVICES FOR SENSING AND IMAGING   4919   275 - 282   2002

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    We propose a sinusoidal phase modulating laser diode interferometer using an additive operating type of integrating bucket method. In previous integrating bucket method, four images, which are integrated values of the interference pattern detected by a CCD image sensor, are required. According to additive and subtractive operations in a calculator, the quadrature signals can be calculated from these images. While these operations are associated with the technical computing software, such as MATLAB, in a personal computer, it is quite fast, even if the images possess large size. In a standard-alone system with a CPU, however, this kind of operation expends unbearable time. To lighten the burden of the calculator, we tried to simplify the operation. That is, on the basis of integrating bucket method, the subtraction in the signal processing is transformed to the addition by use of the phase shifting technique. All additive operations are achieved with the CCD image sensor. In this interferometer, not only the calculating quantity is reduced, but also the number of required images is reduced. The surface profile of a diamond-turned aluminum disk was measured. The repeatability in the measurements was 5.93 nm rms.

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  • Absolute distance measurement with a sampling type of double sinusoidal phase-modulating laser diode interferometer Reviewed

    T Suzuki, T Sekimoto, S Sasaki

    ADVANCED MATERIALS AND DEVICES FOR SENSING AND IMAGING   4919   339 - 346   2002

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    We propose a new range finding technique that uses two-wavelength interferometry. The system we propose uses a single laser diode to realize a two-wavelength interferometer, which expands measurement range. The single light-source allows us to simplify, the optical setup. Our devise generates two independent interference signals with respect to the wavelengths generated by offset current. The external disturbances on these interference signals are eliminated by the feedback control. Although die feedback control eliminates disturbance as well as the information about the distance,. we are able to detect the distance from the phase difference between those compensated interference signals.

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  • Optical non-contact data-transmission system of rotating spindle temperature by adopting one-chip micro-controller (1st report) Reviewed

    K. Yokoyama, T. Suzuki, S. Kobayashi, Y. Matsudaira, Y. Nagai

    67 ( 12 )   2037 - 2041   2001.12

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  • Characteristic of two-wave mixing with linear and repeated phase-modulated laser light Reviewed

    T. Manabe, O. Sasaki, T. Suzuki

    30 ( 12 )   820 - 826   2001.12

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  • Displacement measurement with a self-mixing interferometer equipped with a wavelength compensation system Reviewed

    T. Suzuki, T. Irisawa, O. Sasaki

    Proc. of SPIE International Symposium on optoelectronics, photonics, and imaging   83 - 83   2001.9

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  • Phase-locked phase-shifting laser diode interferometer with photothermal modulation Reviewed

    T Suzuki, XF Zhao, O Sasaki

    APPLIED OPTICS   40 ( 13 )   2126 - 2131   2001.5

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    We propose a phase-shifting interferometer that uses both phase-locked and photothermal modulating techniques. In this interferometer the measurement accuracy is not affected by the intensity modulation that usually appears in current modulation. The surface profile of a diamond-turned aluminum disk was measured; the rms repeatability obtained was lambda /460. (C) 2001 Optical Society of America.

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  • Small-rotation-angle measurement using an imaging method Reviewed

    T Suzuki, H Nakamura, O Sasaki, JE Greivenkamp

    OPTICAL ENGINEERING   40 ( 3 )   426 - 432   2001.3

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    A system of small-rotation-angle measurement based on fringe projection is proposed and demonstrated. This system has potential for a broad range of uses and robustness to external disturbances, because it requires no coherent light. The setup is very simple and applicable to automatic on-line measurement. Several measurements indicate a sensitivity of 3 arcsec. (C) 2001 Society of Photo-Optical Instrumentation Engineers.

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  • High-speed sinusoidal phase modulating laser diode interferometer with a feedback control to eliminate external disturbance Reviewed

    T Suzuki, T Maki, O Sasaki

    OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN 2001)   4416   392 - 395   2001

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    A surface profiler incorporating a feedback controller that eliminates external disturbances is proposed and demonstrated. Its overall performance is dependent upon the frequency response of the feedback loop. The frequency of modulating signal strongly influences response of the feedback controller. When using an integrating-bucket method, however, the CCD camera must be operated at the NTSC-approved modulating frequency. Our technique uses electronic-shutter equipped CCD camera. The shutter function enables us to apply high-speed sinusoidal phase modulation to the conventional integrating-bucket method under the NTSC standards.

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  • Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation. Reviewed

    T Suzuki, T Yazawa, O Sasaki

    OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN 2001)   4416   46 - 49   2001

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    The system we propose uses two separate wavelengths to measure step-height. Two laser diodes alternately modulated with a sinusoidal signal separate a like number of overlapping interference images detected by CCD camera, the phase map being obtained by a modulated LD. In this instance, the 1 mum step-height was accurately detected.

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  • Measurement of cylinder diameter by using sinusoidally vibrating sinusoidal gratings Reviewed

    O Sasaki, K Hashimoto, Y Fujimori, T Suzuki

    OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN 2001)   4416   35 - 38   2001

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    We propose a new method for measuring a position of an endpoint of a metal cylinder in which a sinusoidal intensity distribution vibrating sinusoidally is used. The position of the endpoint is measured as a phase of a sinusoidally phase-modulated signal which is generated from a light diffracted from the endpoint. En order to extend the measurement range and measure a diameter of a metal cylinder two sinusoidal intensity distributions with two different periods of P-1 = 100 mum and P-2 = 98 mum are used. Cylinder diameters are exactly determined from the measurements for two endpoints of a cylinder using the two periods. Experimental results make it clear that the measurement error is less than 0.3 mum for a cylinder metal of 3885.2 mum diameter.

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  • A feedback type of sinusoidal phase-modulating SLD interferometer for real-time displacement measurement Reviewed

    F. Sano, O. Sasaki, T. Suzuki

    第29巻, 第10号   635 - 639   2000.10

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  • Measurement of small vibration amplitudes of a rough surface by an interferometer with a self-pumped phase-conjugate mirror Reviewed

    XZ Wang, O Sasaki, T Suzuki, T Maruyama

    APPLIED OPTICS   39 ( 25 )   4593 - 4597   2000.9

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    The application of a Michelson interferometer with a self-pumped phase-conjugate mirror to measure small vibration amplitudes of a rough surface is described. The distorted wave front of the light that is diffusely reflected from the rough surface is restored by phase conjugation to provide an interference signal with a high signal-to-noise ratio. The vibration amplitudes of a stainless-steel sample are measured with a precision of similar to 5 nm. (C) 2000 Optical Society of America OCIS codes: 120.3180, 190.5040, 120.7280.

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  • Sinusoidal wavelength-scanning superluminescent diode interferometer with feedback control for real-time distance measurement Reviewed

    K. Akiyama, O. Sasaki, T. Suzuki

    第29巻, 第9号   580 - 585   2000.9

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  • Sinusoidal wavelength-scanning interferometer with a superluminescent diode for step-profile measurement Reviewed

    O Sasaki, N Murata, T Suzuki

    APPLIED OPTICS   39 ( 25 )   4589 - 4592   2000.9

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    in sinusoidal phase-modulating interferometry an optical path length (OPD) larger than a wavelength is measured by detection of sinusoidal phase-modulation amplitude Z(b) of the interference signal that is produced by sinusoidal scanning of the wavelength of a light source. A light source with a large scanning width of wavelength is created by use of a superluminescent laser diode for the error in the measured value obtained by Z(b) to be smaller than half of the central wavelength. In this situation the measured value can be combined with a fractional value of the OPD obtained from the conventional phase of the interference signal. A sinusoidal wavelength-scanning interferometer with the light source measures an OPD over a few tens of micrometers with a high accuracy of a few nanometers. (C) 2000 Optical Society of America OCIS codes: 120.3180, 120.5050, 120.6650.

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  • Tomographic imaging by two-wave mixing with a wavelength-scanning laser diode Reviewed

    O Sasaki, J Yamagishi, T Manabe, T Suzuki

    OPTICS LETTERS   25 ( 16 )   1174 - 1176   2000.8

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    A method of tomographic imaging is proposed in which two-wave mixing in a photorefractive crystal is used with wavelength scanning of a laser diode and phase modulation of the pump beam. This method provides full optical processing and is effective for weak light from objects because of the use of two-wave mixing. The depth resolution of the method was similar to 1 cm when the wavelength-scanning width was similar to 0.02 nm. (C) 2000 Optical Society of America OCIS codes: 170.4500, 170.1650, 190.7070.

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  • Sinusoidal wavelength-scanning interferometric reflectometry Reviewed

    O Sasaki, T Kuwahara, R Hara, T Suzuki

    APPLIED OPTICS   39 ( 22 )   3847 - 3853   2000.8

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    We propose interferometric reflectometry in which a sinusoidal wavelength-scanning tunable laser diode is used to detect positions and profiles of multiple reflecting surfaces. An objective signal extracted from an interference signal contains modulation amplitude Z and phase a, which are related to the positions and profiles, respectively, of multiple reflecting surfaces. By using values of the objective signal at special times, we can produce an image intensity that shows where the reflecting surfaces exist. To obtain exact values of Z or values of a, we estimated the objective signal by using a conjugate gradient method. Experimental results show that a resolution of two-optical-path difference (OPD) in the image intensity is similar to 60 mu m, and the final OPD precisions are 2 and 8 mu m for two and three reflecting surfaces, respectively, for a wavelength-scanning width of 7 nm. Profiles of the front and rear surfaces of a silica glass plate with a thickness of 20 mu m have been measured with a precision of similar to 10 nm. (C) 2000 Optical Society of America OCIS codes: 120.3180, 110.4500, 120.6650.

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  • Real-time displacement measurement with a two-wavelength sinusoidal phase-modulating laser diode interferometer Reviewed

    T Suzuki, K Kobayashi, O Sasaki

    APPLIED OPTICS   39 ( 16 )   2646 - 2652   2000.6

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    A two-wavelength interferometer that uses two separate modulating currents with different phases but the same frequencies to detect a greater degree of object displacement in real time is proposed and demonstrated. The measurement error was 57 nm, roughly 1/80 of the synthetic wavelength. We have confirmed that this modulating technique enables us to equip our prototype interferometer with a simple feedback-control system that eliminates external disturbance. (C) 2000 Optical Society of America OCIS codes: 120.3180, 120.5050, 120.5060, 140.2020.

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  • Phase-locked phase-shifting laser diode interferometry with a photothermal modulation Reviewed

    T. Suzuki, X. Zhao, O. Sasaki

    Proc. of OSA summer topical meeting on optical fabrication and testing   Vol.42   94 - 96   2000.6

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  • Laser-diode interferometer with a photothermal modulation Reviewed

    T Suzuki, M Matsuda, O Sasaki, T Maruyama

    APPLIED OPTICS   38 ( 34 )   7069 - 7075   1999.12

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    A laser-diode (LD) interferometer that uses an accurate photothermal-modulating technique is proposed. Since this technique with the photothermal method modulates only a wavelength of the LD, measurement accuracy is not affected by an intensity modulation that usually appears in the current modulation. The fundamental characteristics of this technique are investigated in detail. The new setup is tested, and its accuracy is compared with that of a previous system. (C) 1999 Optical Society of America OCIS codes: 120.3180, 120.3930, 120.5050, 120.5060, 140.2020, 140.6810.

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  • Exact measurements of surface profiles of a glass plate by a superluminescent diode interferometer Reviewed

    O Sasaki, T Nakada, T Suzuki

    OPTICAL ENGINEERING   38 ( 10 )   1679 - 1682   1999.10

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    A superluminescent diode interferometer that uses sinusoidal phase-modulating interferometry and the shifting method is applied to measure the front and rear surface profiles of a glass plate with an accuracy of a few nanometers. Since the roughness of the reference surface is large, a glass plate is put behind the object as another reference surface, which is estimated by the shifting method with an accuracy of a few nanometers. (C) 1999 Society of Photo-Optical Instrumentation Engineers. [0091-3286(99)01310-0].

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  • Measurement of spatially nonuniform phase changes of a light beam utilizing the reflectivity characteristic of a self-pumped phase-conjugate mirror Reviewed

    XZ Wang, O Sasaki, T Suzuki, T Maruyama

    OPTICAL ENGINEERING   38 ( 9 )   1553 - 1559   1999.9

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    We describe a new method for measuring spatially nonuniform phase changes of a light beam from the spatial nonuniformity of the phase changes, which is obtained by detecting the relative reflectivity change of a self-pumped phase-conjugate mirror. The method is designed to decrease the accumulation of calculating errors. The usefulness of these methods is verified through computer simulations and measurements of the phase changes caused by spatially nonuniform deformation of a semitransparent sheet of silicone gum. (C) 1999 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(99)00609-1].

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  • Self-mixing type of phase-locked laser diode interferometer Reviewed

    T Suzuki, S Hirabayashi, O Sasaki, T Maruyama

    OPTICAL ENGINEERING   38 ( 3 )   543 - 548   1999.3

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    A new type of phase-locked laser diode interferometer that uses self-mixing interference in the optical system is described. The self-mixing interference (SMI) signal is obtained easily by optical feedback, i.e., feeding back the laser beam from the object to the laser diode (LD). The SMI signal can be detected by a photodiode in the package of the LD. Therefore, a beamsplitter, reference mirror, and external photodetector are not required, and an interference signal is obtained using a simple optical system. Although the mechanism of SMI is completely different from that of conventional interference, it is shown that the response of the SMI signal to phase changes is the same as that of conventional interference, We used the phase-locked technique to fix the phase change and demonstrated measurement of absolute distance and displacement, (C) 1999 Society of Photo-Optical instrumentation Engineers. [S0091-3286(99)01503-2].

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  • Optical Haar wavelet transforms for feature extraction,' Asian Journal of Physics Reviewed

    O.Sasaki, M.Fujiwara, T.Suzuki

    Asian Journal of Physics   8 ( 3 )   265 - 271   1999.3

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  • Optical telemetering of temperature information in rotating spindle (2nd report) - on-line estimation of thermal elongation and thermal displacement of rotating spindle Reviewed

    K. Yokoyama, S. Endo, T. Suzuki, Y. Matsudaira

    第65巻, 第1号   150 - 154   1999.1

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  • Sinusoidal phase-modulating superluminescent diode interferometer with Fabry-Perot Etalone for step-profile measurement Reviewed

    K Tsuji, O Sasaki, T Suzuki

    OPTICAL REVIEW   6 ( 1 )   62 - 67   1999.1

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    In this paper we use a superluminescent diode (SLD) as the light source of an interferometer and extract a narrow spectrum from a wide spectrum of the SLD with a Fabry-Perot Etalone (FPE). By varying sinusoidally the distance between the two mirrors of FPE, the central wavelength of the narrow spectrum is scanned sinusoidally. The distance between the mirrors is exactly set by a feedback control system, and sinusoidal phase-modulated SLD light that has a large scanning width of about 10 nm can be obtained with high stability and spatial uniformity. The phase of the interference signal has two different components. One is amplitude Z(b) Of sinusoidal phase modulation, which is proportional to the optical path difference (OPD) and the scanning width. The other is conventional phase alpha, which provides a fractional value of the OPD in the range of the wavelength. By combining the two values of the OPD obtained from Z(b) and alpha, an exact OPD larger than the wavelength can be measured with high accuracy in alpha. Characteristics of the interferometer are made clear through step-profile measurements.

    DOI: 10.1007/s10043-999-0062-z

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  • Small rotation angle measurement using an imaging method Reviewed

    T Suzuki, H Nakamura, JE Greivenkamp, O Sasaki

    THREE-DIMENSIONAL IMAGING, OPTICAL METROLOGY, AND INSPECTION V   3835   14 - 21   1999

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    A system of small rotation angle measurement based on the fringe projection is proposed and demonstrated. This system has potential for a broad range of uses and a robustness for the external disturbances, because it requires no coherent light. The setup is very simple and applicable to the automatic on-line measurement. Several measurements indicate a sensitivity of 3 arcsec.

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  • Sinusoidal wavelength-scanning interferometers using a superluminescent diode Reviewed

    O Sasaki, N Murata, K Akiyama, T Suzuki

    INTERFEROMETRY '99: APPLICATIONS   3745   196 - 204   1999

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    Two different sinusoidal wavelength-scanning (SWS) interferometers with a SWS light source using a superluminescent laser diode are proposed for step-profile measurement and real-time distance measurement, respectively. An optical path difference (OPD) longer than a wavelength is measured from detection of sinusoidal phase-modulation amplitude Z(b) of the interference signal that is proportional to the OPD and the scanning width 2b. In step-profile measurement, if measurement error in the OPD obtained from Z(b) is Smaller than a half wavelength, this measured value of the OPD is combined with a fractional value of the OPD obtained from the conventional phase of the interference signal. This combination enables us to measure the OPD longer than a wavelength with a high accuracy of a few nm. In real-time distance measurement, the amplitude Z(b) is kept at a specified constant value for changes of OPD by controlling the scanning width 2b of the wavelength with a feedback system. The amplitude Z(b) is detected by processing the interference signal with electric circuits in real-time. The value of b is easily controlled in the SWS light source, and an OPD longer than a wavelength is measured from the value of b with an accuracy of about a wavelength.

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  • Sinusoidal wavelength-scanning interferometric reflectometry Reviewed

    O Sasaki, T Kuwahara, R Hara, T Suzuki

    OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN'99)   3740   618 - 621   1999

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    We propose an interferometric reflectometry using a sinusoidal wavelength-scanning tunable laser diode to detect positions and profiles of multiple reflecting surfaces. An objective signal extracted from an interference signal contains the modulation amplitude Z and the phase alpha which are related to positions and profiles of multiple reflecting surfaces, respectively. By using values of the objective signal at special times, we can produce an image intensity which shows where the reflecting surfaces exist. To obtain exact values of Z or values of alpha the objective signal is estimated with a conjugate gradient method. Experiments results show that a resolution of two-optical path difference (OPD) in the image intensity is 87 mu m, and a final OPD accuracy is 2 mu m and 8 mu m for the two and three reflecting surfaces, respectively, in the case of the wavelength-seaming width of 7 nm. Profiles of bent and rear surfaces of a silica glass plate with thickness of 20 mu m are measured, with an accuracy of about 10 nm.

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  • Rotation angle measurement using an imaging method Reviewed

    T Suzuki, H Nakamura, JE Greivenkamp, O Sasaki

    OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN'99)   3740   136 - 139   1999

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    A system of rotation angle measurement based on the fringe projection is proposed and demonstrated. This system has potential for a broad range of uses and a robustness for the external disturbances, because it requires no coherent light. The setup is very simple and applicable to the automatic on-line measurement. Several measurements indicate a sensitivity of 5 arcsec.

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  • Optical data transmission system of the temperature information in rotating spindle (1st report) - Development of the system and measuring accuracy Reviewed

    K Yokoyama, T Suzuki, S Endo, H Hoshina

    PRECISION ENGINEERING, NANOTECHNOLOGY, VOL 1, PROCEEDINGS   Vol.1   76 - 79   1999

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  • Optical data transmission system of the temperature information in rotating spindle (2nd report) - Inner-race temperature of rolling bearing and estimation accuracy of axial thermal elongation Reviewed

    K Yokoyama, T Suzuki, S Endo, Y Matsudaira

    PRECISION ENGINEERING, NANOTECHNOLOGY, VOL 1, PROCEEDINGS   Vol.1   80 - 83   1999

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  • Sinusoidal phase modulating laser diode interferometer using a photo-thermal modulation Reviewed

    T Suzuki, M Matsuda, O Sasaki, T Maruyama

    OPTICAL ENGINEERING FOR SENSING AND NANOTECHNOLOGY (ICOSN'99)   3740   98 - 101   1999

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    A laser diode interferometer that uses accurate photo-thermal modulating technique is proposed. Since this technique of photo-thermal method modulates just a wavelength of the laser diode, measurement accuracy is not affected by an intensity modulation that is used to be appeared in the current modulation. The fundamental characteristics of this technique is investigated in detail. The new setup is tested, and its accuracy compared with that of an earlier system.

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  • Optical character recognition using a memory matrix generated from singular value decomposition Reviewed

    O Sasaki, K Sakata, A Shibahara, T Suzuki

    OPTICAL ENGINEERING   37 ( 9 )   2592 - 2596   1998.9

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    A memory matrix provides output vectors that are specified by the corresponding input vectors. If the input vectors represent input characters, the memory matrix performs character recognition. When the input characters contain noise, it is difficult to recognize the characters. To overcome this difficulty, we generate a new memory matrix by using singular value decomposition and manipulating the singular values. The effectiveness of the memory matrix is made clear by recognizing 26 alphabets characters containing noise with an optical recognition system, (C) 1998 Society of Photo-Optical Instrumentation Engineers.

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  • Optical telemetering of temperature information in rotating spindle (2nd report) - extension of measuring period and measurement in the case with thermocouple hot junction short-circuited to spindle Reviewed

    K. Yokoyama, S. Endo, T. Suzuki

    第64巻, 第9号   1355 - 1360   1998.9

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    DOI: 10.2493/jjspe.64.1355

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  • Superluminescent diode interferometer using sinusoidal phase modulation for step-profile measurement Reviewed

    O Sasaki, Y Ikeada, T Suzuki

    APPLIED OPTICS   37 ( 22 )   5126 - 5131   1998.8

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    We propose an interferometer in which the relationship between the degree of coherence (DCH) and the optical path difference (OPD) is utilized for determining an OPD longer than a wavelength. A superluminescent diode is employed as the source of the interferometer, and sinusoidal phase-modulating interferometry is used to detect the DCH and the phase of the interference signal. The combination of the OPD determined from the DCH and the phase of an interference signal enables us to measure an OPD longer than a wavelength with a high accuracy of a few nanometers. Experimental results show clearly the usefulness of the interferometer for a step-profile measurement. (C) 1998 Optical Society of America.

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  • Optical character recognition with feature extraction and associative memory matrix Reviewed

    O Sasaki, A Shibahara, T Suzuki

    OPTICAL ENGINEERING   37 ( 6 )   1827 - 1833   1998.6

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    A method is proposed in which handwritten characters are recognized using feature extraction and an associative memory matrix. In feature extraction, simple processes such as shifting and superimposing patterns are executed. A memory matrix is generated with singular value decomposition and by modifying small singular values. The method is optically implemented with two liquid crystal displays. Experimental results for the recognition of 26 handwritten alphabet characters clearly show the effectiveness of the method. (C) 1998 Society of Photo-Optical Instrumentation Engineers. [S0091-3286(98)00206-2].

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  • Roof-angle error measurement using an imaging method Reviewed

    T. Suzuki, J. E. Greivenkamp

    Proc. of OSA summer topical meeting on optical fabrication and testing   Vol.12   160 - 162   1998.6

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  • Generation of a SLD light phase-modulated sinusoidally with Fabry-Perot etalone and its application to interferometric measurement Reviewed

    K. Tsuji, O. Sasaki, T. Suzuki

    第27巻, 第1号   33 - 39   1998.1

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  • Sinusoidal wavelength-scanning interferometers Reviewed

    O Sasaki, K Tsuji, S Sato, T Kuwahara, T Suzuki

    LASER INTERFEROMETRY IX: TECHNIQUES AND ANALYSIS   3478   37 - 44   1998

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    In sinusoidal phase-modulating interferomety an optical path length (OPD) larger than a wavelength is measured by detecting sinusoidal phase-modulation amplitude of the interference signal. This interference signal is produced by scanning sinusoidally wavelength of a light source. If the measurement accuracy in OPD is higher than half of the central wavelength, this measured value is combined with a fractional value of the OPD which is obtained from the conventional phase of the interference signal. The measurement accuracy in OPD is higher as the scanning width of wavelength is larger. We propose two different methods to create a light source with a large scanning width of wavelength by using superluminescent laser diode and external-cavity tunable laser diode. Experimental results clearly show that sinusoidal wavelength-scanning interferometers using these light sources measure an OPD over a few tens of microns with a high accuracy of a few nm.

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  • Real-time vibration measurement using a feedback type of laser diode interferometer with an optical fiber Reviewed

    T Suzuki, T Okada, O Sasaki, T Maruyama

    OPTICAL ENGINEERING   36 ( 9 )   2496 - 2502   1997.9

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    A laser diode interferometer that uses an optical fiber is proposed. The laser diode simultaneously functions as a light source, a phase modulator, and a phase compensator. Detection of the vibration and reduction of external disturbance are carried out using a feedback control for the injection current of the laser diode. Thus it can measure vibration accurately in real time with a simple signal processing circuit. The optical fiber not only functions as a flexible probe, enabling us to measure the vibration of an object that cannot be moved onto the optical bench, it also acts as a reference mirror, thereby simplifying the unit construction. The principle of the feedback control in laser diode interferometer is also described in detail. (C) 1997 society of Photo-Optical Instrumentation Engineers.

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  • Wavelength-multiplexed phase-locked laser diode interferometer using a phase-shifting technique Reviewed

    T Suzuki, T Muto, O Sasaki, T Maruyama

    APPLIED OPTICS   36 ( 25 )   6196 - 6201   1997.9

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    We propose a new signal-processing method for eliminating measurement errors that occur in the wavelength-multiplexed phase-locked laser diode interferometer. The basic idea proposed here is a very simple but effective way to improve measurement accuracy. With our scheme, the phase in the interference signal is strictly shifted by 2 pi, which enables us to eliminate measurement errors, The equivalent wavelength Lambda is 80 mm, and the measurement accuracy reaches similar to Lambda/600. A step-height measurement was also carried out in the experiment. (C) 1997 Optical Society of America.

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  • Vibration Amplitude measurement for rough surface with an interferometer using a phase-conjugate laser light Reviewed

    X. Wang, O. Sasaki, T. Kikuchi, N. Ito, T. Suzuki, T. Maruyama

    Proc. of 1997 Topical meeting on Photorefractive Materials, Effects and Devices   208 - 211   1997.9

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  • Double sinusoidal phase-modulating laser-diode interferometer using self-pumped phase-conjugate wave for measuring displacements of rough surface Reviewed

    O. Sasaki, T. Manabe, X. Wang, T. Suzuki

    Proc. of 1997 Topical meeting on Photorefractive Materials, Effects and Devices   523 - 526   1997.9

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  • High accuracy, wide range, rotation angle measurement by the use of two parallel interference patterns Reviewed

    XL Dai, O Sasaki, JE Greivenkamp, T Suzuki

    APPLIED OPTICS   36 ( 25 )   6190 - 6195   1997.9

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    Eased on the idea of measuring small rotation angles with a parallel interference pattern (PIP), a method is developed to measure large rotation angles accurately. Two parallel PIP's that have different periods are used to measure a rotation angle of an object. The measurement made with a small-period PIP provides a high accuracy, and the measurement made with a large-period PIP provides a wide range. An accurate measurement for wide-range angles is made by combining the two measured values. The accuracy of the phase detection is determined by the periods of two PIP's. Rotation angles from approximately -30 to 30 are min can be measured with an accuracy of 0,2 are sec. Analytical results are supported by experimental results. (C) 1997 Optical Society of America.

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  • Self-mixing type of phase-locked laser diode interferometer Reviewed

    T Suzuki, S Hirabayashi, O Sasaki, T Maruyama

    OPTICAL MANUFACTURING AND TESTING II   3134   512 - 519   1997

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    A new type of phase-locked laser diode interferometer which uses self-mixing interference in the optical system is described. The self-mixing interference signal is obtained easily by the optical feedback or feeding back laser beam from the object to the laser diode (LD). The interference signal can be detected by a photodiode which is in the package of the LD. Therefore, a beam splitter, reference mirror and external photodetector are not required, and a kind of interference signal is obtained by a simple optical system. But the signal is not as same as that, which is obtained in a conventional interferometer. We used the phase-locked technique to measure the phase change in the self-mixing interference signal. This technique enables us to detect the displacement of an object. We describe our principle, experimental setup, and experimental results.

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  • Two-wavelength laser diode interferometer with a time-sharing heterodyne modulation Reviewed

    T Suzuki, T Aizaki, O Sasaki, T Maruyama

    LASERS AS TOOLS FOR MANUFACTURING II   2993   192 - 199   1997

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    A new type of two-wavelength interferometer for the measurement of absolute distance is described. Since the wavelength of the laser diode is temporally multiplexed, only one laser diode light-source is required, thus eliminating the necessity of aligning two independent optical axes. Absolute distance is calculated from the difference of the phases in the interference signals generated by each wavelength. The self-correlation function is applicable in our system for detecting this phase-difference between two kinds of interference signals, thereby, the signal processing is very simple and there is a possibility that the real-time distance measurement becomes possible in our new method.

    DOI: 10.1117/12.270028

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  • Measurement of two-dimensional small rotation angles by using orthogonal parallel interference patterns Reviewed

    XL Dai, O Sasaki, JE Greivenkamp, T Suzuki

    APPLIED OPTICS   35 ( 28 )   5657 - 5666   1996.10

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    Based on measuring one-dimensional small rotation angles by using a parallel interference pattern (PIP), a method for measuring two-dimensional (2D) small rotation angles by using two different PIP's that are orthogonal to each other is proposed. We simultaneously measure the 2D small rotation angles Delta theta and Delta phi by detecting the phases of the orthogonal PIP's reflected by an object at two detection points. A sensitivity of 4.9 mrad/arcsec and a spatial resolution of 1.5 x 1.5 mm(2) are achieved in the measurement. Theoretical analysis and experimental results show that error epsilon(1) in the measurement of Delta phi is almost equal to -0.01 Delta theta and error epsilon(2) in the measurement of Delta theta is almost equal to -0.01 Delta phi. For small rotation angles of less than a few tens of arcseconds, the random errors whose standard deviations are 0.6 arcsec are dominant. (C) 1996 Optical Society of America

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  • Prifile measurement of multiple surfaces by heterodyne sinusoidal phase-modulating interferometry Reviewed

    T. Nakada, O. Sasaki, K. Tsuji, T. Suzuki

    25 ( 8 )   473 - 477   1996.8

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  • High-accuracy wide-range rotation angle measurement by using two parallel interference patterns Reviewed

    X. Dai, O. Sasaki, J. E. Greivenkamp, T. Suzuki

    Proc. of International Workshop on Interferometry   85 - 86   1996.8

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  • Optical telemetering of temperature information in rotating spindle (2nd report) - development of high-speed multichannel optical telemetering system - Reviewed

    K. Yokoyama, T. Suzuki, H. Hoshina

    62 ( 7 )   1009 - 1014   1996.7

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    DOI: 10.2493/jjspe.62.1009

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  • Absolute distance measurement using wavelength-multiplexed phase-locked laser diode interferometry Reviewed

    T Suzuki, O Sasaki, T Maruyama

    OPTICAL ENGINEERING   35 ( 2 )   492 - 497   1996.2

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    A new type of two-wavelength interferometer which applies a phase-lock technique is described. The wavelength tunability of a laser diode (LD) is used for phase modulation and phase control in this interferometer. Since the two wavelengths are derived from a single LD in our system, the optical system is simple and there is no need to consider the fluctuation of relative wavelength between the two LD's in the conventional two-wavelength interferometers. The equivalent wavelength Lambda is 15 mm and the measurement accuracy reaches &lt;similar similar to Lambda/400. The error sources in the system and the error analysis are also described. (C) 1996 Society of Photo-Optical instrumentation Engineers.

    DOI: 10.1117/1.600921

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  • Evaluation of friction torque of rolling bearing Reviewed

    K. Yokoyama, A. Tohyama, T. Suzuki

    62 ( 2 )   210 - 214   1996.2

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    DOI: 10.2493/jjspe.62.210

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  • Feedback type of laser diode interferometer with an optical fiber Reviewed

    T Suzuki, T Okada, O Sasaki, T Maruyama

    LASER INTERFEROMETRY VIII: TECHNIQUES AND ANALYSIS   2860   225 - 231   1996

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  • Evaluation of friction torque and heat quantity generated in spindle (1st report) - influence of design parameters upon heat quantity evaluated with an improved measuring system - Reviewed

    K. Yokoyama, T. Suzuki, T. Hirakura, T. Moriwaki

    61 ( 11 )   1583 - 1588   1995.11

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    DOI: 10.2493/jjspe.61.1584

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  • EXACT MEASUREMENT OF FLAT SURFACE PROFILES BY OBJECT SHIFTS IN A PHASE-CONJUGATE FIZEAU INTERFEROMETER Reviewed

    O SASAKI, Y TAKEBAYASHI, XZ WANG, T SUZUKI

    OPTICAL ENGINEERING   34 ( 10 )   2957 - 2963   1995.10

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    We propose a method of exact measurement of flat surface profiles in a phase-conjugate Fizeau interferometer. Aberration of lenses causes an undesirable phase distribution in the interference signal of the phase-conjugate Fizeau interferometer. To eliminate this phase distribution, we shift the object in two directions orthogonal to each other and we get difference values of the surface profile of the object. Additional displacements of the object surface involved in the shifts lead to some small errors in the difference values. We estimate an exact surface profile by solving the difference equations. Characteristics of the method are made clear through computer simulations and measurements of a 40-mm-diam flat mirror.

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  • MEASUREMENT OF SMALL ROTATION ANGLES BY USING A PARALLEL INTERFERENCE PATTERN Reviewed

    XL DAI, O SASAKI, JE GREIVENKAMP, T SUZUKI

    APPLIED OPTICS   34 ( 28 )   6380 - 6388   1995.10

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    We propose a method for measuring rotation angles by using a parallel interference pattern. At two points on a parallel interference pattern reflected by an object, we detect phase changes in the reflected parallel interference pattern caused by rotations of the object. A high sensitivity, or a high ratio of the phase change to the rotation angle, 17 mrad/arcsec, can be achieved by determining the positions of two detection points. A high spatial resolution of similar to 0.5 mm is also obtained. We analyze the measurement error caused by the alignment of the parallel interference pattern and a random measurement error caused by the phase detection. The theoretical analyses and the experimental results make the characteristics of the method clear and show that the method has an accuracy of 0.2 arcsec for small rotation angles.

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  • RESPONSE CHARACTERISTICS OF A SELF-PUMPED PHASE-CONJUGATE MIRROR TO SPATIALLY NONUNIFORM PHASE-CHANGES OF AN INCIDENT WAVE AND THEIR APPLICATIONS Reviewed

    XZ WANG, O SASAKI, T SUZUKI, T MARUYAMA

    OPTICAL ENGINEERING   34 ( 4 )   1184 - 1190   1995.4

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    The response of a self-pumped phase-conjugate mirror to spatially nonuniform phase change of incident wave is examined with a phase-conjugate Fizeau interferometer. The experimental results make it clear that the spatially nonuniform phase change of the incident wave is not reversed by the self-pumped phase-conjugate wave (SPPCW) immediately after the phase change, and the decrease of phase-conjugate reflectivity caused by the nonuniform phase change is proportional to the nonuniformity of the phase change. The phase characteristic of the SPPCW makes the phase-conjugate Fizeau interferometer for surface profile measurements insensitive to object vibrations. The reflectivity characteristics enable us to measure the nonuniform phase change by detecting the intensity of the SPPCW.

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  • Evaluation of friction torque and heat quantity generated in spindle (1st report) - development of evaluation system and evaluation of air spindle characteristics - Reviewed

    K. Yokoyama, T. Suzuki, T. Hirakura, T. Moriwaki

    61 ( 4 )   511 - 515   1995.4

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    DOI: 10.2493/jjspe.61.511

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  • Measurement of small rotation angles by using a parallel interference pattern Reviewed

    Xiaoli Dai, Osami Sasaki, John E. Greivenkamp, Takamasa Suzuki

    Applied Optics   34 ( 28 )   6380 - 6388   1995

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    We propose a method for measuring rotation angles by using a parallel interference pattern. At two points on a parallel interference pattern reflected by an object, we detect phase changes in the reflected parallel interference pattern caused by rotations of the object. A high sensitivity, or a high ratio of the phase change to the rotation angle, 17 mrad/arcsec, can be achieved by determining the positions of two detection points. A high spatial resolution of 0.5 mm is also obtained. We analyze the measurement error caused by the alignment of the parallel interference pattern and a random measurement error caused by the phase detection. The theoretical analyses and the experimental results make the characteristics of the method clear and show that the method has an accuracy of 0.2 arcsec for small rotation angles. © 1995 Optical Society of America.

    DOI: 10.1364/AO.34.006380

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  • High-speed multichannel optical telemetering system Reviewed

    T Suzuki, K Yokoyama, H Hoshina

    MACHINE TOOL, IN-LINE, AND ROBOT SENSORS AND CONTROLS   2595   11 - 18   1995

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  • Absolute measurement of spherical surfaces using phase-conjugate waves Reviewed

    O SASAKI, Y TAKEBAYASHI, T SUZUKI

    INTERNATIONAL CONFERENCE ON OPTICAL FABRICATION AND TESTING   2576   193 - 197   1995

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  • Sinusoidal phase-modulating laser diode interferometer using a self-pumped phase-conjugate mirror Reviewed

    T SUZUKI, J HASEGAWA, O SASAKI, T MARUYAMA

    INTERNATIONAL CONFERENCE ON OPTICAL FABRICATION AND TESTING   2576   299 - 307   1995

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  • Response characteristics of self-pumped phase-conjugate wave to nonuniform phase changes of incident wave and their applications Reviewed

    X. Wang, O. Sasaki, T. Suzuki, T. Maruyama

    Proc. of ICO Topical meeting   148 - 148   1994.9

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  • Superluminecent diode interferometer using sinusoidal phase-modulation for step profile measurement Reviewed

    O. Sasaki, Y. Ikeda, T. Suzuki

    Proc. of ICO Topical meeting   146 - 146   1994.9

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  • REAL-TIME 2-DIMENSIONAL SURFACE PROFILE MEASUREMENT IN A SINUSOIDAL PHASE-MODULATING LASER-DIODE INTERFEROMETER Reviewed

    T SUZUKI, O SASAKI, J KANEDA, T MARUYAMA

    OPTICAL ENGINEERING   33 ( 8 )   2754 - 2759   1994.8

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    A real-time 2-D surface profile measurement system is described. In this system, a laser diode and a 2-D charge-coupled device image sensor are used as a light source and a photodetector, respectively. The phase is detected from the sinusoidal phase-modulating interference signal using the high-speed electrical circuit. The time required for phase detection is 20 ms for 50 x 40 measuring points. Because the phases can be obtained for even and odd fields of the image sensor, the' original spatial resolution of the image sensor is not reduced in this system. Repeatability of the measurement is approximately 14 nm, rms.

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  • SINUSOIDAL PHASE-MODULATING FIZEAU INTERFEROMETER USING A SELF-PUMPED PHASE CONJUGATOR FOR SURFACE PROFILE MEASUREMENTS Reviewed

    XZ WANG, O SASAKI, Y TAKEBAYASHI, T SUZUKI, T MARUYAMA

    OPTICAL ENGINEERING   33 ( 8 )   2670 - 2674   1994.8

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    A sinusoidal phase-modulating Fizeau interferometer using a BaTiO3 self-pumped phase conjugator is constructed to measure surface profiles of objects with a high accuracy. An object field is formed on a surface of a glass plate where the object wave interferes with its phase conjugate wave. Because the size of the glass plate can be much smaller than that of the object, the sinusoidal phase modulation by vibrating the glass plate is easy and accurate for measurements of the surface profiles of large-diameter objects. The interferometer is self-referencing and free of the phase fluctuations of the object wave caused by spatially uniform movements of objects. The usefulness of the interferometer is made clear through the surface profile measurements of a diamond-turned aluminum disk and mirror.

    DOI: 10.1117/12.173590

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  • 高精度実時間半導体レーザ干渉計に関する研究

    鈴木孝昌

    1994.3

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  • IMPROVEMENT OF RESPONSE-TIME WITH AN ADDITIONAL BIAS BEAM IN A BATIO3 SELF-PUMPED PHASE-CONJUGATE MIRROR Reviewed

    T SUZUKI, T SATO

    APPLIED OPTICS   32 ( 21 )   3959 - 3961   1993.7

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    Improvement of the response time of the BaTiO3 self-pumped phase-conjugate mirror is demonstrated with a simple configuration. It is based on beam amplification in the crystal driven by an additional bias beam.

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  • REAL-TIME DISPLACEMENT MEASUREMENT USING SYNCHRONOUS DETECTION IN A SINUSOIDAL PHASE MODULATING INTERFEROMETER Reviewed

    T SUZUKI, O SASAKI, S TAKAYAMA, T MARUYAMA

    OPTICAL ENGINEERING   32 ( 5 )   1033 - 1037   1993.5

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    A real-time displacement measurement system using a sinusoidal phase modulating interferometer is proposed and demonstrated. The system utilizes the frequency components of the interference signal to detect the desired phase or the displacement in real time. The real-time phase detector is constructed with simple electronic circuits. The system also has a feedback loop to eliminate external disturbance. It is easy to measure the relatively large displacement that exceeds a half wavelength of the light because the compensation circuit is incorporated into the system to obtain continuous phase outside the region from 0 to 2pi.

    DOI: 10.1117/12.130252

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  • SINUSOIDAL PHASE-MODULATING FIZEAU INTERFEROMETER USING PHASE-CONJUGATE WAVE Reviewed

    O SASAKI, XZ WANG, Y TAKEBAYASHI, T SUZUKI

    INTERFEROMETRY VI: TECHNIQUES AND ANALYSIS   2003   12 - 20   1993

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  • DIFFERENTIAL TYPE OF PHASE-LOCKED LASER DIODE INTERFEROMETER FREE FROM EXTERNAL DISTURBANCE Reviewed

    T SUZUKI, O SASAKI, K HIGUCHI, T MARUYAMA

    APPLIED OPTICS   31 ( 34 )   7242 - 7248   1992.12

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    A phase-locked laser diode interferometer with differential detection to eliminate external disturbance is proposed. In this interferometer, the measurements are implemented at two different points at the same time. The surface profile that contains the disturbance is obtained at the scanned measuring point, and the disturbance is obtained at the fixed measuring point. The exact profile is obtained by subtracting the latter from the former. The limitations and characteristics are examined theoretically. The analytical results agree well with the experimental results. The repeated measurement accuracy is estimated to be approximately 5 nm in this interferometer.

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  • NOVELTY IMAGING-SYSTEM WITH A DESIRED LONG-TIME SCALE USING BATIO3 AND A CONTROLLED SHUTTER SEQUENCE Reviewed

    T SUZUKI, T SATO

    APPLIED OPTICS   31 ( 5 )   606 - 612   1992.2

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    A novelty imaging system using photorefractive crystal BaTiO3 and a controlled shutter sequence, which can be applied to the slow-motion detection of the object, is proposed. In this system the observation time scale is set to the desired long value uninfluenced by the time constant of the crystal that is used. This system utilizes a photorefractive beam-fanning effect in the BaTiO3 crystal, so it is constructed simply by using only the object beam without suffering from the external disturbance that is intrinsic when the reference beam is used. Moreover, the visibility for an opaque object is also maintained by the use of an additional random-phase plate. We examine the basic characteristics and determine the appropriate conditions of the system.

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  • Characteristic of the elimination of disturbance in the sinusoidal phase modulating laser diode interferometer Reviewed

    K. Maeyama, O. Sasaki, T. Suzuki, T. Maruyama

    21 ( 2 )   113 - 118   1992.2

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  • PHASE LOCKED LASER DIODE INTERFEROMETER Reviewed

    O SASAKI, T SUZUKI, K HIGUCHI

    LASER INTEROMETRY IV : COMPUTER-AIDED INTERFEROMETRY   1553   77 - 83   1992

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  • 2-WAVELENGTH SINUSOIDAL PHASE MODULATING LASER-DIODE INTERFEROMETER INSENSITIVE TO EXTERNAL DISTURBANCES Reviewed

    O SASAKI, H SASAZAKI, T SUZUKI

    APPLIED OPTICS   30 ( 28 )   4040 - 4045   1991.10

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    We describe a two-wavelength laser-diode interferometer that is insensitive to external disturbances such as fluctuations in the wavelength of the laser diode and mechanical vibrations of the optical components. In sinusoidal phase-modulating interferometry this insensitivity is easily obtained by controlling the injection current of the laser diode with a feedback control system. Using an equivalent wavelength of 152-mu-m provided by two single-frequency laser diodes, we can measure the distance, rotation angle, and surface profile measurements with great accuracy.

    DOI: 10.1364/AO.30.004040

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  • PHASE-LOCKED LASER DIODE INTERFEROMETER - HIGH-SPEED FEEDBACK-CONTROL SYSTEM Reviewed

    T SUZUKI, O SASAKI, K HIGUCHI, T MARUYAMA

    APPLIED OPTICS   30 ( 25 )   3622 - 3626   1991.9

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    We have previously proposed a phase-locked laser diode interferometer. In that previous interferometer, however, there was substantial room for improvement in the reduction of measurement time. This reduction is achieved by using a different process for generation of the feedback signal in which the output of a charge-coupled device image sensor is used effectively. We analyze the feedback control system of the interferometer as a discrete-time system and discuss the characteristics of the interferometer. It is shown that the measurement time is much shorter than that of the interferometer proposed previously.

    DOI: 10.1364/AO.30.003622

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  • DOUBLE SINUSOIDAL PHASE-MODULATING LASER DIODE INTERFEROMETER FOR DISTANCE MEASUREMENT Reviewed

    O SASAKI, T YOSHIDA, T SUZUKI

    APPLIED OPTICS   30 ( 25 )   3617 - 3621   1991.9

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    Sinusoidal phase-modulating interferometry is used to detect exactly the sinusoidal phase variation of an interference signal even when the amplitude of the interference signal is varied by modulation of the injection current. We can easily provide a sinusoidal phase-modulating interferometer with a feedback control system that eliminates the phase fluctuations caused by mechanical vibrations. The methods using sinusoidal phase-modulating interferometry improve the resolution of distance measurements. Experimental results show that the thickness of gauge blocks is measured with a resolution of approximately 0.5-mu-m.

    DOI: 10.1364/AO.30.003617

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  • Two-wavelength sinusoidal phase/modulating laser-diode interferometer insensitive to external disturbances Reviewed

    Osami Sasaki, Hiroyuki Sasazaki, Takamasa Suzuki

    Applied Optics   30 ( 28 )   1991

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    We describe a two-wavelength laser-diode interferometer that is insensitive to external disturbances such as fluctuations in the wavelength of the laser diode and mechanical vibrations of the optical components. In sinusoidal phase-modulating interferometry this insensitivity is easily obtained by controlling the injection current of the laser diode with a feedback control system. Using an equivalent wavelength of 152 limprovided by two single-frequency laser diodes, we can measure the distance, rotation angle, and surface profile measurements with great accuracy. © 1991 Optical Society of America.

    DOI: 10.1364/AO.30.004040

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  • Double sinusoidal phase-modulating laser diode interferometer for distance measurement Reviewed

    Osami Sasaki, Tadahiko Yoshida, Takamasa Suzuki

    Applied Optics   30 ( 25 )   3617 - 3621   1991

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    Language:English   Publishing type:Research paper (scientific journal)  

    Sinusoidal phase-modulating interferometry is used to detect exactly the sinusoidal phase variation of an interference signal even when the amplitude of the interference signal is varied by modulation of the injection current. We can easily provide a sinusoidal phase-modulating interferometer with a feedback control system that eliminates the phase fluctuations caused by mechanical vibrations. The methods using sinusoidal phase-modulating interferometry improve the resolution of distance measurements. Experimental results show that the thickness of gauge blocks is measured with a resolution of ∽-0.5 μm. © 1991 Optical Society of America.

    DOI: 10.1364/AO.30.003617

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  • SINUSOIDAL PHASE MODULATING LASER DIODE INTERFEROMETER WITH A FEEDBACK-CONTROL SYSTEM TO ELIMINATE EXTERNAL DISTURBANCE Reviewed

    O SASAKI, K TAKAHASHI, T SUZUKI

    OPTICAL ENGINEERING   29 ( 12 )   1511 - 1515   1990.12

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:SOC PHOTO-OPT INSTRUM ENG  

    DOI: 10.1117/12.55754

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  • REAL-TIME DISPLACEMENT MEASUREMENT IN SINUSOIDAL PHASE MODULATING INTERFEROMETRY Reviewed

    T SUZUKI, O SASAKI, K HIGUCHI, T MARUYAMA

    APPLIED OPTICS   28 ( 24 )   5270 - 5274   1989.12

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    DOI: 10.1364/AO.28.005270

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  • Phase locked laser diode interferometry for surface profile measurement Reviewed

    Takamasa Suzuki, Osami Sasaki, Takeo Maruyama

    Applied Optics   28 ( 20 )   4407 - 4410   1989.10

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    We propose a new type phase locked interferometer which uses tunability of the wavelength of a laser diode. The phase lock is achieved by controlling the injection current of the laser diode. A CCD image sensor is used as a photodetector to scan electrically a measuring point along the surface of the object. Since this interferometer uses no mechanical elements such as a piezoelectric transducer and galvanomirror, the measurement accuracy is not limited by the mechanical properties. The characteristics of the feedback control system for the phase lock are examined through measurements of surface profiles of the diamond-turned aluminum disks. © 1989, Optical Society of America.

    DOI: 10.1364/AO.28.004407

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  • PHASE LOCKED LASER DIODE INTERFEROMETRY FOR SURFACE PROFILE MEASUREMENT Reviewed

    T SUZUKI, O SASAKI, T MARUYAMA

    APPLIED OPTICS   28 ( 20 )   4407 - 4410   1989.10

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  • SINUSOIDAL PHASE MODULATING LASER DIODE INTERFEROMETER WITH FEEDBACK-CONTROL SYSTEM TO ELIMINATE EXTERNAL DISTURBANCE Reviewed

    O SASAKI, K TAKAHASHI, T SUZUKI

    FRINGE PATTERN ANALYSIS   1163   14 - 21   1989

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  • フィードバック型半導体レーザ干渉計の動作解析 Reviewed

    鈴木孝昌, 佐々木修己, 丸山武男

    光学   17 ( 12 )   670 - 675   1988.12

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Books

  • 電気の不思議

    鈴木孝昌( Role: Joint author)

    コロナ社  1995.10 

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MISC

  • 2014年日本光学界の研究動向 「9.干渉計測」 Invited

    鈴木孝昌

    光学   44 ( 4 )   150 - 152   2015.4

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    Language:Japanese   Publishing type:Article, review, commentary, editorial, etc. (scientific journal)  

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  • フィードバック型半導体レーザ干渉計による超精密計測技術

    鈴木孝昌

    応用光学   2001.12

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    Language:Japanese   Publishing type:Article, review, commentary, editorial, etc. (other)   Publisher:カトウ光研株式会社出版部  

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  • 正弦波位相変調法におけるフィードバック干渉計

    佐々木修己, 鈴木孝昌

    光技術コンタクト   2001.8

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  • 2000年光学界の進展 「9.干渉計測」

    鈴木孝昌

    光学   2001.4

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  • 半導体レーザ駆動回路の製作

    鈴木孝昌

    トランジスタ技術   1999.4

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  • 位相共役効果を用いた光計測・センシング

    佐藤拓宋, 佐々木修己, 鈴木孝昌, 亀山啓輔

    計測と制御   32 ( 11 )   895 - 901   1993.11

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    Language:Japanese   Publishing type:Article, review, commentary, editorial, etc. (scientific journal)   Publisher:計測自動制御学会  

    DOI: 10.11499/sicejl1962.32.11_895

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Industrial property rights

  • データ伝送システム

    鈴木孝昌, 横山和宏, 小林滋

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    Applicant:JST

    Application no:特願2000-129474  Date applied:2000.4

    Patent/Registration no:特許第3833047  Date issued:2006.7

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Research Projects

  • クロスネットワークを機軸とした地域間データ共有機能を有する金属加工形状検証システムの研究開発

    2010.4

    総務省  戦略的情報通信研究開発推進制度 

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    Grant type:Competitive

    Grant amount:\5208000 ( Direct Cost: \3645600 、 Indirect Cost:\1562400 )

    デジタル画像処理を用いて金属加工製品の穴位置および形状を高精度検出し,加工データとの自動照合を行う検査装置を新規に開発する。また,「認証」,「WEBコンテンツの配信」,「検査データの保存・配信」,「課金」など複数の機能を有するホストサーバーを立ち上げ,地域内あるいは地域間の金属加工工場で当該検査装置および検査データを認証セキュリテイレベルで共有化できるクロスネットワークを構築する。

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  • フルカラー映像表示を可能とする高輝度白色レーザ光源の開発

    2008.4 - 2010.3

    民間財団等  エヌ・エス知覚科学振興会 

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    Grant type:Competitive

    Grant amount:\950000 ( Direct Cost: \950000 )

    映像表示の際にチラつきの原因となるスペックル雑音が半導体レーザをマルチモード発振させることによって改善できることを実験的に確認する。また,波長の異なる半導体レーザを組み合わせて得られた画像をCCDカメラで撮像し,輝度制御を行う方法を確立する。

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  • 小型・高エネルギー効率を特徴とする光ピンセットシステムの構築

    2008.4 - 2010.3

    民間財団等  内田エネルギー科学振興財団 

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    Grant type:Competitive

    Grant amount:\500000 ( Direct Cost: \500000 )

    光源として小型の半導体レーザ,改造を施した顕微鏡システムを用い,小型・軽量・安価でエネルギー使用効率が良く使い易い光ピンセットシステムを実現する。

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  • レーザー光とマイコンを利用した計測器の開発

    2006.7 - 2007.3

    シンワ測定株式会社  共同研究 

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    Grant type:Competitive

    Grant amount:\400000

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  • 波長多重走査型半導体レーザ光源によるインプロセス形状計測システムの実現

    2006.4 - 2009.3

    日本学術振興会  科学研究費助成事業  基盤研究(C)

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    Grant type:Competitive

    Grant amount:\3300000 ( Direct Cost: \2730000 、 Indirect Cost:\570000 )

    半導体レーザと回折格子を組み合わせた光外部共振器型半導体レーザに超音波光偏向器を挿入し,機械的な駆動を伴うことなく静的に発振波長を走査できることを示すとともに,その特性を明らかにした。通常の半導体レーザを用いたシステムにおける波長走査幅は1ナノメートル程度,AR半導体レーザを用いて,2ナノメートル程度の波長走査を実現した。

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  • レーザー光を利用した計測器の開発

    2005.6 - 2006.3

    シンワ測定株式会社  共同研究 

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    Grant type:Competitive

    Grant amount:\500000

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  • Study on laser diode interferometry

    1987.10

    Ordinary Research 

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    Grant type:Competitive

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Teaching Experience

  • マーケット・インターンシップ

    2021
    Institution name:新潟大学

  • 論文輪講I

    2020
    Institution name:新潟大学

  • 電子情報通信設計製図

    2020
    Institution name:新潟大学

  • 論文輪講II

    2020
    Institution name:新潟大学

  • 創造研究プロジェクトI

    2020
    Institution name:新潟大学

  • 電子情報通信実験IIA

    2020
    Institution name:新潟大学

  • 電子情報通信実験IIIA

    2020
    Institution name:新潟大学

  • 電子情報通信実験IIB

    2020
    Institution name:新潟大学

  • システム制御工学

    2019
    Institution name:新潟大学

  • 電子回路

    2018
    Institution name:新潟大学

  • 総合工学概論

    2018
    Institution name:新潟大学

  • ディジタル回路

    2018
    Institution name:新潟大学

  • 電子情報通信実験IB

    2018
    Institution name:新潟大学

  • 総合技術科学演習

    2018
    Institution name:新潟大学

  • 電子情報通信実験IA

    2018
    Institution name:新潟大学

  • 工学リテラシー入門(情報電子分野)

    2017
    Institution name:新潟大学

  • 創造プロジェクトI

    2017
    Institution name:新潟大学

  • 創造研究プロジェクトⅠ

    2017
    -
    2018
    Institution name:新潟大学

  • 創造プロジェクトII

    2017
    Institution name:新潟大学

  • 創造研究プロジェクトⅡ

    2017
    Institution name:新潟大学

  • 創造プロジェクト基礎

    2017
    Institution name:新潟大学

  • テクノロジー・インターンシップ

    2017
    Institution name:新潟大学

  • 制御工学

    2016
    -
    2018
    Institution name:新潟大学

  • 技術英語入門

    2016
    Institution name:新潟大学

  • 電気情報工学特定研究Ⅱ

    2015
    Institution name:新潟大学

  • 電気情報工学博士セミナーⅡ

    2015
    Institution name:新潟大学

  • 中間発表

    2015
    Institution name:新潟大学

  • 電気電子工学コース演習

    2015
    Institution name:新潟大学

  • 電気電子工学研究発表(外部発表)

    2014
    -
    2015
    Institution name:新潟大学

  • 企業における生産・開発

    2014
    Institution name:新潟大学

  • 電気情報工学特定研究Ⅰ

    2014
    Institution name:新潟大学

  • 異文化と技術

    2013
    -
    2018
    Institution name:新潟大学

  • 電気電子工学特定研究Ⅱ

    2013
    -
    2015
    Institution name:新潟大学

  • 電気電子工学文献詳読Ⅱ

    2013
    -
    2015
    Institution name:新潟大学

  • 電気電子工学研究発表演習(中間発表)

    2013
    -
    2015
    Institution name:新潟大学

  • 電気電子工学セミナーⅠ

    2013
    -
    2015
    Institution name:新潟大学

  • 電気電子工学文献詳読Ⅰ

    2013
    -
    2015
    Institution name:新潟大学

  • 電気電子工学特定研究Ⅰ

    2013
    -
    2015
    Institution name:新潟大学

  • 電気電子工学セミナーⅡ

    2013
    -
    2015
    Institution name:新潟大学

  • 電気電子工学研究発表演習(外部発表)

    2013
    Institution name:新潟大学

  • 自然科学総論Ⅲ

    2012
    Institution name:新潟大学

  • 論理回路

    2011
    -
    2017
    Institution name:新潟大学

  • 放射伝達論

    2011
    -
    2012
    Institution name:新潟大学

  • 電気電子創造設計

    2010
    -
    2016
    Institution name:新潟大学

  • 卒業研修

    2009
    Institution name:新潟大学

  • 工学リテラシー入門(電気電子工学科)

    2009
    -
    2016
    Institution name:新潟大学

  • 制御工学I

    2009
    -
    2015
    Institution name:新潟大学

  • ナノ測定論

    2008
    Institution name:新潟大学

  • スタディスキルズ(電気電子工学)

    2008
    Institution name:新潟大学

  • 電気電子工学基礎実験

    2008
    Institution name:新潟大学

  • 光システム機器特論

    2007
    Institution name:新潟大学

  • 卒業研究

    2007
    Institution name:新潟大学

  • 論文輪講

    2007
    -
    2019
    Institution name:新潟大学

  • 電気電子工学実験IV

    2007
    -
    2018
    Institution name:新潟大学

  • 電気電子工学実験III

    2007
    -
    2018
    Institution name:新潟大学

  • 電気電子設計製図

    2007
    -
    2018
    Institution name:新潟大学

  • 電気電子工学実験I

    2007
    -
    2017
    Institution name:新潟大学

  • 電気電子工学実験II

    2007
    -
    2017
    Institution name:新潟大学

  • エレクトロニクスへの招待

    2007
    -
    2016
    Institution name:新潟大学

  • 制御工学II

    2007
    -
    2013
    Institution name:新潟大学

  • 電気電子演習

    2007
    -
    2009
    Institution name:新潟大学

  • 卒業基礎研究

    2007
    -
    2008
    Institution name:新潟大学

  • 光計測機器論

    2007
    Institution name:新潟大学

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Social Activities

  • 見てさわって工学技術

    Role(s): Lecturer

    2009.10

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    Audience: Schoolchildren, Junior students

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  • 出前授業(新津高校)

    Role(s): Lecturer

    2009.9

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    Audience: High school students

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  • 高等学校理科教員指導力向上研修

    Role(s): Lecturer

    2009.9

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    Audience: Teachers

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  • リフレッシュ理科教室in新潟2009

    Role(s): Lecturer

    2009.8

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    Audience: Teachers

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  • 出前授業(高田北城高校)

    Role(s): Lecturer

    高田北城高校  2008.12

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    Audience: High school students

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  • 見てさわって工学技術

    Role(s): Lecturer

    2008.10

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    Audience: Schoolchildren, Junior students

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  • 出前授業(十日町高校)

    Role(s): Lecturer

    新潟県立十日町高等学校  2008.10

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    Audience: High school students

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  • リフレッシュ理科教室in 新潟2008

    Role(s): Lecturer

    2008.8

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    Audience: Teachers

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  • 出前授業(新発田高校)

    2007.12

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  • 見てさわって工学技術

    2007.10

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    Audience: Schoolchildren, Junior students

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  • リフレッシュ理科教室in 新潟2007(第2回目)

    2007.10

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    小中生向けの理科教室を開催

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  • リフレッシュ理科教室in 新潟2007(第1回目)

    2007.8

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    小中学校の先生向けの理科教室を開催

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  • 出前授業(阿賀黎明高校)

    2007.5

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  • 出前授業(栃木高校)

    2007.3

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  • 見てさわって工学技術

    2006.10

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  • リフレッシュ理科教室in新潟2006

    2006.10

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