Faculty Profiles - SOHGAWA Masayuki

Evaluation Method of Fabrics Using Tactile Texture, Visual and Warm/cool Informations Obtained by MEMS Combo Sensor

2016 ( 49 ) 41 - 46 2016.10

Development of non-contact concentration sensor based on crystal oscillator circuit for monitoring energy carrier

33 1 - 4 2016.10

Development of Quartz Oscillator Type Contactless Liquid Concentration Sensor for Healthcare Monitoring of the Machine

33 1 - 4 2016.10

Texture Characterization Including Warm/cool Sensation by Light, Force, and Temperature Sensitive MEMS Sensor

33 1 - 6 2016.10

Proximity Measurement with Frequency-modulated Probe Light Using Proximity and Tactile Combo Sensor

33 1 - 4 2016.10

Development of Self-heated Stage Suitable for Thermal Reactive Ion Etching of the Functional Metals

33 1 - 4 2016.10

Dependence of the Electrode Diameter and Crystal Direction in the Stability of the Frequency for Wireless-QCM Sensor Using ACR-type Resonator

33 1 - 4 2016.10

Development of contactless liquid concentration sensor based on crystal oscillation circuit for long measurement distance

33 1 - 4 2016.10

炭素鎖長の短い疎水基のリン脂質リポソームを用いたカンチレバーバイオセンサのAβタンパク質の検出感度向上の検討

村上祐樹, 谷口智哉, ZHANG Z, 寒川雅之, 山下馨, 野田実

応用物理学会秋季学術講演会講演予稿集(CD-ROM) 77th ROMBUNNO.15a‐B8‐3 2016.9

低濃度Aβタンパク質検出用NiCr歪みゲージカンチレバーセンサの温度補償特性向上

谷口智哉, 寒川雅之, 村上祐樹, ZHANG Ziyang, 山下馨, 野田実

応用物理学会秋季学術講演会講演予稿集(CD-ROM) 77th ROMBUNNO.15a‐B8‐5 2016.9

A MEMS Combo Sensor with Sensitivity to Multi-axial Force, Light, and Temperature Invited

Masayuki Sohgawa

67 ( 8 ) 48 - 55 2016.8

Development of dual channel type contactless liquid sensor using a quartz oscillator circuit

2016 ( 9 ) 25 - 27 2016.6

コレステロール添加リポソーム固定カンチレバーセンサによる低濃度Aβタンパク質の検出

谷口智哉, 村上祐樹, ZHANG Ziyang, 山下馨, 野田実, 寒川雅之

電気学会全国大会講演論文集(CD-ROM) 2016 ROMBUNNO.3‐108 2016.3

コレステロール含有リポソームによるカンチレバーバイオセンサのAβ検出感度の向上

村上祐樹, ZHANG Z, 谷口智哉, 寒川雅之, 山下馨, 野田実

応用物理学会春季学術講演会講演予稿集(CD-ROM) 63rd ROMBUNNO.19A-W331-6 2016.3

親水基の異なるリン脂質リポソームを用いたマイクロカンチレバーセンサによるAβタンパク質識別能力の評価

ZHANG Z, 村上祐樹, 谷口智哉, 寒川雅之, 山下馨, 野田実

応用物理学会春季学術講演会講演予稿集(CD-ROM) 63rd ROMBUNNO.19P-W323-11 2016.3

Optimization of Optical Sensitivity for Proximity and Tactile Combo Sensor

2016 ( 8 ) 33 - 37 2016.3

国際会議報告：2015 International Conference on Solid State Devices and Materials (SSDM2015) Invited

寒川雅之

電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 136 ( 2 ) PNL2_1 - NL2_1 2016.2

Improvement of sensitivity for Aβ protein on cantilever biosensor by incorporating DPPC liposome with cholesterol

Y. Murakami, Z. Zhang, T. Taniguchi, M. Sohgawa, K. Yamashita, M. Noda

20th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2016 1390 - 1391 2016.1

A High-Sensitive Detection of Several Tens of nM of Amyloid-Beta by Cantilever-Type Biosensor Immobilized DPPC Liposome Incorporated with Cholesterol

Y. Murakami, Z. Zhang, T. Taniguchi, M. Sohgawa, K. Yamashita, M. Noda

PROCEEDINGS OF THE 30TH ANNIVERSARY EUROSENSORS CONFERENCE - EUROSENSORS 2016 168 565 - 568 2016

Investigation of temperature compensated detection of Aβ proteins by liposome-immobilized micro-cantilever in microfluidic channel

32 1 - 5 2015.10

Thermal Reactive Ion Etching of Titanium Using a Self-heated Stage and Its Optimization

32 1 - 5 2015.10

Dual-frequency type contactless chemical combo sensor based on quartz oscillator

32 1 - 4 2015.10

Development of miniature thermogravimetric analysis system by using a quartz crystal microbalance

32 1 - 4 2015.10

時間応答性の異なる検知部を集積したマイクロカンチレバー型触覚センサの基礎検討

河野壮, 三原雅人, 安部隆, 奥山雅則, 野間春生, 寒川雅之

「センサ・マイクロマシンと応用システム」シンポジウム論文集電気学会センサ・マイクロマシン部門 [編] 32 1 - 4 2015.10

Evaluation and fabrication of Gaussian-shaped AT-cut quartz crystal resonator

32 1 - 4 2015.10

半導体MEMSを用いた近接覚・触覚コンボセンサ Invited

寒川雅之

ケミカルエンジニヤリング 60 ( 9 ) 653 - 659 2015.9

カンチレバーバイオセンサによる異種脂質膜‐Aβタンパク質間相互作用の検出

ZHANG Z, 寒川雅之, 山下馨, 野田実

応用物理学会秋季学術講演会講演予稿集(CD-ROM) 76th ROMBUNNO.13A-2B-6 2015.8

2A2-R03 Development of Liquid Concentration Sensor Using Crystal Oscillator Circuit Embedded in a Robotic Artificial Skin

YANAGITA Yuta, SOHGAWA Masayuki, ABE Takashi

2015 "2A2 - R03(1)"-"2A2-R03(2)" 2015.5

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

In this paper, we report the development of liquid concentration sensor using crystal oscillator circuit embedded in a robotic artificial skin. We optimized the shape of the sensing capacitor for sensing a small quantity of liquid locally. This sensor is composed of the sensing capacitor and quartz crystal resonator (QCR). The frequency of QCR changes by a liquid in contact with the artificial skin on the sensing capacitor. Because the frequency changes relate to the electrical characteristics (dielectric constant, conductivity) of the liquid, the sensor can measure the concentration of the liquid. This sensor is expected to be applied to a sensor embedded in the robotic artificial skin.

1P1-V05 Characterization of Surface Texture Depending on Hardness, Thickness, and Roughness Using MEMS Tactile Sensor

TAKAHASHI Kenta, ABE Takashi, OKUYAMA Masanori, NOMA Haruo, SOHGAWA Masayuki

2015 "1P1 - V05(1)"-"1P1-V05(2)" 2015.5

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

In this paper, we report the texture quantitative measurement using the miniature multi-axial tactile sensor with microcantilevers which are fabricated by MEMS technology and embedded in the elastomer. The Si microcantilevers are deformed by both normal and shear forces and the deflection of the cantilever can be detected as resistance change of a strain gauge. The resistance changes by active-touching (pushing and sliding) to the object have been characterized and they are correlated with hardness, thickness, and roughness of the object. The first component obtained by principal component analysis of the correlation matrix among the resistance changes shows the surface texture characteristics (roughness, smoothness, friction) of the object. On the other hand, the second principal component shows texture characteristics including both bulky and elastic feelings of the object.

E部門発足20周年記念特集～未来に向けて（若手研究者の夢）～：「日本的」なセンサデバイスを目指して Invited

寒川雅之

電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 136 ( 5 ) NL5_3 2015.5

Fabrication of Multi-layer Micro-cantilever Structure and Its Application to Miniature Sensor Devices

2015 ( 1 ) 41 - 44 2015.3

カンチレバーバイオセンサを用いたリポソーム脂質膜上でのAβタンパク質動態の経時変化の検討

ZHANG Z, 寒川雅之, 山下馨, 野田実

応用物理学会春季学術講演会講演予稿集(CD-ROM) 62nd ROMBUNNO.13A-D6-10 2015.2

MEMS加工技術とその応用 Invited

寒川雅之, 安部隆

機械の研究 67 ( 2 ) 99 - 105 2015.2

Detection of amyloid-beta at different stages of fibrillization using a cantilever-based liposome biosensor

Ziyang Zhang, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences 1649 - 1651 2015.1

Characterization of Fibrillization Process of Amyloid-Beta on Lipid Membrane Utilizing a Cantilever-Based Liposome Biosensor

Z. Zhang, M. Sohgawa, K. Yamashita, M. Noda

EUROSENSORS 2015 120 41 - 44 2015

Detection of Liposome-Protein Interaction Using NiCr Thin Film Strain Gauge Cantilever Sensor with Droplet-Sealing Structure

ZHANG Z, 赤井俊夫, 高田佳祐, 山下馨, 野田実, 寒川雅之

電気学会バイオ・マイクロシステム研究会資料 BMS-14 ( 28-37 ) 5 - 8 2014.12

Thermal reactive ion etching for etching through titanium wafer

31 1 - 4 2014.10

Analysis of Proximity Sensing for the Multimodal Sensor of Proximity and Touch Force

31 1 - 4 2014.10

Mechanical Characterization of Titanium Microneedles Fabricated by DRIE for Microsurgery

31 1 - 4 2014.10

Non-contact type quartz-crystal sensor for measurement of liquid concentration

31 1 - 4 2014.10

Label-Free Sensing of Various Proteins Using NiCr Strain Gauge Cantilever with Immobilized Liposome

31 4p 2014.10

Aβラベルフリー検知リポソーム固定NiCr歪ゲージカンチレバーセンサ

ZHANG Z, 寒川雅之, 山下馨, 野田実

応用物理学会秋季学術講演会講演予稿集(CD-ROM) 75th ROMBUNNO.20P-A2-5 2014.9

Research of Difference Between Human Tactile Sense and Artificial MEMS Tactile Sensor

WAKAO Asuka, WATANABE Kosuke, SOGAWA Masayuki, OKUYAMA Masanori, NOMA Haruo

Technical report of IEICE. Multimedia and virtual environment 114 ( 114 ) 41 - 45 2014.7

Language：Japanese Publisher：The Institute of Electronics, Information and Communication Engineers

Humans, using their finger tips, are able to detect fine mechanical stimulus and to recognize differences of texture, e.g. asperity, friction, heat and elasticity. We have developed an artificial MEMS tactile sensor that utilizes a number of leaning micro-cantilevers embedded within PDMS. The sensor detects the perpendicular and the shear forces occur in response to the touch of the fine structure of the object's surface. In this report, we evaluate the tactile discrimination capabilities of our tactile sensor by comparing the sensor's output against the results of humans' tactile perception of surfaces with different textures.

Research of Difference Between Human Tactile Sense and Artificial MEMS Tactile Sensor

38 ( 25 ) 41 - 45 2014.7

2A2-W06 Development of non-contact type alcohol concentration detection method using a quartz crystal resonator(Fuctional Interface)

SUSA Tsubasa, SOHGAWA Masayuki, ABE Takashi

2014 "2A2 - W06(1)"-"2A2-W06(2)" 2014.5

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

In this paper, we report the development of non-contact type alcohol concentration detection method using a quartz crystal resonator. This detection method was realized by using an interdigital capacitor (IDC) located at a backside of glass substrate for sensing the liquid on the substrate. Multi-point measurement can be done by fabricating multichannel IDC. Frequency changes by a change in the relative permittivity caused by dropping the liquid on the substrate. Since the relative permittivity is dependent on the concentration of the liquid, it is possible to measure the concentration of alcohol. The proposed method is expected to use for non-contact measurements of liquids.

生体タンパク質識別用リポソーム固定NiCr薄膜ひずみゲージカンチレバーセンサ

寒川雅之, ZHANG Ziyang, 赤井俊夫, 高田佳祐, 山下馨, 野田実

電気学会全国大会講演論文集(CD-ROM) 2014 ROMBUNNO.3-112 2014.3

リポソーム固定NiCr歪ゲージカンチレバーセンサを用いたタンパク質検知

ZHANG Z, 赤井俊夫, 寒川雅之, 高田佳祐, 山下馨, 野田実

応用物理学会春季学術講演会講演予稿集(CD-ROM) 61st ROMBUNNO.19P-E15-13 2014.3

A novel micro-cantilever biosensor with droplet-sealed structure for stable detection of target proteins

Z. Zhang, T. Akai, M. Sohgawa, K. Takada, K. Yamashita, M. Noda

18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014 1975 - 1977 2014.1

Research of Difference Between Human Tactile Sense and Artificial MEMS Tactile Sensor

16 41 - 45 2014

MEMS触覚センサによる物体表面質感の計測法

渡部公介, 金島岳, 奥山雅則, 野間春生, 東輝明, 安部隆, 寒川雅之

電気学会全国大会講演論文集(CD-ROM) 2014 2014

Development of QCM-based thermal desorption spectroscopy for space applications

30 1 - 4 2013.11

Development of a multipoint droplet concentration detector using a single quartz resonator with microflow channel for microreactors

30 4p 2013.11

Fabrication of titanium microstructure using a desktop DRIE equipment

30 1 - 5 2013.11

5PM3-PMN-051 Development of dual quartz sensor for liquid analysis using leakage electric field

Imai Hiroaki, Takeishi Taichi, Sohgawa Masayuki, Abe Takashi

2013 ( 5 ) 97 - 98 2013.11

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

QCM (Quartz crystal microbalance) is used as viscoelastic sensor not only as mass sensor. If it can measure the electric properties, it is expected to use for various applications. In this paper, a dual quartz sensor using a leakage electric field has been developed for analyzing the physicochemical properties of liquids. This sensor can measure the mechanical properties and the electrical properties simultaneously by integrating two types of ACR (Antiparallel coupled resonator) sensors on a same substrate. One is the sensor for measuring the viscoelasticity, another is the sensor for measuring the conductivity and dielectric constant. By changing the electrode portion on the sensing surface of ACR, ACR can evaluate the electrical properties of liquid using a leakage electric field. And this sensor can improve its stability in the air by adjusting the electrode area on the sensing surface.

6PM3-PMN-050 Optimization of electrode design for a QCM based odor sensor using thermal desorption spectroscopy

Sakai Jumpei, Iida Naoyuki, Sohgawa Masayuki, Abe Takashi

2013 ( 5 ) 225 - 226 2013.11

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

We developed a single microheater combined quartz crystal microbalance array for thermal desorption spectroscopy. In this study, new designs of the microheater were fabricated and frequency stability of fabricated sensor was compared between the new designs of the microheater. In a design of the microheater, the frequency stability (3 σ) calculated from the frequency change for 60 sec was 1.4 Hz when the sensor was heated to a temperature of 140 degrees Celsius. The design was effective to improve the frequency stability under heating. In addition, identification between methanol and ethanol was carried out by using the sensor.

NiCr薄膜歪ゲージマイクロカンチレバーセンサを用いたリポソーム‐タンパク質間相互作用検出

藤本貴士, 寒川雅之, 高田佳祐, 山下馨, 野田実

応用物理学会春季学術講演会講演予稿集(CD-ROM) 60th ROMBUNNO.28P-G17-12 2013.3

NiCr薄膜歪ゲージマイクロカンチレバー構造によるリポソーム‐蛋白質間相互作用検出

寒川雅之, 藤本貴士, 高田佳祐, 山下馨, 野田実

電気学会全国大会講演論文集 2013 ( 3 ) 165 2013.3

マイクロカンチレバー型触覚センサを用いた多軸力計測システムの構成と評価

横山輔久登, 寒川雅之, 金島岳, 奥山雅則, 東輝明, 野間春生

電気学会全国大会講演論文集 2013 ( 3 ) 2013

単一MEMSセンサ素子による近接覚・触覚計測手法の検討

横山輔久登, 金島岳, 奥山雅則, 安部隆, 寒川雅之, 野間春生, 東輝明

センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 30th 2013

Miniature Ultrasonic and Tactile Sensors for Dexterous Robot

Masanori Okuyama, Kaoru Yamashita, Minoru Noda, Masayuki Sohgawa, Takeshi Kanashima, Haruo Noma

Transactions on Electrical and Electronic Materials 13 ( 5 ) 215 - 220 2012.10

Review of Eurosensors XXV Invited

Masayuki Sohgawa

IEEJ Transactions on Sensors and Micromachines 132 ( 1 ) NL1_1 2012.1

3次元集積化多軸触覚センサのためのTSV作製

平嶋大樹, 横山輔久登, 寒川雅之, 金島岳, 奥山雅則, 野間春生

応用物理学関係連合講演会講演予稿集(CD-ROM) 59th 2012

磁場中90°off-axis PLD法による多結晶BiFeO3薄膜の作製と評価

PARK J.M., 中嶋誠二, 寒川雅之, 金島岳, 奥山雅則

応用物理学会学術講演会講演予稿集(CD-ROM) 73rd 2012

磁場中PLD法によるエピタキシャルBiFeO3薄膜の作製と評価

PARK J.M., 中嶋誠二, 寒川雅之, 金島岳, 奥山雅則

応用物理学関係連合講演会講演予稿集(CD-ROM) 59th 2012

信号増幅回路を積層集積化したマイクロカンチレバー型多軸触覚センサの作製

横山輔久登, 平嶋大樹, 寒川雅之, 金島岳, 奥山雅則, 野間春生

電気学会全国大会講演論文集 2012 ( 3 ) 2012

2A2-O12 Rotational Slippage Detection Using Micro Cantilever Type Tactile Sensor Array(Tactile and Force Sensing (1))

MITO Wataru, UEMATSU Tatsuya, YAMAZOE Hirotake, TADA Masahiro, SOHGAWA Masayuki, KANESHIMA Takeshi, OKUYAMA Masanori, NOMA Haruo

2011 "2A2 - O12(1)"-"2A2-O12(3)" 2011.5

Language：Japanese Publisher：The Japan Society of Mechanical Engineers

We propose rotational slippage detection method using our proposed MEMS based tactile sensor. The sensor consists of small element which has three inclined micro cantilevers embedded in elastomer, and the element can detect both pressure and shear stresses. By using the sensor and k-NN machine learning algorithm, we could detect two pinching condition, rotational deformation (pre-stage of rotational slip) and point contact condition (rotational slippable condition).

ロボットによる把持状態識別のためのMEMS多軸触覚センサアレイ (特集センサ技術とその応用) Invited

寒川雅之

ロボット ( 200 ) 1 - 4 2011.5

Confirmation of Gripping Status Classification using An Array of Micro Cantilever Type Tactile Sensor

MITO Wataru, MIMA Tatuya, YAMAZOE Hirotake, YOSHIDA Shunsuke, TADA Masahiro, SOHGAWA Masayuki, KANASHIMA Takeshi, OKUYAMA Masanori, NOMA Haruo

Transactions of the Society of Instrument and Control Engineers 第47巻, 第1号, pp. 40-42 ( 1 ) 40 - 42 2011

Language：English Publisher：The Society of Instrument and Control Engineers

We have designed and fabricated a tactile array sensors with three inclined micro-cantilevers embedded in elastomer, which can detect both normal and shear stresses. In this paper, we confirmed gripping status classification using sensor output. Using our sensor, four gripping status (free, grasping, holding and slipping) could be classified significantly.

DOI： 10.9746/sicetr.47.40