Updated on 2024/11/07

写真a

 
ABE Takashi
 
Organization
Academic Assembly Institute of Science and Technology SEISAN DESIGN KOUGAKU KEIRETU Professor
Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Mechanical Science and Engineering Professor
Faculty of Engineering Department of Engineering Professor
Title
Professor
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Degree

  • 博士(工学) ( 1997.3   名古屋大学 )

Research Interests

  • Tough MEMS

  • Micro fabrication

  • MEMS

  • Quartz MEMS

  • Sensor

Research Areas

  • Informatics / Mechanics and mechatronics

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Measurement engineering

  • Nanotechnology/Materials / Nano/micro-systems

  • Informatics / Robotics and intelligent system

Research History (researchmap)

  • Niigata University   Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Mechanical Science and Engineering   Professor

    2010.4

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  • Tohoku University   Graduate School of Engineering   Associate Professor

    2003.4 - 2010.3

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  • Japan Science and Technology Agency

    2002.11 - 2006.3

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  • Tohoku University   Faculty of Engineering   Research Assistant

    2001.4 - 2003.3

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Research History

  • Niigata University   Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Mechanical Science and Engineering   Professor

    2010.4

  • Niigata University   Faculty of Engineering Department of Mechanical and Production Engineering   Professor

    2010.4

Education

  • Nagoya University   Graduate School, Division of Engineering

    - 1997.3

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    Country: Japan

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  • Nagoya University   Faculty of Engineering

    - 1992.3

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    Country: Japan

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Professional Memberships

Committee Memberships

  • 日本機械学会   代表会員  

    2023.4   

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    Committee type:Academic society

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  • 日本機械学会 マイクロ・ナノ工学部門   第13回マイクロ・ナノ工学シンポジウム実行委員長  

    2022 - 2023   

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  •   Transducers2023 組織委員会 委員  

    2021 - 2024   

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    Committee type:Academic society

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  • 電気学会 センサ・マイクロマシン部門   監事  

    2021 - 2023   

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  • 日本機械学会 マイクロナノ工学部門   第12回マイクロ・ナノ工学シンポジウム 論文委員長  

    2020 - 2021   

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  • 電気学会   センサ・マイクロマシン部門研究調査運営委員会 委員長  

    2020 - 2021   

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    Committee type:Academic society

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  • IEEJ Sensors and Micromachines   Vice president  

    2019 - 2021   

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    Committee type:Academic society

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  • IEEJ Sensors and Micromachines   Director, Editorial and Publishing Affairs  

    2019 - 2020   

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    Committee type:Academic society

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  • 日本機械学会 マイクロ・ナノ工学部門   表彰委員会 委員長  

    2019 - 2020   

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    Committee type:Academic society

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  • 日本学術振興会   第150委員会 委員  

    2018 - 2020   

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  • 電気学会   代議員(社員)  

    2016 - 2020   

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    Committee type:Academic society

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  • 日本機械学会   マイクロ・ナノ工学部門 代議員  

    2016 - 2019   

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  • 電気学会 センサ・マイクロマシン部門大会   論文委員長  

    2015 - 2016   

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  • 電気学会 センサ・マイクロマシン部門   編修長(主査)  

    2013 - 2014   

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Papers

  • 支持基板上ATカット水晶振動子の形状の最適化

    Tomoya Nitta, Kuraudo Yasuda, Keito Morohashi, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   144 ( 6 )   136 - 140   2024.6

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.136

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  • Development of a Degradation Method for Evaluation Edible Oils Using a Contactless Quartz Crystal Complex Capacitance Sensor

    Yu Oshima, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   144 ( 5 )   111 - 116   2024.5

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.111

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  • Sensitivity Dependence Analysis of Multi-axis Tactile Sensors on the Bump Position of Contact Area and Sensing Device Design Based on the Analysis

    Hiiro Wakabayashi, Hideto Kadota, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   144 ( 5 )   77 - 81   2024.5

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.77

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  • Elastomer-embedded MEMS Tactile Sensor for Detecting Normal Force, Bending, and Torsion in Grasping Motion

    So Okako, Taisei Nambu, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   144 ( 1 )   6 - 11   2024.1

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.6

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  • 肌のベタつき感定量評価のための触覚センサによる粘着性計測

    So Okako, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   143 ( 8 )   251 - 255   2023.8

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.143.251

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  • The New Control Method for Detection of Cold‐Warm sensation using a Heater Integrated Tactile Sensor

    Takuma Iwahashi, Naotaka Onda, Hikaru Nagumo, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Electrical and Electronic Engineering   2023.4

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/tee.23813

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  • Temperature characteristics of a thickness shear mode quartz crystal resonator bonded to a support substrate Reviewed

    Hajime Satani, Kuraudo Yasuda, Masayuki Sohgawa, Takashi Abe

    Applied Physics Letters   121 ( 25 )   252903 - 252903   2022.12

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:AIP Publishing  

    Thickness shear mode (TSM) resonators consisting of metal films and quartz plates are widely used for sensor applications such as film thickness monitoring, force sensors, and odor sensors. However, the current sensor geometry prevents further improvements in its sensitivity and stability. Thinning the plate is necessary for high sensitivity, and advanced fabrication technologies are required for their commercialization. The solution is to use a support substrate to increase the mechanical strength, which can guide the transmittance of the electric field. Herein, we report a TSM resonator bonded to a support substrate. An AT-cut quartz resonator with a floating electrode on the top side was bonded to the support substrate. Two excitation electrodes were placed under the substrate. The support substrates evaluated in this study included borosilicate glass, Z-cut quartz crystals, and AT-cut quartz crystal plates. The quartz crystal resonator (QCR) bonded to the AT-cut quartz crystal plate and positioned at 90° to the crystallographic x-axis shows an excellent temperature coefficient of frequency of −60 ± 14 ppb/°C for a temperature range 11–40 °C. The proposed method reduces temperature sensitivity to 1/4 or less compared to that without a substrate. Furthermore, the resonator could be used as a quartz crystal microbalance. The proposed method may inspire further high-frequency QCR-based biochemical chips or various sensor applications with TSM resonators.

    DOI: 10.1063/5.0132804

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  • Tactile sensor with microcantilevers embedded in fluoroelastomer/PDMS for physical and chemical resistance

    Yuji Takahashi, Takumi Takahashi, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    Electronics and Communications in Japan   105 ( 3 )   2022.8

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/ecj.12369

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12369

  • Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors

    Ren Kaneta, Takumi Hasegawa, Jun Kido, Takashi Abe, Masayuki Sohgawa

    Journal of Robotics and Mechatronics   34 ( 3 )   677 - 682   2022.6

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    Publishing type:Research paper (scientific journal)   Publisher:Fuji Technology Press Ltd.  

    We previously reported a microelectromechanical system tactile sensor with elastomer-embedded microcantilevers. The sensor enabled the gripping control of soft objects by a robotic hand and acquisition of the object surface texture data. However, sensitivity improvement for more precise control and better texture information acquisition is desired. Here, the cantilever size and the sensor’s strain-gauge arrangement were redesigned, resulting in a sensor with significantly improved sensitivity. In addition, we report the sensitivity dependence on the cantilever size.

    DOI: 10.20965/jrm.2022.p0677

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  • Improvement of Durability of Insulation Film for Low-voltage Electrostatic Tactile Display

    Masatoshi Kondo, Junki Satoh, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   142 ( 5 )   85 - 90   2022.5

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.142.85

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  • Tactile Sensor with Microcantilevers Embedded in Fluoroelastomer/PDMS for Physical and Chemical Resistance

    Yuji Takahashi, Takumi Takahashi, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   142 ( 5 )   91 - 96   2022.5

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.142.91

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  • Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass

    Naotaka Onda, Takaaki Kozuka, Takashi Abe, Masanobu Isshiki, Satoru Tomeno, Masayuki Sohgawa

    Electrical Engineering in Japan   215 ( 1 )   2022.3

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/eej.23370

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/eej.23370

  • Development of time‐delay analysis method of inductance and capacitance for microfluidic circuit

    Ryo Watanabe, Akira Yoshida, Yota Sato, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   105 ( 1 )   2022.3

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/ecj.12352

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12352

  • Development of Time-Delay Analysis Method of Inductance and Capacitance for Microfluidic Circuit

    Ryo Watanabe, Akira Yoshida, Yota Sato, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   142 ( 2 )   17 - 20   2022.2

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.142.17

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  • Development of quartz crystal complex capacitive sensor with microelectrode array for sensitization

    Yuki Hashimoto, Takaaki Haino, Masayuki Sohgawa, Takashi Abe

    Electrical Engineering in Japan   214 ( 4 )   2021.12

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/eej.23356

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/eej.23356

  • Fabrication of Heater-Integrated MEMS Tactile Sensor for Evaluation of Warm and Cold Sensation by Touching Glass

    Naotaka Onda, Takaaki Kozuka, Takashi Abe, Masanobu Isshiki, Satoru Tomeno, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   141 ( 10 )   343 - 348   2021.10

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.141.343

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  • Development of Quartz Crystal Complex Capacitive Sensor with Microelectrode Array for Sensitization

    Yuki Hashimoto, Takaaki Haino, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   141 ( 8 )   279 - 283   2021.8

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.141.279

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  • Contactless Endpoint Detection of Gold Etching Using Quartz-Based Capacitive Detector

    Takuro Okuwaki, Takaaki Haino, Masayuki Sohgawa, Takashi Abe

    21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021   1126 - 1129   2021.6

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    A method for the contactless endpoint detection of gold etching using a quartz-based capacitive detector is reported herein. To design a microfabrication process, the etch rates of materials to be used must be determined to control the etch depth. However, the etch rate changes gradually when the etching solution is used repeatedly. An endpoint and/or etch rate detection method is required to ensure process repeatability in a manufacturing environment. This method should be contactless because the etchants for metals are typically highly corrosive. In this study, a 32 MHz quartz-crystal oscillator is used to detect changes in the concentration of specific ions. The developed method can detect nanometer-order thickness changes during gold etching.

    DOI: 10.1109/Transducers50396.2021.9495749

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  • Development of dry‐nano‐polishing technique using reactive ion etching for ultra thin titanium wafer

    Teruya Chino, Yuta Watanabe, Yosuke Tsukiyama, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   104 ( 2 )   2021.6

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/ecj.12317

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12317

  • Development of Dry-nano-polishing Technique using Reactive Ion Etching for Ultra Thin Titanium Wafer

    Teruya Chino, Yuta Watanabe, Yosuke Tsukiyama, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   141 ( 4 )   103 - 107   2021.4

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.141.103

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  • Multi-frequency Quartz Oscillator Based Liquid Concentration Sensor with External Magnetic Field for Ion Discrimination

    Hiroki Fujimori, Yuki Togashi, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   140 ( 12 )   349 - 353   2020.12

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.140.349

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  • Contactless Monitoring of Water Treatment Process Using Quartz Oscillator Based Liquid Sensor

    Akira Yoshida, Yu Oguro, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   140 ( 10 )   251 - 255   2020.10

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.140.251

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  • Detection Area Evaluation of Tactile Sensor Using Microcantilever Embedded in Elastomer

    Yuto Abe, Fumitoshi Suga, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   140 ( 10 )   272 - 277   2020.10

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.140.272

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  • Detection of Gripping State Using Tactile Sensors Installed on Handgrip for Tools

    Taisei Nambu, Tomoya Fujihashi, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   140 ( 9 )   228 - 234   2020.9

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.140.228

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  • Development of a self-heated-stage for high-speed process of titanium by reactive ion etching

    Yuya Kiryu, Gang Han, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   103 ( 1-4 )   32 - 37   2020.4

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Wiley-Liss Inc.  

    In this study, we developed a detachable self-heated-stage suitable for high-speed processing of titanium by thermally assisted reactive ion etching (TRIE). The detachable self-heated stage was designed based on simulation results. The temperature of the stage increases rapidly within 10 minutes with low radio frequency (RF) power, because of the low thermal capacitance. The etch rates of titanium and titanium alloy by the TRIE improved compared with those of titanium and titanium alloy by a regular RIE. In addition, the replacement of the developed stage with another stage became easier than the previous stage.

    DOI: 10.1002/ecj.12227

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  • Tactile Sensor with High-Density Microcantilever and Multiple PDMS Bumps for Contact Detection Reviewed International journal

    Tomoya Fujihashi, Fumitoshi Suga, Ryoma Araki, Jun Kido, Takashi Abe, Masayuki Sohgawa

    Journal of Robotics and Mechatronics   32 ( 2 )   accepted   2020.4

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  • Tactile sensor using a microcantilever embedded in fluoroelastomer with resistance to cleaning and antiseptic solutions Reviewed International journal

    Takumi Takahashi, Shuhei Sato, Takashi Abe, Masayuki Sohgawa

    Sensors and Actuators A: Physical   301 ( 1 )   111774   2020.1

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.sna.2019.111774

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  • Fabrication and Characterization of Microcantilever for Detection of Vibration Sensation in Tactile Sensing Reviewed

    Harutoshi Takahashi, Yuta Namba, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   139 ( 11 )   375 - 380   2019.11

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    Language:Japanese   Publishing type:Research paper (scientific journal)  

    DOI: 10.1541/ieejsmas.139.375

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  • Development of a Self-heated-stage for High Speed Process of Titanium by Reactive Ion Etching Reviewed

    Yuya Kiryu, Gang Han, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   139 ( 10 )   341 - 345   2019.10

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    Language:Japanese   Publishing type:Research paper (scientific journal)  

    DOI: 10.1541/ieejsmas.139.341

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  • 容器内溶液の非接触検査のための水晶発振回路式液体濃度センサの開発 Invited Reviewed

    小黒 悠, 谷村 実紀, 矢田 直人, 寒川 雅之, 安部 隆

    電気学会論文誌E(センサ・マイクロマシン部門誌)   139 ( 7 )   169 - 174   2019.7

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  • Tactile Sensor Using Microcantilever Embedded in Fluoropolymer for Water and Ethanol Resistance

    Takumi Takahashi, Shuhei Sato, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII   1925 - 1928   2019.6

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    We have developed cantilever-type MEMS tactile sensors with the PDMS elastomer that are sensitive to force and light, and shown that it can measure complex tactile senses. However, it is difficult for this sensor to detect correct response in liquid such as water or ethanol because of luck of resistances to these solutions. Therefore, we employ the fluoropolymer as the elastomer material instead of the PDMS in this work. Consequently, it is demonstrated that the tactile sensor with fluoropolymer can detect force and light successfully in water and ethanol in exactly as detection in air.

    DOI: 10.1109/TRANSDUCERS.2019.8808646

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  • Design and Evaluation of an Electrode Separated Quartz Crystal Microbalance Array as a Disposable Weighing Dish

    Shunya Uchiki, Ikuto Sato, Masayuki Sohgawa, Takashi Abe

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII   1169 - 1172   2019.6

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    This paper describes a new monolithic quartz-crystal microbalance (QCM) array as a disposable weighing dish
    this microbalance contains electrodes on the sensing side and no electrodes on the opposing side. In this sensor, excitation electrodes are positioned on a glass plate that is separate from the dish. The optimized configuration of the monolithic QCM array relative to the crystallographic x-axis of the quartz plate is revealed for the first time. The developed QCM enables the user to measure mass changes by only placing the dish on the excitation electrodes
    hence, it can be applied to disposable QCM-based weighing dishes for evaluating surface treatments, coating processes, and liquid properties.

    DOI: 10.1109/TRANSDUCERS.2019.8808753

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  • 触覚センサによる多層柔軟物モデルの計測と有限要素解析 Reviewed

    木藤 潤, 阿部 祐太, 佐藤 周平, 安部 隆, 野間 春生, 寒川 雅之

    電気学会論文誌E(センサ・マイクロマシン部門誌)   139 ( 6 )   149 - 154   2019.6

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  • 1滴を評価できる水晶発振回路式粘度・濃度複合センサの作製と評価 Reviewed

    庄司拓人, 江端 亮, 寒川雅之, 安部 隆

    電気学会論文誌E(センサ・マイクロマシン部門誌)   139 ( 4 )   81 - 84   2019.4

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  • Introducing planar hydrophobic groups into an alkyl-sulfonated rigid polyimide and how this affects morphology and proton conductivity Reviewed

    Yuki Nagao, Teppei Tanaka, Yutaro Ono, Kota Suetsugu, Mitsuo Hara, Guangtong Wang, Shusaku Nagano, Takashi Abe

    Electrochimica Acta   300   333   2019.3

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    Publisher:Elsevier {BV}  

    DOI: 10.1016/j.electacta.2019.01.118

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  • Development of quartz oscillator based liquid concentration sensor for contactless monitoring of solution in bottle

    Yu Oguro, Miki Tanimura, Naoto Yada, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   139 ( 7 )   169 - 174   2019

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan  

    In this paper, we developed a quartz oscillator based liquid concentration sensor for contactless monitoring of solution in bottle. This sensor is composed of the sensing capacitor (SC) and quartz crystal resonator (QCR). This sensor has advantages such as high stability and it can measure the frequency dependence on liquid concentration. We succeeded in measuring the hardness of the mineral water and the carbonate aqueous solution in bottle. Because this contactless capacitive sensor is low-priced, we can expect the use for the liquid management of various fields.

    DOI: 10.1541/ieejsmas.139.169

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  • Fabrication and evaluation of quartz oscillator based viscosity / concentration sensor for a drop sensing

    Takuto Shoji, Ryo Ebata, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   139 ( 4 )   81 - 84   2019

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan  

    In this paper, we developed a quartz oscillator based viscosity/concentration sensor. This sensor combines a capacitive sensor and a quartz crystal microbalance with a microfluidic circuit. This sensor can measure the concentration and the viscosity of liquids as a time lag signal of the frequency response. We measured the concentration and the viscosity of aqueous solution of glucose with this sensor. From this result, we evaluated the sensor performance.

    DOI: 10.1541/ieejsmas.139.81

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  • Measurement by Tactile Sensor and FEM Analysis of Multi-layered Flexible Model for Skin Diagnosis

    Jun Kido, Yuta Abe, Shuhei Sato, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   139 ( 6 )   149 - 154   2019

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan  

    This paper addresses measurement with tactile sensor and FEM analysis of multi-layered flexible model for skin diagnosis. In the multi-axial-force MEMS sensor, we evaluated the change of output by contact with the multi-layered flexible object. A test piece similar to human skin consisting of a rigid layer and a flexible layer is prepared. The sensor output depends greatly on the ratio and hardness of the hard layer and the thickness of the flexible layer of the specimen, and the contact surface. Compared with the results of FEM analysis, it is suggested that the difference of the dependence is caused by the constant compressive load applied at the time of shear deformation.

    DOI: 10.1541/ieejsmas.139.149

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  • Microdroplet monitoring using microfluid circuit combined quartz oscillator based capacitive sensor Reviewed

    Roy Ebata, Ryo Sakai, Masayuki Sohgawa, Takashi Abe

    Electronics and communications inJapan   101 ( 12 )   50 - 55   2018.12

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  • 微小流体回路融合型水晶発振回路式容量センサを用いた微小液滴のモニタリング Reviewed

    江端 亮, 坂井 了, 寒川 雅之, 安部 隆

    電気学会論文誌E(センサ・マイクロマシン部門誌)   138 ( 8 )   382 - 386   2018.8

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  • Lyotropic ordering for high proton conductivity in sulfonated semialiphatic polyimide thin films Reviewed

    K. Takakura, Y. Ono, K. Suetsugu, M. Hara, S. Nagano, T. Abe, Y. Nagao

    Polymer Journal   2018.8

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  • Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous Gripping Control Reviewed

    Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    Micromachines   9 ( 6 )   301   2018.6

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  • 光・ひずみ複合触覚センサを用いたポリオキシメチレン樹脂の表面形状・色計測による質感評価 Reviewed

    難波 勇太, 安部 隆, 寒川 雅之

    電気学会論文誌E(センサ・マイクロマシン部門誌)   138 ( 6 )   250 - 256   2018.6

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  • Electromotive Manipulator Control by Detection of Proximity, Contact, and Slipping Using MEMS Multiaxial Tactile Sensor Reviewed

    Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    Electrical Engineering in Japan   204 ( 2 )   44 - 49   2018.4

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    In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed single element MEMS sensor which can detect proximity, contact, and slipping to skillful gripping of the object. This MEMS sensor can detect proximity as impedance change of Si substrate by reflected light from the object due to the photoconductive effect. In addition, both normal and shear load can be also detected as resistance change of strain gage on cantilevers located threefold symmetry and embedded in polydimethylsiloxane (PDMS). By attaching the sensor on the electromotive manipulator, accurate control of gripping force was enabled by feedback of the sensor output.

    DOI: 10.1002/eej.23098

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  • High proton conduction of organized sulfonated polyimide thin films with planar and bent backbones Reviewed

    Y. Ono, R. Goto, M. Hara, S. Nagano, T. Abe, Y. Nagao

    Macromolecules   51   3351 - 3359   2018.4

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  • Development of Self-Heated Stage Suitable for Thermal Assist Reactive Ion Etching of the Functional Metals Invited Reviewed

    Yuki Murata, Gang Han, Daiki Ohkawa, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   101 ( 3 )   96 - 102   2018.3

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    This paper describes development of self-heated stage suitable for thermal reactive ion etching (TRIE) of the functional metals. TRIE was evaluated using both experiments and simulations for etching functional metals. The self-heated stage was designed based on the simulation results. TRIE employs a self-heated stage which is thermally insulated aluminum plate as the etching stage of a regular RIE apparatus. The stage temperature increases rapidly within 10 min and etch rate does not depend on process time. TRIE technique was used to etch various kinds of functional metals: Ti, Mo, Ta, Nb, and Ti alloy (Ti-6Al-4V). It did improve the etching rate of these materials greatly.

    DOI: 10.1002/ecj.12046

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  • Electrode-separated quartz crystal microbalance for smart-sensor mounting application Reviewed

    Jun Sakaguchi, Masayuki Sohgawa, Takashi Abe

    Sensors and Materials   30 ( 5 )   1073 - 1080   2018

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    Quartz crystal microbalances (QCMs) have found applications as popular chemical and biological sensing tools. However, their current device geometry prevents their commercialization for industrial use. In this study, we propose a new disposable QCM sensor with an electrode only on the sensing side, making it suitable for sensor mounting. In this sensor system, the excitation electrode is positioned on a glass plate separate from the QCM. Such electrode configurations are suitable for sensor applications in flow cell systems in preference to common QCM systems because QCM mounting on the flow cell and the electrical interconnections between the QCM and the oscillation circuit are simple. The optimized configurations of the electrode diameter, separation distance, and orientation relative to the crystallographic x-axis of the plate are revealed for the first time. The proposed QCM can be applied to realize a disposable QCM-based biochip or hazardous gas sensor located inside a flow tube.

    DOI: 10.18494/SAM.2018.1712

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  • Texture evaluation for planed surface of polyoxymethylene resin by measuring surface shape and color with light and strain sensitive tactile sensor Reviewed

    Yuta Namba, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   138 ( 6 )   250 - 256   2018

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    In this work, we have evaluated the planed surface of polyoxymethylene resin by light and strain sensitive MEMS tactile sensor. It is confirmed that the sensor output is correlated with surface profile and frictional characteristics of the resin. Additionally, it is demonstrated that difference of the surface color of the resin can be detected by this sensor.

    DOI: 10.1541/ieejsmas.138.250

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  • Surface texture characterization using optical and tactile combined sensor Reviewed

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    Sensors and Materials   30 ( 5 )   1091 - 1101   2018

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    Measurements of the surface texture of objects, including optical and tactile features, using a multimodal micro-electromechanical systems (MEMS) sensor are reported in this paper. The proposed MEMS sensor has two functions in its structure: light sensitivity of the MOS structure in the Si substrate and force sensitivity of the strain resistance gauge on microcantilevers embedded in the elastomer. Deflection of the cantilever, induced by an applied force, can be detected as a DC resistance change of the strain gauge film, which depends on the tactile texture including hardness, thickness, and surface roughness of the object. On the other hand, reflected light from the object, detected as AC impedance change at 5 MHz, depends on the color of the object. It is confirmed that the resistance and impedance changes correlate with the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that the surface texture of the object, including optical and tactile features, can be characterized using a single MEMS sensor.

    DOI: 10.18494/SAM.2018.1786

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  • Development of dual channel type contactless liquid sensor using a quartz oscillator circuit Invited Reviewed

    Naoto Yada, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   138 ( 2 )   37 - 40   2018

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    In this paper, we developed a contactless monitoring technique of liquid for measuring the concentration of liquid. This sensor is composed of dual sensing capacitors and quartz oscillation circuits. We succeeded in measuring dielectric and conductivity change at the same time by using dual frequency. Therefore, it can measure liquid tailored to its physicochemical properties with wide frequency range. In this study, we succeeded in monitoring change of concentration of cutting oil. The proposed sensor can be expected to be used for liquid monitoring.

    DOI: 10.1541/ieejsmas.138.37

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  • Microdroplet monitoring using microfluid circuit combined quartz oscillator based capacitive sensor

    Ryo Ebata, Ryo Sakai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   138 ( 8 )   382 - 386   2018

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    In this paper, we developed a compact microdroplet monitoring sensor. This sensor is capacitive sensor combined a microfluidic circuit and a crystal oscillator. We succeeded in the generation and monitoring of microdroplets with this sensor. We optimized the sensing capacitor to improve the sensitivity of the sensor. With optimized the sensing capacitor, the frequency response can be increased. We measured NaCl aqueous solution concentration with the optimized sensing capacitor. From the measurement result, the high dynamic range measurement can be made by using two frequencies.

    DOI: 10.1541/ieejsmas.138.382

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  • Deep reactive ion etching technique involving use of 3D self-heated cathode Reviewed

    Gang Han, Yuki Murata, Daiki Ohkawa, Masayuki Sohgawa, Takashi Abe

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   1281 - 1284   2017.7

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    In this study, a thermally assisted reactive-ion etching (TRIE) technique using a 3D self-heated stage as the etching stage in a conventional reactive-ion etcher was developed and applied to a large size wafer. The 3D stage was designed based on simulation results and its heating characteristics on application of RF power were evaluated. Results indicated that the temperature of the etching stage increased rapidly to 350 °C, but maintained a distribution of ≤ 4 °C. Its application to various minor metals (Ti, Ti 6Al-4V, Ta, Nb, and Mo) was investigated. The resultant etch rates substantially increased with the use of the 3D self-heated cathode in a conventional reactive-ion etcher.

    DOI: 10.1109/TRANSDUCERS.2017.7994289

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  • Gripping control of delicate and flexible object by electromotive manipulator with proximity and tactile combo MEMS sensor Reviewed

    Ryoma Araki, Fumitoshi Suga, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   1140 - 1143   2017.7

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    In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed MEMS sensor to skillful gripping of various objects. This MEMS sensor is responsive to light with the photoconductive effect in Si and force with resistance change in the strain gauge layer on microcantilever structures, as a result, the sensor can detect both proximity and contact. In addition, since the cantilevers are located three-fold symmetry, the direction of applied force can also be detected. It is demonstrated that the proposed manipulator system with the developed sensor can grip not only rigid bodies but also gripping flexible objects.

    DOI: 10.1109/TRANSDUCERS.2017.7994254

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  • Texture measurement for fabrics including warm/cool and fluffiness sensation by multimodal MEMS sensor Reviewed

    Fumiya Sato, Takashi Shiwa, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2017)   343 - 346   2017.6

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    In this paper, we report that texture measurement of warm/cool and fluffiness sensations of various fabrics has been carried out by a multimodal MEMS sensor. This MEMS sensor can detect force as resistance change of strain gauge on micro-cantilever and light as impedance change of Si layer by the photoconductive effect, respectively. The sensor can also detect a temperature drop by heat transfer from the sensor to the contact object as resistance change of the strain gauge and impedance change of Si. It is demonstrated that warm/cool and fluffiness sensations of fabrics can be evaluated by the measured results of the proposed MEMS sensor depending on temperature drop and contact force.

    DOI: 10.1109/TRANSDUCERS.2017.7994058

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  • Fabrication of a true-Gaussian-shaped quartz crystal resonator Reviewed

    Hiroki Kutsuwada, Sho Watanabe, Masayuki Sohgawa, Takashi Abe

    SENSORS AND ACTUATORS A-PHYSICAL   260   58 - 61   2017.6

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    In this paper, a simple fabrication method for a Gaussian-shaped quartz crystal resonator was developed based on the surface tension of the photoresist. First, the photoresist profile on a quartz wafer was changed to a lens shape by the photoresist reflow. By changing the viscocity of the photoresist with propylene glycol monomethyl ether acetate, the photoresist profile on the quartz wafer was adjusted to create a Gaussian shape. Finally, the Gaussian-shaped QCR was fabricated by transferring the shape onto the quartz wafer using a reactive ion etching. (C) 2017 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.sna.2017.04.019

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  • Development of titanium micro mold manufacturing technology for the microfluidic chip by plasma etching Reviewed

    Takeshi Hitobo, Masahiro Shiroki, Hirofumi Nabesawa, Toyohisa Asaji, Takashi Abe

    Journal of the Vacuum Society of Japan   60 ( 4 )   145 - 147   2017

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    This paper describes the microfabrication of titanium micro molds for the microfluidic chip by a reactive ion etching (RIE) system. The etching was carried out using SF6 plasma.We have examined the etching rate and surface roughness at the range of process pressure 0.3-0.7 Pa and RF (13.56 MHz radio-frequency) power 30-70 W. The etching rate is over 0.3 mm/min at the RF power of 70W. The surface roughness of etched substrates is below 40 nm at the process pressure of 0.3 Pa. We made a titanium micro mold and molded microfluidic chips by using polycarbonate, and microresico® (Polypropylene resin).

    DOI: 10.3131/jvsj2.60.145

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  • Microstructure formation on polytetrafluoroethylene (PTFE) and perfluoroalkoxy (PFA) bulk plates by a magnetron enhanced reactive ion etching system Reviewed

    Hirofumi Nabesawa, Takeshi Hitobo, Toyohisa Asaji, Takashi Abe, Minoru Seki

    Journal of the Vacuum Society of Japan   60 ( 5 )   176 - 181   2017

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    The etching characteristics of polytetrafluoroethylene (PTFE) and perfluoroalkoxy (PFA) bulk plates were studied in a magnetron enhanced reactive ion etching (M-RIE) system. The etch rates of the plates for oxygen plasma were investigated under the pressure range 0.1-2.0 Pa, and were found to strongly correlate with the self-bias voltage. The plates presented smooth surface in the 0.1-1.0 Pa pressure range, and rough surfaces at 1.5 Pa and 2.0 Pa. The roughness was introduced by a micromask sputtered from the chamber material. The titanium etching mask exhibited lower etch rates for oxygen plasma than aluminum and silicon dioxide. Finally, using the dry-etched titanium mask in low-pressure oxygen plasma, we fabricated a 5-μm pitch line-and-space structure on a PTFE plate and a 4-μm square pillar array on a PFA plate.

    DOI: 10.3131/jvsj2.60.176

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  • Development of self-heated stage suitable for thermal assist reactive ion etching of the functional metals Reviewed

    Yuki Murata, Gang Han, Daiki Ohkawa, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   137 ( 9 )   262 - 266   2017

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    This paper describes development of self-heated stage suitable for thermal reactive ion etching (TRIE) of the functional metals. Thermal reactive ion etching was evaluated using both experiments and simulations for etching functional metals. The self-heated stage was designed based on the simulation results. TRIE employs a self-heated stage which is thermally insulated aluminum plate as the etching stage of a regular RIE apparatus. The stage temperature increases rapidly within 10 min and etch rate is not depend on process time. TRIE technique was used to etch various kinds of functional metals: Ti, Mo, Ta, Nb, and Ti alloy (Ti-6Al-4V). It did improve the etching rate of these materials greatly.

    DOI: 10.1541/ieejsmas.137.262

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  • Texture Characterization Including Warm/Cool Sensation Using Force-, Light-, and Temperature-Sensitive Micro-electromechanical Systems Sensor Reviewed

    Fumiya Sato, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    SENSORS AND MATERIALS   29 ( 3 )   311 - 321   2017

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    In this paper, we report on texture measurements for an object, including tactile, warm/cool, and light sensations using a multimodal micro-electromechanical systems (MEMS) sensor. This MEMS sensor can detect force as a resistance change of the strain gauge on a microcantilever and light as an impedance change of a Si layer by a photoconductive effect. The sensor, which was maintained near human body temperature using a heater, can also detect a temperature drop after heat transfer from the sensor to a contacted object as a resistance change of the strain gauge or an impedance change of the Si layer. In this work, three different materials (copper, acrylic, and wood) were chosen as the target objects for the measurement of surface texture, and they were characterized on the basis of the differences in sensor outputs in active sensing experiments (approaching and pressing of the sensor with a probe light) on the sensor surface. In the proximity process, the impedance change of the Si layer depends on the surface reflectivity of the objects. After the object is touched by the sensor surface, the impedance of the Si layer and the resistance of the strain gauge of the sensor increase with the change in temperature caused by heat transfer. Furthermore, the resistance of the strain gauge decreases with the deformation of the cantilever caused by the pressing force from each object. Therefore, it is demonstrated that surface texture including the mechanical, optical, and thermal characteristics of various materials can be evaluated by active sensing using the proposed MEMS multimodal sensor.

    DOI: 10.18494/SAM.2017.1443

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  • Deposition and characterization of Al2O3 and BiFeO3 thin films on titanium substrates for tough MEMS devices Reviewed

    Takeshi Kohno, Masato Mihara, Ataru Tanabe, Takashi Abe, Masanori Okuyama, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   137 ( 1 )   46 - 47   2017

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    Insulator and piezoelectric thin films were deposited on titanium substrate, and characterized for application in tough MEMS tactile sensors. The titanium substrate was polished by buffing before the deposition of the thin films. An Al2O3 thin film was deposited as an insulator and showed good insulation characteristics on the polished titanium substrate. Piezoelectric BiFeO3 thin films were prepared by RF sputtering. The XRD pattern of the BiFeO3 thin film on the titanium substrate shows the presence of the ferroelectric phase. The polarization-electric field curve also shows a ferroelectric hysteresis loop. The results show that insulator and piezoelectric thin film can be formed on titanium substrate.

    DOI: 10.1541/ieejsmas.137.46

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  • Thermal Reactive Ion Etching of Minor Metals with SF6 Plasma Reviewed

    Gang Han, Yuki Murata, Yuto Minami, Masayuki Sohgawa, Takashi Abe

    SENSORS AND MATERIALS   29 ( 3 )   217 - 223   2017

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    In this study, thermally assisted reactive ion etching (TRIE) was evaluated by both experiments and simulations. TRIE employs a self-heated stage instead of the etching stage of a regular RIE apparatus. The self-heated stage was designed on the base of the simulation results, and its heating characteristics upon the application of radio frequency (RF) power were evaluated. The temperature of the stage increases rapidly within 10 min because of the low thermal capacitance of the stage. An etch rate of 0.6 mu m/min and an etch selectivity of about 30 were achieved for titanium etching with SF6 plasma. In addition, we also investigated the application of TRIE for various kinds of minor metals (Mo, Ta, Nb, and Ti alloy) for the first time and achieved higher etch rates and etch selectivities than those of regular reactive ion etching (RIE).

    DOI: 10.18494/SAM.2017.1444

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  • Electromotive manipulator control by detection of proximity, contact and slipping using MEMS multi-axial tactile sensor Reviewed

    Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   137 ( 7 )   212 - 217   2017

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    In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed single element MEMS sensor which can detect proximity, contact, and slipping to skillful gripping of the object. This MEMS sensor can detect proximity as impedance change of Si substrate by reflected light from the object due to the photoconductive effect. In addition, both normal and shear load can be also detected as resistance change of strain gauge on cantilevers located three-fold symmetry and embedded in PDMS. By attaching the sensor on the electromotive manipulator, accurate control of gripping force was enabled by feedback of the sensor output.

    DOI: 10.1541/ieejsmas.137.212

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  • Evaluation of the heating characteristics of miniature QCR-based thermogravimetric sensor in vacuum Invited Reviewed

    Ryosuke Wada, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   137 ( 7 )   180 - 184   2017

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    In this paper, we proposed a miniature thermogravimetric analysis sensor by using quartz crystal microbalance. We optimized the heating electrode shape of the microheater-integrated QCM for measuring a component of the soil on Mars and physically adsorbed water content in the Martian dust. Then, we evaluated the heating properties of the QCM in vacuum environment. As a result, the temperature of the electrode heated up to 300°C. We found out the optimized QCM showed low power consumption and had superior heating properties.

    DOI: 10.1541/ieejsmas.137.180

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  • Measurement techniques with frequency-modulated probe light for proximity and tactile combo sensor Reviewed

    Nao Umeki, Akito Nozawa, Masanori Okuyama, Haruo Noma, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   137 ( 5 )   146 - 150   2017

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    We have developed a single sensor which can detect proximity and multi-axial touch force for smart-manipulation control of delicate objects. In this work, a measurement technique with modulated probe light to reduce of the environmental noise for proximity sensing has been reported. The white LED as probe light was switched at 150 Hz. Although the sensor output includes environmental noise from power source and room light, it is demonstrated that the proximity distance can be distinguished as amplitude of frequency component at 150 Hz.

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  • Development of Wirelessly Excited Multi-Channel QCM Sensor for Odor Sensor Applications

    SATO Ikuto, SAKAGUTI Jun, SOHGAWA Masayuki, ABE Takashi

    The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)   2017   1A1 - K11   2017

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    <p>This paper reports the development of wirelessly excited multi-channel QCM sensor for odor sensor applications. In this sensor, the excitation electrodes are positioned on a glass plate separate from the QCM. Such electrode configurations are suitable for odor sensor applications because the electrical interconnections between the QCM and the oscillation circuit are simple. We evaluated the dependence of the resonance frequency on the crystallographic orientation. We found out two vibrational modes that depends on each modulus of elasticity and the frequency responses of each mode are linear for mass loading.</p>

    DOI: 10.1299/jsmermd.2017.1A1-K11

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  • Output Characterization of Proximity and Tactile Combination MEMS Sensor for Gripping Control of Flexible Object

    SUGA Fumitoshi, ARAKI Ryoma, ABE Takashi, NOMA Haruo, SOHGAWA Masayuki

    The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)   2017   1A1 - N02   2017

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    <p>In this Paper, we report output characterization of the proximity and tactile combination MEMS sensor for controlling manipulation of flexible objects. This sensor can detect proximity by the internal photoelectric effect in Si substrate and normal and shear loads as tactile information are detectable by deflection of cantilevers, which are fabricated on the substrate surface and embedded in the silicone elastomer. The proximity and tactile outputs from this sensor attached on the electromotive actuator depend on distance to the target object and normal load applied by gripping the object, respectively. Furthermore, sensor output with shear load applied by weight of gripped flexible object is measured and the improved control method for stable gripping control of flexible objects is discussed.</p>

    DOI: 10.1299/jsmermd.2017.1A1-N02

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  • Evaluation method of fabrics by visual and tactile texture information using MEMS combo sensor Reviewed

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    IEEE Sensors 2016   655 - 657   2016.11

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    DOI: 10.1109/ICSENS.2016.7808624

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  • 水晶振動子を用いた液体分析用コンボセンサにおける形状最適化 Reviewed

    坂井 了, 今井 寛明, 寒川 雅之, 安部 隆

    電気学会論文誌E   136 ( 7 )   319 - 322   2016.7

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    DOI: 10.1541/ieejsmas.136.343

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  • MASS SENSITIVITY AMPLIFICATION BY USING GAUSSIAN-SHAPED QUARTZ CRYSTAL RESONATOR Reviewed

    H. Kutsuwada, S. Watanabe, M. Sohgawa, T. Abe

    2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   1022 - 1025   2016

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    This paper reports mass sensitivity amplification in a Gaussian-shaped quartz crystal resonator (Gaussian-shaped QCR). To achieve amplification, a fabrication process for a Gaussian-shaped (not quasi-Gaussian) QCR was developed using photolithographic methods. Sensitivity amplification in the QCR was observed at the central portion. The mass response was three times higher than the theoretical value for gravimetric measurements of thin, uniform films. The optimized height of the shape, evaluated based on the Q factor, is higher than that of the convex shape. This resonator is expected to be applicable to mass measurement of various micro/nanoparticles.

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  • Preface to the special issue on the awarded papers of the 32nd sensor symposium ' Reviewed

    Shuichi Shoji, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   136 ( 6 )   213   2016

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    DOI: 10.1541/ieejsmas.136.213

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  • Contactless Liquid Sensing Technique Using a Quartz Oscillator Reviewed

    Tsubasa Susa, Takeru Watanabe, Masayuki Sohgawa, Takashi Abe

    SENSORS AND MATERIALS   28 ( 4 )   289 - 294   2016

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:MYU, SCIENTIFIC PUBLISHING DIVISION  

    In this paper, a contactless sensor for the measurement of liquid concentration using a quartz oscillator is reported. An out-of-plane electric field distribution from a planar sensing capacitor (SC) is used for the noncontact sensor measurement of liquid concentration on a spacer. This sensor measures the changes in the capacitance of the SC by the changes in the frequency of the quartz oscillator. Because the capacitance is dependent on the relative permittivity and conductivity of the liquid sample on the spacer, it is pOssible to measure the concentration of the sample. The response is very stable because, in this sensor, the SC is incorporated into the quartz oscillator. Because the SC is in contact with the liquid sample instead of the quartz crystal resonator, the sensor has a high quality factor (approximately 30000). Moreover, this sensor can be used with a general integrated circuit (IC) and an electronic component at a low cost. The sensor is used for the noncontact measurements of liquid concentration.

    DOI: 10.18494/SAM.2016.1179

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  • Development of liquid concentration sensor based on crystal oscillator circuit for measuring microdroplet Reviewed

    Yuta Yanagita, Tsubasa Susa, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   136 ( 7 )   319 - 322   2016

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    In this paper, the liquid concentration sensor using crystal oscillator circuit which is available for measuring microdroplet is reported. We optimized the design of the sensing capacitor (SC) for sensing microdroplet. An electric-field-concentrated SC was used for measuring the liquid. The SC incorporated into the quartz oscillator has high-sensitivity because of the high stable crystal oscillator circuit. The SC is embedded in a silicone rubber. A spatially confined electric field is generated over the rubber. Therefore, the frequency of the oscillator changes by the contact with a liquid to the rubber. Moreover, the change less affected by a quantity of liquid. Because the frequency changes relate to the electrical characteristics of the liquid, the concentration of the liquid can be measured by the sensor. This sensor is expected to be applied to factory automation.

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  • Shape optimization of combo sensor using quartz crystal resonator for liquid analysis Reviewed

    Ryo Sakai, Hiroaki Imai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   136 ( 8 )   343 - 347   2016

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    In this paper, we report the optimized combo sensor using quartz crystal resonator for analyzing the physicochemical properties of liquids. This sensor can measure the mechanical properties and the electrical properties simultaneously by integrating a LFE (Lateral Field Excited) sensor with an ACR (Antiparallel Coupled Resonator) or two types of ACR sensor on a same substrate. We optimized the electrode diameter of resonator for measuring a glucose aqueous solution or NaCl aqueous solution. Moreover, we measured concentration of glucose aqueous solution and NaCl aqueous solution with optimized sensor. This sensor is expected to be used for product quality control in industrial plants.

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  • Development of titanium micro mold manufacturing technology for the microfluidic chip by plasma etching

    HITOBO Takeshi, SHIROKI Masahiro, NABESAWA Hirofumi, ASAJI Toyohisa, ABE Takashi

    Abstract of annual meeting of the Surface Science of Japan   36   272 - 272   2016

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  • Characterization of BiFeO3 Thin Film for Tactile Sensor Using Microcantilevers with Piezoelectric Capacitor and Strain-Gauge Reviewed

    Takeshi Kohno, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    IEEE Sensors 2015   1192 - 1195   2015.11

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    Lead-free BiFeO3 thin films for tactile sensor using microcantilevers have been prepared on Pt and SrRuO3/Pt thin films on a SiO2/Si substrate by RF sputtering, and the electrical characteristics have been optimized by controlling the substrate temperature, gas pressure, and oxygen partial pressure in deposition process. The BiFeO3 thin film (thickness: 300 nm) deposited on SrRuO3 (thickness: 80 nm) deposited at substrate temperature of 500°C in gas pressure of 0.6 Pa and oxygen partial pressure of 0.24 Pa has good crystallinity, ferroelectricity, and piezoelectric property. Therefore, it is demonstrated that BiFeO3 thin film can be a good sensing material as a detection part of tactile sensor. Furthermore, a cantilever structure with piezoelectric capacitor and strain gauge has been fabricated and different time-dependent outputs from them can be obtained.

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  • Basic Study for Tactile and Visual Texture Measurement by Multimodal MEMS Sensor with Force and Light Sensitivity Reviewed

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    IEEE Sensors 2015   699 - 702   2015.11

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    The tactile and visual texture measurement by multimodal MEMS sensor is reported. This MEMS sensor has two function in a structure: force-sensitivity of resistance of microcantilevers embedded in the elastomer and light-sensitivity of a MOS structure on the Si substrate. Deflection of the cantilever induced by applied force depends on the tactile texture including hardness, thickness, and roughness of the object, and is detected as DC resistance change of the strain gauge film. On the other hand, incident light depends on the visual texture of the object, and is detected as AC impedance change at 5 MHz. It is confirmed that the resistance and impedance changes depend on the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that multimodal texture can be characterized by a single MEMS sensor.

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  • Non-contact Sensor for Measurement of Liquid Concentration based on Quartz Oscillator Reviewed

    Susa Tsubasa, Watanabe Takeru, Sohgawa Masayuki, Abe Takashi

    The Journal of the Institute of Electrical Engineers of Japan   135 ( 5 )   158 - 164   2015.6

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    In this paper, we report the non-contact sensor for measurement of liquid concentration based on quartz oscillator. The non-contact sensing can be realized by using a leaked electric field of a planer sensing capacitor for sensing liquid on a spacer. This sensor measures capacitance changes of the sensing capacitor (SC) as frequency changes of the quartz oscillator. Since the capacitance is dependent on relative permittivity or conductivity of liquid on the spacer, it is possible to measure the concentration of them. The response is very stable because this sensor is incorporated the SC into the quartz oscillator. Because the SC is in contact with the sensing liquid instead of the quartz crystal resonator, the proposed sensor has a high quality factor (about 30,000). Moreover, this sensor can be used with general IC and electronic component, which takes low cost. The proposed sensor is expected to use for non-contact measurements of liquid concentration.

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  • Tactile Sensor Using Micro-cantilever with BiFeO3 Piezoelectric Film Reviewed

    Masato Mihara, Akito Nozawa, Takashi Abe, Masanori Okuyama, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   135 ( 5 )   158 - 164   2015.5

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    We have developed the tactile sensor using micro-cantilevers embedded in the elastomer which can measure both the normal and shear forces by piezoresistance. In this work, a piezoelectric tactile sensor using micro-cantilevers embedded in the elastomer has been proposed and fabricated for realizing lower power consumption than the conventional sensor using piezoresistor. The BiFeO3 thin film (thickness: 400 nm) deposited by rf sputtering at substrate temperature of 520°C and gas pressure of 0.6 Pa has a good piezoelectric property because output voltage of 300 mV is obtained for strain induced by vibration of the cantilever. Therefore, it is demonstrated that the BiFeO3 can be used to detect the micro-cantilever deflection by external force applied on the tactile sensor.

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  • Thermal reactive ion etching technique involving use of self-heated cathode Reviewed

    S. Yamada, Y. Minami, M. Sohgawa, T. Abe

    REVIEW OF SCIENTIFIC INSTRUMENTS   86 ( 4 )   2015.4

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    In this work, the thermal reactive ion etching (TRIE) technique for etching hard-to-etch materials is presented. The TRIE technique employs a self-heated cathode and a thermally insulated aluminum plate is placed on the cathode of a regular reactive ion etching (RIE) system. By optimizing the beam size to support the sample stage, the temperature of the stage can be increased to a desired temperature without a cathode heater. The technique was used to etch a bulk titanium plate. An etch rate of 0.6 mu m/min and an etch selectivity to nickel of 100 were achieved with SF6 plasma. The proposed technique makes a regular RIE system a more powerful etcher without the use of chlorine gas, a cathode heater, and an inductively coupled plasma source. (C) 2015 AIP Publishing LLC.

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  • Preface to the special issue on "World state-of-the-art research on sensors and micromachines" Reviewed

    Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   135 ( 3 )   90   2015.3

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  • Microheater-integrated quartz crystal microbalance array for thermal desorption spectroscopy Reviewed

    Jumpei Sakai, Masayuki Sohgawa, Naoyuki Iida, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   135 ( 3 )   112 - 113   2015.3

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    In this work, we present a new design involving a microheater-integrated quartz crystal microbalance (QCM) array for thermal desorption spectroscopy. Each QCM consists of two electrodes to excite thickness-shear-mode (TSM) vibrations on the crystal back side and one microheater to increase the temperature on the crystal front side. The resonance frequency was stable when a voltage was applied to the microheater. Carbon microparticles were coated on one of the QCMs for gas adsorption, and its frequency change during the temperature increase was calculated by subtracting the frequency change of an untreated QCM. The proposed QCM array was employed to separate ethanol from methanol. The separation was successful, as confirmed via thermal desorption spectra calculated by differentiating the resonance frequency change with respect to time.

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  • NON-CONTACT SENSOR FOR MEASUREMENT OF LIQUID CONCENTRATION BASED ON QUARTZ OSCILLATOR Reviewed

    T. Susa, T. Watanabe, M. Sohgawa, T. Abe

    2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)   1472 - 1475   2015

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    In this paper, a noncontact sensor for the measurement of liquid concentration using a quartz oscillator is reported. An out-of-plane electric field with a planer sensing capacitor (SC) is used for sensing a liquid on a spacer. This sensor measures the changes in the capacitance of the SC as the changes in the frequency of the quartz oscillator. The capacitance is dependent on the relative permittivity and the conductivity of the liquid sample on the spacer. Therefore, it is possible to measure the concentration of the sample. The response is very stable because in this sensor, the SC is incorporated into the quartz oscillator. Because the quartz crystal resonator is not contact with liquid, the proposed sensor has a high quality factor (approximately 30,000). Moreover, this sensor can be used with a general IC and an electronic component, with a low cost. The proposed sensor can be expected to be used for various kinds of liquid sensing applications.

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  • Multimodal Measurement of Proximity and Touch Force by Light- and Strain-Sensitive Multifunctional MEMS Sensor Reviewed

    Masayuki Sohgawa, Akito Nozawa, Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    IEEE Sensors 2014   1749 - 1752   2014.11

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    A multimodal sensor with Si micro-cantilever embedded in PDMS elastomer for measurement of proximity and touch forces has been fabricated and characterized. DC resistance of the strain gauge on the cantilever changes in proportion to the indentation depth of the object. On the other hand, the AC (&gt; 0.5 MHz) impedance including photo-sensitive component of Si increases with increase of distance between the sensor surface and the object because of decrease of light intensity reflected on the object surface. Moreover, the AC impedance is different between grounding and floating of the proximate object because of difference of distribution of electrostatic field between electrodes, so that it is suggested that proximity can be detected as the impedance change by light as well as the electric field.

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  • Texture measurement and identification of object surface by MEMS tactile sensor Reviewed

    Masayuki Sohgawa, Kosuke Watanabe, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    2014 IEEE SENSORS   1706 - 1709   2014.11

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    The surface texture of various materials has been characterized by tactile sensor with a micro-cantilever embedded in the PDMS elastomer. The maximum output (resistance of strain gauge on the cantilever) change of the sensor by indentation of the object on the sensor surface depends on the hardness or thickness of the object. Moreover, output change is asymmetric in a back-and-forth indentation test because of relaxation of deformation. On the other hand, the output increases rapidly at beginning of stepwise sliding of the sensor at the object surface because of static friction, and changes periodically corresponding to stick-slip oscillation or surface roughness after slipping. It is demonstrated that about 30 materials of papers, clothes, leathers, and plastic sheets, have been classified into 5 clusters by the principal component analysis using feature quantities extracted from the sensor outputs.

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  • Miniature quartz crystal-resonator-based thermogravimetric detector Reviewed

    N. Sai, Y. Tagawa, M. Sohgawa, T. Abe

    REVIEW OF SCIENTIFIC INSTRUMENTS   85 ( 9 )   095001   2014.9

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    In this work, a new design for a microheater combined with a quartz crystal microbalance (QCM) array for thermogravimetric analysis is presented. Each QCM consists of two electrodes to excite thickness-shear-mode vibrations and one microheater to increase the temperature on the crystal backside. In addition, all the electrode pads are patterned on the crystal backside, making the design of the QCM compact and user-friendly. Finally, the proposed QCM array was employed to separate ethanol from methanol. This was successfully achieved via thermal desorption spectra calculated by differentiating the frequency changes. (C) 2014 AIP Publishing LLC.

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  • A Multichannel Chemical Sensing Method Using Single Quartz Resonator and Micro Flow Channel Reviewed

    Shinjiro Toyama, Takashi Abe

    IEEE SENSORS JOURNAL   14 ( 1 )   135 - 139   2014.1

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    In this paper, the development of a multi chemical sensing method using a single quartz crystal resonator and micro flow channel has been reported. In the developed device, samples pass through two capacitors that are mounted as sensing parts in a microchannel with a time lag. Connecting the capacitors to the single quartz crystal resonator, one can obtain frequency change Delta F of the resonator as time lag signals depending on the relative permittivity of samples. The optimization of resonator diameter was also carried out in this paper. Using the proposed method, we can realize multi chemical sensing with a single resonator.

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  • Micromachining of titanium using a desktop DRIE Reviewed

    Shuji Yamada, Takeshi Hitobo, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   134 ( 4 )   96 - 99   2014

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    In this paper, we report a micromachining of titanium using a desktop DRIE and fabrication of microstructure. We found out high speed exhaust characteristic is indispensable in the etching of titanium, and the etching rate more than 0.2 μm/min (a maximum rate is 0.4 μm/min) was provided in a small amount of etching gas (SF6). As the demonstration of the method, we fabricated microneedles imitating mosquito's proboscis. We revealed that it is available for fabricating precision microstructure. Titanium has excellent mechanical property and corrosion resistance, and it is expected to be used as a material for MEMS. In this method, it is expected to apply to fabricate the three-dimensional structures. © 2014 The Institute of Electrical Engineers of Japan.

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  • Numerical calculation and experimental verification of a quartz-crystal-resonator-based methanol concentration sensor Reviewed

    Takeru Watanabe, Shinjiro Toyama, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   134 ( 7 )   224 - 228   2014

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    In this paper, we report the numerical calculation and experimental verification of a quartz-crystal-resonator-based methanol concentration sensor for fuel cell applications. This sensor is composed of a quartz crystal resonator (QCR) and an interdigital capacitor (IDC). Our sensor can detect a very small capacitance change with a resolution of sub fF. The fabricated sensor can measure a methanol concentration with a resolution of 0.008 wt%. In the present study, we found out optimized sensor design (QCR and IDC) for the substrate thickness and the range of the methanol concentration. By the use of this study, the capacitive sensor with higher resolution can be realized, and it can be expected to apply to various types of capacitive sensors. © 2014 The Institute of Electrical Engineers of Japan.

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  • Active touch sensing by multi-axial force measurement using high-resolution tactile sensor with microcantilevers Reviewed

    Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   134 ( 3 )   58 - 63   2014

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    A tactile sensing system that measures normal and shear (triaxial) forces has been developed, and its characteristics such as linearity and crosstalk have been evaluated. Triaxial forces are estimated from the resistance changes of NiCr thin film strain gauge attached to three microcantilevers. The output voltage of the Wheatstone bridge that comprises a gauge film and three reference resistances is acquired using an A/D converter after amplification. Triaxial forces are calculated from the output voltages of three microcantilevers by simple matrix multiplication. Nonlinearity and crosstalk are less than 4% when the normal force applied is up to 1N and less than 10% when the shear force applied is up to 0.2N. Active touch sensing was demonstrated using an object having a striped profile measuring 0.1mm in height and 1mm in width. © 2014 The Institute of Electrical Engineers of Japan.

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  • Proximity and tactile sensing using a single MEMS sensor with photo- and strain sensitivities Reviewed

    Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   134 ( 7 )   229 - 234   2014

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    A novel method has been proposed to detect proximity and tactile information using a single MEMS sensor. Tactile information is obtained from DC resistance change of NiCr strain gauge film. In contrast, proximity information is obtained from AC impedance change, which is caused by photo-absorption of Si wafer irradiated by a neighboring LED. Therefore, selection of the information to be acquired is performed by switching the DC and AC measurement system. Experimental results show almost linear tactile output to indentation of 0 to 0.5mm and non-linear proximity output to distance of 0 to 50 mm, respectively. Moreover, the sensor is able to acquire rough shape of a toroidal object by proximity measurement. © 2014 The Institute of Electrical Engineers of Japan.

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  • 1P2-X09 Multimodal Measurement of Proximity and Touch Force by Light- and Strain-sensitive Multifunctional MEMS Sensor(Tactile and Force Sensing (2))

    NOZAWA Akito, YOKOYAMA Hokuto, KANASHIMA Takeshi, OKUYAMA Masanori, ABE Takashi, NOMA Haruo, AZUMA Teruaki, SOHGAWA Masayuki

    The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)   2014   _1P2-X09_1 - _1P2-X09_4   2014

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    A multifunctional MEMS sensor for measurement of proximity and touch of an object has been fabricated and characterized. The DC resistance changes linearly to indentation distance of the object. On the other hand, the AC (> 500 kHz) impedance increases with increase of distance between the sensor surface and the object because of decrease of light intensity reflected on the object surface. An error of proximity measurement induced by environmental temperature and illuminance has been characterized. The error was estimated at 1 mm for 1℃ temperature change and at 2 mm for 500 lx illuminance change, respectively, and they are enough low in stable environment. Moreover, the AC impedance was different between grounding and floating the proximate object because of difference of distribution of electricstatic field between electrodes, so that it is suggested that proximity can be measured as the impedance change by light as well as electrostatic field.

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  • Experimental optimization of quartz-crystal-resonator-based methanol sensor connected in series with interdigital capacitor Reviewed

    Shunpei Ishii, Keito Emura, Takashi Abe

    Japanese Journal of Applied Physics   52 ( 12 )   127201   2013.12

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    In this paper, we report the development of a monolithic methanol concentration sensor. An interdigital capacitor and a resonator are fabricated on a single-crystal substrate. The methanol concentration can be measured by measuring the frequency shift of the resonator because the shift corresponds to a change in the relative permittivity of the capacitor connected in series to the resonator. The quality factor (Q) of the sensor is more than 20,000 since the methanol solution is not in contact with the resonator but with the capacitor. The smallest resonator diameter and sensor size for achieving a resolution of 0.3 wt% were 1.5mm and 2.6 × 10.9 × 0.1mm3, respectively. Because the structure and manufacturing process are simple, the proposed sensor can be expected to be used for various kinds of liquid sensing applications. © 2013 The Japan Society of Applied Physics.

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  • Force intensity and direction measurement in real time using miniature tactile sensor with microcantilevers embedded in PDMS Reviewed

    Hokuto Yokoyama, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    IEEE Sensors   1090 - 1093   2013.11

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    Intensity and direction of normal and shear (3-axial) forces have been measured by using a tactile sensor with NiCr strain gauge film on 3 microcantilevers. Output voltage of the Wheatstone bridge which includes a gauge film is measured as digital signal after amplification. 3-axial forces are calculated from the output voltages of 3 microcantilevers every 100 ms. When normal force is applied from 0 to 1 N, the measurement errors of normal and shear forces are less than 50 mN and 10 mN, respectively. When shear force of 0.1 and 0.2 N is applied, the angle error of evaluated direction is less than 10°.

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  • Low-pressure plasma-etching of bulk polymer materials using gas mixture of CF4 and O-2 Reviewed

    Hirofumi Nabesawa, Takaharu Hiruma, Takeshi Hitobo, Suguru Wakabayashi, Toyohisa Asaji, Takashi Abe, Minoru Seki

    AIP ADVANCES   3 ( 11 )   112105   2013.11

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    In this study, we have proposed a low-pressure reactive ion etching of bulk polymer materials with a gas mixture of CF4 and O-2, and have achieved precise fabrication of poly(methyl methacrylate) (PMMA) and perfluoroalkoxy (PFA) bulk polymer plates with high-aspect-ratio and narrow gap array structures, such as, pillar, frustum, or cone, on a nano/micro scale. The effects of the etching conditions on the shape and size of each pillar were evaluated by changing etching duration and the size/material of etching mask. The fabricated PMMA array structures indicate possibilities of optical waveguide and nanofiber array. PFA cone array structures showed super-hydrophobicity without any chemical treatments. Also, polystyrene-coated silica spheres were used as an etching mask for the pillar array structure formation to control the gap between pillars. (c) 2013 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.

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  • Enhancement of Proton Transport in an Oriented Polypeptide Thin Film Reviewed

    Yuki Nagao, Jun Matsui, Takashi Abe, Hirotsugu Hiramatsu, Hitoshi Yamamoto, Tokuji Miyashita, Noriko Sata, Hiroo Yugami

    LANGMUIR   29 ( 23 )   6798 - 6804   2013.6

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    Proton transport properties of a partially protonated poly(aspartic acid)/sodium polyaspartate (P-Asp) were investigated. A remarkable enhancement of proton conductivity has been achieved in the thin film. Proton conductivity of 60-nm-thick thin film prepared on MgO(100) substrate was 3.4 X 10(-3) S cm(-1) at 298 K. The electrical conductivity of the oriented thin film was 1 order of magnitude higher than the bulk specimen, and the activation energies for the proton conductivity were 0.34 eV for the oriented thin film and 0.65 eV for the pelletized sample, respectively. This enhancement of the proton transport is attributable to the highly oriented structure on MgO(100) substrate. This result proposes great potential for a new strategy to produce a highly proton-conductive material using the concept of an oriented thin film structure without strong acid groups.

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  • Design and Evaluation of Microheater Combined QCM Array for Thermal Desorption Spectroscopy Reviewed

    Jumpei Sakai, Naoyuki Iida, Masayuki Sohgawa, Takashi Abe

    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013 & Eurosensors XXVII)   234 - 237   2013.6

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    In this paper, we propose a single microheater combined quartz crystal microbalance array for thermal desorption spectroscopy. The each QCM has two electrodes for exciting thickness shear mode (TSM) vibrations on one side of the crystal and a double-spiral-shape heater on the other side. The resonance frequency is stable when a voltage was applied on the microheater. Carbon microparticles for gas adsorption were coated on one of the QCMs and the frequency change during temperature increase was extracted by subtracting the change of the other QCM. The proposed QCM array can monitor small mass changes at sub-ng level as a function of temperature.

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  • A fabrication method of high-Q quartz crystal resonator using double-layered etching mask for DRIE Reviewed

    Takashi Abe, Yousuke Itasaka

    SENSORS AND ACTUATORS A-PHYSICAL   188   503 - 506   2012.12

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    This paper reports a fabrication method of high-Q, quartz-crystal resonator having deep etched structures with precisely modulated surface shape. The method to realize the structures bases on the use of multi-layered mask having different etch selectivity to quartz during deep reactive ion etching (DRIE) process. Here, hard mask (nickel) and soft mask (photoresist) was used for deep etching and modulating etched surface shape, respectively. Because of the large difference in the etch selectivity between quartz/hard-mask (&gt;30) and quartz/soft-mask (0.3-2), the limited range size of modulating shapes in the vertical direction was improved. Inverted-mesa quartz resonators combined with a spherical shape are demonstrated using the proposed method showing the improvement of the device performance. (C) 2012 Elsevier B.V. All rights reserved.

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  • 液体分析用デュアル水晶センサの開発 Reviewed

    武石大一, 江村恵渡, 安部隆

    電気学会論文誌E   132 ( 7 )   174 - 177   2012.7

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  • A Multichannel Chemical Sensing Method Using Single Quartz Resonator and Micro Flow Channel Reviewed

    Shinjiro Toyama, Takashi Abe

    2012 IEEE SENSORS PROCEEDINGS   1057 - 1060   2012

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    In this paper, the development of multi chemical sensing method using a single quartz resonator and micro flow channel has been reeported. In the developed device, samples pass through two capacitors mounted as sensing parts in a microchannnel with a time lag. Connecting the capacitors to thee single quartz resonator, one can obtain frequency change Delta F of the resonator as time lag signals depending on the relative permittivity of samples. Using the proposed method, we can realize multi chemical sensing with a single resonator.

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  • A methanol concentration sensor using a quartz resonator connected in series to interdigital capacitor Reviewed

    Shunpei Ishii, Keito Emura, Takashi Abe

    Proceedings of IEEE Sensors   133 ( 3 )   96 - 97   2012

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    This paper reports the development of monolithic methanol concentration sensor for direct methanol fuel cell (DMFC). An interdigital capacitor and a resonator are fabricated on a single quartz crystal substrate. Methanol concentration can be measured by the frequency change of the resonator because the change corresponds to the dielectric constant change of the capacitor connected in series to the resonator. The smallest diameter of resonator and size of sensor that achieve a resolution of 0.1 wt% were 1.5 mm and 2.6×10.9×0.1 mm, respectively. Because the structure and the manufacturing process are simple, we expect it will be used for various kinds of liquid sensor. © 2012 IEEE.

    DOI: 10.1109/ICSENS.2012.6411072

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  • RIE patterning technology of Zr-based metallic glass for MEMS devices fabrication Reviewed

    Yao-Chuan Tsai, Yu-Ching Lin, Takashi Abe, Masayoshi Esashi, Thomas Gessner

    Proceedings of IEEE Sensors   2012

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    In this work, metallic glass films (Zr-Cu-Al-Ni) were successfully deposited and patterned by sputter and reactive ion etching (RIE) technologies for widening micro electro mechanical system (MEMS) field. The amorphous structure of the deposited Zr-based alloy films were confirmed by X-ray Diffraction (XRD) and transmission electron microscopy (TEM). The home-made RIE equipment was used to dry etch the metallic glass films for patterning. This technique removes the atoms by ion bombardment. The different gases were selected during the RIE plasma etching process such as argon (Ar), octafluorocyclobutane (C4F8) and sulphur hexafluoride (SF6). Two kind photoresists, AZP4620 and OFPR800, were used as the etching masks for transferring the patterns to Zr-based metallic glass thin film. The etching rate and etching selectivity of photoresist and metallic glass were tested in different photoresist hard-baking conditions and different etching RF power. Besides, the condition of employing different working gases during RIE etching process was carried out and studied in this work. As a result, the metallic glass Zr-Cu-Al-Ni films were successfully structured with 20nm/min etching rate and 1:3.2 (metallic glass: photoresist) etching selectivity by using a mixture of Ar and C4F8 gases. This plasma etching technology realizes metallic glass films patterning for advanced MEMS devices fabrication. © 2012 IEEE.

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  • Development of dual quartz sensor for liquid analysis Reviewed

    Taichi Takeishi, Keito Emura, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   132 ( 7 )   174 - 177   2012

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    A dual quartz sensor has been developed which enables the analyses of physicochemical properties of liquids. In this sensor, an ACR (Antiparallel Coupled Resonator) type quartz sensor and a LFE (Lateral Field Excited) type quartz sensor were fabricated on a same plate. The ACR can measure frequency response caused by a mechanical characteristic (viscoelasticity) of liquids. The LFE can measure frequency response caused by both the mechanical characteristic and the electrical characteristics (conductivity and dielectric constant) of liquids. By subtracting the frequency shift of the LFE and the ACR, the dual quartz sensor is possible to calculate the electrical characteristics. Therefore the dual quartz sensor allowed simultaneous measurements of electrical characteristics and the mechanical characteristic of a liquid. © 2012 The Institute of Electrical Engineers of Japan.

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  • A Gaussian-shaped AT-cut quartz crystal resonator Reviewed

    Takashi Abe, Hiroki Kishi

    SENSORS AND ACTUATORS A-PHYSICAL   166 ( 2 )   173 - 176   2011.4

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    This paper reports the design and fabrication of a Gaussian-shaped AT-cut quartz crystal resonator. The thickness distribution of the resonator was designed following a Gaussian-type function. The distribution was based on the analysis of thickness shearing vibration calculated using finite element analysis for a flat-shaped resonator. The vibration analysis showed improvement of the energy trapping effect, and the vibration at the wafer edge was negligible. For the experimental verification, we attempted to fabricate a Gaussian-shaped resonator using microfabrication technologies. The resonant characteristics were substantially improved by the shaping. (C) 2010 Elsevier B.V. All rights reserved.

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  • A Monolithic QCM Array Designed for Mounting on a Flow Cell Reviewed

    Takashi Abe, Makoto Higuchi

    IEEE SENSORS JOURNAL   11 ( 1 )   86 - 90   2011.1

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    A monolithic quartz crystal microbalance (QCM) array fabricated with the excitation electrodes located on the airside and the gold conductive layer on the sensing side was evaluated as a biosensor array in a simple flow cell. The electrode configuration of the new QCM is suitable for sensor applications in flow-cell systems compared with standard QCM because the mounting of the QCM on the flow cell and the electric interconnection between the excitation electrode and oscillation circuit does not require considerable skill and effort. Frequency response to the adsorption of human IgG to anti-human IgG antibody at the concentrations of 0.1-100 mu g/ml was successfully measured, and the results showed that this new sensor can be an alternative to the standard QCM. In addition, the affinity difference between the reference QCM coated with bovine serum albumin for reducing nonspecific binding and the antibody-immobilized QCM to anti-human IgG antibody was simultaneously measured by using the monolithic QCM array within the flow cell. The monolithic QCM array designed for mounting on a flow cell will be expected to use for studying a surface science in a microchannel.

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  • Deep reactive ion etching of lithium niobate by using low-frequency bias Reviewed

    Toyohisa Asaji, Hirofumi Nabesawa, Hidefumi Uchiyama, Takashi Abe

    Journal of the Vacuum Society of Japan   53 ( 8 )   501 - 503   2010

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    Lithium niobate (LN) etching has been demonstrated with an electron cyclotron resonance (ECR) plasma and low-frequency bias. The etching was studied by using Ar, BCl3 and SF6 gases. The etch rates of BCl3 and SF6 are about 3.8 and 4.6 times higher than that of Ar, respectively. The highest etch rate (220 nm/min) was obtained under the condition of SF6 plasma and 1 MHz bias. The etching method which can fabricate micro-trenches with high-aspect ratio and smooth surfaces has been achieved.

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  • Real-time measurement of photocatalytic reactions using a monolithic QCM array Invited Reviewed

    Takashi Abe, Hiroshi Kato

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   19 ( 9 )   094019   2009.9

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    This paper reports a real-time measurement of photocatalytic reactions by using a miniaturized quartz-crystal microbalance (QCM) array. The QCM was miniaturized and integrated on the same quartz plate using microfabrication techniques. Two QCMs were located close to each other, with one of the QCMs used as a reference sensor for the accurate and independent determination of mass change effects and environmental change effects. The QCM output was compensated for frequency shifts induced by ultra violet (UV) irradiation by subtracting the frequency shift of the reference sensor. The minimum detectable frequency shift under the irradiation was within 1 Hz. The measured photodecomposition speed of methylene blue dye on a TiO(2)-coated QCM agreed well with that evaluated by the standard optical testing method under dry condition. The developed method enabled us to measure the photodecomposition of a surfactant on a TiO(2)-coated QCM with sub-nanogram mass resolution in real time.

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  • Integration of QCMs for studying surface science within a microfluidic channel Reviewed

    Yousuke Itasaka, Matsuhiko Nishizawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   129 ( 12 )   2 - 443   2009

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    This paper reports integration of quartz-crystal microbalance (QCM) sensors on a monolithic quartz crystal plate without using microfabrication. The QCM sensor used for this study is specially developed for sensing within a microfluidic channel. In this study, the distance between QCMs was optimized by monitoring frequency change caused by a mass load onto a neighboring QCM. It was found that circular shape QCM is suitable for the integration. The optimized QCM array was used for monitoring an etching of a gold electrode of the QCM by electrochemically generated oxidant. The measured phenomenon is practically useful for the cleaning of an integrated sensor within a packaged microfluidic channel. © 2009 The Institute of Electrical Engineers of Japan.

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  • Microfluidic biofuel cells: Series-connection with superhydrophobic air valves Reviewed

    M. Togo, K. Morimoto, T. Abe, H. Kaji, M. Nishizawa

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems   2102 - 2105   2009

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    We report the construction of microfluidic biofuel cells connected in series by semiautomatic air valves, in which a lotus leaf-like superhydrophobic structure (a micropillar array) traps air and ionically isolates each biofuel cell aligned within the channel. The micropillar array was prepared by conventional photolithography and reactive ion etching (RIE) techniques, and the structural parameters of the micropillars (size and spacing) were optimized as to obtain the highest degree of hydrophobicity. The open-circuit voltage measured at the ends of three aligned biofuel cells was three times larger than that of a single cell using the semiautomatic air valve system. ©2009 IEEE.

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    Other Link: http://orcid.org/0000-0003-2566-4172

  • Polymer surface morphology control by reactive ion etching for microfluidic devices Reviewed

    Hirofumi Nabesawa, Takeshi Hitobo, Suguru Wakabayashi, Toyohisa Asaji, Takashi Abe, Minoru Seki

    SENSORS AND ACTUATORS B-CHEMICAL   132 ( 2 )   637 - 643   2008.6

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    This paper presents the novel method to control polymer surface morphology using reactive ion etching (RIE) technique and its application to microfluidic devices. By using this method, polymer surface morphology could be controlled in the wide range between smooth surface and grassy surface with a newly developed electron cyclotron resonance (ECR)-RIE system. It was found that the polymer surface morphology is closely related to metal micromask concentration on the surface. Our system could easily control the micromask concentration only by changing the total pressure in the chamber. The etching characteristics of 75 mol% O-2-CF4 gas mixture were systematically investigated as a function of total pressure. The smoothest surface with the arithmetic mean roughness value (R-a) less than 10 nm was achieved at 0.1 Pa. On the other hand, the grassy surface with high aspect ratio of 80 was uniformly formed on the polymer surface under the higher-pressure range from 1.0 Pa to 1.5 Pa. Furthermore, the proposed method was applied to microfluidic channels with multiple pillars, and a hybrid structure with smooth and grassy surfaces. (C) 2008 Elsevier B.V. All rights reserved.

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  • New surface forces apparatus using two-beam interferometry Reviewed

    Hiroshi Kawai, Hiroshi Sakuma, Masashi Mizukami, Takashi Abe, Yasuhiro Fukao, Haruo Tajima, Kazue Kurihara

    Review of Scientific Instruments   79 ( 4 )   2008

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    We designed a new surface forces apparatus for measuring the interactions between two nontransparent substrates and/or in nontransparent liquids. The small displacement of a surface, the bottom one in this study, was measured by the two-beam (twin path) interferometry technique using the phase difference between the laser light reflected by the fixed mirror and that by the mirror on the back of the bottom surface unit. It is possible to determine the distance with a resolution of 1 nm in the working range of 5 μm. This apparatus was successfully applied to measure the forces between mica surfaces in pure water and aqueous KBr solutions. © 2008 American Institute of Physics.

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  • A porous membrane-based culture substrate for localized in situ electroporation of adherent mammalian cells Reviewed

    Takeshi Ishibashi, Kimiyasu Takoh, Hirokazu Kaji, Takashi Abe, Matsuhiko Nishizawa

    SENSORS AND ACTUATORS B-CHEMICAL   128 ( 1 )   5 - 11   2007.12

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    We report herein the invention of and proof of function for a porous membrane-based electroporation device that can deliver molecules into spatially restricted and predefined areas of a cell monolayer. The device's cell culture substrate is a microporous alumina membrane (pore size 0.02 mu m), with an underlying thin poly-(dimethylsiloxane) (PDMS) film that has one or more holes with diameters in the one-tenth millimeter range. When a transient electric field is generated between the device's two planar electrodes - one of which is placed above the cells and the other below the PDMS layer - the filed condenses only in the volume defined by hole in the PDMS film and therefore localized electroporation can occur. We demonstrate that Lucifer Yellow (LY) and plasmid DNA are selectively introduced into only those HeLa cells located above the holes. Using the device containing a PDMS film with multiple holes, a patterned array of LY-stained cells was resulted. Compared with the operation of and the results obtained from a conventional cuvette electroporation device, our device greatly decreases the necessary operating voltage, can be used with cells attached to a substrate, and increases the number of conditions that can be screened in a single experiment. Finally, since a PDMS film with different sized holes, produces different localized electric field strengths, it is possible to determine the optimum electroporetic conditions in a single experiment. (c) 2007 Elsevier B.V. All rights reserved.

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  • Design and evaluation of an antiparallel coupled resonator for chemical sensor applications Reviewed

    Takashi Abe, Hiroshi Kato

    ANALYTICAL CHEMISTRY   79 ( 17 )   6804 - 6806   2007.9

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    In this paper, a new type of quartz crystal resonator in which the electrodes are located on (me side has been developed for chemical sensing. The resonator has two electrodes for exciting thickness shear mode (TSM) vibrations on one side of the crystal and a conductive layer on the other side. These electrodes are capacitively coupled with the electric fields in opposite directions, forming an antiparallel coupled resonator (ACR). The resonant characteristics of the ACR were evaluated as a function of gap width between the two electrodes used to excite the TSM. The conductance value was observed to increase with decreasing gap width. We also discovered that the gap should be parallel with the crystallographic x-axis to obtain the highest sensitivity. The frequency response to a viscous loading was almost same as that of a standard quartz crystal microbalance (QCM). The ACR sensor is an attractive alternative to a QCM chemical sensor because it can be easily integrated into packaging and film coatings.

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  • Dual-channel quartz-crystal microbalance for sensing under UV radiation Reviewed

    Takashi Abe, Xinghua Li

    IEEE SENSORS JOURNAL   7 ( 3-4 )   321 - 322   2007.3

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    In situ measurements of interfacial phenomena with subatomic resolution under environmental disturbances have been a major goal of engineers and scientists engaged in the development of a microbalance sensor. Here, we demonstrate in situ measurements of the photooxidization process of alkanethiol self-assembled monolayers using dual-channel quartz-crystal microbalance (D-QCM) sensor that uses spherically contoured resonators to acoustically separate sensing channels for simultaneous compensation of environmental disturbances. Using a photolithographic method to make the D-QCM, the reference channel used in parallel with the sensing channel has almost the same resonant frequency and temperature coefficient of frequency. As a result, mass changes of 10-pg order accuracy were observed under ultraviolet radiation over four days.

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  • Electrodeposition of anchored polypyrrole film on microelectrodes and stimulation of cultured cardiac myocytes Reviewed

    Matsuhiko Nishizawa, Hyuma Nozaki, Hirokazu Kaji, Takahiro Kitazume, Noriyuki Kobayashi, Takeshi Ishibashi, Takashi Abe

    BIOMATERIALS   28 ( 8 )   1480 - 1485   2007.3

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    The electrically conducting polymer polypyrrole (PPy) was electrochemically deposited onto Pt microelectrodes on a polyimide (PI) substrate. Pre-modification of the PI surface with a self-assembled monolayer of octadecyltrichlorosilane-induced anisotropic lateral growth of PPy along the P1 surface and enhanced adhesive strength of the PPy film. The lateral growth of PPy film around the electrode anchored the whole film to the substrate. External stimulation of cultured cardiac myocytes was carried out using the PPy-coated microelectrode. The myocytes on the microelectrode substrate were electrically conjugated to form a sheet, and showed synchronized beating upon stimulation. The threshold charge for effective stimulation of a 0.8cm(2) sheet of myocytes was around 0.2 mu C, roughly corresponding to a membrane depolarization of 250 mV. (c) 2006 Elsevier Ltd. All rights reserved.

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  • Improved wettability of a fluoropolymer from a simple combination of surface modifications using a plasma and surfactant Reviewed

    Takashi Abe, Masahiro Matsumoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   46 ( 1 )   367 - 369   2007.1

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    Wettability control and bonding of fluoropolymers are important in the microfabrication of microfluidic devices. Here, we demonstrate a process that combines a unique plasma surface modification with surfactant. We employed a tetrafluoro-ethylene-hexafluoropropylene copolymer (PFA) plate dipped into a surfactant solution and briefly exposed to oxygen plasma. We discovered that the contact angle of water on a PFA plate depends on volatility of the surfactant. With this treatment, direct bonding between the PFA plates occurred under low temperature conditions. Finally, we demonstrated the micropatterning of the plate with a shadow mask.

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  • Generation of patterned cell co-cultures inside tubular structure using electrochemical biolithography and electrostatic assembly Reviewed

    Hirokazu Kaji, Soichiro Sekine, Takashi Abe, Matsuhiko Nishizawa

    2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS   187 - 192   2007

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    We report a method for producing patterned cell co-cultures inside silicone tubing. A platinum needle microelectrode was inserted through the wall of the tubing and an oxidizing agent electrochemically generated at the inserted electrode. This agent caused local detachment of the anti-biofouling heparin layer from the inner surface of the tubing. The cell-adhesive protein fibronectin selectively adsorbed onto the newly exposed surface, making it possible to initiate a localized cell culture. The electrode could be readily set in place without breaking the tubular structure and, importantly, almost no culture solution leaked from the electrode insertion site after the electrode was removed. Ionic adsorption of poly-L-lysine at the tubular region retaining a heparin coating was used to switch the heparin surface from cell-repellent to cell-adhesive, thereby facilitating the adhesion of a second cell type. The combination of the electrode-based technique with electrostatic deposition enabled the formation of patterned co-cultures within the semi-closed tubular structure. The controlled co-cultures inside the elastic tubing should be of value for cell-cell interaction studies following application of chemical or mechanical stimuli and for tissue engineering-based bioreactors. ©2007 IEEE.

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  • Polymer surface morphology control for microfluidic devices Reviewed

    H. Nabesawa, T. Hitobo, S. Wakabayashi, T. Asaji, T. Abe, I. Nakatani, M. Seki

    TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems   199 - 202   2007

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    This paper presents the novel method to control polymer surface morphology using Reactive Ion Etching (RIE) technique and its application to microfluidic devices. This method controls surface morphology in wide range between smooth surface and grassy surface by a newly developed Electron Cyclotron Resonance (ECR)-RIE system. The etching characteristics of 75mol%O2-CF 4 gas mixture were systematically investigated as a function of pressure. The smoothest surface with the roughness (Ra) less than 10 nm was achieved at 0.1 Pa. On the other hand, the grassy surface with high aspect ratio of 80 was uniformly formed in the higher-pressure range from 1.0 Pa to 1.5 Pa. Furthermore, the proposed method was applied to microfluidic channels with multiple pillars, and a hybrid structure with smooth and grassy surfaces. ©2007 IEEE.

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  • Inverted mesa-type quartz crystal resonators fabricated by deep-reactive ion etching Reviewed

    Takashi Abe, Vu Ngoc Hung, Masayoshi Esashi

    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL   53 ( 7 )   1234 - 1236   2006.7

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    In this letter, we present experimental data showing Q change versus thickness for a quartz-crystal resonator fabricated with deep-reactive ion etching. Measurements show that Q increases as etch depth increases, and further that Q can be optimized as a function of etch depth and diameter of the resonator.

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  • Miniaturization of spherically contoured rectangular AT-cut quartz-crystal resonators by using reactive ion etching Reviewed

    T Abe, H Shimamoto, XH Li

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 6A )   5283 - 5285   2006.6

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    This paper describes resonant characteristics of spherically contoured AT-cut quartz-crystal resonators, and a novel fabrication process. The fabrication process is based on a photolithographic process suitable for the mass production. Further, the time required to finish quartz blanks into the spherically contoured shape is dramatically less than for conventional methods. Our measurements show that Q of the spherically contoured resonators fabricated with our method are an order of magnitude higher than those resonators without the spherical shape.

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  • Electrochemical approach to pattern cells within three-dimensional microstructures Reviewed

    Matsuhiko Nishizawa, Takashi Abe, Hirokazu Kaji

    2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE   242 - +   2006

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    The ability to control of the behavior of living cells in vitro is critical in fundamental cell biology as well as applied biotechnology including tissue engineering and cell-based chip devices. Patterning cells on surfaces is one of the most important approaches to modulate cell behaviors and functions in culture. Here, we describe ongoing work on the newly developed surface patterning technique, "electrochemical bio-lithography", with a focus on the following two subjects: 1) patterning cells within preassembled microfluidic devices and 2) dynamic control of cellular motility.

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  • An electrochemical microsystem for manipulating living cells Reviewed

    Hirokazu Kaji, Masahiko Hashimoto, Takeaki Kawashima, Takashi Abe, Matsuhiko Nishizawa

    FUTURE MEDICAL ENGINEERING BASED ON BIONANOTECHNOLOGY, PROCEEDINGS   3 - +   2006

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    The ability to control the behavior of living cells in vitro is critical in a wide range of research fields including fundamental cell biology, tissue engineering, and cell-based chip devices. Patterning cells on substrate surfaces is one of the most important approaches to modulate cellular behaviors and functions in culture. Here, we describe a cell patterning technique based on an electrochemical method, "electrochemical biolithography", which enables the localized immobilization of living cells under typical physiological conditions such as those found in culture media. The present technique is applicable even for a previously cell-patterned substrate and for a grooved substrate, opening new possibilities for the cell-based studies. Also, the integration of this electrochemical technique into a microfluidic device will provide a novel type of cell-chip which enables on-demand immobilization of cells just prior to the use of the device.

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  • Deep reactive ion etching of lithium niobate by using low-frequency bias

    Toyohisa Asaji, Hirofumi Nabesawa, Motoichi Kanazawa, Takashi Abe, Shigeyuki Ishii, Junji Saito, Yushi Kato

    Proceeding of 8th International Symposium on Sputtering & Plasma Processes   307 - 309   2005.6

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  • Surface micromachined AlN thin film 2 GHz resonator for CMOS integration Reviewed

    M Hara, J Kuypers, T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   117 ( 2 )   211 - 216   2005.1

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    This paper describes the development of the aluminum nitride (AIN) thin film bulk acoustic resonator (FBAR) using noble MEMS techniques for CMOS integration. An air-gap was fabricated under the resonator for acoustic isolation. Germanium (Ge) was used as a sacrificial layer to make the air-gap. This technique gives high CMOS compatibility. The resonator achieved a Q factor of 780 and an effective electro-mechanical coupling constant (k(eff)(2)) of 5.36% at a resonant frequency of 2 GHz. (C) 2004 Elsevier B.V. All rights reserved.

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  • A miniaturized and convex-shaped quartz-crystal resonator for multiple chemical sensing in liquid Reviewed

    L Li, M Esashi, T Abe

    Micro Total Analysis Systems 2004, Vol 2   ( 297 )   37 - 39   2005

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    A microfabricated bi-convex quartz-crystal microbalance (QCM) with large-radius spherical thickness distribution was realised by reactive ion etching (RIE) and photoresist reflow with solvent vapor. Due to the spherical thickness distribution, the spurious mode was suppressed very well and the resonator has high Q-factor (c.a. 80000). The vibration energy was trapped around the electrode within 5 wafer thicknesses. This value is three times shorter than that of planer QCM. Thus high-density integration and higher productivity per a wafer were realised without any unwanted influence on the Q-factor. The fabricated sensor also has superior resonant characteristic under the viscoelastic liquid.

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  • Elcrochemical bio-lithography for in-situ immobilization of proteins and cells within microchannels Reviewed

    Matsuhiko Nishizawa, Hirokazu Kaji, Kazuto Tsukidate, Masahiko Hashimoto, Takashi Abe

    Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05   1   151 - 154   2005

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    The use of microfluidic system is a recent trend in diagnostic assays and bioreactors based on the protein and cellular engineering. Most of microfluidic biodevices would require the combination with a technique to pattern proteins and living cells within microchannels just prior to the use of the devices, since these bio-elements are delicate against desiccation, oxidation and heat. Here, we present a simple, electrochemical method to locally immobilize proteins and cells on substrate surface, easily applicable to the microfluidic system. The integration of the technique into a microfluidic device and the on-demand immobilization of proteins and cells were achieved. The sandwich immunoassay within the microchannel was demonstrated, in which a series of protocols from immobilization to measurement can be carried out under physiochemical conditions. © 2005 IEEE.

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  • Microfabricated spherical bi-convex quartz crystal microbalance array Reviewed

    L Li, T Abe, M Esashi

    MEMS 2005 Miami: Technical Digest   327 - 330   2005

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    A miniaturized spherical bi-convex quartz crystal microbalance (QCM) array was fabricated by reactive ion etching (RIE) and photoresist reflow with solvent vapor technology. The spherical convex shape is necessary to suppress a spurious mode and obtain a high Q factor. Not only can the large-radius spherical convex shape be achieved by this technology, but also miniaturization and batch fabrication. The Q factor of the fabricated QCM (80000) is two times higher than that of the planar QCM, and the spurious mode around the fundamental vibration mode is suppressed very well. It also has superior resonant characteristic under the viscoelastic liquid.

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  • Fabrication of miniaturized bi-convex quartz crystal microbalance using reactive ion etching and melting photoresist Reviewed

    L Li, T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   114 ( 2-3 )   496 - 500   2004.9

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    In this paper, miniaturized bi-convex quartz crystal microbalance (QCM) has been fabricated using reactive ion etching (RIE) and melting photoresist technology. Due to the convexity of the resonator surface and the small size of the excitation electrode, the energy of the oscillation is trapped at the center so that very little dissipation occurs at the edge. The fabricated bi-convex. QCM has superior resonant characteristics compared. with a QCM without the bi-convex formation. For example, the QCM with a high-quality value (76 000) was realized for a 1 mm-diameter electrode QCM with 1.6 mum-deep and 2 mm-diameter convex formation on both sides. A spurious mode around a fundamental vibration mode became very small or nearly negligible. This technology is useful from the viewpoint of mass production because it does not require polishing. The manufactured bi-convex QCM can be used for sensing liquid properties. (C) 2004 Elsevier B.V. All rights reserved.

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  • A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution Reviewed

    L Li, M Esashi, T Abe

    APPLIED PHYSICS LETTERS   85 ( 13 )   2652 - 2654   2004.9

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    A miniaturized biconvex quartz-crystal microbalance (QCM) with large-radius spherical thickness distribution was fabricated by reactive ion etching (RIE) and photoresist reflow with solvent vapor technology. A conventional polishing method could not manufacture the miniaturized, spherically convex shape, which is necessary to suppress a spurious mode and obtain a high Q factor. Not only can the large-radius spherical convex shape be achieved by this technology, but also miniaturization and batch fabrication. The Q factor of the fabricated QCM (80 000) is two times higher than that of the planar QCM, and the spurious mode around the fundamental vibration mode is suppressed very well. It also has superior resonant characteristic under the viscoelastic liquid. (C) American Institute of Physics.

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  • Trench filling characteristics of low stress TEOS/ozone oxide deposited by PECVD and SACVD Reviewed

    C Chang, T Abe, M Esashi

    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS   10 ( 2 )   97 - 102   2004.1

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    In this paper low stress silicon oxide was deposited with tetraethylorthosilicate (TEOS, Si(OC2H5)(4))/ozone by plasma enhanced chemical vapor deposition (PECVD) and sub-atmospheric chemical vapor deposition (SACVD) for deep trench filling. Two kinds of PECVD oxide were fabricated: Coil antenna inductively coupled plasma (ICP) oxide and parallel plates capacitive coupled plasma (CCP) oxide. Adding ozone into the deposition process enhances the trench filling capability. Oxide filling in a deep trench (5 mum wide, 52 mum deep) was carried out using the SACVD process, which gave excellent conformal step coverage. However, the coil antenna ICP oxide was suitable as a sealing material. The effects of argon ion sputtering and magnetic field in the PECVD for the trench filling are discussed in this paper. Because the low temperature processes of PECVD and SACVD, the thermal residual stress was reduced and a low stress film of 85 MPa compression is available.

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  • High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE Reviewed

    VN Hung, T Abe, PN Minh, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   108 ( 1-3 )   91 - 96   2003.11

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    In this work, high-frequency one-chip multichannel quartz crystal microbalance (QCM) prepared by deep reactive ion etching (RIE) is presented. The quartz resonators in one-chip with the diameter in the range 0.05-1.0 mm and thickness in the range 18-82 mum were fabricated. The conductance measurements have shown that Q-factor of the resonators increases with decreasing quartz resonator thickness and reaches the value of about 30,000 for the 94 MHz quartz resonator. By decreasing the thickness, very small resonator with 100 mum diameter can be performed with Q-factor of 5700. The separation of spurious modes from fundamental mode is improved by reducing the diameters of the quartz resonators. The influence of the loading glycerol/water mixtures into the electrical properties of the sensor was conducted. (C) 2003 Published by Elsevier B.V.

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  • Smooth surface glass etching by deep reactive ion etching with SF6 and Xe gases Reviewed

    L Li, T Abe, M Esashi

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   21 ( 6 )   2545 - 2549   2003.11

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    This article reports on a smooth surface glass etching using deep reactive ion etching with a mixture of sulfur hexafluoride (SF6) and xenon (Xe) gases. A surface roughness of 23 Angstrom was achieved with SF6/Xe(= 1/1) and 18 Angstrom with SF6/Ar(= 1/4) tinder a condition of -390 V self-bias voltage and 0.2 Pa pressure. The surface roughness in the order of several. angstroms (5.9 Angstrom) was obtained at a pressure of 0.1 Pa (SF6 /Xe= 1/1). The average surface roughness (R-a) after the etching by SF6/Xe gas was smaller than those after the etching with SF6 only or SF6/Ar at a same mole fraction of the inert gas to SF6+inert gas. Since heavy inert gas increases the physical sputtering effect, the addition of the heavy inert gas helps to remove contaminant residues remaining on the etched surface. The optimum condition of smooth glass etching With high etch selectivity (21) is a pressure of 0.2 Pa and a mole fraction of Xe to SF6 gas is 8 to 7. We also make an analysis of the relationship between the surface average roughness on the bottom and the etched depth. The average roughness of the etched surface was smooth not only for the bottom but also for the sidewalls. The average surface roughness of the sidewalls was about 16 nm for 50-mum-deep etching under the same optimum condition. This technology was applied to a deep etching of quartz crystal used for a mass sensor. (C) 2003 American Vacuum Society.

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  • Endpoint detectable plating through femtosecond laser drilled glass wafers for electrical interconnections Reviewed

    T Abe, XH Li, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   108 ( 1-3 )   234 - 238   2003.11

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    An endpoint detectable plating process to avoid over-electroplating was proposed and performed in this work. The technology was developed for fabrication of Pyrex glass wafer with electrical feed-throughs. Thin film of gold was deposited on the glass wafer prior to the femtosecond laser drilling. When the growing metal in the through-holes was contacted to the metal, a resistance between the opposite two electrodes decreases suddenly. Thus, the endpoint detection was realized by in situ monitoring of applied voltage at constant current mode. After the endpoint detection, periodic reverse plating was applied to fill the through-holes uniformly. Finally, uniform copper deposition in the through-holes up to 12 aspect ratios was realized by this method. This technology was also applicable to the fabrication of microstructure based on electroforming. (C) 2003 Elsevier B.V. All rights reserved.

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  • Highly selective reactive-ion etching using CO/NH3/Xe gases for microstructuring of Au, Pt, Cu, and 20% Fe-Ni Reviewed

    T Abe, YG Hong, M Esashi

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   21 ( 5 )   2159 - 2162   2003.9

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    dA highly selective dry-etch process for conductive metals (Au, Pt, and Cu) and magnetic metal (20% Fe-Ni) has been developed using a magnetron reactive-ion-etching system employing a CO/NH3/Xe chemistry. Etch selectivities of these metals to titanium are greater than 80: 1 for Au, 40: 1 for Pt, 30: 1 for Cu, and 15: 1 for permalloy (20% Fe-Ni) at the titanium-etch rate of 1.0 nm/min. The etching was conducted at room temperature. It was observed that the small addition of Xe to CO/NH3 etch gases (molar ratio= 1/7) increased the etch rate of these metals while promoting nitridation of the titanium mask and achieving enhanced selectivity. The titanium can be used both as a mask for the sputter etching of noble metals and as a mask for the reactive-ion etching of magnetic metals in the plasma. By about a factor of 3, the inclusion of Xe enhanced the etch selectivities for noble metals, copper, and a magnetic metal over titanium. (C) 2003 American Vacuum Society.

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  • MEMS based thin film 2 GHz resonator for CMOS integration Reviewed

    M. Hara, J. Kuypers, T. Abe, M. Esashi

    IEEE MTT-S International Microwave Symposium, 2003   2003.8

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    DOI: 10.1109/MWSYM.2003.1210489

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  • Aluminum nitride based thin film bulk acoustic resonator using germanium sacrificial layer etching Reviewed

    M. Hara, J. Kuypers, T. Abe, M. Esashi

    TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems   2003.6

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    DOI: 10.1109/SENSOR.2003.1217131

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  • Endpoint detectable plating through femto-laser drilled glass wafers for three-dimentional electric interconnections Reviewed

    XH Li, T Abe, M Esashi

    MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS   638 - 641   2003

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    An endpoint detectable plating process to avoid over-electroplating was proposed and performed in this work. The technology was developed for a fabrication of Pyrex glass wafer with electrical feed-throughs. Thin film of gold was deposited on the glass wafer prior to a femto-second laser drilling. When a growing metal in the through-holes was contacted to the gold, a resistance between the opposite two electrodes decreases suddenly. Thus the endpoint detection was realized by in situ monitoring of applied voltage at constant current mode. After the endpoint detection, periodic reverse plating was applied to fill the through-holes uniformly. Finally, uniform copper deposition in the through-holes up to 12 aspect ratios was realized by this method.

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  • Energy dissipation in small-diameter quartz crystal microbalance experimentally studied for ultra-high sensitive gravimetry Reviewed

    T Abe, L Li, VN Hung, M Esashi

    MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS   518 - 521   2003

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    In this paper, the energy dissipation in small-diameter Quartz Crystal Microbalance (QCM) was experimentally studied for ultra-high sensitive gravimetric measurements. Newly developed deep reactive ion etching technology for smooth surface glass etching was used for the fabrication of small-diameter QCM. Minimum average surface roughness is 2.3 nm for an etching with SF6/Xe (=1/1) gases and 1.8 nm for SF6/Ar (=1/4) gases at a pressure of 0.2 Pa with a self-bias voltage of -390 V. The diameters of fabricated QCM were 0.2-1.0mm and their thickness was in the range of 6-82mum. The Q-factor of the fabricated QCM increases exponentially from 2000 to 10000 as the thickness decreases due to the decrease of supporting loss. Interestingly, the increases of Q-factor deviate from simple exponential function and show a maximum peak of the Q-factor (30000).

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  • High sensitive, miniaturized plano-convex quartz crystal microbalance fabricated by reactive ion etching and melting photoresist Reviewed

    L Li, T Abe, M Esashi

    BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2   508 - 511   2003

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    In this paper, high sensitive, miniaturized plano-convex quartz crystal microbalance (QCM) has been fabricated by reactive ion etching (RIE) and melting photoresist technology. Due to the convexity of the resonator surface and the small size of the excitation electrode, the energy of the oscillation is trapped at the center so that very little dissipation occurs at the edge. The fabricated plano-convex QCM has superior resonant characteristics compared with a QCM without the plano-convex formation. For example, the QCM with a high,quality value (60000) was realized for a 1-mm-diameter electrode QCM with 1.6-mum-deep and 2-mm-diameter convex formation on both sides. A spurious mode around a fundamental vibration mode was also suppressed less than 20% from that before the etching. This technology is useful from a. viewpoint of mass production because it needs not polishing.

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  • Glass etching assisted by femtosecond pulse modification Reviewed

    CL Chang, T Abe, M Esashi

    SENSORS AND MATERIALS   15 ( 3 )   137 - 145   2003

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    In this paper the etching of Pyrex glass assisted by femtosecond pulses is reported. The process consists of 2 steps: (1) irradiating the glass by focused pulses from a femtosecond laser, (2) etching the glass in diluted HF (hydrofluoric acid) a solution. The glass can be modified without cracking by applying a femtosecond laser with a very low intensity. The etched depth of Pyrex glass increases from 12 to 131 mum with femtosecond laser irradiation from 0 to 1170 kJ/cm(2), and etching in a 5% HF solution for 230 min. This technique provides an alter-native way of achieving a high etching rate of Pyrex glass for applications to micro-electro-mechanical systems (MEMS), and of forming suspended structures on the surface of a Pyrex glass substrate by using modified glass as a sacrificial layer.

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  • Structures and Interactions of Polyelectrolyte Brushes Studied by Surface Forces Measurement Reviewed

    Kazue Kurihara, Shujiro Hayashi, Takashi Abe, Nobuyuki Hayashi, Masazo Niwa

    IUPAC Polymer Conference (IUPAC-PC2002)   126 - 126   2002.12

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  • Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass Reviewed

    XG Li, T Abe, YX Liu, M Esashi

    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   11 ( 6 )   625 - 630   2002.12

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    This paper describes the fabrication technology for high-density electrical feed-throughs in Pyrex glass wafers. Small through holes (40-80 mum in diameter) in Pyrex glass wafers have been fabricated using deep-reactive-ion etching (DRIE) in a sulfur hexafluoride (SF6) plasma. The maximum aspect ratios obtained were between 5 and 7 for a hole pattern and 10 for a trench pattern. Through the wafer etching of a hole pattern of 50 pm diameter was carried out using 150-mum-thick Pyrex glass wafers. The electrical feed-throughs in the wafers were fabricated by filling the through-holes with electroplated nickel. We were able to successfully bond the glass wafer to silicon by anodic bonding after removing the electroplated nickel on the surface of the wafer by chemical-mechanical polishing (CMP). The electric resistance of the feed-through was estimated by a 4 point wire sensing method to be about 40 mOmega per hole. The heat cycles test shows that the resistance changes were within 3% after 100 cycles. The fabrication of high density electrical feed-throughs is one of the key processes in the field of MEMS. Probable applications of this technology are in electrical feed-throughs between logic elements and microprobe arrays for high-density data storage and for packaged devices.

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  • Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance Reviewed

    VN Hung, T Abe, PN Minh, M Esashi

    APPLIED PHYSICS LETTERS   81 ( 26 )   5069 - 5071   2002.12

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    A miniaturized highly sensitive single-chip multichannel quartz-crystal microbalance prepared by deep reactive ion etching is presented. In the present work., quartz resonators in a single-chip with the diameters in the range 0.05-1.0 mm and thicknesses in the range 18-82 mum were fabricated. The conductance measurements carried out on the resonators showed that the Q factor is inversely proportional to resonator thickness. The Q-factor value. as high as similar to30000 has been observed in case of a 94 MHz resonator whose diameter is 1 mm and the thickness 17.8 mum. The Q factor of a resonator of very small diameter (0.1 mm) reached the value 5700. (C) 2002 American Institute of Physics.

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  • Microprobe array with electrical interconnection for thermal imaging and data storage Reviewed

    Dong Weon Lee, Takahito Ono, Takashi Abe, Masayoshi Esashi

    Journal of Microelectromechanical Systems   11 ( 3 )   215 - 221   2002.6

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    In this work, new novel methods for fabricating a thermal probe array with 32 × 32 probes on one chip are proposed. It consists of silicon micromachined probe, AIN actuator, pyramidal SiO2 tip on which the nano-scale metal-metal junction is formed using a self-alignment technique. The nano-junction can be used as a thermocouple to measure a local temperature on a sample surface or as a nano-heater to make a local deformation on a media. In self-alignment process, a metal layer (Pt/Ni) is deposited on the inside of SiO2 hollow tip fabricated by low temperature (950 °C) oxidation of silicon etch pit. This low temperature oxidation results in a smaller oxide thickness at the tip apex than other flat area. Therefore, after selective etching the SiO2 in buffered HF, a small hole surrounding the Pt/Ti tip apex can be created. Another metal (Ni) is deposited outside the Pt/Ti tip to make the nano-junction. For electrical interconnection between the thermal probe and an IC chip, a hole array with 30 μm of a hole diameter is made by dry etching through the 150-μm-thick Pyrex glass, and then Ni is electroplated into the through etched-hole. Finally the Pyrex glass plate was anodically bonded to the probe array. Using the fabricated thermal probe, temperature distribution is measured on a prepared sample surface and the local heating capability of the thermal probe is confirmed. Preliminary experiments for data writing and reading are performed on a phase change medium.

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  • Polyelectrolyte brush layers studied by surface forces measurement: Dependence on pH and salt concentrations and scaling Reviewed

    S Hayashi, T Abe, N Higashi, M Niwa, K Kurihara

    LANGMUIR   18 ( 10 )   3932 - 3944   2002.5

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    Interactions between opposed brush layers of polyelectrolytes ionized poly(L-glutamic acid) (PLGA) or poly(L-tysine) (PLL) in water were directly investigated using surface forces measurement. The brush layers were prepared by the Langmuir-Blodgett deposition of amphiphiles bearing PLGA (degree of polymerization n = 21,44, and 48) or PLL (n = 41 and 52) as hydrophilic groups. The density of polyelectrolyte chains was around 0.4 chain/nm(2). Surface force profiles, consisting of a long-range electrical double layer repulsion and a short-range steric repulsion, were measured and analyzed with varying pH, salt concentration, and polyelectrolyte chain length. The surface potential obtained from the double layer repulsion indicated that nearly all of the ionized groups in the brush layers were neutralized by counterions. In the case of PLGA, the steric repulsion of the brush layer increased with increasing pH from 9 to 10, reflecting the increase in the ionization degree of the carboxylic groups, and then decreased above pH 10 due to salt effect. Similar behavior was also observed for PLL: the steric repulsion increased when the pH was changed from 4 to 3 and decreased at pH 2. In the cases of both PLGA and PLL, the steric repulsion decreased with increasing salt concentration (0.43-10 mM) at a fixed pH, which was likely due to a decrease in the osmotic pressure of the counterions. The distance at which the steric repulsion appeared (Do) corresponded to twice the length of an extended polyelectrolyte molecule. This distance Do remained practically the same under the pH and salt conditions studied for the brush of an identical polymerization degree. Twice the length of polyelectrolyte chains L-0 was defined as Do - 6 (nm), where 6 nm was twice the length of the long alkyl chains in polyelectrolyte amphiphiles, and was found to be proportional to the polymerization degree of polyelectrolyte n. The stress profiles, obtained by differentiating the force profiles, were scaled according to the distance to provide identical profiles for different polymer chain lengths. An equation describing the stress profiles was derived based on a model that attributed the steric force to the osmotic pressure of the counterions. The equation reproduced well the stress profiles of PLGA and PLL brushes, where the osmotic coefficient was a variable parameter. The osmotic coefficient was estimated to be 0.004 for both PLGA and PLL and much less than the value determined in solution (similar to0.2), indicating that the counterions bound more strongly to the polyelectrolytes in the brush layer than to isolated polyelectrolytes in solution. The advantage of characterizing polyelectrolytes by surface forces measurement was discussed.

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  • Deep reactive ion etching of silicon carbide Reviewed

    S Tanaka, K Rajanna, T Abe, M Esashi

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   19 ( 6 )   2173 - 2176   2001.11

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    In this article, we describe more than 100-mum-deep reactive ion etching (RIE) of silicon carbide (SiC) in oxygen-added sulfur hexafluoride (SF6) plasma. We used a homemade magnetically enhanced, inductively coupled plasma reactive ion etcher (ME-ICP-RIE) and electroplated nickel masks. First, 5 h etching experiments using etching gases with 0%, 5%, 100% and 20% oxygen were performed by supplying rf power of 150 and 130W to an ICP antenna and a sample stage, respectively. They demonstrated a maximum etch rate of 0.45 mum/min and residue-free etching in the case of 5% oxygen addition. Observation of the cross sections of etched samples using a scanning electron microscope confirmed a microloading effect, which is reduction of the etched depth with a decrease in the mask opening width. Next, a 7 h etching experiment using an etching gas with 5% oxygen was performed by increasing the rf power to the sample stage to 150 W. This yielded an etched depth of 216 mum. (C) 2001 American Vacuum Society.

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  • Deep reactive ion etching of Pyrex glass using SF6 plasma Reviewed

    XH Li, T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   87 ( 3 )   139 - 145   2001.1

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    Deep reactive ion etching of Pyrex glass has been characterized in sulfur hexafluoride plasma (SF6). High etch rate (similar to0.6 mum/min) was demonstrated under a condition of low pressure (0.2 Pa) and high self-bias (-390 V) by using a magnetically enhanced inductively coupled plasma reactive ion etching. Vertical etch profile (taper angle similar to 88 degrees), high aspect ratio (&gt;10) and through-wafer etching of Pyrex glass (200 mum in thickness) were achieved under the condition by using thick (20 mum) and vertical electroplated nickel film as mask. The vertical etch profile was achieved when the mask opening is narrower than 20 mum because the deposition of nonvolatile product on the sidewall is reduced. A novel etching technique "scoop-out etching" was demonstrated by using the present etching characteristics. (C) 2001 Elsevier Science B.V. All rights reserved.

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  • Ultrahydrophobic surface selectively modified by pulse electrodeposition from aqueous dispersion of PTFE particles Reviewed

    T Abe, M Esashi

    TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2   1044 - 1047   2001

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    Micro-pattern formation of PTFE nanoporous film was realized by using pulsed electrodeposition from aqueous disperision of PTFE particles. The volume fraction of PTFE in a nickel matrix was more than 50 vol.% when the pulse-on and the pulse-off time were controlled to be 10 msec and 2 msec, respectively. In this condition, the PTFE particles embedded in the matrix fused each other by annealing the film under the temperature of 300 degreesC. After removing the nickel by acid, the obtaiend PTFE film had nanopore and it brought ultrahydrophobic effect.

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  • Transition behavior of polyelectrolyte brushes depending on polymer chain density Reviewed

    S Hayashi, T Abe, N Higashi, M Niwa, K Kurihara

    MOLECULAR CRYSTALS AND LIQUID CRYSTALS   371   349 - 354   2001

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    Brush layers of polyelectrolytes, ionized poly(L-lysine) (PLL) or poly(L-glutamic acid) (PLGA), at desired densities were prepared by the Langmuir-Blodgett (LB) deposition of amphiphiles bearing PLL or PLGA segments as hydrophilic groups, and subjected to the surface force measurements. Abrupt changes in the surface force, the surface potential, and the transfer ratio of the brush layers were observed at a critical density. The present data is in good agreement with our previous report on the jump in the compressibility of the brushes, and supports the existence of the density dependent transition of polyelectrolytes in solutions.

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  • High density electrical feedthrough fabricated by deep reactive ion etching of Pyrex glass Reviewed

    XH Li, T Abe, YX Liu, M Esashi

    14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST   98 - 101   2001

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    This paper reports a new fabrication technology of Pyrex glass with a fine pitch electrical feedthrough. Small through holes (40-60 mum in diameter) in Pyrex glass plate have been fabricated using deep reactive ion etching in sulfer hexafluoride (SF6) plasma. By filling the through holes with electroplated metal, the fine pitch electrical feedthrough in Pyrex glass plate becomes enable technology. Pyrex glass can be anodically bonded with silicon. Thus, our technology will be widely used for high density electrical feedthrough to the backside of a plate. The applications of the technology to micro probe array used for high density data storage and packaged devices are expected.

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  • Charge regulation in polyelectrolyte brushes studied by FTIR spectroscopy Reviewed

    T Abe, S Hayashi, N Higashi, M Niwa, K Kurihara

    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS   169 ( 1-3 )   351 - 356   2000.9

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    Brush layers of a polyelectrolyte, ionized poly(glutamic acid) (polymerization degree n = 48), were studied using FTIR spectroscopy as a function of the polyelectrolyte chain density. The Langmuir-Blodgett (LB) deposition of the mixed monolayers of a poly (glutamic acid) functionalized amphiphile and dioctadecylphospholic acid afforded the preparation of polyelectrolyte brushes at the desired density on various substrates. FTIR spectroscopy on the LB films demonstrated that the ionization degree of the carboxylic acid groups decreased with increasing polyelectrolyte density in order to maintain the charge density below the critical value of 0.8 similar to 1 charge nm(-3). The average distance between the charges at the maximum density was ca. 1.1 +/- 0.1 nm which is close to twice the Bjerrum length, the distance at which the Coulomb interaction between elementary charges is equal to the thermal energy. (C) 2000 Elsevier Science B.V. All rights reserved.

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  • One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE Reviewed

    T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   82 ( 1-3 )   139 - 143   2000.5

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    In this paper, we present a one-chip multichannel quartz crystal microbalance (QCM) sensor fabricated by deep reactive ion etching (Deep RIE). An inductively coupled plasma reactive ion etching (ICP RIE) using SF, gas has been applied to the Deep RTE of quartz. High etch rate (similar to 0.5 mu m/min) and mirror surface (roughness, similar to 2 nm) were achieved at the conditions of low process pressure (2 mTorr) and high self-bias voltage (- 340 V). The multichannel QCM sensor, which has different resonance frequencies, was formed by fabricating diaphragms of different thicknesses on a single crystal of quartz plate. The resonance frequencies ranged from 21.7 to 20.75 MHz. The Q factors of each peak were approximately 2000 in air and the resolution for mass change was +/-1 ng on 2-mm-diameter electrode. We have successfully shown that the sensor with different coating films can be applied to chemometric odor sensor. (C) 2000 Elsevier Science S.A. All rights reserved.

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  • Density-dependent jump in compressibility of polyelectrolyte brush layers revealed by surface forces measurement Reviewed

    T Abe, N Higashi, M Niwa, K Kurihara

    LANGMUIR   15 ( 22 )   7725 - 7731   1999.10

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:AMER CHEMICAL SOC  

    Interactions between apposed brush layers of polyelectrolytes ionized poly(L-glutamic acid) (polymerization degree n = 21, 44, 48) were investigated in water at pH 10 by the direct surface forces measurement. Brush layers were prepared by the Langmuir-Blodgett (LB) deposition of amphiphiles bearing a poly(L-glutamic acid) chain and two octadecyl groups. The obtained surface force and stress profiles consisted of a long-range electrostatic repulsion and a short-range steric repulsion. The distance where the steric repulsion appeared was in good agreement with twice the length of the polyelectrolyte chains in the extended form. The stress profiles of the polyelectrolyte brushes at n = 21, 44, and 48 produced the identical curve when the distance was scaled by the length corresponding to twice the thickness of an undeformed polyelectrolyte layer. Interactions between the layers of a poly(L-glutamic acid) (n = 48) were also studied as a function of the polyelectrolyte chain density in the brush layers. The density was varied by mixing the poly(L-glutamic acid) amphiphile with dioctadecylphosphoric acid. The sudden increase in the short-range repulsion attributed to the steric component was found at the critical density of 0.20 +/- 0.07 chain/nm(2) with decreasing chain density in the brush layers, indicating the existence of the transition in the interaction mode of polyelectrolytes. The steric repulsion was quantitatively analyzed to provide the elastic compressibility modulus of the polyelectrolyte brushes. The obtained modulus of 0.6 +/- 0.1 pN/chain was in the high-density region, and 4.4 +/- 0.7 pN/chain was in the low-density region. The transition in the counterion binding to polyelectrolytes may account for the density-dependent change in the interactions of the polyelectrolyte chains.

    DOI: 10.1021/la990240w

    Web of Science

    J-GLOBAL

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  • Interactions between Poly (L-lysine) Brush Layers Studied by Surface forces Measurement Invited Reviewed

    K. Kurihara, T. Abe, N. Higashi, M. Niwa

    Proceeding of Yamada Conference L Polyelectrolytes   7725 - 7731   1999.10

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  • Transition in Interactions between Polyelectrolyte Brush Layers as Revealed by Surface Forces Measurements Reviewed

    Kazue Kurihara, Takashi Abe, Nobuyuki Higashi, Masazo Niwa

    Proceedings of Yamada Conference L Polyelectrolytes   443 - 446   1999.4

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  • Direct demonstration of attraction for a complementary pair of apposed nucleic acid base monolayers Reviewed

    K Kurihara, T Abe, N Nakashima

    LANGMUIR   12 ( 17 )   4053 - 4056   1996.8

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:AMER CHEMICAL SOC  

    Direct measurement of surface forces has been employed for the systematic determination of interaction forces between nucleic acid base monolayers at various pH values from 5.6 to 9.3. Measured forces have been classified as (1) forces at a distance D &gt; 20 nm, which are attractive or repulsive depending on the hydrophobicity and the charge of the surfaces and which can be accounted for in terms of the sum of &apos;&apos;double-layer forces&apos;&apos; and so-called &apos;&apos;very long ranged hydrophobic attraction&apos;&apos;; which are always attractive; and (3) pull-off (adhesive) forces from contact, which reflect characteristics of molecular contact between monolayers of nucleic acid bases. The forces between complementary pairs (adenine-thymine) are found, for the first time, to be always attractive and stable independently of separation distances as well as pH&apos;s studied. On the other hand, interactions between noncomplementary pairs (thymine-thymine, adenine-adenine) are found to be regulated by the surface charge; thus, notably the long-ranged forces change from attractive to repulsive at pH&apos;s where the nucleobases start to dissociate.

    DOI: 10.1021/la950867o

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  • STERIC FORCES BETWEEN BRUSH LAYERS OF POLY(L-GLUTAMIC ACID) AND THEIR DEPENDENCE ON SECONDARY STRUCTURES AS DETERMINED BY FT-IR SPECTROSCOPY Reviewed

    K KURIHARA, T ABE, N HIGASHI, M NIWA

    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS   103 ( 3 )   265 - 272   1995.10

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:ELSEVIER SCIENCE BV  

    Interactions between apposed poly(L-glutamic acid) monolayers in water were investigated by direct surface forces measurement. The average degree of polymerization was 21. The monolayers of anchored poly(L-glutamic acid) were prepared on mica surfaces by the Langmuir-Blodgett deposition of monolayers of an amphiphile containing the polypeptide as the hydrophilic head group. Various secondary structures of poly(L-glutamic acid) were formed in this monolayer at the air-water interface, through intra- and intermolecular hydrogen bonding, depending on the surface pressure and the pH value of the aqueous subphase, and transferred onto mica surfaces. Formation of the secondary structures was characterized by Fourier transform-infrared (FT-IR) spectroscopy prior to the forces measurement. Surface force profiles consisted of a long-range electrostatic and a short-range steric repulsion. Secondary structures of poly(L-glutamic acid), identified by FT-IR with respect to their composition and orientation, were found to determine the short-range steric repulsion. The obtained elastic compressibility moduli of the polypeptide monolayers were 5.6 +/- 2.2 MPa for the beta(2)-structure rich layer, and 0.2 +/- 0.1 MPa for the layer of ionized extended chains.

    DOI: 10.1016/0927-7757(95)03295-O

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  • DIRECT MEASUREMENT OF SURFACE FORCES BETWEEN MONOLAYERS OF ANCHORED POLY(L-GLUTAMIC ACID) Reviewed

    T ABE, K KURIHARA, N HIGASHI, M NIWA

    JOURNAL OF PHYSICAL CHEMISTRY   99 ( 7 )   1820 - 1823   1995.2

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:AMER CHEMICAL SOC  

    Interactions between apposed poly(L-glutamic acid) monolayers in water were investigated by direct surface force measurements. The average degree of polymerization was 21. Surface force profiles consisted of a long-range electrostatic repulsion and a short-range steric repulsion. Secondary structures of the polypeptide were found to determine the short-range steric repulsion. The elastic compressibility moduli of the polypeptide monolayers were obtained to be 5.6 +/- 2.2 MPa for the beta(2)-structure-rich layer and 0.2 +/- 0.1 MPa for the layer of ionized extended chains.

    DOI: 10.1021/j100007a003

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  • SURFACE FORCES BETWEEN MONOLAYERS OF END-ANCHORED POLYELECTROLYTE LAYERS - STRUCTURAL CHANGES AND INTERACTIONS Reviewed

    K KURIHARA, T ABE, T KUNITAKE, N HIGASHI, M NIWA

    ADVANCED MATERIALS '93, II - A & B   15 ( A & B )   517 - 520   1994

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:ELSEVIER SCIENCE PUBL B V  

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MISC

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Awards

  • 日本機械学会 マイクロ・ナノ工学部門 貢献表彰

    2022.11   日本機械学会  

    安部 隆

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  • 第35回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2018.11   電気学会 センサ・マイクロマシン部門   水晶発振回路式液体濃度センサの炭酸濃度非接触測定への応用

    小黒 悠, 谷村実紀, 矢田直人, 寒川雅之, 安部 隆

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  • 優秀論文発表賞

    2016.10   電気学会 センサ・マイクロマシン部門総合研究会   水晶発振回路を用いた2チャンネル型非接触液体センサの開発

    矢田 直人, 寒川 雅之, 安部 隆

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  • 第33回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2016.10   電気学会センサ・マイクロマシン部門   真空中での水晶振動子式小型熱重量分析センサの昇温特性評価

    和田 涼介, 寒川 雅之, 安部 隆

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  • 第31回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2014.10   電気学会センサ・マイクロマシン部門   非接触型液体濃度検出用水晶センサ

    須佐 翼, 渡部 尊, 寒川 雅之, 安部 隆

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Research Projects

  • 回路レス温度補正が可能な実装基板一体型水晶振動子によるオンサイト計測の革新

    Grant number:24K01317

    2024.4 - 2028.3

    System name:科学研究費助成事業

    Research category:基盤研究(B)

    Awarding organization:日本学術振興会

    安部 隆

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    Grant amount:\17680000 ( Direct Cost: \13600000 、 Indirect Cost:\4080000 )

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  • 特殊金属/合金マイクロマシンの創成

    Grant number:21K18870

    2021.7 - 2024.3

    System name:科学研究費助成事業

    Research category:挑戦的研究(萌芽)

    Awarding organization:日本学術振興会

    安部 隆

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    Grant amount:\6240000 ( Direct Cost: \4800000 、 Indirect Cost:\1440000 )

    申請研究では計画研究として3つの研究項目がある。以下に、各々の研究項目の進捗状況を説明する。研究項目1であるフレキシブルで強靭なTitanium On Insulator (TOI)ウェハを用いた圧力、力、アクチュエータの実現のためには、シリコンMEMSにおける酸化膜に対応する絶縁薄膜の成膜技術が重要である。さらに絶縁膜を残したままで鏡面加工する技術も重要である。熱膨張係数が近く、絶縁性が高いアルミナ薄膜を絶縁膜としたTOIウェハについて、薄膜を残したままでそのままDRIE加工をしても元のチタン基板よりも鏡面状態で深掘りすることに成功した。本技術は、日本機械学会のマイクロナノ工学部門大会において若手優秀講演賞を受賞した。なお、本研究成果に関わる予備研究で実施していたドライナノ研磨技術が英文誌に掲載された。研究項目2のマイクロ電解工業に関する挑戦については、評価のための設備立ち上げを進めており、電気化学微細加工装置のセットアップを終えた段階である。次年度に試験を実施する予定である。研究項目3については、フッ素樹脂とアンカー効果を有するチタンウェハの接合に成功した。接合部は母材よりも強固であり、引っ張り試験では把持部のチタン板が破断した。本研究成果は、2022年度の徳島で開催される関連学会で発表予定である。なお、上記の計画研究以外のチタンマイクロマシニングの応用として、主刃の周縁にマイクロ刃を有するマイクロサージェリー用メスの試作も実施し、より低い力で切開できるようになった。本研究成果は、第38回センサ・マイクロマシンと応用システムシンポジウムにて、速報ポスター賞にノミネートされた。マイクロ構造形成と切れ味の相関に関するメカニズム解明は刃物の機能性を生み出す可能性を有し新しい分野になると期待される。

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  • しなやかさ・タフさ・機能性を有する機能性メタルベースMEMSのスマート生産技術

    2016 - 2018

    System name:基盤研究(B)

    Awarding organization:文部科学省

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • マイクロ・ナノ流体回路融合発振回路式化学演算チップの開発

    2016 - 2017

    System name:挑戦的萌芽研究

    Awarding organization:文部科学省

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • 機能材料をベースとしたMEMSのための熱アシスト型反応性イオンエッチングの試験研究,

    2015 - 2016

    System name:マッチングプランナープログラム

    Awarding organization:JST

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • 液体燃料、潤滑剤の効率的利用のための非接触型液体濃度センサの開発

    2014 - 2015

    System name:研究成果研究成果展開事業 A-STEP FSステージ

    Awarding organization:JST

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • 小型・高精度・高速マルチ化学センシングシステムの実用化への展開

    2013 - 2014

    System name:知財活用促進ハイウェイ

    Awarding organization:JST

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • ワンチップ型バルク弾性波型メタノール濃度センサの開発

    2011.12 - 2012.6

    System name:研究成果最適支援プログラムA-STEP探索タイプ

    Awarding organization:JST

    安部 隆

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  • A Gaussian Shaped Resonator for Sensing Single Cell

    Grant number:23510126

    2011 - 2013

    System name:Grants-in-Aid for Scientific Research

    Research category:Grant-in-Aid for Scientific Research (C)

    Awarding organization:Japan Society for the Promotion of Science

    ABE Takashi

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    Authorship:Principal investigator  Grant type:Competitive

    In this study, we tried to improve the sensitivity of quartz crystal sensor for sensing single cell. The enhancement of mass sensitivity was realized by shaping the resonator based on the simulation results. As the result, the mass sensitivity was improved at least one order of magnitude and the responses show a linear relationship between mass changes and frequency changes.
    The developed method is expected to be used for evaluation of nanomaterials in addition to measurements of single cell.

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  • 外乱下においてサブ原子層レベルの感度を有するQCMの開発

    2006.6 - 2010.6

    System name:産業技術研究助成事業(若手グラント)

    Awarding organization:NEDO

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • Research of a nano-energy system creation

    Grant number:18GS0203

    2006 - 2010

    System name:Grants-in-Aid for Scientific Research

    Research category:Grant-in-Aid for Creative Scientific Research

    Awarding organization:Japan Society for the Promotion of Science

    KUWANO Hiroki, NISHIZAWA Matsuhiko, ONO Takahito, ORIMO Shinichi, TANAKA Shuji, NAGASAWA Sumito, ANBE Takashi, OKAMOTO Hiroshi, ONUKI Teppei, CAO Ziping, HAMATE Yuichiro, OGUCHI Hiroyuki

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    Grant amount:\413400000 ( Direct Cost: \318000000 、 Indirect Cost:\95400000 )

    Micro power generator required in the field of telecommunication, medicine/welfare and so on has been developed. We established fundamental technologies for the micro generator such as materials, highly efficient optimum design. We have succeeded high-power micro fuel cells by applying micro combinatorial and vacuum insulation technology, long life high-power bio-fuel cells by applying carbon nano-tube enzyme electrode and auto-stack structure technology, and highly efficient vibration-based micro energy harvester by applying self-standing electret film and broadband vibration structure technology. In addition, solid electrolyte materials for low temperature operation and micro detonation technology were established as innovative basic technologies.

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  • Development of real-time measurement techniques of surface reactions at the sub-atomic layer level under active environmental control

    Grant number:18681017

    2006 - 2008

    System name:Grants-in-Aid for Scientific Research

    Research category:Grant-in-Aid for Young Scientists (A)

    Awarding organization:Japan Society for the Promotion of Science

    ABE Takashi

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    Authorship:Principal investigator  Grant type:Competitive

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  • マイクロ電気化学システムによる細胞接着の3次元操作

    Grant number:18048004

    2006 - 2007

    System name:科学研究費助成事業

    Research category:特定領域研究

    Awarding organization:日本学術振興会

    西澤 松彦, 安部 隆, 梶 弘和

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    Grant amount:\3200000 ( Direct Cost: \3200000 )

    本研究は,電気化学反応によって細胞接着を操作する技術「電気化学バイオリソグラフィー」を3次元構造体への細胞接着の操作へ拡張し,細胞培養担体(スキャホールド)内部への異種細胞から成る反復構造の作製へのチャレンジである。先ず,ガラスとPDMSからなるマイクロ流路デバイスの内部に細胞の共培養系を作製する事に成功した。あらかじめ流路の内壁にマイクロ電極のアレイを作製しておき,流路内部をヘパリン被覆した後にKBr水溶液を充填して電極に1.5Vを印加すると,電極の対面部位のヘパリンが脱着して細胞接着性へと変化し,細胞培養が出来た。隣接するマイクロ電極で同様の操作を違う種類の細胞に対して行なうと,流路内に異種細胞を配列させ,共培養化する事ができた。次に,あらかじめ電極を配置しておく必要が無いシステムの開発を意図して,針電極による細胞接着誘導を検討した。シリコンゴムチューブの内壁をヘパリン修飾し,そこへ針電極を刺して上述の反応を行う事によって,電極を刺した領域のみに細胞接着を誘導できた。さらに共培養化も出来た。この結果は,3次元構造体の内部に共培養系を造り込むという当初の目的を達成した典型的な一例であるとともに,血管内皮細胞の培養によって,血管を模擬したせん断応力と引っ張り応力が負荷できるモデルとなる可能性を有している。これは血流と細胞動態との関連を探るトレース実験を可能とする,これまでに無かった実験系を提供する可能性を有している。

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  • Development of Electrochemical Biolithograpy and application to Cellular Chips

    Grant number:17310080

    2005 - 2007

    System name:Grants-in-Aid for Scientific Research

    Research category:Grant-in-Aid for Scientific Research (B)

    Awarding organization:Japan Society for the Promotion of Science

    NISHIZAWA Matsuhiko, ABE Takashi

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    Grant amount:\14870000 ( Direct Cost: \14000000 、 Indirect Cost:\870000 )

    Microfluidic systems have been widely investigated for biological applications and hold great promise in the development of diagnostic assays and bioreactors. The combination of the surface patterning techniques with the microfluidic systems paves the way to multi-functional, high-throughput, and cost-effective analysis, in which the "real-time" and "on-demand" micropatterning of bioelements within the microchannels would be essentially required since such delicate materials are unstable to desiccation, oxidation, and heat. However, most of the photolithography-based techniques are unable to be applied within the sealed microchannels.
    In this research, we have developed a novel technique "electrochemical bio-lithography", which enables the localized immobilization of proteins and cells within 3D microstructures such as microfluidic channels. The principle of the technique is based on our finding that the albumin- or heparin-coated surfaces, initially anti biofouling, rapidly becomes protein- and cell-adhesive upon exposure to the reactive oxidizing agent such as hypobromous acid, which can be produced by the electrochemical oxidation of bromide ion in a biological buffer solution. Since this lithography can be conducted under typical physiological conditions, it enables the spatiotemporal control of cell adhesion and growth on substrates; it facilities the stepwise immobilization of multitype protein arrays and multiphenotype cell arrays. And importantly, this technique is simple enough to be integrated into the miniaturized and semi-closed systems such as microfluidic devices, indicating the possible "on-demand" immobilization of proteins and living cells just prior to use of the microfluidic biodevices. In addition, we have achieved rapid cellular arrangement in the semi-closed microfluidic channel by combining electrochemical bio-lithography with negative dielectrophoresis (DEP).

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  • マイクロ・ナノマシニングを用いた水晶振動子型分子認識チップの創製

    2002.10 - 2006.3

    System name:戦略的研究創造研究推進事業(さきがけタイプ)

    Awarding organization:JST

    安部 隆

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  • 微小空間における燃焼の制御・利用に関する研究

    Grant number:14655077

    2002 - 2003

    System name:科学研究費助成事業

    Research category:萌芽研究

    Awarding organization:日本学術振興会

    田中 秀治, 安部 隆, 小野 崇人, 江刺 正喜

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    Grant amount:\3300000 ( Direct Cost: \3300000 )

    微小空間における燃焼の応用として、マイクロ燃料改質器の熱源、マイクロ熱電発電器、マイクロロケットスラスターを取り上げ、試作品の製作と試験とを中心とする実証的な研究を行った。
    [マイクロ燃料改質器]携帯機器内で液体燃料から水素を生成するマイクロ燃料改質器を開発した。シリコンのエッチング・酸化・酸化シリコンによるエッチング孔の埋め戻しによって、断熱のための自己支持膜を強度が確保される構造に改良し、改良したマイクロ燃料改質器において水素の自立燃焼とメタノールの水蒸気改質とを確認した。
    [マイクロ熱電発電]触媒燃焼器を熱源とするICチップ大の熱電発電器を開発した。メタノールを燃料にして200mW以上の出力、および約2.5%の効率を実現した。また、触媒燃焼器に燃料の蒸気圧によって空気を供給するマイクロエゼクタを試作した。エゼクタの構造、流路の形状、燃料の供給圧などパラメータにして一連の実験を行い、ブタンの完全燃焼に必要な量の空気が供給できることを確認した。さらに、そのエゼクタを用いてブタンの燃焼に成功した。
    [マイクロロケットスラスター]10kg級の超小形人工衛星の姿勢制御をするマイクロ固体ロケットアレイスラスターを開発した。本スラスター上には、直径0.8mmの使い切り固体ロケットが多数並べられており、スラストはデジタル的に制御される。点火の確実性を向上させるために、燃料の充填方法を変更し、種々の方法で燃料を充填したスラスターの真空燃焼試験を行った。その結果に基づいて、燃料の充填方法をはじめとして、燃料の組成、スラスターの構造などを見直している。

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  • マルチチャンネル水晶振動子マイクロバランスの超小型化、高感度化に関する研究

    Grant number:14655313

    2002 - 2003

    System name:科学研究費助成事業

    Research category:萌芽研究

    Awarding organization:日本学術振興会

    江刺 正喜, 安部 隆

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    Grant amount:\2900000 ( Direct Cost: \2900000 )

    マイクロ・ナノマシニング技術を用いて、単一水晶基板上に多数の振動子が配列したマルチチャンネル型の水晶振動子マイクロバランス(QCM)を製作した。このマルチチャンネル型QCMは、各々の振動子に異なる感応膜を被覆し周波数応答を比較することでケモメトリック分析等が可能な画期的なセンサである。このQCMセンサの質量検出感度は周波数の自乗に逆比例するために板厚が薄いほど高感度になることが知られている。これまでに、水晶を鏡面のまま微細加工できる反応性イオンエッチング技術を開発し、その微細加工技術を用いて水晶板を部分的に薄くし高感度化を達成しかつ干渉せずに振動する逆メサ構造の振動子を製作してきた。その結果、支持損失を抑えて高いQ値(低損失)となる最適形状条件を実験的に見い出した。このように、高感度な振動子の製作方法が確立した一方、振動子を薄くするあるいは小さくすると粘弾性負荷に対して不安定になるという新たな問題が明らかになった。これを解決するために振動子中央部に振動エネルギーが集中するように水晶板の板厚を変える加工技術を開発した。具体的には、ホトレジストをリフローによりレンズ形状にし鏡面エッチング技術でこの形状を水晶板に転写することでコンベックス形状の大量一括生産を実現した。上記方法で製作した振動子の振動特性を評価し、未加工の場合と比較してQ値が二倍高くかつ溶液中での振動特性が優れていること等を明らかにした。

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Teaching Experience

  • 総合技術科学演習

    2022
    Institution name:新潟大学

  • 先端研究入門

    2020
    Institution name:新潟大学

  • 機械工学実験IV

    2020
    Institution name:新潟大学

  • 機械工学実験III

    2020
    Institution name:新潟大学

  • 機械工学概論

    2017
    Institution name:新潟大学

  • 数物演習

    2017
    Institution name:新潟大学

  • 工学リテラシー入門(力学分野)

    2017
    Institution name:新潟大学

  • 物理工学実験

    2017
    Institution name:新潟大学

  • 材料生産システム博士特定研究Ⅰ

    2014
    Institution name:新潟大学

  • 外国語論文解説・討論Ⅰ

    2014
    Institution name:新潟大学

  • 材料生産システム博士セミナーⅠ

    2014
    Institution name:新潟大学

  • 機械科学コース演習

    2014
    Institution name:新潟大学

  • 機械工学実験I

    2012
    Institution name:新潟大学

  • 卒業研究

    2012
    Institution name:新潟大学

  • 卒業研修

    2012
    Institution name:新潟大学

  • 英文輪読I

    2012
    Institution name:新潟大学

  • 英文輪読II

    2012
    Institution name:新潟大学

  • 機械工学演習

    2012
    Institution name:新潟大学

  • 機械工学実験II

    2012
    Institution name:新潟大学

  • 機械科学セミナーⅠ

    2012
    -
    2015
    Institution name:新潟大学

  • 機械科学文献詳読Ⅰ

    2012
    -
    2015
    Institution name:新潟大学

  • 材料生産システム特定研究Ⅱ

    2012
    -
    2015
    Institution name:新潟大学

  • 研究発表演習・発表

    2012
    -
    2015
    Institution name:新潟大学

  • 機械科学文献詳読Ⅱ

    2012
    -
    2015
    Institution name:新潟大学

  • 機械科学特別演習

    2012
    -
    2015
    Institution name:新潟大学

  • 材料生産システム特定研究Ⅰ

    2012
    -
    2015
    Institution name:新潟大学

  • 機械科学セミナーⅡ

    2012
    -
    2015
    Institution name:新潟大学

  • 技術英語入門

    2012
    Institution name:新潟大学

  • くらしを支える機械システム工学

    2011
    Institution name:新潟大学

  • 先端マイクロマシン工学特論

    2011
    Institution name:新潟大学

  • 工学リテラシー入門(機械システム工学科)

    2011
    -
    2020
    Institution name:新潟大学

  • 自然科学総論Ⅱ

    2011
    -
    2020
    Institution name:新潟大学

  • マイクロマシン

    2010
    Institution name:新潟大学

  • 応用数理A

    2010
    Institution name:新潟大学

  • マイクロマシン工学特論

    2010
    Institution name:新潟大学

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