Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Mechanical Science and Engineering Professor
Faculty of Engineering Department of Engineering Professor
Updated on 2024/11/07
博士(工学) ( 1997.3 名古屋大学 )
Tough MEMS
Micro fabrication
MEMS
Quartz MEMS
Sensor
Informatics / Mechanics and mechatronics
Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Measurement engineering
Nanotechnology/Materials / Nano/micro-systems
Informatics / Robotics and intelligent system
Niigata University Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Mechanical Science and Engineering Professor
2010.4
Tohoku University Graduate School of Engineering Associate Professor
2003.4 - 2010.3
Japan Science and Technology Agency
2002.11 - 2006.3
Tohoku University Faculty of Engineering Research Assistant
2001.4 - 2003.3
Niigata University Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Mechanical Science and Engineering Professor
2010.4
Niigata University Faculty of Engineering Department of Mechanical and Production Engineering Professor
2010.4
Nagoya University Graduate School, Division of Engineering
- 1997.3
Country: Japan
Nagoya University Faculty of Engineering
- 1992.3
Country: Japan
機械学会
IEEE
応用物理学会
電気学会
日本機械学会 代表会員
2023.4
Committee type:Academic society
日本機械学会 マイクロ・ナノ工学部門 第13回マイクロ・ナノ工学シンポジウム実行委員長
2022 - 2023
Transducers2023 組織委員会 委員
2021 - 2024
Committee type:Academic society
電気学会 センサ・マイクロマシン部門 監事
2021 - 2023
日本機械学会 マイクロナノ工学部門 第12回マイクロ・ナノ工学シンポジウム 論文委員長
2020 - 2021
Committee type:Academic society
電気学会 センサ・マイクロマシン部門研究調査運営委員会 委員長
2020 - 2021
Committee type:Academic society
IEEJ Sensors and Micromachines Vice president
2019 - 2021
Committee type:Academic society
IEEJ Sensors and Micromachines Director, Editorial and Publishing Affairs
2019 - 2020
Committee type:Academic society
日本機械学会 マイクロ・ナノ工学部門 表彰委員会 委員長
2019 - 2020
Committee type:Academic society
日本学術振興会 第150委員会 委員
2018 - 2020
Committee type:Academic society
電気学会 代議員(社員)
2016 - 2020
Committee type:Academic society
日本機械学会 マイクロ・ナノ工学部門 代議員
2016 - 2019
Committee type:Academic society
電気学会 センサ・マイクロマシン部門大会 論文委員長
2015 - 2016
Committee type:Academic society
電気学会 センサ・マイクロマシン部門 編修長(主査)
2013 - 2014
Committee type:Academic society
Tomoya Nitta, Kuraudo Yasuda, Keito Morohashi, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 144 ( 6 ) 136 - 140 2024.6
Yu Oshima, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 144 ( 5 ) 111 - 116 2024.5
Hiiro Wakabayashi, Hideto Kadota, Takashi Abe, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 144 ( 5 ) 77 - 81 2024.5
So Okako, Taisei Nambu, Takashi Abe, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 144 ( 1 ) 6 - 11 2024.1
So Okako, Takashi Abe, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 143 ( 8 ) 251 - 255 2023.8
The New Control Method for Detection of Cold‐Warm sensation using a Heater Integrated Tactile Sensor
Takuma Iwahashi, Naotaka Onda, Hikaru Nagumo, Takashi Abe, Masayuki Sohgawa
IEEJ Transactions on Electrical and Electronic Engineering 2023.4
Hajime Satani, Kuraudo Yasuda, Masayuki Sohgawa, Takashi Abe
Applied Physics Letters 121 ( 25 ) 252903 - 252903 2022.12
Yuji Takahashi, Takumi Takahashi, Takashi Abe, Haruo Noma, Masayuki Sohgawa
Electronics and Communications in Japan 105 ( 3 ) 2022.8
Ren Kaneta, Takumi Hasegawa, Jun Kido, Takashi Abe, Masayuki Sohgawa
Journal of Robotics and Mechatronics 34 ( 3 ) 677 - 682 2022.6
Improvement of Durability of Insulation Film for Low-voltage Electrostatic Tactile Display
Masatoshi Kondo, Junki Satoh, Takashi Abe, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 142 ( 5 ) 85 - 90 2022.5
Yuji Takahashi, Takumi Takahashi, Takashi Abe, Haruo Noma, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 142 ( 5 ) 91 - 96 2022.5
Naotaka Onda, Takaaki Kozuka, Takashi Abe, Masanobu Isshiki, Satoru Tomeno, Masayuki Sohgawa
Electrical Engineering in Japan 215 ( 1 ) 2022.3
Development of time‐delay analysis method of inductance and capacitance for microfluidic circuit
Ryo Watanabe, Akira Yoshida, Yota Sato, Masayuki Sohgawa, Takashi Abe
Electronics and Communications in Japan 105 ( 1 ) 2022.3
Development of Time-Delay Analysis Method of Inductance and Capacitance for Microfluidic Circuit
Ryo Watanabe, Akira Yoshida, Yota Sato, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 142 ( 2 ) 17 - 20 2022.2
Development of quartz crystal complex capacitive sensor with microelectrode array for sensitization
Yuki Hashimoto, Takaaki Haino, Masayuki Sohgawa, Takashi Abe
Electrical Engineering in Japan 214 ( 4 ) 2021.12
Naotaka Onda, Takaaki Kozuka, Takashi Abe, Masanobu Isshiki, Satoru Tomeno, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 141 ( 10 ) 343 - 348 2021.10
Development of Quartz Crystal Complex Capacitive Sensor with Microelectrode Array for Sensitization
Yuki Hashimoto, Takaaki Haino, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 141 ( 8 ) 279 - 283 2021.8
Contactless Endpoint Detection of Gold Etching Using Quartz-Based Capacitive Detector
Takuro Okuwaki, Takaaki Haino, Masayuki Sohgawa, Takashi Abe
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 1126 - 1129 2021.6
Development of dry‐nano‐polishing technique using reactive ion etching for ultra thin titanium wafer
Teruya Chino, Yuta Watanabe, Yosuke Tsukiyama, Masayuki Sohgawa, Takashi Abe
Electronics and Communications in Japan 104 ( 2 ) 2021.6
Development of Dry-nano-polishing Technique using Reactive Ion Etching for Ultra Thin Titanium Wafer
Teruya Chino, Yuta Watanabe, Yosuke Tsukiyama, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 141 ( 4 ) 103 - 107 2021.4
Hiroki Fujimori, Yuki Togashi, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 140 ( 12 ) 349 - 353 2020.12
Contactless Monitoring of Water Treatment Process Using Quartz Oscillator Based Liquid Sensor
Akira Yoshida, Yu Oguro, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 140 ( 10 ) 251 - 255 2020.10
Detection Area Evaluation of Tactile Sensor Using Microcantilever Embedded in Elastomer
Yuto Abe, Fumitoshi Suga, Takashi Abe, Haruo Noma, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 140 ( 10 ) 272 - 277 2020.10
Detection of Gripping State Using Tactile Sensors Installed on Handgrip for Tools
Taisei Nambu, Tomoya Fujihashi, Takashi Abe, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 140 ( 9 ) 228 - 234 2020.9
Development of a self-heated-stage for high-speed process of titanium by reactive ion etching
Yuya Kiryu, Gang Han, Junichi Imai, Masayuki Sohgawa, Takashi Abe
Electronics and Communications in Japan 103 ( 1-4 ) 32 - 37 2020.4
Tactile Sensor with High-Density Microcantilever and Multiple PDMS Bumps for Contact Detection Reviewed International journal
Tomoya Fujihashi, Fumitoshi Suga, Ryoma Araki, Jun Kido, Takashi Abe, Masayuki Sohgawa
Journal of Robotics and Mechatronics 32 ( 2 ) accepted 2020.4
Tactile sensor using a microcantilever embedded in fluoroelastomer with resistance to cleaning and antiseptic solutions Reviewed International journal
Takumi Takahashi, Shuhei Sato, Takashi Abe, Masayuki Sohgawa
Sensors and Actuators A: Physical 301 ( 1 ) 111774 2020.1
Harutoshi Takahashi, Yuta Namba, Takashi Abe, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 139 ( 11 ) 375 - 380 2019.11
Development of a Self-heated-stage for High Speed Process of Titanium by Reactive Ion Etching Reviewed
Yuya Kiryu, Gang Han, Junichi Imai, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 139 ( 10 ) 341 - 345 2019.10
容器内溶液の非接触検査のための水晶発振回路式液体濃度センサの開発 Invited Reviewed
小黒 悠, 谷村 実紀, 矢田 直人, 寒川 雅之, 安部 隆
電気学会論文誌E(センサ・マイクロマシン部門誌) 139 ( 7 ) 169 - 174 2019.7
Tactile Sensor Using Microcantilever Embedded in Fluoropolymer for Water and Ethanol Resistance
Takumi Takahashi, Shuhei Sato, Takashi Abe, Haruo Noma, Masayuki Sohgawa
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 1925 - 1928 2019.6
Design and Evaluation of an Electrode Separated Quartz Crystal Microbalance Array as a Disposable Weighing Dish
Shunya Uchiki, Ikuto Sato, Masayuki Sohgawa, Takashi Abe
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII 1169 - 1172 2019.6
触覚センサによる多層柔軟物モデルの計測と有限要素解析 Reviewed
木藤 潤, 阿部 祐太, 佐藤 周平, 安部 隆, 野間 春生, 寒川 雅之
電気学会論文誌E(センサ・マイクロマシン部門誌) 139 ( 6 ) 149 - 154 2019.6
1滴を評価できる水晶発振回路式粘度・濃度複合センサの作製と評価 Reviewed
庄司拓人, 江端 亮, 寒川雅之, 安部 隆
電気学会論文誌E(センサ・マイクロマシン部門誌) 139 ( 4 ) 81 - 84 2019.4
Yuki Nagao, Teppei Tanaka, Yutaro Ono, Kota Suetsugu, Mitsuo Hara, Guangtong Wang, Shusaku Nagano, Takashi Abe
Electrochimica Acta 300 333 2019.3
Development of quartz oscillator based liquid concentration sensor for contactless monitoring of solution in bottle
Yu Oguro, Miki Tanimura, Naoto Yada, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 139 ( 7 ) 169 - 174 2019
Fabrication and evaluation of quartz oscillator based viscosity / concentration sensor for a drop sensing
Takuto Shoji, Ryo Ebata, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 139 ( 4 ) 81 - 84 2019
Measurement by Tactile Sensor and FEM Analysis of Multi-layered Flexible Model for Skin Diagnosis
Jun Kido, Yuta Abe, Shuhei Sato, Takashi Abe, Haruo Noma, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 139 ( 6 ) 149 - 154 2019
Microdroplet monitoring using microfluid circuit combined quartz oscillator based capacitive sensor Reviewed
Roy Ebata, Ryo Sakai, Masayuki Sohgawa, Takashi Abe
Electronics and communications inJapan 101 ( 12 ) 50 - 55 2018.12
微小流体回路融合型水晶発振回路式容量センサを用いた微小液滴のモニタリング Reviewed
江端 亮, 坂井 了, 寒川 雅之, 安部 隆
電気学会論文誌E(センサ・マイクロマシン部門誌) 138 ( 8 ) 382 - 386 2018.8
Lyotropic ordering for high proton conductivity in sulfonated semialiphatic polyimide thin films Reviewed
K. Takakura, Y. Ono, K. Suetsugu, M. Hara, S. Nagano, T. Abe, Y. Nagao
Polymer Journal 2018.8
Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous Gripping Control Reviewed
Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa
Micromachines 9 ( 6 ) 301 2018.6
光・ひずみ複合触覚センサを用いたポリオキシメチレン樹脂の表面形状・色計測による質感評価 Reviewed
難波 勇太, 安部 隆, 寒川 雅之
電気学会論文誌E(センサ・マイクロマシン部門誌) 138 ( 6 ) 250 - 256 2018.6
Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa
Electrical Engineering in Japan 204 ( 2 ) 44 - 49 2018.4
High proton conduction of organized sulfonated polyimide thin films with planar and bent backbones Reviewed
Y. Ono, R. Goto, M. Hara, S. Nagano, T. Abe, Y. Nagao
Macromolecules 51 3351 - 3359 2018.4
Development of Self-Heated Stage Suitable for Thermal Assist Reactive Ion Etching of the Functional Metals Invited Reviewed
Yuki Murata, Gang Han, Daiki Ohkawa, Junichi Imai, Masayuki Sohgawa, Takashi Abe
Electronics and Communications in Japan 101 ( 3 ) 96 - 102 2018.3
Electrode-separated quartz crystal microbalance for smart-sensor mounting application Reviewed
Jun Sakaguchi, Masayuki Sohgawa, Takashi Abe
Sensors and Materials 30 ( 5 ) 1073 - 1080 2018
Texture evaluation for planed surface of polyoxymethylene resin by measuring surface shape and color with light and strain sensitive tactile sensor Reviewed
Yuta Namba, Takashi Abe, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 138 ( 6 ) 250 - 256 2018
Surface texture characterization using optical and tactile combined sensor Reviewed
Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa
Sensors and Materials 30 ( 5 ) 1091 - 1101 2018
Development of dual channel type contactless liquid sensor using a quartz oscillator circuit Invited Reviewed
Naoto Yada, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 138 ( 2 ) 37 - 40 2018
Microdroplet monitoring using microfluid circuit combined quartz oscillator based capacitive sensor
Ryo Ebata, Ryo Sakai, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 138 ( 8 ) 382 - 386 2018
Deep reactive ion etching technique involving use of 3D self-heated cathode Reviewed
Gang Han, Yuki Murata, Daiki Ohkawa, Masayuki Sohgawa, Takashi Abe
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems 1281 - 1284 2017.7
Gripping control of delicate and flexible object by electromotive manipulator with proximity and tactile combo MEMS sensor Reviewed
Ryoma Araki, Fumitoshi Suga, Takashi Abe, Haruo Noma, Masayuki Sohgawa
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems 1140 - 1143 2017.7
Fumiya Sato, Takashi Shiwa, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa
The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2017) 343 - 346 2017.6
Fabrication of a true-Gaussian-shaped quartz crystal resonator Reviewed
Hiroki Kutsuwada, Sho Watanabe, Masayuki Sohgawa, Takashi Abe
SENSORS AND ACTUATORS A-PHYSICAL 260 58 - 61 2017.6
Development of titanium micro mold manufacturing technology for the microfluidic chip by plasma etching Reviewed
Takeshi Hitobo, Masahiro Shiroki, Hirofumi Nabesawa, Toyohisa Asaji, Takashi Abe
Journal of the Vacuum Society of Japan 60 ( 4 ) 145 - 147 2017
Microstructure formation on polytetrafluoroethylene (PTFE) and perfluoroalkoxy (PFA) bulk plates by a magnetron enhanced reactive ion etching system Reviewed
Hirofumi Nabesawa, Takeshi Hitobo, Toyohisa Asaji, Takashi Abe, Minoru Seki
Journal of the Vacuum Society of Japan 60 ( 5 ) 176 - 181 2017
Development of self-heated stage suitable for thermal assist reactive ion etching of the functional metals Reviewed
Yuki Murata, Gang Han, Daiki Ohkawa, Junichi Imai, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 137 ( 9 ) 262 - 266 2017
Texture Characterization Including Warm/Cool Sensation Using Force-, Light-, and Temperature-Sensitive Micro-electromechanical Systems Sensor Reviewed
Fumiya Sato, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa
SENSORS AND MATERIALS 29 ( 3 ) 311 - 321 2017
Deposition and characterization of Al2O3 and BiFeO3 thin films on titanium substrates for tough MEMS devices Reviewed
Takeshi Kohno, Masato Mihara, Ataru Tanabe, Takashi Abe, Masanori Okuyama, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 137 ( 1 ) 46 - 47 2017
Thermal Reactive Ion Etching of Minor Metals with SF6 Plasma Reviewed
Gang Han, Yuki Murata, Yuto Minami, Masayuki Sohgawa, Takashi Abe
SENSORS AND MATERIALS 29 ( 3 ) 217 - 223 2017
Electromotive manipulator control by detection of proximity, contact and slipping using MEMS multi-axial tactile sensor Reviewed
Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 137 ( 7 ) 212 - 217 2017
Evaluation of the heating characteristics of miniature QCR-based thermogravimetric sensor in vacuum Invited Reviewed
Ryosuke Wada, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 137 ( 7 ) 180 - 184 2017
Measurement techniques with frequency-modulated probe light for proximity and tactile combo sensor Reviewed
Nao Umeki, Akito Nozawa, Masanori Okuyama, Haruo Noma, Takashi Abe, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 137 ( 5 ) 146 - 150 2017
Development of Wirelessly Excited Multi-Channel QCM Sensor for Odor Sensor Applications
SATO Ikuto, SAKAGUTI Jun, SOHGAWA Masayuki, ABE Takashi
The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec) 2017 1A1 - K11 2017
Output Characterization of Proximity and Tactile Combination MEMS Sensor for Gripping Control of Flexible Object
SUGA Fumitoshi, ARAKI Ryoma, ABE Takashi, NOMA Haruo, SOHGAWA Masayuki
The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec) 2017 1A1 - N02 2017
Evaluation method of fabrics by visual and tactile texture information using MEMS combo sensor Reviewed
Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa
IEEE Sensors 2016 655 - 657 2016.11
水晶振動子を用いた液体分析用コンボセンサにおける形状最適化 Reviewed
坂井 了, 今井 寛明, 寒川 雅之, 安部 隆
電気学会論文誌E 136 ( 7 ) 319 - 322 2016.7
MASS SENSITIVITY AMPLIFICATION BY USING GAUSSIAN-SHAPED QUARTZ CRYSTAL RESONATOR Reviewed
H. Kutsuwada, S. Watanabe, M. Sohgawa, T. Abe
2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) 1022 - 1025 2016
Preface to the special issue on the awarded papers of the 32nd sensor symposium ' Reviewed
Shuichi Shoji, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 136 ( 6 ) 213 2016
Contactless Liquid Sensing Technique Using a Quartz Oscillator Reviewed
Tsubasa Susa, Takeru Watanabe, Masayuki Sohgawa, Takashi Abe
SENSORS AND MATERIALS 28 ( 4 ) 289 - 294 2016
Development of liquid concentration sensor based on crystal oscillator circuit for measuring microdroplet Reviewed
Yuta Yanagita, Tsubasa Susa, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 136 ( 7 ) 319 - 322 2016
Shape optimization of combo sensor using quartz crystal resonator for liquid analysis Reviewed
Ryo Sakai, Hiroaki Imai, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 136 ( 8 ) 343 - 347 2016
Development of titanium micro mold manufacturing technology for the microfluidic chip by plasma etching
HITOBO Takeshi, SHIROKI Masahiro, NABESAWA Hirofumi, ASAJI Toyohisa, ABE Takashi
Abstract of annual meeting of the Surface Science of Japan 36 272 - 272 2016
Takeshi Kohno, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa
IEEE Sensors 2015 1192 - 1195 2015.11
Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa
IEEE Sensors 2015 699 - 702 2015.11
Non-contact Sensor for Measurement of Liquid Concentration based on Quartz Oscillator Reviewed
Susa Tsubasa, Watanabe Takeru, Sohgawa Masayuki, Abe Takashi
The Journal of the Institute of Electrical Engineers of Japan 135 ( 5 ) 158 - 164 2015.6
Tactile Sensor Using Micro-cantilever with BiFeO3 Piezoelectric Film Reviewed
Masato Mihara, Akito Nozawa, Takashi Abe, Masanori Okuyama, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 135 ( 5 ) 158 - 164 2015.5
Thermal reactive ion etching technique involving use of self-heated cathode Reviewed
S. Yamada, Y. Minami, M. Sohgawa, T. Abe
REVIEW OF SCIENTIFIC INSTRUMENTS 86 ( 4 ) 2015.4
Preface to the special issue on "World state-of-the-art research on sensors and micromachines" Reviewed
Takashi Abe
IEEJ Transactions on Sensors and Micromachines 135 ( 3 ) 90 2015.3
Microheater-integrated quartz crystal microbalance array for thermal desorption spectroscopy Reviewed
Jumpei Sakai, Masayuki Sohgawa, Naoyuki Iida, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 135 ( 3 ) 112 - 113 2015.3
NON-CONTACT SENSOR FOR MEASUREMENT OF LIQUID CONCENTRATION BASED ON QUARTZ OSCILLATOR Reviewed
T. Susa, T. Watanabe, M. Sohgawa, T. Abe
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) 1472 - 1475 2015
Masayuki Sohgawa, Akito Nozawa, Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma
IEEE Sensors 2014 1749 - 1752 2014.11
Texture measurement and identification of object surface by MEMS tactile sensor Reviewed
Masayuki Sohgawa, Kosuke Watanabe, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma
2014 IEEE SENSORS 1706 - 1709 2014.11
Miniature quartz crystal-resonator-based thermogravimetric detector Reviewed
N. Sai, Y. Tagawa, M. Sohgawa, T. Abe
REVIEW OF SCIENTIFIC INSTRUMENTS 85 ( 9 ) 095001 2014.9
A Multichannel Chemical Sensing Method Using Single Quartz Resonator and Micro Flow Channel Reviewed
Shinjiro Toyama, Takashi Abe
IEEE SENSORS JOURNAL 14 ( 1 ) 135 - 139 2014.1
Micromachining of titanium using a desktop DRIE Reviewed
Shuji Yamada, Takeshi Hitobo, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 134 ( 4 ) 96 - 99 2014
Numerical calculation and experimental verification of a quartz-crystal-resonator-based methanol concentration sensor Reviewed
Takeru Watanabe, Shinjiro Toyama, Masayuki Sohgawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 134 ( 7 ) 224 - 228 2014
Active touch sensing by multi-axial force measurement using high-resolution tactile sensor with microcantilevers Reviewed
Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 134 ( 3 ) 58 - 63 2014
Proximity and tactile sensing using a single MEMS sensor with photo- and strain sensitivities Reviewed
Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa
IEEJ Transactions on Sensors and Micromachines 134 ( 7 ) 229 - 234 2014
NOZAWA Akito, YOKOYAMA Hokuto, KANASHIMA Takeshi, OKUYAMA Masanori, ABE Takashi, NOMA Haruo, AZUMA Teruaki, SOHGAWA Masayuki
The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec) 2014 _1P2-X09_1 - _1P2-X09_4 2014
Experimental optimization of quartz-crystal-resonator-based methanol sensor connected in series with interdigital capacitor Reviewed
Shunpei Ishii, Keito Emura, Takashi Abe
Japanese Journal of Applied Physics 52 ( 12 ) 127201 2013.12
Hokuto Yokoyama, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma
IEEE Sensors 1090 - 1093 2013.11
Low-pressure plasma-etching of bulk polymer materials using gas mixture of CF4 and O-2 Reviewed
Hirofumi Nabesawa, Takaharu Hiruma, Takeshi Hitobo, Suguru Wakabayashi, Toyohisa Asaji, Takashi Abe, Minoru Seki
AIP ADVANCES 3 ( 11 ) 112105 2013.11
Enhancement of Proton Transport in an Oriented Polypeptide Thin Film Reviewed
Yuki Nagao, Jun Matsui, Takashi Abe, Hirotsugu Hiramatsu, Hitoshi Yamamoto, Tokuji Miyashita, Noriko Sata, Hiroo Yugami
LANGMUIR 29 ( 23 ) 6798 - 6804 2013.6
Design and Evaluation of Microheater Combined QCM Array for Thermal Desorption Spectroscopy Reviewed
Jumpei Sakai, Naoyuki Iida, Masayuki Sohgawa, Takashi Abe
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013 & Eurosensors XXVII) 234 - 237 2013.6
A fabrication method of high-Q quartz crystal resonator using double-layered etching mask for DRIE Reviewed
Takashi Abe, Yousuke Itasaka
SENSORS AND ACTUATORS A-PHYSICAL 188 503 - 506 2012.12
液体分析用デュアル水晶センサの開発 Reviewed
武石大一, 江村恵渡, 安部隆
電気学会論文誌E 132 ( 7 ) 174 - 177 2012.7
A Multichannel Chemical Sensing Method Using Single Quartz Resonator and Micro Flow Channel Reviewed
Shinjiro Toyama, Takashi Abe
2012 IEEE SENSORS PROCEEDINGS 1057 - 1060 2012
A methanol concentration sensor using a quartz resonator connected in series to interdigital capacitor Reviewed
Shunpei Ishii, Keito Emura, Takashi Abe
Proceedings of IEEE Sensors 133 ( 3 ) 96 - 97 2012
RIE patterning technology of Zr-based metallic glass for MEMS devices fabrication Reviewed
Yao-Chuan Tsai, Yu-Ching Lin, Takashi Abe, Masayoshi Esashi, Thomas Gessner
Proceedings of IEEE Sensors 2012
Development of dual quartz sensor for liquid analysis Reviewed
Taichi Takeishi, Keito Emura, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 132 ( 7 ) 174 - 177 2012
A Gaussian-shaped AT-cut quartz crystal resonator Reviewed
Takashi Abe, Hiroki Kishi
SENSORS AND ACTUATORS A-PHYSICAL 166 ( 2 ) 173 - 176 2011.4
A Monolithic QCM Array Designed for Mounting on a Flow Cell Reviewed
Takashi Abe, Makoto Higuchi
IEEE SENSORS JOURNAL 11 ( 1 ) 86 - 90 2011.1
Deep reactive ion etching of lithium niobate by using low-frequency bias Reviewed
Toyohisa Asaji, Hirofumi Nabesawa, Hidefumi Uchiyama, Takashi Abe
Journal of the Vacuum Society of Japan 53 ( 8 ) 501 - 503 2010
Real-time measurement of photocatalytic reactions using a monolithic QCM array Invited Reviewed
Takashi Abe, Hiroshi Kato
JOURNAL OF MICROMECHANICS AND MICROENGINEERING 19 ( 9 ) 094019 2009.9
Integration of QCMs for studying surface science within a microfluidic channel Reviewed
Yousuke Itasaka, Matsuhiko Nishizawa, Takashi Abe
IEEJ Transactions on Sensors and Micromachines 129 ( 12 ) 2 - 443 2009
Microfluidic biofuel cells: Series-connection with superhydrophobic air valves Reviewed
M. Togo, K. Morimoto, T. Abe, H. Kaji, M. Nishizawa
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems 2102 - 2105 2009
Polymer surface morphology control by reactive ion etching for microfluidic devices Reviewed
Hirofumi Nabesawa, Takeshi Hitobo, Suguru Wakabayashi, Toyohisa Asaji, Takashi Abe, Minoru Seki
SENSORS AND ACTUATORS B-CHEMICAL 132 ( 2 ) 637 - 643 2008.6
New surface forces apparatus using two-beam interferometry Reviewed
Hiroshi Kawai, Hiroshi Sakuma, Masashi Mizukami, Takashi Abe, Yasuhiro Fukao, Haruo Tajima, Kazue Kurihara
Review of Scientific Instruments 79 ( 4 ) 2008
A porous membrane-based culture substrate for localized in situ electroporation of adherent mammalian cells Reviewed
Takeshi Ishibashi, Kimiyasu Takoh, Hirokazu Kaji, Takashi Abe, Matsuhiko Nishizawa
SENSORS AND ACTUATORS B-CHEMICAL 128 ( 1 ) 5 - 11 2007.12
Design and evaluation of an antiparallel coupled resonator for chemical sensor applications Reviewed
Takashi Abe, Hiroshi Kato
ANALYTICAL CHEMISTRY 79 ( 17 ) 6804 - 6806 2007.9
Dual-channel quartz-crystal microbalance for sensing under UV radiation Reviewed
Takashi Abe, Xinghua Li
IEEE SENSORS JOURNAL 7 ( 3-4 ) 321 - 322 2007.3
Electrodeposition of anchored polypyrrole film on microelectrodes and stimulation of cultured cardiac myocytes Reviewed
Matsuhiko Nishizawa, Hyuma Nozaki, Hirokazu Kaji, Takahiro Kitazume, Noriyuki Kobayashi, Takeshi Ishibashi, Takashi Abe
BIOMATERIALS 28 ( 8 ) 1480 - 1485 2007.3
Improved wettability of a fluoropolymer from a simple combination of surface modifications using a plasma and surfactant Reviewed
Takashi Abe, Masahiro Matsumoto
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 46 ( 1 ) 367 - 369 2007.1
Generation of patterned cell co-cultures inside tubular structure using electrochemical biolithography and electrostatic assembly Reviewed
Hirokazu Kaji, Soichiro Sekine, Takashi Abe, Matsuhiko Nishizawa
2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS 187 - 192 2007
Polymer surface morphology control for microfluidic devices Reviewed
H. Nabesawa, T. Hitobo, S. Wakabayashi, T. Asaji, T. Abe, I. Nakatani, M. Seki
TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems 199 - 202 2007
Inverted mesa-type quartz crystal resonators fabricated by deep-reactive ion etching Reviewed
Takashi Abe, Vu Ngoc Hung, Masayoshi Esashi
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL 53 ( 7 ) 1234 - 1236 2006.7
Miniaturization of spherically contoured rectangular AT-cut quartz-crystal resonators by using reactive ion etching Reviewed
T Abe, H Shimamoto, XH Li
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 45 ( 6A ) 5283 - 5285 2006.6
Electrochemical approach to pattern cells within three-dimensional microstructures Reviewed
Matsuhiko Nishizawa, Takashi Abe, Hirokazu Kaji
2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE 242 - + 2006
An electrochemical microsystem for manipulating living cells Reviewed
Hirokazu Kaji, Masahiko Hashimoto, Takeaki Kawashima, Takashi Abe, Matsuhiko Nishizawa
FUTURE MEDICAL ENGINEERING BASED ON BIONANOTECHNOLOGY, PROCEEDINGS 3 - + 2006
Deep reactive ion etching of lithium niobate by using low-frequency bias
Toyohisa Asaji, Hirofumi Nabesawa, Motoichi Kanazawa, Takashi Abe, Shigeyuki Ishii, Junji Saito, Yushi Kato
Proceeding of 8th International Symposium on Sputtering & Plasma Processes 307 - 309 2005.6
Surface micromachined AlN thin film 2 GHz resonator for CMOS integration Reviewed
M Hara, J Kuypers, T Abe, M Esashi
SENSORS AND ACTUATORS A-PHYSICAL 117 ( 2 ) 211 - 216 2005.1
A miniaturized and convex-shaped quartz-crystal resonator for multiple chemical sensing in liquid Reviewed
L Li, M Esashi, T Abe
Micro Total Analysis Systems 2004, Vol 2 ( 297 ) 37 - 39 2005
Elcrochemical bio-lithography for in-situ immobilization of proteins and cells within microchannels Reviewed
Matsuhiko Nishizawa, Hirokazu Kaji, Kazuto Tsukidate, Masahiko Hashimoto, Takashi Abe
Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 1 151 - 154 2005
Microfabricated spherical bi-convex quartz crystal microbalance array Reviewed
L Li, T Abe, M Esashi
MEMS 2005 Miami: Technical Digest 327 - 330 2005
Fabrication of miniaturized bi-convex quartz crystal microbalance using reactive ion etching and melting photoresist Reviewed
L Li, T Abe, M Esashi
SENSORS AND ACTUATORS A-PHYSICAL 114 ( 2-3 ) 496 - 500 2004.9
A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution Reviewed
L Li, M Esashi, T Abe
APPLIED PHYSICS LETTERS 85 ( 13 ) 2652 - 2654 2004.9
Trench filling characteristics of low stress TEOS/ozone oxide deposited by PECVD and SACVD Reviewed
C Chang, T Abe, M Esashi
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 10 ( 2 ) 97 - 102 2004.1
High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE Reviewed
VN Hung, T Abe, PN Minh, M Esashi
SENSORS AND ACTUATORS A-PHYSICAL 108 ( 1-3 ) 91 - 96 2003.11
Smooth surface glass etching by deep reactive ion etching with SF6 and Xe gases Reviewed
L Li, T Abe, M Esashi
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 21 ( 6 ) 2545 - 2549 2003.11
Endpoint detectable plating through femtosecond laser drilled glass wafers for electrical interconnections Reviewed
T Abe, XH Li, M Esashi
SENSORS AND ACTUATORS A-PHYSICAL 108 ( 1-3 ) 234 - 238 2003.11
Highly selective reactive-ion etching using CO/NH3/Xe gases for microstructuring of Au, Pt, Cu, and 20% Fe-Ni Reviewed
T Abe, YG Hong, M Esashi
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 21 ( 5 ) 2159 - 2162 2003.9
MEMS based thin film 2 GHz resonator for CMOS integration Reviewed
M. Hara, J. Kuypers, T. Abe, M. Esashi
IEEE MTT-S International Microwave Symposium, 2003 2003.8
Aluminum nitride based thin film bulk acoustic resonator using germanium sacrificial layer etching Reviewed
M. Hara, J. Kuypers, T. Abe, M. Esashi
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems 2003.6
Endpoint detectable plating through femto-laser drilled glass wafers for three-dimentional electric interconnections Reviewed
XH Li, T Abe, M Esashi
MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS 638 - 641 2003
Energy dissipation in small-diameter quartz crystal microbalance experimentally studied for ultra-high sensitive gravimetry Reviewed
T Abe, L Li, VN Hung, M Esashi
MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS 518 - 521 2003
High sensitive, miniaturized plano-convex quartz crystal microbalance fabricated by reactive ion etching and melting photoresist Reviewed
L Li, T Abe, M Esashi
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 508 - 511 2003
Glass etching assisted by femtosecond pulse modification Reviewed
CL Chang, T Abe, M Esashi
SENSORS AND MATERIALS 15 ( 3 ) 137 - 145 2003
Structures and Interactions of Polyelectrolyte Brushes Studied by Surface Forces Measurement Reviewed
Kazue Kurihara, Shujiro Hayashi, Takashi Abe, Nobuyuki Hayashi, Masazo Niwa
IUPAC Polymer Conference (IUPAC-PC2002) 126 - 126 2002.12
Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass Reviewed
XG Li, T Abe, YX Liu, M Esashi
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 11 ( 6 ) 625 - 630 2002.12
Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance Reviewed
VN Hung, T Abe, PN Minh, M Esashi
APPLIED PHYSICS LETTERS 81 ( 26 ) 5069 - 5071 2002.12
Microprobe array with electrical interconnection for thermal imaging and data storage Reviewed
Dong Weon Lee, Takahito Ono, Takashi Abe, Masayoshi Esashi
Journal of Microelectromechanical Systems 11 ( 3 ) 215 - 221 2002.6
Polyelectrolyte brush layers studied by surface forces measurement: Dependence on pH and salt concentrations and scaling Reviewed
S Hayashi, T Abe, N Higashi, M Niwa, K Kurihara
LANGMUIR 18 ( 10 ) 3932 - 3944 2002.5
Deep reactive ion etching of silicon carbide Reviewed
S Tanaka, K Rajanna, T Abe, M Esashi
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 19 ( 6 ) 2173 - 2176 2001.11
Deep reactive ion etching of Pyrex glass using SF6 plasma Reviewed
XH Li, T Abe, M Esashi
SENSORS AND ACTUATORS A-PHYSICAL 87 ( 3 ) 139 - 145 2001.1
Ultrahydrophobic surface selectively modified by pulse electrodeposition from aqueous dispersion of PTFE particles Reviewed
T Abe, M Esashi
TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 1044 - 1047 2001
Transition behavior of polyelectrolyte brushes depending on polymer chain density Reviewed
S Hayashi, T Abe, N Higashi, M Niwa, K Kurihara
MOLECULAR CRYSTALS AND LIQUID CRYSTALS 371 349 - 354 2001
High density electrical feedthrough fabricated by deep reactive ion etching of Pyrex glass Reviewed
XH Li, T Abe, YX Liu, M Esashi
14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST 98 - 101 2001
Charge regulation in polyelectrolyte brushes studied by FTIR spectroscopy Reviewed
T Abe, S Hayashi, N Higashi, M Niwa, K Kurihara
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS 169 ( 1-3 ) 351 - 356 2000.9
One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE Reviewed
T Abe, M Esashi
SENSORS AND ACTUATORS A-PHYSICAL 82 ( 1-3 ) 139 - 143 2000.5
Density-dependent jump in compressibility of polyelectrolyte brush layers revealed by surface forces measurement Reviewed
T Abe, N Higashi, M Niwa, K Kurihara
LANGMUIR 15 ( 22 ) 7725 - 7731 1999.10
Interactions between Poly (L-lysine) Brush Layers Studied by Surface forces Measurement Invited Reviewed
K. Kurihara, T. Abe, N. Higashi, M. Niwa
Proceeding of Yamada Conference L Polyelectrolytes 7725 - 7731 1999.10
Transition in Interactions between Polyelectrolyte Brush Layers as Revealed by Surface Forces Measurements Reviewed
Kazue Kurihara, Takashi Abe, Nobuyuki Higashi, Masazo Niwa
Proceedings of Yamada Conference L Polyelectrolytes 443 - 446 1999.4
Direct demonstration of attraction for a complementary pair of apposed nucleic acid base monolayers Reviewed
K Kurihara, T Abe, N Nakashima
LANGMUIR 12 ( 17 ) 4053 - 4056 1996.8
STERIC FORCES BETWEEN BRUSH LAYERS OF POLY(L-GLUTAMIC ACID) AND THEIR DEPENDENCE ON SECONDARY STRUCTURES AS DETERMINED BY FT-IR SPECTROSCOPY Reviewed
K KURIHARA, T ABE, N HIGASHI, M NIWA
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS 103 ( 3 ) 265 - 272 1995.10
DIRECT MEASUREMENT OF SURFACE FORCES BETWEEN MONOLAYERS OF ANCHORED POLY(L-GLUTAMIC ACID) Reviewed
T ABE, K KURIHARA, N HIGASHI, M NIWA
JOURNAL OF PHYSICAL CHEMISTRY 99 ( 7 ) 1820 - 1823 1995.2
SURFACE FORCES BETWEEN MONOLAYERS OF END-ANCHORED POLYELECTROLYTE LAYERS - STRUCTURAL CHANGES AND INTERACTIONS Reviewed
K KURIHARA, T ABE, T KUNITAKE, N HIGASHI, M NIWA
ADVANCED MATERIALS '93, II - A & B 15 ( A & B ) 517 - 520 1994
Flexible Pressure and Bend Sensor for Combination Tactile Sensing
寒川雅之, 高橋拓海, 富田亮, 安部隆, 鳴海敬倫
電子情報通信学会技術研究報告 119 ( 103(OME2019 12-16) ) 7‐10 2019.6
フッ素エラストマとCNT分散樹脂を用いたフレキシブル圧力・曲げセンサの基礎検討
高橋拓海, 富田亮, 安部隆, 鳴海敬倫, 寒川雅之
電気学会全国大会講演論文集(CD-ROM) 2019 ROMBUNNO.3‐164 2019.3
高プロトン伝導性スルホン化ポリイミド薄膜における構造規則性と分子量の相関
長尾祐樹, 小野祐太朗, 高倉健作, 後藤崚介, 末次輝太, 原光生, 永野修作, 安部隆
応用物理学会秋季学術講演会講演予稿集(CD-ROM) 79th ROMBUNNO.19a‐211A‐8 2018.9
長尾祐樹, 高倉健作, 小野祐太朗, 後藤崚介, 末次輝太, 原光生, 永野修作, 安部隆
高分子学会予稿集(CD-ROM) 67 ( 2 ) ROMBUNNO.1O14 2018.8
34 4p 2017.10
34 6p 2017.10
Development and evaluation of wirelessly excited QCM sensor for thermogravimetric analysis
34 4p 2017.10
Warm/cool and Texture Combo Evaluation for Fabrics by MEMS Tactile Sensor
34 5p 2017.10
Development of Light and Force Sensitive MEMS Sensor for Monitoring Skin Conditions
34 1 - 4 2017.10
Development of Wirelessly Excited Dual Mode QCM Sensor
34 1 - 4 2017.10
長尾祐樹, KARTHIK Krishnan, 小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆
高分子学会予稿集(CD-ROM) 66 ( 2 ) ROMBUNNO.2G13 2017.9
スルホン化ポリイミド薄膜における側鎖構造のプロトン伝導性への影響
小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆, 長尾祐樹
高分子学会予稿集(CD-ROM) 66 ( 2 ) ROMBUNNO.2U10 2017.9
スルホン化ポリイミド薄膜の組織構造規則性・周期性が高プロトン伝導性へ与える影響
長尾祐樹, KARTHIK Krishnan, 小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆
応用物理学会秋季学術講演会講演予稿集(CD-ROM) 78th ROMBUNNO.5p‐C13‐9 2017.8
2017 ( 14 ) 5 - 9 2017.6
水で組織構造化するスルホン化ポリイミド薄膜におけるプロトン伝導性へのキャスト溶媒依存性
長尾祐樹, KARTHIK Krishnan, 小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆
高分子学会予稿集(CD-ROM) 66 ( 1 ) ROMBUNNO.3G11 2017.5
小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆, 長尾祐樹
日本化学会春季年会講演予稿集(CD-ROM) 97th ROMBUNNO.4A2‐05 2017.3
2017 ( 1 ) 25 - 28 2017.3
2016 ( 49 ) 41 - 46 2016.10
33 1 - 4 2016.10
33 1 - 4 2016.10
33 1 - 4 2016.10
33 1 - 4 2016.10
33 1 - 6 2016.10
Proximity Measurement with Frequency-modulated Probe Light Using Proximity and Tactile Combo Sensor
33 1 - 4 2016.10
Development of Self-heated Stage Suitable for Thermal Reactive Ion Etching of the Functional Metals
33 1 - 4 2016.10
小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆, 長尾祐樹
高分子学会予稿集(CD-ROM) 65 ( 2 ) ROMBUNNO.2X12 2016.8
Development of dual channel type contactless liquid sensor using a quartz oscillator circuit
2016 ( 9 ) 25 - 27 2016.6
Optimization of Optical Sensitivity for Proximity and Tactile Combo Sensor
2016 ( 8 ) 33 - 37 2016.3
Shape optimization of combo sensor using quartz crystal resonator for liquid analysis
32 1 - 4 2015.10
Evaluation and fabrication of Gaussian-shaped AT-cut quartz crystal resonator
32 1 - 4 2015.10
Dual-frequency type contactless chemical combo sensor based on quartz oscillator
32 1 - 4 2015.10
Development of miniature thermogravimetric analysis system by using a quartz crystal microbalance
32 1 - 4 2015.10
時間応答性の異なる検知部を集積したマイクロカンチレバー型 触覚センサの基礎検討
河野 壮, 三原 雅人, 安部 隆, 奥山 雅則, 野間 春生, 寒川 雅之
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 32 1 - 4 2015.10
32 1 - 5 2015.10
Thermal Reactive Ion Etching of Titanium Using a Self-heated Stage and Its Optimization
32 1 - 5 2015.10
1P1-V05 Characterization of Surface Texture Depending on Hardness, Thickness, and Roughness Using MEMS Tactile Sensor
TAKAHASHI Kenta, ABE Takashi, OKUYAMA Masanori, NOMA Haruo, SOHGAWA Masayuki
2015 "1P1 - V05(1)"-"1P1-V05(2)" 2015.5
2A2-R03 Development of Liquid Concentration Sensor Using Crystal Oscillator Circuit Embedded in a Robotic Artificial Skin
YANAGITA Yuta, SOHGAWA Masayuki, ABE Takashi
2015 "2A2 - R03(1)"-"2A2-R03(2)" 2015.5
2015 ( 1 ) 41 - 44 2015.3
MEMS加工技術とその応用 Invited
寒川 雅之, 安部 隆
機械の研究 67 ( 2 ) 99 - 105 2015.2
Analysis of Proximity Sensing for the Multimodal Sensor of Proximity and Touch Force
31 1 - 4 2014.10
2A2-W06 Development of non-contact type alcohol concentration detection method using a quartz crystal resonator(Fuctional Interface)
SUSA Tsubasa, SOHGAWA Masayuki, ABE Takashi
2014 "2A2 - W06(1)"-"2A2-W06(2)" 2014.5
MEMS触覚センサによる物体表面質感の計測法
渡部公介, 金島岳, 奥山雅則, 野間春生, 東輝明, 安部隆, 寒川雅之
電気学会全国大会講演論文集(CD-ROM) 2014 2014
光・ひずみ複合MEMSセンサを用いた近接覚・触覚マルチモーダル計測
野沢瑛斗, 横山輔久登, 金島岳, 奥山雅則, 安部隆, 野間春生, 東輝明, 寒川雅之
日本機械学会ロボティクス・メカトロニクス講演会講演論文集(CD-ROM) 2014 2014
6PM3-PMN-050 Optimization of electrode design for a QCM based odor sensor using thermal desorption spectroscopy
Sakai Jumpei, Iida Naoyuki, Sohgawa Masayuki, Abe Takashi
2013 ( 5 ) 225 - 226 2013.11
5PM3-PMN-051 Development of dual quartz sensor for liquid analysis using leakage electric field
Imai Hiroaki, Takeishi Taichi, Sohgawa Masayuki, Abe Takashi
2013 ( 5 ) 97 - 98 2013.11
ホローカソード型高密度プラズマ源の開発および微細パターン作製への応用
鍋澤浩文, 人母岳, 加藤裕史, 安部隆, 浅地豊久
富山県工業技術センター研究報告 ( 27 ) 49 2013.7
単一MEMSセンサ素子による近接覚・触覚計測手法の検討
横山輔久登, 金島岳, 奥山雅則, 安部隆, 寒川雅之, 野間春生, 東輝明
センサ・マイクロマシンと応用システムシンポジウム(CD-ROM) 30th 2013
デスクトップDRIEを用いたチタニウム微細加工
山田悠貴, 田村卓也, 加勢彩乃, 山田周史, 浅地豊久, 人母岳, 鍋澤浩文, 安部隆
日本機械学会マイクロ・ナノ工学シンポジウム講演論文集 4th 233 - 234 2012.10
MEMS応用のためのチタンDRIE技術の開発
山田悠貴, 田村卓也, 浅地豊久, 人母岳, 鍋澤浩文, 安部隆
応用物理学会学術講演会講演予稿集(CD-ROM) 73rd ROMBUNNO.12A-E1-12 2012.8
ホローカソード型高密度プラズマ源の開発および微細パターン作製への応用
鍋澤浩文, 浅地豊久, 加藤裕史, 安部隆
富山県工業技術センター研究報告 ( 26 ) 65 2012.7
圧電材料用卓上型プラズマエッチング装置の開発
鍋澤浩文, 浅地豊久, 安部隆
富山県工業技術センター研究報告 ( 25 ) 61 2011.7
長尾祐樹, 松井淳, 安部隆, 佐多教子, 宮下徳治, 湯上浩雄
日本化学会講演予稿集 90th ( 2 ) 446 2010.3
三宅 丈雄, 安部 隆, 西澤 松彦
ナノ医工学年報 3 ( 1 ) 35 - 44 2009
Surface Modification with Electrically Conducting Polymers as a Cell Interfacing Material
KAMIYA Takashi, KAJI Hirokazu, ABE Takashi, NISHIZAWA Matsuhiko
2008 ( 6 ) 37 - 41 2008.6
3D Microfabrication of Quartz-crystal using Dry Etching for Sensor Applications
KATO Hiroshi, KISHI Hiroki, NISHIZAWA Matsuhiko, ABE Takashi
2007 ( 35 ) 13 - 16 2007.12
Surface Modification of Polypyrrole-Coated Electrodes and its Application to Cell Stimulation Electrodes
KITAZUME Takahiro, KAMIYA Takashi, KAJI Hirokazu, ABE Takashi, NISHIZAWA Matsuhiko
2007 ( 7 ) 19 - 23 2007.7
A study of enzyme-based microfluidic biofuel cell
ASAI Tatsuya, TOGO Makoto, TAKAMURA Akimasa, KAJI Hirokazu, ABE Takashi, NISHIZAWA Matsuhiko
2007 ( 7 ) 111 - 114 2007.7
電気化学バイオリソグラフィーによる微小流路内へのタンパク質の局所固定化
梶 弘和, 月舘 和人, 安部 隆
Proceedings of the Chemical Sensor Symposium 39 124 - 126 2005.4
521 Development of convex-shaped quartz-crystal resonator by using MEMS fabrication technology
SHIMAMOTO Hisanori, SAKATA Eiji, NISHIZAWA Matsuhiko, ABE Takashi
2005 ( 40 ) 224 - 225 2005.3
アーチ状ECRプラズマによる難加工材料の高速エッチングプロセス
鍋沢浩文, 浅地豊久, 金沢元一, 安部隆, 石井成行
応用物理学会学術講演会講演予稿集 64th ( 1 ) 113 2003.8
ガラス基板貫通配線を用いたアレイMEMSの大口径ウェハ対応プロセス
李興華, 安部隆, 原基揚, 江刺正喜
センサ・マイクロマシンと応用システムシンポジウム講演概要集 20th 97 2003.7
Electrical Modification on Conductive Polymer using a Scanning Probe Microscope Reviewed
Shinya Yoshida, Takahito Ono, Takashi Abe, Masayoshi Esashi
Proceedings of the 20th Sensor Symposium 14 411 - 414 2003.7
小野 崇人, 田中秀治, 安部隆, 江刺 正喜
計測と制御 42 ( 1 ) 5 - 11 2003.1
Fabrication of microprobe array with sub-100nm nano-heater for nanometric thermal imaging and data storage Reviewed
D. W. Lee, T. Ono, T. Abe, M. Esashi
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) 204 - 207 2001
A thermomechanical relay with microspring contact array
YX Liu, XH Li, T Abe, Y Haga, M Esashi
14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST 220 - 223 2001
マルチチャンネル水晶マイクロバランスの製作とケモメトリック分析への応用
安部 隆, 江刺 正喜
Molecular electronics and bioelectronics 11 ( 2 ) 127 - 137 2000.8
One-chip multi-channel QCM for liquid analysis
ABE Takashi, ESASHI Masayoshi
1999 ( 43 ) 23 - 26 1999.11
One-chip multi-channel QCM fabricated by Deep RIE
ABE Takashi, ESASHI Masayoshi
1999 ( 28 ) 57 - 62 1999.9
日本機械学会 マイクロ・ナノ工学部門 貢献表彰
2022.11 日本機械学会
安部 隆
第35回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞
2018.11 電気学会 センサ・マイクロマシン部門 水晶発振回路式液体濃度センサの炭酸濃度非接触測定への応用
小黒 悠, 谷村実紀, 矢田直人, 寒川雅之, 安部 隆
優秀論文発表賞
2016.10 電気学会 センサ・マイクロマシン部門総合研究会 水晶発振回路を用いた2チャンネル型非接触液体センサの開発
矢田 直人, 寒川 雅之, 安部 隆
第33回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞
2016.10 電気学会センサ・マイクロマシン部門 真空中での水晶振動子式小型熱重量分析センサの昇温特性評価
和田 涼介, 寒川 雅之, 安部 隆
第31回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞
2014.10 電気学会センサ・マイクロマシン部門 非接触型液体濃度検出用水晶センサ
須佐 翼, 渡部 尊, 寒川 雅之, 安部 隆
回路レス温度補正が可能な実装基板一体型水晶振動子によるオンサイト計測の革新
Grant number:24K01317
2024.4 - 2028.3
System name:科学研究費助成事業
Research category:基盤研究(B)
Awarding organization:日本学術振興会
安部 隆
Grant amount:\17680000 ( Direct Cost: \13600000 、 Indirect Cost:\4080000 )
特殊金属/合金マイクロマシンの創成
Grant number:21K18870
2021.7 - 2024.3
System name:科学研究費助成事業
Research category:挑戦的研究(萌芽)
Awarding organization:日本学術振興会
安部 隆
Grant amount:\6240000 ( Direct Cost: \4800000 、 Indirect Cost:\1440000 )
申請研究では計画研究として3つの研究項目がある。以下に、各々の研究項目の進捗状況を説明する。研究項目1であるフレキシブルで強靭なTitanium On Insulator (TOI)ウェハを用いた圧力、力、アクチュエータの実現のためには、シリコンMEMSにおける酸化膜に対応する絶縁薄膜の成膜技術が重要である。さらに絶縁膜を残したままで鏡面加工する技術も重要である。熱膨張係数が近く、絶縁性が高いアルミナ薄膜を絶縁膜としたTOIウェハについて、薄膜を残したままでそのままDRIE加工をしても元のチタン基板よりも鏡面状態で深掘りすることに成功した。本技術は、日本機械学会のマイクロナノ工学部門大会において若手優秀講演賞を受賞した。なお、本研究成果に関わる予備研究で実施していたドライナノ研磨技術が英文誌に掲載された。研究項目2のマイクロ電解工業に関する挑戦については、評価のための設備立ち上げを進めており、電気化学微細加工装置のセットアップを終えた段階である。次年度に試験を実施する予定である。研究項目3については、フッ素樹脂とアンカー効果を有するチタンウェハの接合に成功した。接合部は母材よりも強固であり、引っ張り試験では把持部のチタン板が破断した。本研究成果は、2022年度の徳島で開催される関連学会で発表予定である。なお、上記の計画研究以外のチタンマイクロマシニングの応用として、主刃の周縁にマイクロ刃を有するマイクロサージェリー用メスの試作も実施し、より低い力で切開できるようになった。本研究成果は、第38回センサ・マイクロマシンと応用システムシンポジウムにて、速報ポスター賞にノミネートされた。マイクロ構造形成と切れ味の相関に関するメカニズム解明は刃物の機能性を生み出す可能性を有し新しい分野になると期待される。
しなやかさ・タフさ・機能性を有する機能性メタルベースMEMSのスマート生産技術
2016 - 2018
System name:基盤研究(B)
Awarding organization:文部科学省
安部 隆
Authorship:Principal investigator Grant type:Competitive
マイクロ・ナノ流体回路融合発振回路式化学演算チップの開発
2016 - 2017
System name:挑戦的萌芽研究
Awarding organization:文部科学省
安部 隆
Authorship:Principal investigator Grant type:Competitive
機能材料をベースとしたMEMSのための熱アシスト型反応性イオンエッチングの試験研究,
2015 - 2016
System name:マッチングプランナープログラム
Awarding organization:JST
安部 隆
Authorship:Principal investigator Grant type:Competitive
液体燃料、潤滑剤の効率的利用のための非接触型液体濃度センサの開発
2014 - 2015
System name:研究成果研究成果展開事業 A-STEP FSステージ
Awarding organization:JST
安部 隆
Authorship:Principal investigator Grant type:Competitive
小型・高精度・高速マルチ化学センシングシステムの実用化への展開
2013 - 2014
System name:知財活用促進ハイウェイ
Awarding organization:JST
安部 隆
Authorship:Principal investigator Grant type:Competitive
ワンチップ型バルク弾性波型メタノール濃度センサの開発
2011.12 - 2012.6
System name:研究成果最適支援プログラムA-STEP探索タイプ
Awarding organization:JST
安部 隆
Authorship:Principal investigator Grant type:Competitive
A Gaussian Shaped Resonator for Sensing Single Cell
Grant number:23510126
2011 - 2013
System name:Grants-in-Aid for Scientific Research
Research category:Grant-in-Aid for Scientific Research (C)
Awarding organization:Japan Society for the Promotion of Science
ABE Takashi
Authorship:Principal investigator Grant type:Competitive
In this study, we tried to improve the sensitivity of quartz crystal sensor for sensing single cell. The enhancement of mass sensitivity was realized by shaping the resonator based on the simulation results. As the result, the mass sensitivity was improved at least one order of magnitude and the responses show a linear relationship between mass changes and frequency changes.
The developed method is expected to be used for evaluation of nanomaterials in addition to measurements of single cell.
外乱下においてサブ原子層レベルの感度を有するQCMの開発
2006.6 - 2010.6
System name:産業技術研究助成事業(若手グラント)
Awarding organization:NEDO
安部 隆
Authorship:Principal investigator Grant type:Competitive
Research of a nano-energy system creation
Grant number:18GS0203
2006 - 2010
System name:Grants-in-Aid for Scientific Research
Research category:Grant-in-Aid for Creative Scientific Research
Awarding organization:Japan Society for the Promotion of Science
KUWANO Hiroki, NISHIZAWA Matsuhiko, ONO Takahito, ORIMO Shinichi, TANAKA Shuji, NAGASAWA Sumito, ANBE Takashi, OKAMOTO Hiroshi, ONUKI Teppei, CAO Ziping, HAMATE Yuichiro, OGUCHI Hiroyuki
Grant amount:\413400000 ( Direct Cost: \318000000 、 Indirect Cost:\95400000 )
Micro power generator required in the field of telecommunication, medicine/welfare and so on has been developed. We established fundamental technologies for the micro generator such as materials, highly efficient optimum design. We have succeeded high-power micro fuel cells by applying micro combinatorial and vacuum insulation technology, long life high-power bio-fuel cells by applying carbon nano-tube enzyme electrode and auto-stack structure technology, and highly efficient vibration-based micro energy harvester by applying self-standing electret film and broadband vibration structure technology. In addition, solid electrolyte materials for low temperature operation and micro detonation technology were established as innovative basic technologies.
Development of real-time measurement techniques of surface reactions at the sub-atomic layer level under active environmental control
Grant number:18681017
2006 - 2008
System name:Grants-in-Aid for Scientific Research
Research category:Grant-in-Aid for Young Scientists (A)
Awarding organization:Japan Society for the Promotion of Science
ABE Takashi
Authorship:Principal investigator Grant type:Competitive
マイクロ電気化学システムによる細胞接着の3次元操作
Grant number:18048004
2006 - 2007
System name:科学研究費助成事業
Research category:特定領域研究
Awarding organization:日本学術振興会
西澤 松彦, 安部 隆, 梶 弘和
Grant amount:\3200000 ( Direct Cost: \3200000 )
本研究は,電気化学反応によって細胞接着を操作する技術「電気化学バイオリソグラフィー」を3次元構造体への細胞接着の操作へ拡張し,細胞培養担体(スキャホールド)内部への異種細胞から成る反復構造の作製へのチャレンジである。先ず,ガラスとPDMSからなるマイクロ流路デバイスの内部に細胞の共培養系を作製する事に成功した。あらかじめ流路の内壁にマイクロ電極のアレイを作製しておき,流路内部をヘパリン被覆した後にKBr水溶液を充填して電極に1.5Vを印加すると,電極の対面部位のヘパリンが脱着して細胞接着性へと変化し,細胞培養が出来た。隣接するマイクロ電極で同様の操作を違う種類の細胞に対して行なうと,流路内に異種細胞を配列させ,共培養化する事ができた。次に,あらかじめ電極を配置しておく必要が無いシステムの開発を意図して,針電極による細胞接着誘導を検討した。シリコンゴムチューブの内壁をヘパリン修飾し,そこへ針電極を刺して上述の反応を行う事によって,電極を刺した領域のみに細胞接着を誘導できた。さらに共培養化も出来た。この結果は,3次元構造体の内部に共培養系を造り込むという当初の目的を達成した典型的な一例であるとともに,血管内皮細胞の培養によって,血管を模擬したせん断応力と引っ張り応力が負荷できるモデルとなる可能性を有している。これは血流と細胞動態との関連を探るトレース実験を可能とする,これまでに無かった実験系を提供する可能性を有している。
Development of Electrochemical Biolithograpy and application to Cellular Chips
Grant number:17310080
2005 - 2007
System name:Grants-in-Aid for Scientific Research
Research category:Grant-in-Aid for Scientific Research (B)
Awarding organization:Japan Society for the Promotion of Science
NISHIZAWA Matsuhiko, ABE Takashi
Grant amount:\14870000 ( Direct Cost: \14000000 、 Indirect Cost:\870000 )
Microfluidic systems have been widely investigated for biological applications and hold great promise in the development of diagnostic assays and bioreactors. The combination of the surface patterning techniques with the microfluidic systems paves the way to multi-functional, high-throughput, and cost-effective analysis, in which the "real-time" and "on-demand" micropatterning of bioelements within the microchannels would be essentially required since such delicate materials are unstable to desiccation, oxidation, and heat. However, most of the photolithography-based techniques are unable to be applied within the sealed microchannels.
In this research, we have developed a novel technique "electrochemical bio-lithography", which enables the localized immobilization of proteins and cells within 3D microstructures such as microfluidic channels. The principle of the technique is based on our finding that the albumin- or heparin-coated surfaces, initially anti biofouling, rapidly becomes protein- and cell-adhesive upon exposure to the reactive oxidizing agent such as hypobromous acid, which can be produced by the electrochemical oxidation of bromide ion in a biological buffer solution. Since this lithography can be conducted under typical physiological conditions, it enables the spatiotemporal control of cell adhesion and growth on substrates; it facilities the stepwise immobilization of multitype protein arrays and multiphenotype cell arrays. And importantly, this technique is simple enough to be integrated into the miniaturized and semi-closed systems such as microfluidic devices, indicating the possible "on-demand" immobilization of proteins and living cells just prior to use of the microfluidic biodevices. In addition, we have achieved rapid cellular arrangement in the semi-closed microfluidic channel by combining electrochemical bio-lithography with negative dielectrophoresis (DEP).
マイクロ・ナノマシニングを用いた水晶振動子型分子認識チップの創製
2002.10 - 2006.3
System name:戦略的研究創造研究推進事業(さきがけタイプ)
Awarding organization:JST
安部 隆
Authorship:Principal investigator Grant type:Competitive
微小空間における燃焼の制御・利用に関する研究
Grant number:14655077
2002 - 2003
System name:科学研究費助成事業
Research category:萌芽研究
Awarding organization:日本学術振興会
田中 秀治, 安部 隆, 小野 崇人, 江刺 正喜
Grant amount:\3300000 ( Direct Cost: \3300000 )
微小空間における燃焼の応用として、マイクロ燃料改質器の熱源、マイクロ熱電発電器、マイクロロケットスラスターを取り上げ、試作品の製作と試験とを中心とする実証的な研究を行った。
[マイクロ燃料改質器]携帯機器内で液体燃料から水素を生成するマイクロ燃料改質器を開発した。シリコンのエッチング・酸化・酸化シリコンによるエッチング孔の埋め戻しによって、断熱のための自己支持膜を強度が確保される構造に改良し、改良したマイクロ燃料改質器において水素の自立燃焼とメタノールの水蒸気改質とを確認した。
[マイクロ熱電発電]触媒燃焼器を熱源とするICチップ大の熱電発電器を開発した。メタノールを燃料にして200mW以上の出力、および約2.5%の効率を実現した。また、触媒燃焼器に燃料の蒸気圧によって空気を供給するマイクロエゼクタを試作した。エゼクタの構造、流路の形状、燃料の供給圧などパラメータにして一連の実験を行い、ブタンの完全燃焼に必要な量の空気が供給できることを確認した。さらに、そのエゼクタを用いてブタンの燃焼に成功した。
[マイクロロケットスラスター]10kg級の超小形人工衛星の姿勢制御をするマイクロ固体ロケットアレイスラスターを開発した。本スラスター上には、直径0.8mmの使い切り固体ロケットが多数並べられており、スラストはデジタル的に制御される。点火の確実性を向上させるために、燃料の充填方法を変更し、種々の方法で燃料を充填したスラスターの真空燃焼試験を行った。その結果に基づいて、燃料の充填方法をはじめとして、燃料の組成、スラスターの構造などを見直している。
マルチチャンネル水晶振動子マイクロバランスの超小型化、高感度化に関する研究
Grant number:14655313
2002 - 2003
System name:科学研究費助成事業
Research category:萌芽研究
Awarding organization:日本学術振興会
江刺 正喜, 安部 隆
Grant amount:\2900000 ( Direct Cost: \2900000 )
マイクロ・ナノマシニング技術を用いて、単一水晶基板上に多数の振動子が配列したマルチチャンネル型の水晶振動子マイクロバランス(QCM)を製作した。このマルチチャンネル型QCMは、各々の振動子に異なる感応膜を被覆し周波数応答を比較することでケモメトリック分析等が可能な画期的なセンサである。このQCMセンサの質量検出感度は周波数の自乗に逆比例するために板厚が薄いほど高感度になることが知られている。これまでに、水晶を鏡面のまま微細加工できる反応性イオンエッチング技術を開発し、その微細加工技術を用いて水晶板を部分的に薄くし高感度化を達成しかつ干渉せずに振動する逆メサ構造の振動子を製作してきた。その結果、支持損失を抑えて高いQ値(低損失)となる最適形状条件を実験的に見い出した。このように、高感度な振動子の製作方法が確立した一方、振動子を薄くするあるいは小さくすると粘弾性負荷に対して不安定になるという新たな問題が明らかになった。これを解決するために振動子中央部に振動エネルギーが集中するように水晶板の板厚を変える加工技術を開発した。具体的には、ホトレジストをリフローによりレンズ形状にし鏡面エッチング技術でこの形状を水晶板に転写することでコンベックス形状の大量一括生産を実現した。上記方法で製作した振動子の振動特性を評価し、未加工の場合と比較してQ値が二倍高くかつ溶液中での振動特性が優れていること等を明らかにした。
総合技術科学演習
先端研究入門
機械工学実験IV
機械工学実験III
機械工学概論
数物演習
工学リテラシー入門(力学分野)
物理工学実験
材料生産システム博士特定研究Ⅰ
外国語論文解説・討論Ⅰ
材料生産システム博士セミナーⅠ
機械科学コース演習
機械工学実験I
卒業研究
卒業研修
英文輪読I
英文輪読II
機械工学演習
機械工学実験II
機械科学セミナーⅠ
機械科学文献詳読Ⅰ
材料生産システム特定研究Ⅱ
研究発表演習・発表
機械科学文献詳読Ⅱ
機械科学特別演習
材料生産システム特定研究Ⅰ
機械科学セミナーⅡ
技術英語入門
くらしを支える機械システム工学
先端マイクロマシン工学特論
工学リテラシー入門(機械システム工学科)
自然科学総論Ⅱ
マイクロマシン
応用数理A
マイクロマシン工学特論