Updated on 2026/03/10

写真a

 
ABE Takashi
 
Organization
Academic Assembly Institute of Science and Technology SEISAN DESIGN KOUGAKU KEIRETU Professor
Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Mechanical Science and Engineering Professor
Faculty of Engineering Department of Engineering Professor
Title
Professor
External link

Degree

  • 博士(工学) ( 1997.3   名古屋大学 )

Research Interests

  • Tough MEMS

  • Micro fabrication

  • MEMS

  • Quartz MEMS

  • Sensor

Research Areas

  • Informatics / Mechanics and mechatronics

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Measurement engineering

  • Nanotechnology/Materials / Nano/micro-systems

  • Informatics / Robotics and intelligent system

Research History (researchmap)

  • Niigata University   Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Mechanical Science and Engineering   Professor

    2010.4

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  • Tohoku University   Graduate School of Engineering   Associate Professor

    2003.4 - 2010.3

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  • Japan Science and Technology Agency

    2002.11 - 2006.3

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  • Tohoku University   Faculty of Engineering   Research Assistant

    2001.4 - 2003.3

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Research History

  • Niigata University   Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Mechanical Science and Engineering   Professor

    2010.4

  • Niigata University   Faculty of Engineering Department of Mechanical and Production Engineering   Professor

    2010.4

Education

  • Nagoya University   Graduate School, Division of Engineering

    - 1997.3

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    Country: Japan

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  • Nagoya University   Faculty of Engineering

    - 1992.3

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    Country: Japan

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Professional Memberships

Committee Memberships

  • 日本機械学会   代表会員  

    2023.4   

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    Committee type:Academic society

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  • 日本機械学会 マイクロ・ナノ工学部門   第13回マイクロ・ナノ工学シンポジウム実行委員長  

    2022 - 2023   

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  •   Transducers2023 組織委員会 委員  

    2021 - 2024   

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    Committee type:Academic society

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  • 電気学会 センサ・マイクロマシン部門   監事  

    2021 - 2023   

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  • 日本機械学会 マイクロナノ工学部門   第12回マイクロ・ナノ工学シンポジウム 論文委員長  

    2020 - 2021   

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  • 電気学会   センサ・マイクロマシン部門研究調査運営委員会 委員長  

    2020 - 2021   

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    Committee type:Academic society

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  • IEEJ Sensors and Micromachines   Vice president  

    2019 - 2021   

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    Committee type:Academic society

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  • IEEJ Sensors and Micromachines   Director, Editorial and Publishing Affairs  

    2019 - 2020   

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    Committee type:Academic society

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  • 日本機械学会 マイクロ・ナノ工学部門   表彰委員会 委員長  

    2019 - 2020   

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    Committee type:Academic society

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  • 日本学術振興会   第150委員会 委員  

    2018 - 2020   

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    Committee type:Academic society

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  • 電気学会   代議員(社員)  

    2016 - 2020   

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    Committee type:Academic society

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  • 日本機械学会   マイクロ・ナノ工学部門 代議員  

    2016 - 2019   

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    Committee type:Academic society

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  • 電気学会 センサ・マイクロマシン部門大会   論文委員長  

    2015 - 2016   

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    Committee type:Academic society

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  • 電気学会 センサ・マイクロマシン部門   編修長(主査)  

    2013 - 2014   

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    Committee type:Academic society

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Papers

  • Novel Estimation Method of Force Application Point for Cantilever‐Type MEMS Tactile Sensor

    Harufumi Hosokawa, Ryusuke Mitobe, Takashi Abe, Masayuki Sohgawa

    Electrical Engineering in Japan   218 ( 3 )   77 - 84   2025.9

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    ABSTRACT

    In this paper, we propose a new evaluation method for the spatial distribution of sensitivity to force in a cantilever‐type MEMS tactile sensor developed in our laboratory. By combining the responses of two strain gauges attached to the cantilever with different coefficients, it is shown that the spatial distribution of sensitivity can be controlled, and the force application position and the magnitude of force can be predicted with high accuracy.

    DOI: 10.1002/eej.23525

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  • Novel Estimation Method of Force Application Point for Cantilever-Type MEMS Tactile Sensor

    Harufumi Hosokawa, Ryusuke Mitobe, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   145 ( 7 )   144 - 150   2025.7

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.145.144

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  • Evaluation of Omni-Directional Tactile Sensor for Force Vector Measurement

    Ryusuke Mitobe, Yuji Takahashi, Takashi Abe, Haruki Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   145 ( 6 )   96 - 102   2025.6

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.145.96

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  • Development of Technology for Measuring Water Retention and Permeability of Concrete Using Quartz Complex Capacitance Sensor

    Mahiro Kirinashizawa, Keigo Iwamoto, Taketeru Yokoyama, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   145 ( 6 )   109 - 114   2025.6

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.145.109

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  • Non-destructive Monitoring the Hydration of Cement-based Materials Using a Quartz Complex Capacitive Sensor

    Taichi Miura, Keigo Iwamoto, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   145 ( 5 )   85 - 90   2025.5

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.145.85

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  • Quartz Oscillator Based Complex Capacitive Sensor for Nondestructive Sensing Inside RC Structures

    Taketeru Yokoyama, Ryosuke Takahashi, Keigo Iwamoto, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   108 ( 1 )   2025.1

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    ABSTRACT

    This research developed a complex capacitance sensor using a quartz oscillator for non‐invasively imaging of a rebars position in reinforced concrete structures. The use of different electrode structures and a floating electrode located on the backside allowed for control of the sensing depth. This technology is expected to realize a simpler maintenance and management process for infrastructure quality.

    DOI: 10.1002/ecj.12483

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  • Effect of elastomer materials on the time response characteristics of MEMS tactile sensors

    Yusaku AIBA, Ryusuke MITOBE, Akiyoshi KUSANO, Akiomi USHIDA, Takashi ABE, Masayuki SOHGAWA

    Mechanical Engineering Journal   12 ( 4 )   25 - 00098   2025

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    Publishing type:Research paper (scientific journal)   Publisher:Japan Society of Mechanical Engineers  

    DOI: 10.1299/mej.25-00098

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  • MEMS Tactile Sensor for Mimicking the Response of Human Tactile Sensation

    Ryusuke Mitobe, Zhikai Geng, Takashi Abe, Kensuke Kanda, Masayuki Sohgawa

    Sensors and Materials   36 ( 12 )   5129 - 5129   2024.12

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    Publishing type:Research paper (scientific journal)   Publisher:MYU K.K.  

    DOI: 10.18494/sam5241

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  • Quartz Oscillator based Complex Capacitive Sensor for Nondestructive Sensing Inside RC Structures

    Taketeru Yokoyama, Ryosuke Takahashi, Keigo Iwamoto, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   144 ( 12 )   396 - 401   2024.12

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.396

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  • Dependence of Response to Bending and Torsional Deformation on Sealing Depth of MEMS Tactile Sensor in Elastomer Sheet

    Hiiro Wakabayashi, Taisei Nambu, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   144 ( 11 )   369 - 374   2024.11

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.369

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  • Integration of Light and Temperature Sensing Elements for Combined Visual and Tactile Measurement of Resin Compounds

    Mako Nakamura, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   144 ( 9 )   252 - 257   2024.9

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.252

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  • Trace Measurement by Fingerprint Type Surface Tactile Sensor for Texture Detection

    So Okako, Yosuke Tsukiyama, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   144 ( 9 )   247 - 251   2024.9

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.247

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  • 支持基板上ATカット水晶振動子の形状の最適化

    Tomoya Nitta, Kuraudo Yasuda, Keito Morohashi, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   144 ( 6 )   136 - 140   2024.6

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.136

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  • Development of a degradation method for evaluation of edible oils using a contactless quartz crystal complex capacitance sensor

    Yu Oshima, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   107 ( 2 )   2024.5

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    Abstract

    A method for evaluating the degradation of edible oils using a contactless quartz‐based capacitive detector is reported herein. Oils easily oxidize, resulting in loss of flavor and nutritional value. Therefore, it is necessary to determine oil degradation. We attempted to evaluate the degradation of edible oils by heat and light using this sensor. The results showed the degradation of heated and irradiated oil could be detected. This is due to the compound was formed during heating and irradiation.

    DOI: 10.1002/ecj.12459

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  • Development of a Degradation Method for Evaluation Edible Oils Using a Contactless Quartz Crystal Complex Capacitance Sensor

    Yu Oshima, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   144 ( 5 )   111 - 116   2024.5

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.111

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  • Sensitivity Dependence Analysis of Multi-axis Tactile Sensors on the Bump Position of Contact Area and Sensing Device Design Based on the Analysis

    Hiiro Wakabayashi, Hideto Kadota, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   144 ( 5 )   77 - 81   2024.5

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.77

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  • Elastomer-embedded MEMS Tactile Sensor for Detecting Normal Force, Bending, and Torsion in Grasping Motion

    So Okako, Taisei Nambu, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   144 ( 1 )   6 - 11   2024.1

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.6

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  • 肌のベタつき感定量評価のための触覚センサによる粘着性計測

    So Okako, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   143 ( 8 )   251 - 255   2023.8

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.143.251

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  • The New Control Method for Detection of Cold‐Warm sensation using a Heater Integrated Tactile Sensor

    Takuma Iwahashi, Naotaka Onda, Hikaru Nagumo, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Electrical and Electronic Engineering   2023.4

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/tee.23813

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  • Temperature characteristics of a thickness shear mode quartz crystal resonator bonded to a support substrate Reviewed

    Hajime Satani, Kuraudo Yasuda, Masayuki Sohgawa, Takashi Abe

    Applied Physics Letters   121 ( 25 )   252903 - 252903   2022.12

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    Authorship:Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:AIP Publishing  

    Thickness shear mode (TSM) resonators consisting of metal films and quartz plates are widely used for sensor applications such as film thickness monitoring, force sensors, and odor sensors. However, the current sensor geometry prevents further improvements in its sensitivity and stability. Thinning the plate is necessary for high sensitivity, and advanced fabrication technologies are required for their commercialization. The solution is to use a support substrate to increase the mechanical strength, which can guide the transmittance of the electric field. Herein, we report a TSM resonator bonded to a support substrate. An AT-cut quartz resonator with a floating electrode on the top side was bonded to the support substrate. Two excitation electrodes were placed under the substrate. The support substrates evaluated in this study included borosilicate glass, Z-cut quartz crystals, and AT-cut quartz crystal plates. The quartz crystal resonator (QCR) bonded to the AT-cut quartz crystal plate and positioned at 90° to the crystallographic x-axis shows an excellent temperature coefficient of frequency of −60 ± 14 ppb/°C for a temperature range 11–40 °C. The proposed method reduces temperature sensitivity to 1/4 or less compared to that without a substrate. Furthermore, the resonator could be used as a quartz crystal microbalance. The proposed method may inspire further high-frequency QCR-based biochemical chips or various sensor applications with TSM resonators.

    DOI: 10.1063/5.0132804

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  • Tactile sensor with microcantilevers embedded in fluoroelastomer/PDMS for physical and chemical resistance

    Yuji Takahashi, Takumi Takahashi, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    Electronics and Communications in Japan   105 ( 3 )   2022.8

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/ecj.12369

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12369

  • Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors

    Ren Kaneta, Takumi Hasegawa, Jun Kido, Takashi Abe, Masayuki Sohgawa

    Journal of Robotics and Mechatronics   34 ( 3 )   677 - 682   2022.6

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    Publishing type:Research paper (scientific journal)   Publisher:Fuji Technology Press Ltd.  

    We previously reported a microelectromechanical system tactile sensor with elastomer-embedded microcantilevers. The sensor enabled the gripping control of soft objects by a robotic hand and acquisition of the object surface texture data. However, sensitivity improvement for more precise control and better texture information acquisition is desired. Here, the cantilever size and the sensor’s strain-gauge arrangement were redesigned, resulting in a sensor with significantly improved sensitivity. In addition, we report the sensitivity dependence on the cantilever size.

    DOI: 10.20965/jrm.2022.p0677

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  • Improvement of Durability of Insulation Film for Low-voltage Electrostatic Tactile Display

    Masatoshi Kondo, Junki Satoh, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   142 ( 5 )   85 - 90   2022.5

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.142.85

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  • Tactile Sensor with Microcantilevers Embedded in Fluoroelastomer/PDMS for Physical and Chemical Resistance

    Yuji Takahashi, Takumi Takahashi, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   142 ( 5 )   91 - 96   2022.5

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.142.91

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  • Development of time‐delay analysis method of inductance and capacitance for microfluidic circuit

    Ryo Watanabe, Akira Yoshida, Yota Sato, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   105 ( 1 )   2022.3

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/ecj.12352

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12352

  • Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass

    Naotaka Onda, Takaaki Kozuka, Takashi Abe, Masanobu Isshiki, Satoru Tomeno, Masayuki Sohgawa

    Electrical Engineering in Japan   215 ( 1 )   2022.3

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/eej.23370

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/eej.23370

  • Development of Time-Delay Analysis Method of Inductance and Capacitance for Microfluidic Circuit

    Ryo Watanabe, Akira Yoshida, Yota Sato, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   142 ( 2 )   17 - 20   2022.2

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.142.17

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  • Development of quartz crystal complex capacitive sensor with microelectrode array for sensitization

    Yuki Hashimoto, Takaaki Haino, Masayuki Sohgawa, Takashi Abe

    Electrical Engineering in Japan   214 ( 4 )   2021.12

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/eej.23356

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/eej.23356

  • Fabrication of Heater-Integrated MEMS Tactile Sensor for Evaluation of Warm and Cold Sensation by Touching Glass

    Naotaka Onda, Takaaki Kozuka, Takashi Abe, Masanobu Isshiki, Satoru Tomeno, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   141 ( 10 )   343 - 348   2021.10

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.141.343

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  • Development of Quartz Crystal Complex Capacitive Sensor with Microelectrode Array for Sensitization

    Yuki Hashimoto, Takaaki Haino, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   141 ( 8 )   279 - 283   2021.8

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.141.279

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  • Contactless Endpoint Detection of Gold Etching Using Quartz-Based Capacitive Detector

    Takuro Okuwaki, Takaaki Haino, Masayuki Sohgawa, Takashi Abe

    21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021   1126 - 1129   2021.6

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    Language:English   Publishing type:Research paper (international conference proceedings)   Publisher:Institute of Electrical and Electronics Engineers Inc.  

    DOI: 10.1109/Transducers50396.2021.9495749

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  • Development of dry‐nano‐polishing technique using reactive ion etching for ultra thin titanium wafer

    Teruya Chino, Yuta Watanabe, Yosuke Tsukiyama, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   104 ( 2 )   2021.6

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    Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/ecj.12317

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12317

  • Development of Dry-nano-polishing Technique using Reactive Ion Etching for Ultra Thin Titanium Wafer

    Teruya Chino, Yuta Watanabe, Yosuke Tsukiyama, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   141 ( 4 )   103 - 107   2021.4

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.141.103

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  • Multi-frequency Quartz Oscillator Based Liquid Concentration Sensor with External Magnetic Field for Ion Discrimination

    Hiroki Fujimori, Yuki Togashi, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   140 ( 12 )   349 - 353   2020.12

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.140.349

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  • Contactless Monitoring of Water Treatment Process Using Quartz Oscillator Based Liquid Sensor

    Akira Yoshida, Yu Oguro, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   140 ( 10 )   251 - 255   2020.10

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.140.251

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  • Detection Area Evaluation of Tactile Sensor Using Microcantilever Embedded in Elastomer

    Yuto Abe, Fumitoshi Suga, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   140 ( 10 )   272 - 277   2020.10

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.140.272

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  • Detection of Gripping State Using Tactile Sensors Installed on Handgrip for Tools

    Taisei Nambu, Tomoya Fujihashi, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   140 ( 9 )   228 - 234   2020.9

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.140.228

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  • Development of a self-heated-stage for high-speed process of titanium by reactive ion etching

    Yuya Kiryu, Gang Han, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   103 ( 1-4 )   32 - 37   2020.4

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Wiley-Liss Inc.  

    DOI: 10.1002/ecj.12227

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  • Tactile Sensor with High-Density Microcantilever and Multiple PDMS Bumps for Contact Detection Reviewed International journal

    Tomoya Fujihashi, Fumitoshi Suga, Ryoma Araki, Jun Kido, Takashi Abe, Masayuki Sohgawa

    Journal of Robotics and Mechatronics   32 ( 2 )   accepted   2020.4

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  • Tactile sensor using a microcantilever embedded in fluoroelastomer with resistance to cleaning and antiseptic solutions Reviewed International journal

    Takumi Takahashi, Shuhei Sato, Takashi Abe, Masayuki Sohgawa

    Sensors and Actuators A: Physical   301 ( 1 )   111774   2020.1

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    Language:English   Publishing type:Research paper (scientific journal)  

    DOI: 10.1016/j.sna.2019.111774

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  • Fabrication and Characterization of Microcantilever for Detection of Vibration Sensation in Tactile Sensing Reviewed

    Harutoshi Takahashi, Yuta Namba, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   139 ( 11 )   375 - 380   2019.11

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    Language:Japanese   Publishing type:Research paper (scientific journal)  

    DOI: 10.1541/ieejsmas.139.375

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  • Development of a Self-heated-stage for High Speed Process of Titanium by Reactive Ion Etching Reviewed

    Yuya Kiryu, Gang Han, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   139 ( 10 )   341 - 345   2019.10

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    Language:Japanese   Publishing type:Research paper (scientific journal)  

    DOI: 10.1541/ieejsmas.139.341

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  • 容器内溶液の非接触検査のための水晶発振回路式液体濃度センサの開発 Invited Reviewed

    小黒 悠, 谷村 実紀, 矢田 直人, 寒川 雅之, 安部 隆

    電気学会論文誌E(センサ・マイクロマシン部門誌)   139 ( 7 )   169 - 174   2019.7

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    Language:Japanese   Publishing type:Research paper (scientific journal)  

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  • Tactile Sensor Using Microcantilever Embedded in Fluoropolymer for Water and Ethanol Resistance

    Takumi Takahashi, Shuhei Sato, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII   1925 - 1928   2019.6

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    DOI: 10.1109/TRANSDUCERS.2019.8808646

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  • Design and Evaluation of an Electrode Separated Quartz Crystal Microbalance Array as a Disposable Weighing Dish

    Shunya Uchiki, Ikuto Sato, Masayuki Sohgawa, Takashi Abe

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII   1169 - 1172   2019.6

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    DOI: 10.1109/TRANSDUCERS.2019.8808753

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  • 触覚センサによる多層柔軟物モデルの計測と有限要素解析 Reviewed

    木藤 潤, 阿部 祐太, 佐藤 周平, 安部 隆, 野間 春生, 寒川 雅之

    電気学会論文誌E(センサ・マイクロマシン部門誌)   139 ( 6 )   149 - 154   2019.6

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  • 1滴を評価できる水晶発振回路式粘度・濃度複合センサの作製と評価 Reviewed

    庄司拓人, 江端 亮, 寒川雅之, 安部 隆

    電気学会論文誌E(センサ・マイクロマシン部門誌)   139 ( 4 )   81 - 84   2019.4

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  • Introducing planar hydrophobic groups into an alkyl-sulfonated rigid polyimide and how this affects morphology and proton conductivity Reviewed

    Yuki Nagao, Teppei Tanaka, Yutaro Ono, Kota Suetsugu, Mitsuo Hara, Guangtong Wang, Shusaku Nagano, Takashi Abe

    Electrochimica Acta   300   333   2019.3

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    DOI: 10.1016/j.electacta.2019.01.118

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  • A drug refillable device for transscleral sustained drug delivery to the retina

    Nagai, N., Saijo, S., Song, Y., Kaji, H., Abe, T.

    European Journal of Pharmaceutics and Biopharmaceutics   136   184 - 191   2019.3

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    DOI: 10.1016/j.ejpb.2019.01.024

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  • Development of quartz oscillator based liquid concentration sensor for contactless monitoring of solution in bottle

    Yu Oguro, Miki Tanimura, Naoto Yada, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   139 ( 7 )   169 - 174   2019

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    DOI: 10.1541/ieejsmas.139.169

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  • Fabrication and evaluation of quartz oscillator based viscosity / concentration sensor for a drop sensing

    Takuto Shoji, Ryo Ebata, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   139 ( 4 )   81 - 84   2019

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    DOI: 10.1541/ieejsmas.139.81

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  • Measurement by Tactile Sensor and FEM Analysis of Multi-layered Flexible Model for Skin Diagnosis

    Jun Kido, Yuta Abe, Shuhei Sato, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   139 ( 6 )   149 - 154   2019

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    DOI: 10.1541/ieejsmas.139.149

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  • Multilayered drug delivery sheet that allows minimally invasive delivery to the eye Reviewed

    Kaji H, Sato Y, Nagai N, Abe T

    Transactions of the Annual Meeting of the Society for Biomaterials and the Annual International Biomaterials Symposium   40   564   2019

  • Sensitivity and temperature Characteristics of Tactile Sensor with Cr-N Thin Film Depending on Annealing Temperature

    Homma Haruka, Yonehara Kohei, Abe Takashi, Niwa Eiji, Sohgawa Masayuki

    The Proceedings of the Symposium on Micro-Nano Science and Technology   2019.10   20am2PN343   2019

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    Previously, it was reported that the sensitivity of MEMS tactile sensors could be improved by using Cr-N thin film as a strain gauge. In this study, we investigated changes in the sensitivity and temperature coefficient of resistance to the post-deposition heat treatment temperature of Cr-N thin films. As a result, it was found that the tactile sensor using the Cr-N thin film strain gauge has no temperature dependence of sensitivity. In addition, it was confirmed that the temperature coefficient of resistance has temperature dependence, and that the temperature coefficient of resistance can be brought close to 0 ppm/℃ by changing the heat treatment temperature after film formation.

    DOI: 10.1299/jsmemnm.2019.10.20am2pn343

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  • Microdroplet monitoring using microfluid circuit combined quartz oscillator based capacitive sensor Reviewed

    Roy Ebata, Ryo Sakai, Masayuki Sohgawa, Takashi Abe

    Electronics and communications inJapan   101 ( 12 )   50 - 55   2018.12

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  • 微小流体回路融合型水晶発振回路式容量センサを用いた微小液滴のモニタリング Reviewed

    江端 亮, 坂井 了, 寒川 雅之, 安部 隆

    電気学会論文誌E(センサ・マイクロマシン部門誌)   138 ( 8 )   382 - 386   2018.8

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  • Lyotropic ordering for high proton conductivity in sulfonated semialiphatic polyimide thin films Reviewed

    K. Takakura, Y. Ono, K. Suetsugu, M. Hara, S. Nagano, T. Abe, Y. Nagao

    Polymer Journal   2018.8

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  • Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous Gripping Control Reviewed

    Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    Micromachines   9 ( 6 )   301   2018.6

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  • 光・ひずみ複合触覚センサを用いたポリオキシメチレン樹脂の表面形状・色計測による質感評価 Reviewed

    難波 勇太, 安部 隆, 寒川 雅之

    電気学会論文誌E(センサ・マイクロマシン部門誌)   138 ( 6 )   250 - 256   2018.6

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  • Electromotive Manipulator Control by Detection of Proximity, Contact, and Slipping Using MEMS Multiaxial Tactile Sensor Reviewed

    Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    Electrical Engineering in Japan   204 ( 2 )   44 - 49   2018.4

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    In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed single element MEMS sensor which can detect proximity, contact, and slipping to skillful gripping of the object. This MEMS sensor can detect proximity as impedance change of Si substrate by reflected light from the object due to the photoconductive effect. In addition, both normal and shear load can be also detected as resistance change of strain gage on cantilevers located threefold symmetry and embedded in polydimethylsiloxane (PDMS). By attaching the sensor on the electromotive manipulator, accurate control of gripping force was enabled by feedback of the sensor output.

    DOI: 10.1002/eej.23098

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  • High proton conduction of organized sulfonated polyimide thin films with planar and bent backbones Reviewed

    Y. Ono, R. Goto, M. Hara, S. Nagano, T. Abe, Y. Nagao

    Macromolecules   51   3351 - 3359   2018.4

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  • Development of Self-Heated Stage Suitable for Thermal Assist Reactive Ion Etching of the Functional Metals Invited Reviewed

    Yuki Murata, Gang Han, Daiki Ohkawa, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   101 ( 3 )   96 - 102   2018.3

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    DOI: 10.1002/ecj.12046

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  • Texture evaluation for planed surface of polyoxymethylene resin by measuring surface shape and color with light and strain sensitive tactile sensor Reviewed

    Yuta Namba, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   138 ( 6 )   250 - 256   2018

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    DOI: 10.1541/ieejsmas.138.250

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  • Development of dual channel type contactless liquid sensor using a quartz oscillator circuit Invited Reviewed

    Naoto Yada, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   138 ( 2 )   37 - 40   2018

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    DOI: 10.1541/ieejsmas.138.37

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  • Surface texture characterization using optical and tactile combined sensor Reviewed

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    Sensors and Materials   30 ( 5 )   1091 - 1101   2018

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    DOI: 10.18494/SAM.2018.1786

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  • Electrode-separated quartz crystal microbalance for smart-sensor mounting application Reviewed

    Jun Sakaguchi, Masayuki Sohgawa, Takashi Abe

    Sensors and Materials   30 ( 5 )   1073 - 1080   2018

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    DOI: 10.18494/SAM.2018.1712

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  • Microdroplet monitoring using microfluid circuit combined quartz oscillator based capacitive sensor

    Ryo Ebata, Ryo Sakai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   138 ( 8 )   382 - 386   2018

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    DOI: 10.1541/ieejsmas.138.382

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  • Sensitivity Improvement of MEMS Tactile Sensor with Cr-N Thin Film Strain Gauge

    Yonehara Kohei, Kidou Jun, Fujihashi Tomoya, Takahashi Harutoshi, Abe Takashi, Niwa Eiji, Sohgawa Masayuki

    The Proceedings of the Symposium on Micro-Nano Science and Technology   2018.9   01pm1PN152   2018

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    In this work, we have fabricated the tactile sensor using microcantilevers with Cr-N thin film strain gauge which has high gauge factor. In our previous works, NiCr thin film was employed as strain gauge, however, resistance change was relatively small because of its low gauge factor. The gauge factor of Cr-N thin film is 7 times higher than that of NiCr with higher gauge rate than NiCr, thus sensitivity of the sensor is expected to be improved. The tactile sensor with Cr-N thin film is successfully fabricated and strain gauge as ohmic resistance can be obtained. It is demonstrated that fabricated sensor has linear sensitivity to both normal and shear forces.

    DOI: 10.1299/jsmemnm.2018.9.01pm1pn152

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  • Deep reactive ion etching technique involving use of 3D self-heated cathode Reviewed

    Gang Han, Yuki Murata, Daiki Ohkawa, Masayuki Sohgawa, Takashi Abe

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   1281 - 1284   2017.7

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    DOI: 10.1109/TRANSDUCERS.2017.7994289

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  • Gripping control of delicate and flexible object by electromotive manipulator with proximity and tactile combo MEMS sensor Reviewed

    Ryoma Araki, Fumitoshi Suga, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   1140 - 1143   2017.7

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    DOI: 10.1109/TRANSDUCERS.2017.7994254

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  • Texture measurement for fabrics including warm/cool and fluffiness sensation by multimodal MEMS sensor Reviewed

    Fumiya Sato, Takashi Shiwa, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2017)   343 - 346   2017.6

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    In this paper, we report that texture measurement of warm/cool and fluffiness sensations of various fabrics has been carried out by a multimodal MEMS sensor. This MEMS sensor can detect force as resistance change of strain gauge on micro-cantilever and light as impedance change of Si layer by the photoconductive effect, respectively. The sensor can also detect a temperature drop by heat transfer from the sensor to the contact object as resistance change of the strain gauge and impedance change of Si. It is demonstrated that warm/cool and fluffiness sensations of fabrics can be evaluated by the measured results of the proposed MEMS sensor depending on temperature drop and contact force.

    DOI: 10.1109/TRANSDUCERS.2017.7994058

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  • Fabrication of a true-Gaussian-shaped quartz crystal resonator Reviewed

    Hiroki Kutsuwada, Sho Watanabe, Masayuki Sohgawa, Takashi Abe

    SENSORS AND ACTUATORS A-PHYSICAL   260   58 - 61   2017.6

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    DOI: 10.1016/j.sna.2017.04.019

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  • Development of titanium micro mold manufacturing technology for the microfluidic chip by plasma etching Reviewed

    Takeshi Hitobo, Masahiro Shiroki, Hirofumi Nabesawa, Toyohisa Asaji, Takashi Abe

    Journal of the Vacuum Society of Japan   60 ( 4 )   145 - 147   2017

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    DOI: 10.3131/jvsj2.60.145

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  • Thermal Reactive Ion Etching of Minor Metals with SF6 Plasma Reviewed

    Gang Han, Yuki Murata, Yuto Minami, Masayuki Sohgawa, Takashi Abe

    SENSORS AND MATERIALS   29 ( 3 )   217 - 223   2017

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    DOI: 10.18494/SAM.2017.1444

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  • Electromotive manipulator control by detection of proximity, contact and slipping using MEMS multi-axial tactile sensor Reviewed

    Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   137 ( 7 )   212 - 217   2017

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    DOI: 10.1541/ieejsmas.137.212

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  • Evaluation of the heating characteristics of miniature QCR-based thermogravimetric sensor in vacuum Invited Reviewed

    Ryosuke Wada, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   137 ( 7 )   180 - 184   2017

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    DOI: 10.1541/ieejsmas.137.180

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  • Measurement techniques with frequency-modulated probe light for proximity and tactile combo sensor Reviewed

    Nao Umeki, Akito Nozawa, Masanori Okuyama, Haruo Noma, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   137 ( 5 )   146 - 150   2017

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    DOI: 10.1541/ieejsmas.137.146

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  • Development of self-heated stage suitable for thermal assist reactive ion etching of the functional metals Reviewed

    Yuki Murata, Gang Han, Daiki Ohkawa, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   137 ( 9 )   262 - 266   2017

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    DOI: 10.1541/ieejsmas.137.262

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  • Microstructure formation on polytetrafluoroethylene (PTFE) and perfluoroalkoxy (PFA) bulk plates by a magnetron enhanced reactive ion etching system Reviewed

    Hirofumi Nabesawa, Takeshi Hitobo, Toyohisa Asaji, Takashi Abe, Minoru Seki

    Journal of the Vacuum Society of Japan   60 ( 5 )   176 - 181   2017

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    DOI: 10.3131/jvsj2.60.176

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  • Deposition and characterization of Al2O3 and BiFeO3 thin films on titanium substrates for tough MEMS devices Reviewed

    Takeshi Kohno, Masato Mihara, Ataru Tanabe, Takashi Abe, Masanori Okuyama, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   137 ( 1 )   46 - 47   2017

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    DOI: 10.1541/ieejsmas.137.46

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  • Texture Characterization Including Warm/Cool Sensation Using Force-, Light-, and Temperature-Sensitive Micro-electromechanical Systems Sensor Reviewed

    Fumiya Sato, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    SENSORS AND MATERIALS   29 ( 3 )   311 - 321   2017

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    DOI: 10.18494/SAM.2017.1443

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  • Development of Wirelessly Excited Multi-Channel QCM Sensor for Odor Sensor Applications

    SATO Ikuto, SAKAGUTI Jun, SOHGAWA Masayuki, ABE Takashi

    The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)   2017   1A1 - K11   2017

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    <p>This paper reports the development of wirelessly excited multi-channel QCM sensor for odor sensor applications. In this sensor, the excitation electrodes are positioned on a glass plate separate from the QCM. Such electrode configurations are suitable for odor sensor applications because the electrical interconnections between the QCM and the oscillation circuit are simple. We evaluated the dependence of the resonance frequency on the crystallographic orientation. We found out two vibrational modes that depends on each modulus of elasticity and the frequency responses of each mode are linear for mass loading.</p>

    DOI: 10.1299/jsmermd.2017.1A1-K11

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  • Output Characterization of Proximity and Tactile Combination MEMS Sensor for Gripping Control of Flexible Object

    SUGA Fumitoshi, ARAKI Ryoma, ABE Takashi, NOMA Haruo, SOHGAWA Masayuki

    The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)   2017   1A1 - N02   2017

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    <p>In this Paper, we report output characterization of the proximity and tactile combination MEMS sensor for controlling manipulation of flexible objects. This sensor can detect proximity by the internal photoelectric effect in Si substrate and normal and shear loads as tactile information are detectable by deflection of cantilevers, which are fabricated on the substrate surface and embedded in the silicone elastomer. The proximity and tactile outputs from this sensor attached on the electromotive actuator depend on distance to the target object and normal load applied by gripping the object, respectively. Furthermore, sensor output with shear load applied by weight of gripped flexible object is measured and the improved control method for stable gripping control of flexible objects is discussed.</p>

    DOI: 10.1299/jsmermd.2017.1A1-N02

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  • Evaluation method of fabrics by visual and tactile texture information using MEMS combo sensor Reviewed

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    IEEE Sensors 2016   655 - 657   2016.11

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    DOI: 10.1109/ICSENS.2016.7808624

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  • 水晶振動子を用いた液体分析用コンボセンサにおける形状最適化 Reviewed

    坂井 了, 今井 寛明, 寒川 雅之, 安部 隆

    電気学会論文誌E   136 ( 7 )   319 - 322   2016.7

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    DOI: 10.1541/ieejsmas.136.343

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  • MASS SENSITIVITY AMPLIFICATION BY USING GAUSSIAN-SHAPED QUARTZ CRYSTAL RESONATOR Reviewed

    H. Kutsuwada, S. Watanabe, M. Sohgawa, T. Abe

    2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   1022 - 1025   2016

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  • Preface to the special issue on the awarded papers of the 32nd sensor symposium ' Reviewed

    Shuichi Shoji, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   136 ( 6 )   213   2016

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    DOI: 10.1541/ieejsmas.136.213

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  • Shape optimization of combo sensor using quartz crystal resonator for liquid analysis Reviewed

    Ryo Sakai, Hiroaki Imai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   136 ( 8 )   343 - 347   2016

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    DOI: 10.1541/ieejsmas.136.343

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  • Contactless Liquid Sensing Technique Using a Quartz Oscillator Reviewed

    Tsubasa Susa, Takeru Watanabe, Masayuki Sohgawa, Takashi Abe

    SENSORS AND MATERIALS   28 ( 4 )   289 - 294   2016

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    DOI: 10.18494/SAM.2016.1179

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  • Development of liquid concentration sensor based on crystal oscillator circuit for measuring microdroplet Reviewed

    Yuta Yanagita, Tsubasa Susa, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   136 ( 7 )   319 - 322   2016

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    DOI: 10.1541/ieejsmas.136.319

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  • Development of titanium micro mold manufacturing technology for the microfluidic chip by plasma etching

    HITOBO Takeshi, SHIROKI Masahiro, NABESAWA Hirofumi, ASAJI Toyohisa, ABE Takashi

    Abstract of annual meeting of the Surface Science of Japan   36   272 - 272   2016

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    DOI: 10.14886/sssj2008.36.0_272

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  • Characterization of BiFeO3 Thin Film for Tactile Sensor Using Microcantilevers with Piezoelectric Capacitor and Strain-Gauge Reviewed

    Takeshi Kohno, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    IEEE Sensors 2015   1192 - 1195   2015.11

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    Lead-free BiFeO3 thin films for tactile sensor using microcantilevers have been prepared on Pt and SrRuO3/Pt thin films on a SiO2/Si substrate by RF sputtering, and the electrical characteristics have been optimized by controlling the substrate temperature, gas pressure, and oxygen partial pressure in deposition process. The BiFeO3 thin film (thickness: 300 nm) deposited on SrRuO3 (thickness: 80 nm) deposited at substrate temperature of 500°C in gas pressure of 0.6 Pa and oxygen partial pressure of 0.24 Pa has good crystallinity, ferroelectricity, and piezoelectric property. Therefore, it is demonstrated that BiFeO3 thin film can be a good sensing material as a detection part of tactile sensor. Furthermore, a cantilever structure with piezoelectric capacitor and strain gauge has been fabricated and different time-dependent outputs from them can be obtained.

    DOI: 10.1109/ICSENS.2015.7370483

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  • Basic Study for Tactile and Visual Texture Measurement by Multimodal MEMS Sensor with Force and Light Sensitivity Reviewed

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    IEEE Sensors 2015   699 - 702   2015.11

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    The tactile and visual texture measurement by multimodal MEMS sensor is reported. This MEMS sensor has two function in a structure: force-sensitivity of resistance of microcantilevers embedded in the elastomer and light-sensitivity of a MOS structure on the Si substrate. Deflection of the cantilever induced by applied force depends on the tactile texture including hardness, thickness, and roughness of the object, and is detected as DC resistance change of the strain gauge film. On the other hand, incident light depends on the visual texture of the object, and is detected as AC impedance change at 5 MHz. It is confirmed that the resistance and impedance changes depend on the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that multimodal texture can be characterized by a single MEMS sensor.

    DOI: 10.1109/ICSENS.2015.7370352

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  • Non-contact Sensor for Measurement of Liquid Concentration based on Quartz Oscillator Reviewed

    Susa Tsubasa, Watanabe Takeru, Sohgawa Masayuki, Abe Takashi

    The Journal of the Institute of Electrical Engineers of Japan   135 ( 5 )   158 - 164   2015.6

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    In this paper, we report the non-contact sensor for measurement of liquid concentration based on quartz oscillator. The non-contact sensing can be realized by using a leaked electric field of a planer sensing capacitor for sensing liquid on a spacer. This sensor measures capacitance changes of the sensing capacitor (SC) as frequency changes of the quartz oscillator. Since the capacitance is dependent on relative permittivity or conductivity of liquid on the spacer, it is possible to measure the concentration of them. The response is very stable because this sensor is incorporated the SC into the quartz oscillator. Because the SC is in contact with the sensing liquid instead of the quartz crystal resonator, the proposed sensor has a high quality factor (about 30,000). Moreover, this sensor can be used with general IC and electronic component, which takes low cost. The proposed sensor is expected to use for non-contact measurements of liquid concentration.

    DOI: 10.1541/ieejsmas.135.210

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  • Tactile Sensor Using Micro-cantilever with BiFeO3 Piezoelectric Film Reviewed

    Masato Mihara, Akito Nozawa, Takashi Abe, Masanori Okuyama, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   135 ( 5 )   158 - 164   2015.5

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    We have developed the tactile sensor using micro-cantilevers embedded in the elastomer which can measure both the normal and shear forces by piezoresistance. In this work, a piezoelectric tactile sensor using micro-cantilevers embedded in the elastomer has been proposed and fabricated for realizing lower power consumption than the conventional sensor using piezoresistor. The BiFeO3 thin film (thickness: 400 nm) deposited by rf sputtering at substrate temperature of 520°C and gas pressure of 0.6 Pa has a good piezoelectric property because output voltage of 300 mV is obtained for strain induced by vibration of the cantilever. Therefore, it is demonstrated that the BiFeO3 can be used to detect the micro-cantilever deflection by external force applied on the tactile sensor.

    DOI: 10.1541/ieejsmas.135.158

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  • Thermal reactive ion etching technique involving use of self-heated cathode Reviewed

    S. Yamada, Y. Minami, M. Sohgawa, T. Abe

    REVIEW OF SCIENTIFIC INSTRUMENTS   86 ( 4 )   2015.4

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    DOI: 10.1063/1.4917193

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  • Preface to the special issue on "World state-of-the-art research on sensors and micromachines" Reviewed

    Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   135 ( 3 )   90   2015.3

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    DOI: 10.1541/ieejsmas.135.90

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  • Microheater-integrated quartz crystal microbalance array for thermal desorption spectroscopy Reviewed

    Jumpei Sakai, Masayuki Sohgawa, Naoyuki Iida, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   135 ( 3 )   112 - 113   2015.3

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    DOI: 10.1541/ieejsmas.135.112

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  • NON-CONTACT SENSOR FOR MEASUREMENT OF LIQUID CONCENTRATION BASED ON QUARTZ OSCILLATOR Reviewed

    T. Susa, T. Watanabe, M. Sohgawa, T. Abe

    2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)   1472 - 1475   2015

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  • Multimodal Measurement of Proximity and Touch Force by Light- and Strain-Sensitive Multifunctional MEMS Sensor Reviewed

    Masayuki Sohgawa, Akito Nozawa, Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    IEEE Sensors 2014   1749 - 1752   2014.11

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    DOI: 10.1109/ICSENS.2014.6985362

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  • Texture measurement and identification of object surface by MEMS tactile sensor Reviewed

    Masayuki Sohgawa, Kosuke Watanabe, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    2014 IEEE SENSORS   1706 - 1709   2014.11

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    DOI: 10.1109/ICSENS.2014.6985351

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  • Miniature quartz crystal-resonator-based thermogravimetric detector Reviewed

    N. Sai, Y. Tagawa, M. Sohgawa, T. Abe

    REVIEW OF SCIENTIFIC INSTRUMENTS   85 ( 9 )   095001   2014.9

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    DOI: 10.1063/1.4894385

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  • A Multichannel Chemical Sensing Method Using Single Quartz Resonator and Micro Flow Channel Reviewed

    Shinjiro Toyama, Takashi Abe

    IEEE SENSORS JOURNAL   14 ( 1 )   135 - 139   2014.1

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    DOI: 10.1109/JSEN.2013.2281099

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  • Micromachining of titanium using a desktop DRIE Reviewed

    Shuji Yamada, Takeshi Hitobo, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   134 ( 4 )   96 - 99   2014

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    DOI: 10.1541/ieejsmas.134.96

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  • Proximity and tactile sensing using a single MEMS sensor with photo- and strain sensitivities Reviewed

    Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   134 ( 7 )   229 - 234   2014

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    DOI: 10.1541/ieejsmas.134.229

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  • Active touch sensing by multi-axial force measurement using high-resolution tactile sensor with microcantilevers Reviewed

    Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   134 ( 3 )   58 - 63   2014

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    DOI: 10.1541/ieejsmas.134.58

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  • Numerical calculation and experimental verification of a quartz-crystal-resonator-based methanol concentration sensor Reviewed

    Takeru Watanabe, Shinjiro Toyama, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   134 ( 7 )   224 - 228   2014

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    DOI: 10.1541/ieejsmas.134.224

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  • 1P2-X09 Multimodal Measurement of Proximity and Touch Force by Light- and Strain-sensitive Multifunctional MEMS Sensor(Tactile and Force Sensing (2))

    NOZAWA Akito, YOKOYAMA Hokuto, KANASHIMA Takeshi, OKUYAMA Masanori, ABE Takashi, NOMA Haruo, AZUMA Teruaki, SOHGAWA Masayuki

    The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)   2014   _1P2-X09_1 - _1P2-X09_4   2014

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    A multifunctional MEMS sensor for measurement of proximity and touch of an object has been fabricated and characterized. The DC resistance changes linearly to indentation distance of the object. On the other hand, the AC (> 500 kHz) impedance increases with increase of distance between the sensor surface and the object because of decrease of light intensity reflected on the object surface. An error of proximity measurement induced by environmental temperature and illuminance has been characterized. The error was estimated at 1 mm for 1℃ temperature change and at 2 mm for 500 lx illuminance change, respectively, and they are enough low in stable environment. Moreover, the AC impedance was different between grounding and floating the proximate object because of difference of distribution of electricstatic field between electrodes, so that it is suggested that proximity can be measured as the impedance change by light as well as electrostatic field.

    DOI: 10.1299/jsmermd.2014._1p2-x09_1

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  • Characterization of retinal pigment epithelial cells and endothelial cells within a microfluidic device towards a retina on a chip Reviewed

    Kaji H, Ito S, Nagamine K, Nishizawa M, Nagai N, Abe T

    18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014   742 - 744   2014

  • Experimental optimization of quartz-crystal-resonator-based methanol sensor connected in series with interdigital capacitor Reviewed

    Shunpei Ishii, Keito Emura, Takashi Abe

    Japanese Journal of Applied Physics   52 ( 12 )   127201   2013.12

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    DOI: 10.7567/JJAP.52.127101

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  • Force intensity and direction measurement in real time using miniature tactile sensor with microcantilevers embedded in PDMS Reviewed

    Hokuto Yokoyama, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    IEEE Sensors   1090 - 1093   2013.11

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    DOI: 10.1109/ICSENS.2013.6688401

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  • Low-pressure plasma-etching of bulk polymer materials using gas mixture of CF4 and O-2 Reviewed

    Hirofumi Nabesawa, Takaharu Hiruma, Takeshi Hitobo, Suguru Wakabayashi, Toyohisa Asaji, Takashi Abe, Minoru Seki

    AIP ADVANCES   3 ( 11 )   112105   2013.11

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    DOI: 10.1063/1.4830277

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  • Enhancement of Proton Transport in an Oriented Polypeptide Thin Film Reviewed

    Yuki Nagao, Jun Matsui, Takashi Abe, Hirotsugu Hiramatsu, Hitoshi Yamamoto, Tokuji Miyashita, Noriko Sata, Hiroo Yugami

    LANGMUIR   29 ( 23 )   6798 - 6804   2013.6

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    DOI: 10.1021/la400412f

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  • Design and Evaluation of Microheater Combined QCM Array for Thermal Desorption Spectroscopy Reviewed

    Jumpei Sakai, Naoyuki Iida, Masayuki Sohgawa, Takashi Abe

    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013 & Eurosensors XXVII)   234 - 237   2013.6

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    In this paper, we propose a single microheater combined quartz crystal microbalance array for thermal desorption spectroscopy. The each QCM has two electrodes for exciting thickness shear mode (TSM) vibrations on one side of the crystal and a double-spiral-shape heater on the other side. The resonance frequency is stable when a voltage was applied on the microheater. Carbon microparticles for gas adsorption were coated on one of the QCMs and the frequency change during temperature increase was extracted by subtracting the change of the other QCM. The proposed QCM array can monitor small mass changes at sub-ng level as a function of temperature.

    DOI: 10.1109/Transducers.2013.6626745

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  • A fabrication method of high-Q quartz crystal resonator using double-layered etching mask for DRIE Reviewed

    Takashi Abe, Yousuke Itasaka

    SENSORS AND ACTUATORS A-PHYSICAL   188   503 - 506   2012.12

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    DOI: 10.1016/j.sna.2012.02.006

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  • 液体分析用デュアル水晶センサの開発 Reviewed

    武石大一, 江村恵渡, 安部隆

    電気学会論文誌E   132 ( 7 )   174 - 177   2012.7

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  • A Multichannel Chemical Sensing Method Using Single Quartz Resonator and Micro Flow Channel Reviewed

    Shinjiro Toyama, Takashi Abe

    2012 IEEE SENSORS PROCEEDINGS   1057 - 1060   2012

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  • A methanol concentration sensor using a quartz resonator connected in series to interdigital capacitor Reviewed

    Shunpei Ishii, Keito Emura, Takashi Abe

    Proceedings of IEEE Sensors   133 ( 3 )   96 - 97   2012

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    DOI: 10.1109/ICSENS.2012.6411072

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  • RIE patterning technology of Zr-based metallic glass for MEMS devices fabrication Reviewed

    Yao-Chuan Tsai, Yu-Ching Lin, Takashi Abe, Masayoshi Esashi, Thomas Gessner

    Proceedings of IEEE Sensors   2012

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    DOI: 10.1109/ICSENS.2012.6411175

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  • Development of dual quartz sensor for liquid analysis Reviewed

    Taichi Takeishi, Keito Emura, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   132 ( 7 )   174 - 177   2012

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    DOI: 10.1541/ieejsmas.132.174

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  • A controlled-release capsule device for transscleral drug delivery to the retina Reviewed

    Kaji H, Nagai N, Yamada T, Nishizawa M, Abe T

    Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012   452 - 454   2012

  • A Gaussian-shaped AT-cut quartz crystal resonator Reviewed

    Takashi Abe, Hiroki Kishi

    SENSORS AND ACTUATORS A-PHYSICAL   166 ( 2 )   173 - 176   2011.4

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    DOI: 10.1016/j.sna.2010.04.005

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  • A Monolithic QCM Array Designed for Mounting on a Flow Cell Reviewed

    Takashi Abe, Makoto Higuchi

    IEEE SENSORS JOURNAL   11 ( 1 )   86 - 90   2011.1

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    DOI: 10.1109/JSEN.2010.2051662

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  • Deep reactive ion etching of lithium niobate by using low-frequency bias Reviewed

    Toyohisa Asaji, Hirofumi Nabesawa, Hidefumi Uchiyama, Takashi Abe

    Journal of the Vacuum Society of Japan   53 ( 8 )   501 - 503   2010

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    DOI: 10.3131/jvsj2.53.501

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  • Real-time measurement of photocatalytic reactions using a monolithic QCM array Invited Reviewed

    Takashi Abe, Hiroshi Kato

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING   19 ( 9 )   094019   2009.9

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    DOI: 10.1088/0960-1317/19/9/094019

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  • Integration of QCMs for studying surface science within a microfluidic channel Reviewed

    Yousuke Itasaka, Matsuhiko Nishizawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   129 ( 12 )   2 - 443   2009

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    DOI: 10.1541/ieejsmas.129.439

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  • Microfluidic biofuel cells: Series-connection with superhydrophobic air valves Reviewed

    M. Togo, K. Morimoto, T. Abe, H. Kaji, M. Nishizawa

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems   2102 - 2105   2009

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    DOI: 10.1109/SENSOR.2009.5285620

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  • Polymer surface morphology control by reactive ion etching for microfluidic devices Reviewed

    Hirofumi Nabesawa, Takeshi Hitobo, Suguru Wakabayashi, Toyohisa Asaji, Takashi Abe, Minoru Seki

    SENSORS AND ACTUATORS B-CHEMICAL   132 ( 2 )   637 - 643   2008.6

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    DOI: 10.1016/j.snb.2008.01.050

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  • New surface forces apparatus using two-beam interferometry Reviewed

    Hiroshi Kawai, Hiroshi Sakuma, Masashi Mizukami, Takashi Abe, Yasuhiro Fukao, Haruo Tajima, Kazue Kurihara

    Review of Scientific Instruments   79 ( 4 )   2008

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    DOI: 10.1063/1.2903404

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  • A porous membrane-based culture substrate for localized in situ electroporation of adherent mammalian cells Reviewed

    Takeshi Ishibashi, Kimiyasu Takoh, Hirokazu Kaji, Takashi Abe, Matsuhiko Nishizawa

    SENSORS AND ACTUATORS B-CHEMICAL   128 ( 1 )   5 - 11   2007.12

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    DOI: 10.1016/j.snb.2007.05.027

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  • Design and evaluation of an antiparallel coupled resonator for chemical sensor applications Reviewed

    Takashi Abe, Hiroshi Kato

    ANALYTICAL CHEMISTRY   79 ( 17 )   6804 - 6806   2007.9

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    DOI: 10.1021/ac0709910

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  • Dual-channel quartz-crystal microbalance for sensing under UV radiation Reviewed

    Takashi Abe, Xinghua Li

    IEEE SENSORS JOURNAL   7 ( 3-4 )   321 - 322   2007.3

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    DOI: 10.1109/JSEN.2006.890165

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  • Electrodeposition of anchored polypyrrole film on microelectrodes and stimulation of cultured cardiac myocytes Reviewed

    Matsuhiko Nishizawa, Hyuma Nozaki, Hirokazu Kaji, Takahiro Kitazume, Noriyuki Kobayashi, Takeshi Ishibashi, Takashi Abe

    BIOMATERIALS   28 ( 8 )   1480 - 1485   2007.3

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    DOI: 10.1016/j.biomaterials.2006.11.034

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  • Improved wettability of a fluoropolymer from a simple combination of surface modifications using a plasma and surfactant Reviewed

    Takashi Abe, Masahiro Matsumoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   46 ( 1 )   367 - 369   2007.1

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    DOI: 10.1143/JJAP.46.367

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  • Generation of patterned cell co-cultures inside tubular structure using electrochemical biolithography and electrostatic assembly Reviewed

    Hirokazu Kaji, Soichiro Sekine, Takashi Abe, Matsuhiko Nishizawa

    2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS   187 - 192   2007

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    DOI: 10.1109/MHS.2007.4420850

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  • Polymer surface morphology control for microfluidic devices Reviewed

    H. Nabesawa, T. Hitobo, S. Wakabayashi, T. Asaji, T. Abe, I. Nakatani, M. Seki

    TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems   199 - 202   2007

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    DOI: 10.1109/SENSOR.2007.4300105

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  • Inverted mesa-type quartz crystal resonators fabricated by deep-reactive ion etching Reviewed

    Takashi Abe, Vu Ngoc Hung, Masayoshi Esashi

    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL   53 ( 7 )   1234 - 1236   2006.7

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    DOI: 10.1109/TUFFC.2006.1665070

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  • Miniaturization of spherically contoured rectangular AT-cut quartz-crystal resonators by using reactive ion etching Reviewed

    T Abe, H Shimamoto, XH Li

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   45 ( 6A )   5283 - 5285   2006.6

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    DOI: 10.1143/JJAP.45.5283

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  • Electrochemical approach to pattern cells within three-dimensional microstructures Reviewed

    Matsuhiko Nishizawa, Takashi Abe, Hirokazu Kaji

    2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE   242 - +   2006

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  • An electrochemical microsystem for manipulating living cells Reviewed

    Hirokazu Kaji, Masahiko Hashimoto, Takeaki Kawashima, Takashi Abe, Matsuhiko Nishizawa

    FUTURE MEDICAL ENGINEERING BASED ON BIONANOTECHNOLOGY, PROCEEDINGS   3 - +   2006

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  • Enzyme-based glucose biofuel cell using vitamin K-3-immobilized polymer as electron mediator Reviewed

    Makoto Togo, Tatsuya Asai, Fuyuki Sato, Hirokazu Kaji, Takashi Abe, Matsuhiko Nishizawa

    FUTURE MEDICAL ENGINEERING BASED ON BIONANOTECHNOLOGY, PROCEEDINGS   173 - +   2006

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  • Deep reactive ion etching of lithium niobate by using low-frequency bias

    Toyohisa Asaji, Hirofumi Nabesawa, Motoichi Kanazawa, Takashi Abe, Shigeyuki Ishii, Junji Saito, Yushi Kato

    Proceeding of 8th International Symposium on Sputtering & Plasma Processes   307 - 309   2005.6

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  • Surface micromachined AlN thin film 2 GHz resonator for CMOS integration Reviewed

    M Hara, J Kuypers, T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   117 ( 2 )   211 - 216   2005.1

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    DOI: 10.1016/j.sna.2004.06.014

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  • A miniaturized and convex-shaped quartz-crystal resonator for multiple chemical sensing in liquid Reviewed

    L Li, M Esashi, T Abe

    Micro Total Analysis Systems 2004, Vol 2   ( 297 )   37 - 39   2005

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  • Elcrochemical bio-lithography for in-situ immobilization of proteins and cells within microchannels Reviewed

    Matsuhiko Nishizawa, Hirokazu Kaji, Kazuto Tsukidate, Masahiko Hashimoto, Takashi Abe

    Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05   1   151 - 154   2005

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    DOI: 10.1109/SENSOR.2005.1496381

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  • Microfabricated spherical bi-convex quartz crystal microbalance array Reviewed

    L Li, T Abe, M Esashi

    MEMS 2005 Miami: Technical Digest   327 - 330   2005

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  • Fabrication of miniaturized bi-convex quartz crystal microbalance using reactive ion etching and melting photoresist Reviewed

    L Li, T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   114 ( 2-3 )   496 - 500   2004.9

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    DOI: 10.1016/j.sna.2003.12.031

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  • A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution Reviewed

    L Li, M Esashi, T Abe

    APPLIED PHYSICS LETTERS   85 ( 13 )   2652 - 2654   2004.9

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    DOI: 10.1063/1.1796535

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  • Trench filling characteristics of low stress TEOS/ozone oxide deposited by PECVD and SACVD Reviewed

    C Chang, T Abe, M Esashi

    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS   10 ( 2 )   97 - 102   2004.1

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    DOI: 10.1007/s00542-003-0313-z

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  • High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE Reviewed

    VN Hung, T Abe, PN Minh, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   108 ( 1-3 )   91 - 96   2003.11

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    DOI: 10.1016/S0924-4247(03)00260-7

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  • Smooth surface glass etching by deep reactive ion etching with SF6 and Xe gases Reviewed

    L Li, T Abe, M Esashi

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   21 ( 6 )   2545 - 2549   2003.11

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    DOI: 10.1116/1.1624272

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  • Endpoint detectable plating through femtosecond laser drilled glass wafers for electrical interconnections Reviewed

    T Abe, XH Li, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   108 ( 1-3 )   234 - 238   2003.11

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    DOI: 10.1016/S0924-4247(03)00262-0

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  • Highly selective reactive-ion etching using CO/NH3/Xe gases for microstructuring of Au, Pt, Cu, and 20% Fe-Ni Reviewed

    T Abe, YG Hong, M Esashi

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   21 ( 5 )   2159 - 2162   2003.9

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    DOI: 10.1116/1.1612516

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  • MEMS based thin film 2 GHz resonator for CMOS integration Reviewed

    M. Hara, J. Kuypers, T. Abe, M. Esashi

    IEEE MTT-S International Microwave Symposium, 2003   2003.8

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    DOI: 10.1109/MWSYM.2003.1210489

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  • Aluminum nitride based thin film bulk acoustic resonator using germanium sacrificial layer etching Reviewed

    M. Hara, J. Kuypers, T. Abe, M. Esashi

    TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems   2003.6

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    DOI: 10.1109/SENSOR.2003.1217131

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  • Endpoint detectable plating through femto-laser drilled glass wafers for three-dimentional electric interconnections Reviewed

    XH Li, T Abe, M Esashi

    MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS   638 - 641   2003

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  • Glass etching assisted by femtosecond pulse modification Reviewed

    CL Chang, T Abe, M Esashi

    SENSORS AND MATERIALS   15 ( 3 )   137 - 145   2003

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  • Energy dissipation in small-diameter quartz crystal microbalance experimentally studied for ultra-high sensitive gravimetry Reviewed

    T Abe, L Li, VN Hung, M Esashi

    MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS   518 - 521   2003

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  • High sensitive, miniaturized plano-convex quartz crystal microbalance fabricated by reactive ion etching and melting photoresist Reviewed

    L Li, T Abe, M Esashi

    BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2   508 - 511   2003

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  • Structures and Interactions of Polyelectrolyte Brushes Studied by Surface Forces Measurement Reviewed

    Kazue Kurihara, Shujiro Hayashi, Takashi Abe, Nobuyuki Hayashi, Masazo Niwa

    IUPAC Polymer Conference (IUPAC-PC2002)   126 - 126   2002.12

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  • Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass Reviewed

    XG Li, T Abe, YX Liu, M Esashi

    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   11 ( 6 )   625 - 630   2002.12

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    DOI: 10.1109/JMENS.2002.805211

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  • Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance Reviewed

    VN Hung, T Abe, PN Minh, M Esashi

    APPLIED PHYSICS LETTERS   81 ( 26 )   5069 - 5071   2002.12

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    DOI: 10.1063/1.1532750

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  • Microprobe array with electrical interconnection for thermal imaging and data storage Reviewed

    Dong Weon Lee, Takahito Ono, Takashi Abe, Masayoshi Esashi

    Journal of Microelectromechanical Systems   11 ( 3 )   215 - 221   2002.6

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    DOI: 10.1109/JMEMS.2002.1007400

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  • Polyelectrolyte brush layers studied by surface forces measurement: Dependence on pH and salt concentrations and scaling Reviewed

    S Hayashi, T Abe, N Higashi, M Niwa, K Kurihara

    LANGMUIR   18 ( 10 )   3932 - 3944   2002.5

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    DOI: 10.1021/la0114979

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  • Deep reactive ion etching of silicon carbide Reviewed

    S Tanaka, K Rajanna, T Abe, M Esashi

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   19 ( 6 )   2173 - 2176   2001.11

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    DOI: 10.1116/1.1418401

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  • Deep reactive ion etching of Pyrex glass using SF6 plasma Reviewed

    XH Li, T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   87 ( 3 )   139 - 145   2001.1

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    DOI: 10.1016/S0924-4247(00)00482-9

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  • Ultrahydrophobic surface selectively modified by pulse electrodeposition from aqueous dispersion of PTFE particles Reviewed

    T Abe, M Esashi

    TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2   1044 - 1047   2001

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  • Transition behavior of polyelectrolyte brushes depending on polymer chain density Reviewed

    S Hayashi, T Abe, N Higashi, M Niwa, K Kurihara

    MOLECULAR CRYSTALS AND LIQUID CRYSTALS   371   349 - 354   2001

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    DOI: 10.1080/10587250108024758

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  • High density electrical feedthrough fabricated by deep reactive ion etching of Pyrex glass Reviewed

    XH Li, T Abe, YX Liu, M Esashi

    14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST   98 - 101   2001

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  • Charge regulation in polyelectrolyte brushes studied by FTIR spectroscopy Reviewed

    T Abe, S Hayashi, N Higashi, M Niwa, K Kurihara

    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS   169 ( 1-3 )   351 - 356   2000.9

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    DOI: 10.1016/S0927-7757(00)00470-2

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  • One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE Reviewed

    T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL   82 ( 1-3 )   139 - 143   2000.5

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    DOI: 10.1016/S0924-4247(99)00330-1

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  • Density-dependent jump in compressibility of polyelectrolyte brush layers revealed by surface forces measurement Reviewed

    T Abe, N Higashi, M Niwa, K Kurihara

    LANGMUIR   15 ( 22 )   7725 - 7731   1999.10

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    DOI: 10.1021/la990240w

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  • Interactions between Poly (L-lysine) Brush Layers Studied by Surface forces Measurement Invited Reviewed

    K. Kurihara, T. Abe, N. Higashi, M. Niwa

    Proceeding of Yamada Conference L Polyelectrolytes   7725 - 7731   1999.10

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  • Transition in Interactions between Polyelectrolyte Brush Layers as Revealed by Surface Forces Measurements Reviewed

    Kazue Kurihara, Takashi Abe, Nobuyuki Higashi, Masazo Niwa

    Proceedings of Yamada Conference L Polyelectrolytes   443 - 446   1999.4

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  • Direct demonstration of attraction for a complementary pair of apposed nucleic acid base monolayers Reviewed

    K Kurihara, T Abe, N Nakashima

    LANGMUIR   12 ( 17 )   4053 - 4056   1996.8

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    DOI: 10.1021/la950867o

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  • STERIC FORCES BETWEEN BRUSH LAYERS OF POLY(L-GLUTAMIC ACID) AND THEIR DEPENDENCE ON SECONDARY STRUCTURES AS DETERMINED BY FT-IR SPECTROSCOPY Reviewed

    K KURIHARA, T ABE, N HIGASHI, M NIWA

    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS   103 ( 3 )   265 - 272   1995.10

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    DOI: 10.1016/0927-7757(95)03295-O

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  • DIRECT MEASUREMENT OF SURFACE FORCES BETWEEN MONOLAYERS OF ANCHORED POLY(L-GLUTAMIC ACID) Reviewed

    T ABE, K KURIHARA, N HIGASHI, M NIWA

    JOURNAL OF PHYSICAL CHEMISTRY   99 ( 7 )   1820 - 1823   1995.2

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    DOI: 10.1021/j100007a003

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  • SURFACE FORCES BETWEEN MONOLAYERS OF END-ANCHORED POLYELECTROLYTE LAYERS - STRUCTURAL CHANGES AND INTERACTIONS Reviewed

    K KURIHARA, T ABE, T KUNITAKE, N HIGASHI, M NIWA

    ADVANCED MATERIALS '93, II - A & B   15 ( A & B )   517 - 520   1994

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MISC

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Awards

  • フェロー

    2025.2   日本機械学会  

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  • 日本機械学会 マイクロ・ナノ工学部門 貢献表彰

    2022.11   日本機械学会  

    安部 隆

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  • 第35回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2018.11   電気学会 センサ・マイクロマシン部門   水晶発振回路式液体濃度センサの炭酸濃度非接触測定への応用

    小黒 悠, 谷村実紀, 矢田直人, 寒川雅之, 安部 隆

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  • 優秀論文発表賞

    2016.10   電気学会 センサ・マイクロマシン部門総合研究会   水晶発振回路を用いた2チャンネル型非接触液体センサの開発

    矢田 直人, 寒川 雅之, 安部 隆

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  • 第33回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2016.10   電気学会センサ・マイクロマシン部門   真空中での水晶振動子式小型熱重量分析センサの昇温特性評価

    和田 涼介, 寒川 雅之, 安部 隆

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  • 第31回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2014.10   電気学会センサ・マイクロマシン部門   非接触型液体濃度検出用水晶センサ

    須佐 翼, 渡部 尊, 寒川 雅之, 安部 隆

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Research Projects

  • 回路レス温度補正が可能な実装基板一体型水晶振動子によるオンサイト計測の革新

    Grant number:24K01317

    2024.4 - 2028.3

    System name:科学研究費助成事業

    Research category:基盤研究(B)

    Awarding organization:日本学術振興会

    安部 隆

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    Grant amount:\17680000 ( Direct Cost: \13600000 、 Indirect Cost:\4080000 )

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  • 特殊金属/合金マイクロマシンの創成

    Grant number:21K18870

    2021.7 - 2024.3

    System name:科学研究費助成事業

    Research category:挑戦的研究(萌芽)

    Awarding organization:日本学術振興会

    安部 隆

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    Grant amount:\6240000 ( Direct Cost: \4800000 、 Indirect Cost:\1440000 )

    申請研究では計画研究として3つの研究項目がある。以下に、各々の研究項目の進捗状況を説明する。研究項目1であるフレキシブルで強靭なTitanium On Insulator (TOI)ウェハを用いた圧力、力、アクチュエータの実現のためには、シリコンMEMSにおける酸化膜に対応する絶縁薄膜の成膜技術が重要である。さらに絶縁膜を残したままで鏡面加工する技術も重要である。熱膨張係数が近く、絶縁性が高いアルミナ薄膜を絶縁膜としたTOIウェハについて、薄膜を残したままでそのままDRIE加工をしても元のチタン基板よりも鏡面状態で深掘りすることに成功した。本技術は、日本機械学会のマイクロナノ工学部門大会において若手優秀講演賞を受賞した。なお、本研究成果に関わる予備研究で実施していたドライナノ研磨技術が英文誌に掲載された。研究項目2のマイクロ電解工業に関する挑戦については、評価のための設備立ち上げを進めており、電気化学微細加工装置のセットアップを終えた段階である。次年度に試験を実施する予定である。研究項目3については、フッ素樹脂とアンカー効果を有するチタンウェハの接合に成功した。接合部は母材よりも強固であり、引っ張り試験では把持部のチタン板が破断した。本研究成果は、2022年度の徳島で開催される関連学会で発表予定である。なお、上記の計画研究以外のチタンマイクロマシニングの応用として、主刃の周縁にマイクロ刃を有するマイクロサージェリー用メスの試作も実施し、より低い力で切開できるようになった。本研究成果は、第38回センサ・マイクロマシンと応用システムシンポジウムにて、速報ポスター賞にノミネートされた。マイクロ構造形成と切れ味の相関に関するメカニズム解明は刃物の機能性を生み出す可能性を有し新しい分野になると期待される。

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  • しなやかさ・タフさ・機能性を有する機能性メタルベースMEMSのスマート生産技術

    2016 - 2018

    System name:基盤研究(B)

    Awarding organization:文部科学省

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • マイクロ・ナノ流体回路融合発振回路式化学演算チップの開発

    2016 - 2017

    System name:挑戦的萌芽研究

    Awarding organization:文部科学省

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • 機能材料をベースとしたMEMSのための熱アシスト型反応性イオンエッチングの試験研究,

    2015 - 2016

    System name:マッチングプランナープログラム

    Awarding organization:JST

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • 液体燃料、潤滑剤の効率的利用のための非接触型液体濃度センサの開発

    2014 - 2015

    System name:研究成果研究成果展開事業 A-STEP FSステージ

    Awarding organization:JST

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • 小型・高精度・高速マルチ化学センシングシステムの実用化への展開

    2013 - 2014

    System name:知財活用促進ハイウェイ

    Awarding organization:JST

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • ワンチップ型バルク弾性波型メタノール濃度センサの開発

    2011.12 - 2012.6

    System name:研究成果最適支援プログラムA-STEP探索タイプ

    Awarding organization:JST

    安部 隆

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  • A Gaussian Shaped Resonator for Sensing Single Cell

    Grant number:23510126

    2011 - 2013

    System name:Grants-in-Aid for Scientific Research

    Research category:Grant-in-Aid for Scientific Research (C)

    Awarding organization:Japan Society for the Promotion of Science

    ABE Takashi

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    In this study, we tried to improve the sensitivity of quartz crystal sensor for sensing single cell. The enhancement of mass sensitivity was realized by shaping the resonator based on the simulation results. As the result, the mass sensitivity was improved at least one order of magnitude and the responses show a linear relationship between mass changes and frequency changes.
    The developed method is expected to be used for evaluation of nanomaterials in addition to measurements of single cell.

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  • 外乱下においてサブ原子層レベルの感度を有するQCMの開発

    2006.6 - 2010.6

    System name:産業技術研究助成事業(若手グラント)

    Awarding organization:NEDO

    安部 隆

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    Authorship:Principal investigator  Grant type:Competitive

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  • Research of a nano-energy system creation

    Grant number:18GS0203

    2006 - 2010

    System name:Grants-in-Aid for Scientific Research

    Research category:Grant-in-Aid for Creative Scientific Research

    Awarding organization:Japan Society for the Promotion of Science

    KUWANO Hiroki, NISHIZAWA Matsuhiko, ONO Takahito, ORIMO Shinichi, TANAKA Shuji, NAGASAWA Sumito, ANBE Takashi, OKAMOTO Hiroshi, ONUKI Teppei, CAO Ziping, HAMATE Yuichiro, OGUCHI Hiroyuki

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    Grant amount:\413400000 ( Direct Cost: \318000000 、 Indirect Cost:\95400000 )

    Micro power generator required in the field of telecommunication, medicine/welfare and so on has been developed. We established fundamental technologies for the micro generator such as materials, highly efficient optimum design. We have succeeded high-power micro fuel cells by applying micro combinatorial and vacuum insulation technology, long life high-power bio-fuel cells by applying carbon nano-tube enzyme electrode and auto-stack structure technology, and highly efficient vibration-based micro energy harvester by applying self-standing electret film and broadband vibration structure technology. In addition, solid electrolyte materials for low temperature operation and micro detonation technology were established as innovative basic technologies.

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  • Development of real-time measurement techniques of surface reactions at the sub-atomic layer level under active environmental control

    Grant number:18681017

    2006 - 2008

    System name:Grants-in-Aid for Scientific Research

    Research category:Grant-in-Aid for Young Scientists (A)

    Awarding organization:Japan Society for the Promotion of Science

    ABE Takashi

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  • マイクロ電気化学システムによる細胞接着の3次元操作

    Grant number:18048004

    2006 - 2007

    System name:科学研究費助成事業

    Research category:特定領域研究

    Awarding organization:日本学術振興会

    西澤 松彦, 安部 隆, 梶 弘和

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    Grant amount:\3200000 ( Direct Cost: \3200000 )

    本研究は,電気化学反応によって細胞接着を操作する技術「電気化学バイオリソグラフィー」を3次元構造体への細胞接着の操作へ拡張し,細胞培養担体(スキャホールド)内部への異種細胞から成る反復構造の作製へのチャレンジである。先ず,ガラスとPDMSからなるマイクロ流路デバイスの内部に細胞の共培養系を作製する事に成功した。あらかじめ流路の内壁にマイクロ電極のアレイを作製しておき,流路内部をヘパリン被覆した後にKBr水溶液を充填して電極に1.5Vを印加すると,電極の対面部位のヘパリンが脱着して細胞接着性へと変化し,細胞培養が出来た。隣接するマイクロ電極で同様の操作を違う種類の細胞に対して行なうと,流路内に異種細胞を配列させ,共培養化する事ができた。次に,あらかじめ電極を配置しておく必要が無いシステムの開発を意図して,針電極による細胞接着誘導を検討した。シリコンゴムチューブの内壁をヘパリン修飾し,そこへ針電極を刺して上述の反応を行う事によって,電極を刺した領域のみに細胞接着を誘導できた。さらに共培養化も出来た。この結果は,3次元構造体の内部に共培養系を造り込むという当初の目的を達成した典型的な一例であるとともに,血管内皮細胞の培養によって,血管を模擬したせん断応力と引っ張り応力が負荷できるモデルとなる可能性を有している。これは血流と細胞動態との関連を探るトレース実験を可能とする,これまでに無かった実験系を提供する可能性を有している。

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  • Development of Electrochemical Biolithograpy and application to Cellular Chips

    Grant number:17310080

    2005 - 2007

    System name:Grants-in-Aid for Scientific Research

    Research category:Grant-in-Aid for Scientific Research (B)

    Awarding organization:Japan Society for the Promotion of Science

    NISHIZAWA Matsuhiko, ABE Takashi

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    Grant amount:\14870000 ( Direct Cost: \14000000 、 Indirect Cost:\870000 )

    Microfluidic systems have been widely investigated for biological applications and hold great promise in the development of diagnostic assays and bioreactors. The combination of the surface patterning techniques with the microfluidic systems paves the way to multi-functional, high-throughput, and cost-effective analysis, in which the "real-time" and "on-demand" micropatterning of bioelements within the microchannels would be essentially required since such delicate materials are unstable to desiccation, oxidation, and heat. However, most of the photolithography-based techniques are unable to be applied within the sealed microchannels.
    In this research, we have developed a novel technique "electrochemical bio-lithography", which enables the localized immobilization of proteins and cells within 3D microstructures such as microfluidic channels. The principle of the technique is based on our finding that the albumin- or heparin-coated surfaces, initially anti biofouling, rapidly becomes protein- and cell-adhesive upon exposure to the reactive oxidizing agent such as hypobromous acid, which can be produced by the electrochemical oxidation of bromide ion in a biological buffer solution. Since this lithography can be conducted under typical physiological conditions, it enables the spatiotemporal control of cell adhesion and growth on substrates; it facilities the stepwise immobilization of multitype protein arrays and multiphenotype cell arrays. And importantly, this technique is simple enough to be integrated into the miniaturized and semi-closed systems such as microfluidic devices, indicating the possible "on-demand" immobilization of proteins and living cells just prior to use of the microfluidic biodevices. In addition, we have achieved rapid cellular arrangement in the semi-closed microfluidic channel by combining electrochemical bio-lithography with negative dielectrophoresis (DEP).

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  • マイクロ・ナノマシニングを用いた水晶振動子型分子認識チップの創製

    2002.10 - 2006.3

    System name:戦略的研究創造研究推進事業(さきがけタイプ)

    Awarding organization:JST

    安部 隆

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  • 微小空間における燃焼の制御・利用に関する研究

    Grant number:14655077

    2002 - 2003

    System name:科学研究費助成事業

    Research category:萌芽研究

    Awarding organization:日本学術振興会

    田中 秀治, 安部 隆, 小野 崇人, 江刺 正喜

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    Grant amount:\3300000 ( Direct Cost: \3300000 )

    微小空間における燃焼の応用として、マイクロ燃料改質器の熱源、マイクロ熱電発電器、マイクロロケットスラスターを取り上げ、試作品の製作と試験とを中心とする実証的な研究を行った。
    [マイクロ燃料改質器]携帯機器内で液体燃料から水素を生成するマイクロ燃料改質器を開発した。シリコンのエッチング・酸化・酸化シリコンによるエッチング孔の埋め戻しによって、断熱のための自己支持膜を強度が確保される構造に改良し、改良したマイクロ燃料改質器において水素の自立燃焼とメタノールの水蒸気改質とを確認した。
    [マイクロ熱電発電]触媒燃焼器を熱源とするICチップ大の熱電発電器を開発した。メタノールを燃料にして200mW以上の出力、および約2.5%の効率を実現した。また、触媒燃焼器に燃料の蒸気圧によって空気を供給するマイクロエゼクタを試作した。エゼクタの構造、流路の形状、燃料の供給圧などパラメータにして一連の実験を行い、ブタンの完全燃焼に必要な量の空気が供給できることを確認した。さらに、そのエゼクタを用いてブタンの燃焼に成功した。
    [マイクロロケットスラスター]10kg級の超小形人工衛星の姿勢制御をするマイクロ固体ロケットアレイスラスターを開発した。本スラスター上には、直径0.8mmの使い切り固体ロケットが多数並べられており、スラストはデジタル的に制御される。点火の確実性を向上させるために、燃料の充填方法を変更し、種々の方法で燃料を充填したスラスターの真空燃焼試験を行った。その結果に基づいて、燃料の充填方法をはじめとして、燃料の組成、スラスターの構造などを見直している。

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  • マルチチャンネル水晶振動子マイクロバランスの超小型化、高感度化に関する研究

    Grant number:14655313

    2002 - 2003

    System name:科学研究費助成事業

    Research category:萌芽研究

    Awarding organization:日本学術振興会

    江刺 正喜, 安部 隆

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    Grant amount:\2900000 ( Direct Cost: \2900000 )

    マイクロ・ナノマシニング技術を用いて、単一水晶基板上に多数の振動子が配列したマルチチャンネル型の水晶振動子マイクロバランス(QCM)を製作した。このマルチチャンネル型QCMは、各々の振動子に異なる感応膜を被覆し周波数応答を比較することでケモメトリック分析等が可能な画期的なセンサである。このQCMセンサの質量検出感度は周波数の自乗に逆比例するために板厚が薄いほど高感度になることが知られている。これまでに、水晶を鏡面のまま微細加工できる反応性イオンエッチング技術を開発し、その微細加工技術を用いて水晶板を部分的に薄くし高感度化を達成しかつ干渉せずに振動する逆メサ構造の振動子を製作してきた。その結果、支持損失を抑えて高いQ値(低損失)となる最適形状条件を実験的に見い出した。このように、高感度な振動子の製作方法が確立した一方、振動子を薄くするあるいは小さくすると粘弾性負荷に対して不安定になるという新たな問題が明らかになった。これを解決するために振動子中央部に振動エネルギーが集中するように水晶板の板厚を変える加工技術を開発した。具体的には、ホトレジストをリフローによりレンズ形状にし鏡面エッチング技術でこの形状を水晶板に転写することでコンベックス形状の大量一括生産を実現した。上記方法で製作した振動子の振動特性を評価し、未加工の場合と比較してQ値が二倍高くかつ溶液中での振動特性が優れていること等を明らかにした。

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Teaching Experience

  • 総合技術科学演習

    2022
    -
    2023
    Institution name:新潟大学

  • 先端研究入門

    2020
    Institution name:新潟大学

  • 機械工学実験IV

    2020
    Institution name:新潟大学

  • 機械工学実験III

    2020
    Institution name:新潟大学

  • 機械工学概論

    2017
    Institution name:新潟大学

  • 数物演習

    2017
    Institution name:新潟大学

  • 工学リテラシー入門(力学分野)

    2017
    Institution name:新潟大学

  • 物理工学実験

    2017
    Institution name:新潟大学

  • 材料生産システム博士特定研究Ⅰ

    2014
    Institution name:新潟大学

  • 外国語論文解説・討論Ⅰ

    2014
    Institution name:新潟大学

  • 材料生産システム博士セミナーⅠ

    2014
    Institution name:新潟大学

  • 機械科学コース演習

    2014
    Institution name:新潟大学

  • 機械工学実験I

    2012
    Institution name:新潟大学

  • 卒業研究

    2012
    Institution name:新潟大学

  • 卒業研修

    2012
    Institution name:新潟大学

  • 英文輪読I

    2012
    Institution name:新潟大学

  • 英文輪読II

    2012
    Institution name:新潟大学

  • 機械工学演習

    2012
    Institution name:新潟大学

  • 機械工学実験II

    2012
    Institution name:新潟大学

  • 機械科学セミナーⅠ

    2012
    -
    2015
    Institution name:新潟大学

  • 機械科学文献詳読Ⅰ

    2012
    -
    2015
    Institution name:新潟大学

  • 材料生産システム特定研究Ⅱ

    2012
    -
    2015
    Institution name:新潟大学

  • 研究発表演習・発表

    2012
    -
    2015
    Institution name:新潟大学

  • 機械科学文献詳読Ⅱ

    2012
    -
    2015
    Institution name:新潟大学

  • 機械科学特別演習

    2012
    -
    2015
    Institution name:新潟大学

  • 材料生産システム特定研究Ⅰ

    2012
    -
    2015
    Institution name:新潟大学

  • 機械科学セミナーⅡ

    2012
    -
    2015
    Institution name:新潟大学

  • 技術英語入門

    2012
    Institution name:新潟大学

  • くらしを支える機械システム工学

    2011
    Institution name:新潟大学

  • 先端マイクロマシン工学特論

    2011
    Institution name:新潟大学

  • 工学リテラシー入門(機械システム工学科)

    2011
    -
    2020
    Institution name:新潟大学

  • 自然科学総論Ⅱ

    2011
    -
    2020
    Institution name:新潟大学

  • マイクロマシン

    2010
    Institution name:新潟大学

  • 応用数理A

    2010
    Institution name:新潟大学

  • マイクロマシン工学特論

    2010
    Institution name:新潟大学

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