2021/05/15 更新

写真a

アベ タカシ
安部 隆
ABE Takashi
所属
教育研究院 自然科学系 生産デザイン工学系列 教授
自然科学研究科 材料生産システム専攻 機械科学 教授
工学部 工学科 教授
職名
教授
外部リンク

学位

  • 博士(工学) ( 1997年3月   名古屋大学 )

研究キーワード

  • タフMEMS

  • 微細加工

  • MEMS

  • 水晶MEMS

  • センサ

研究分野

  • 情報通信 / 機械力学、メカトロニクス

  • ものづくり技術(機械・電気電子・化学工学) / 計測工学

  • ナノテク・材料 / ナノマイクロシステム

  • 情報通信 / ロボティクス、知能機械システム

経歴(researchmap)

  • 新潟大学   大学院自然科学研究科 材料生産システム専攻 機械科学   教授

    2010年4月 - 現在

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  • 東北大学   大学院工学研究科 機械・知能系   准教授

    2003年4月 - 2010年3月

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  • 独立行政法人 科学技術振興機構 さきがけ 個人研究者

    2002年11月 - 2005年3月

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  • 東北大学   工学部 機械電子工学科   助手

    2001年4月 - 2003年3月

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経歴

  • 新潟大学   自然科学研究科 材料生産システム専攻 機械科学   教授

    2010年4月 - 現在

  • 新潟大学   機械システム工学科   教授

    2010年4月 - 現在

学歴

  • 名古屋大学   Graduate School, Division of Engineering

    - 1997年3月

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    国名: 日本国

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  • 名古屋大学   工学部

    - 1992年3月

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    国名: 日本国

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所属学協会

委員歴

  • 電気学会 センサ・マイクロマシン部門   副部門長  

    2019年 - 現在   

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    団体区分:学協会

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  • 電気学会 センサ・マイクロマシン部門   編修委員会 編修委員長  

    2019年 - 2020年   

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    団体区分:学協会

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  • 日本機械学会 マイクロ・ナノ工学部門   表彰委員会 委員長  

    2019年 - 2020年   

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    団体区分:学協会

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  • 日本学術振興会   第150委員会 委員  

    2018年 - 2020年   

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    団体区分:学協会

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  • 電気学会   代議員(社員)  

    2016年 - 2019年   

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    団体区分:学協会

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  • 日本機械学会   マイクロ・ナノ工学部門 代議員  

    2016年 - 2019年   

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    団体区分:学協会

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  • 電気学会 センサ・マイクロマシン部門大会   論文委員長  

    2015年 - 2016年   

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    団体区分:学協会

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  • 電気学会 センサ・マイクロマシン部門   編修長(主査)  

    2013年 - 2014年   

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    団体区分:学協会

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▶ 全件表示

 

論文

  • Tactile Sensor with High-Density Microcantilever and Multiple PDMS Bumps for Contact Detection 査読 国際誌

    Tomoya Fujihashi, Fumitoshi Suga, Ryoma Araki, Jun Kido, Takashi Abe, Masayuki Sohgawa

    Journal of Robotics and Mechatronics32 ( 2 ) accepted   2020年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

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  • Tactile sensor using a microcantilever embedded in fluoroelastomer with resistance to cleaning and antiseptic solutions 査読 国際誌

    Takumi Takahashi, Shuhei Sato, Takashi Abe, Masayuki Sohgawa

    Sensors and Actuators A: Physical301 ( 1 ) 111774   2020年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1016/j.sna.2019.111774

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  • 触覚センシングにおける振動覚検知のためのマイクロカンチレバーの作製と評価 査読

    高橋 春暁, 難波 勇太, 安部 隆, 寒川 雅之

    電気学会論文誌E(センサ・マイクロマシン部門誌)139 ( 11 ) 375 - 380   2019年11月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.139.375

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  • チタンを反応性イオンエッチングで高速加工するための自己加熱式ステージの開発 査読

    桐生 祐弥, 韓 剛, 今井 純一, 寒川 雅之, 安部 隆

    電気学会論文誌E(センサ・マイクロマシン部門誌)139 ( 10 ) 341 - 345   2019年10月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.139.341

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  • 容器内溶液の非接触検査のための水晶発振回路式液体濃度センサの開発 招待 査読

    小黒 悠, 谷村 実紀, 矢田 直人, 寒川 雅之, 安部 隆

    電気学会論文誌E(センサ・マイクロマシン部門誌)139 ( 7 ) 169 - 174   2019年7月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

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  • 触覚センサによる多層柔軟物モデルの計測と有限要素解析 査読

    木藤 潤, 阿部 祐太, 佐藤 周平, 安部 隆, 野間 春生, 寒川 雅之

    電気学会論文誌E(センサ・マイクロマシン部門誌)139 ( 6 ) 149 - 154   2019年6月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

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  • 1滴を評価できる水晶発振回路式粘度・濃度複合センサの作製と評価 査読

    庄司拓人, 江端 亮, 寒川雅之, 安部 隆

    電気学会論文誌E(センサ・マイクロマシン部門誌)139 ( 4 ) 81 - 84   2019年4月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

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  • Introducing planar hydrophobic groups into an alkyl-sulfonated rigid polyimide and how this affects morphology and proton conductivity 査読

    Yuki Nagao, Teppei Tanaka, Yutaro Ono, Kota Suetsugu, Mitsuo Hara, Guangtong Wang, Shusaku Nagano, Takashi Abe

    Electrochimica Acta300   333   2019年3月

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    出版者・発行元:Elsevier {BV}  

    DOI: 10.1016/j.electacta.2019.01.118

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  • Microdroplet monitoring using microfluid circuit combined quartz oscillator based capacitive sensor 査読

    Roy Ebata, Ryo Sakai, Masayuki Sohgawa, Takashi Abe

    Electronics and communications inJapan101 ( 12 ) 50 - 55   2018年12月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

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  • 微小流体回路融合型水晶発振回路式容量センサを用いた微小液滴のモニタリング 査読

    江端 亮, 坂井 了, 寒川 雅之, 安部 隆

    電気学会論文誌E(センサ・マイクロマシン部門誌)138 ( 8 ) 382 - 386   2018年8月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

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  • Lyotropic ordering for high proton conductivity in sulfonated semialiphatic polyimide thin films 査読

    K. Takakura, Y. Ono, K. Suetsugu, M. Hara, S. Nagano, T. Abe, Y. Nagao

    Polymer Journal   2018年8月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

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  • Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous Gripping Control 査読

    Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    Micromachines9 ( 6 ) 301   2018年6月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

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  • 光・ひずみ複合触覚センサを用いたポリオキシメチレン樹脂の表面形状・色計測による質感評価 査読

    難波 勇太, 安部 隆, 寒川 雅之

    電気学会論文誌E(センサ・マイクロマシン部門誌)138 ( 6 ) 250 - 256   2018年6月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

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  • Electromotive Manipulator Control by Detection of Proximity, Contact, and Slipping Using MEMS Multiaxial Tactile Sensor 査読

    Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    Electrical Engineering in Japan204 ( 2 ) 44 - 49   2018年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    本論文では、近接・接触・滑りが検知可能な単素子MEMSセンサを用いた電動マニピュレーションシステムの器用な物体把持への有用性を示した。このMEMSセンサは光導電効果にを用いて物体からの反射光によるSi基板のインピーダンス変化として近接を検知する。さらに、3回対称に配置されポリジメチルシロキサン(PDMS)に封止されたカンチレバー上のひずみゲージ抵抗変化として、垂直荷重と剪断荷重を双方検出できる。電動マニピュレータにセンサを設置することで、センサ出力のフィードバックにより把持力の精細な制御が可能とした。

    DOI: 10.1002/eej.23098

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  • High proton conduction of organized sulfonated polyimide thin films with planar and bent backbones 査読

    Y. Ono, R. Goto, M. Hara, S. Nagano, T. Abe, Y. Nagao

    Macromolecules51   3351 - 3359   2018年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

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  • Development of Self-Heated Stage Suitable for Thermal Assist Reactive Ion Etching of the Functional Metals 招待 査読

    Yuki Murata, Gang Han, Daiki Ohkawa, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan101 ( 3 ) 96 - 102   2018年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Wiley-Liss Inc.  

    This paper describes development of self-heated stage suitable for thermal reactive ion etching (TRIE) of the functional metals. TRIE was evaluated using both experiments and simulations for etching functional metals. The self-heated stage was designed based on the simulation results. TRIE employs a self-heated stage which is thermally insulated aluminum plate as the etching stage of a regular RIE apparatus. The stage temperature increases rapidly within 10 min and etch rate does not depend on process time. TRIE technique was used to etch various kinds of functional metals: Ti, Mo, Ta, Nb, and Ti alloy (Ti-6Al-4V). It did improve the etching rate of these materials greatly.

    DOI: 10.1002/ecj.12046

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  • Electrode-separated quartz crystal microbalance for smart-sensor mounting application 査読

    Jun Sakaguchi, Masayuki Sohgawa, Takashi Abe

    Sensors and Materials30 ( 5 ) 1073 - 1080   2018年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:M Y U Scientific Publishing Division  

    Quartz crystal microbalances (QCMs) have found applications as popular chemical and biological sensing tools. However, their current device geometry prevents their commercialization for industrial use. In this study, we propose a new disposable QCM sensor with an electrode only on the sensing side, making it suitable for sensor mounting. In this sensor system, the excitation electrode is positioned on a glass plate separate from the QCM. Such electrode configurations are suitable for sensor applications in flow cell systems in preference to common QCM systems because QCM mounting on the flow cell and the electrical interconnections between the QCM and the oscillation circuit are simple. The optimized configurations of the electrode diameter, separation distance, and orientation relative to the crystallographic x-axis of the plate are revealed for the first time. The proposed QCM can be applied to realize a disposable QCM-based biochip or hazardous gas sensor located inside a flow tube.

    DOI: 10.18494/SAM.2018.1712

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  • Texture evaluation for planed surface of polyoxymethylene resin by measuring surface shape and color with light and strain sensitive tactile sensor 査読

    Yuta Namba, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines138 ( 6 ) 250 - 256   2018年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Institute of Electrical Engineers of Japan  

    In this work, we have evaluated the planed surface of polyoxymethylene resin by light and strain sensitive MEMS tactile sensor. It is confirmed that the sensor output is correlated with surface profile and frictional characteristics of the resin. Additionally, it is demonstrated that difference of the surface color of the resin can be detected by this sensor.

    DOI: 10.1541/ieejsmas.138.250

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  • Surface texture characterization using optical and tactile combined sensor 査読

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    Sensors and Materials30 ( 5 ) 1091 - 1101   2018年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:M Y U Scientific Publishing Division  

    Measurements of the surface texture of objects, including optical and tactile features, using a multimodal micro-electromechanical systems (MEMS) sensor are reported in this paper. The proposed MEMS sensor has two functions in its structure: light sensitivity of the MOS structure in the Si substrate and force sensitivity of the strain resistance gauge on microcantilevers embedded in the elastomer. Deflection of the cantilever, induced by an applied force, can be detected as a DC resistance change of the strain gauge film, which depends on the tactile texture including hardness, thickness, and surface roughness of the object. On the other hand, reflected light from the object, detected as AC impedance change at 5 MHz, depends on the color of the object. It is confirmed that the resistance and impedance changes correlate with the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that the surface texture of the object, including optical and tactile features, can be characterized using a single MEMS sensor.

    DOI: 10.18494/SAM.2018.1786

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  • 水晶発振回路を用いた2チャンネル型非接触液体センサの開発 招待 査読

    矢田直人, 寒川雅之, 安部 隆

    電気学会論文誌E138 ( 2 ) 37 - 40   2018年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.138.37

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  • Deep reactive ion etching technique involving use of 3D self-heated cathode 査読

    Gang Han, Yuki Murata, Daiki Ohkawa, Masayuki Sohgawa, Takashi Abe

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   1281 - 1284   2017年7月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:Institute of Electrical and Electronics Engineers Inc.  

    In this study, a thermally assisted reactive-ion etching (TRIE) technique using a 3D self-heated stage as the etching stage in a conventional reactive-ion etcher was developed and applied to a large size wafer. The 3D stage was designed based on simulation results and its heating characteristics on application of RF power were evaluated. Results indicated that the temperature of the etching stage increased rapidly to 350 °C, but maintained a distribution of ≤ 4 °C. Its application to various minor metals (Ti, Ti 6Al-4V, Ta, Nb, and Mo) was investigated. The resultant etch rates substantially increased with the use of the 3D self-heated cathode in a conventional reactive-ion etcher.

    DOI: 10.1109/TRANSDUCERS.2017.7994289

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  • Gripping control of delicate and flexible object by electromotive manipulator with proximity and tactile combo MEMS sensor 査読

    Ryoma Araki, Fumitoshi Suga, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   1140 - 1143   2017年7月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:Institute of Electrical and Electronics Engineers Inc.  

    In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed MEMS sensor to skillful gripping of various objects. This MEMS sensor is responsive to light with the photoconductive effect in Si and force with resistance change in the strain gauge layer on microcantilever structures, as a result, the sensor can detect both proximity and contact. In addition, since the cantilevers are located three-fold symmetry, the direction of applied force can also be detected. It is demonstrated that the proposed manipulator system with the developed sensor can grip not only rigid bodies but also gripping flexible objects.

    DOI: 10.1109/TRANSDUCERS.2017.7994254

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  • Texture measurement for fabrics including warm/cool and fluffiness sensation by multimodal MEMS sensor 査読

    Fumiya Sato, Takashi Shiwa, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2017)   343 - 346   2017年6月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    本論文ではマルチモーダルMEMSセンサにより様々な布類の温冷感やふわふわ感といったテクスチャ計測を行った結果について報告する。このMEMSセンサはマイクロカンチレバー上のひずみゲージの抵抗変化により力を、光導電効果によるSi層のインピーダンス変化として光をそれぞれ検知可能である。また、このセンサはひずみゲージの抵抗変化およびSiのインピーダンス変化として、センサから接触物体への伝熱による温度降下も検知できる。布の温冷感やふわふわ感は温度効果および接触力に依存するMEMSセンサの計測結果から評価可能であることが示された。

    DOI: 10.1109/TRANSDUCERS.2017.7994058

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  • Fabrication of a true-Gaussian-shaped quartz crystal resonator 査読

    Hiroki Kutsuwada, Sho Watanabe, Masayuki Sohgawa, Takashi Abe

    SENSORS AND ACTUATORS A-PHYSICAL260   58 - 61   2017年6月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    In this paper, a simple fabrication method for a Gaussian-shaped quartz crystal resonator was developed based on the surface tension of the photoresist. First, the photoresist profile on a quartz wafer was changed to a lens shape by the photoresist reflow. By changing the viscocity of the photoresist with propylene glycol monomethyl ether acetate, the photoresist profile on the quartz wafer was adjusted to create a Gaussian shape. Finally, the Gaussian-shaped QCR was fabricated by transferring the shape onto the quartz wafer using a reactive ion etching. (C) 2017 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.sna.2017.04.019

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  • Development of titanium micro mold manufacturing technology for the microfluidic chip by plasma etching 査読

    Takeshi Hitobo, Masahiro Shiroki, Hirofumi Nabesawa, Toyohisa Asaji, Takashi Abe

    Journal of the Vacuum Society of Japan60 ( 4 ) 145 - 147   2017年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Vacuum Society of Japan  

    This paper describes the microfabrication of titanium micro molds for the microfluidic chip by a reactive ion etching (RIE) system. The etching was carried out using SF6 plasma.We have examined the etching rate and surface roughness at the range of process pressure 0.3-0.7 Pa and RF (13.56 MHz radio-frequency) power 30-70 W. The etching rate is over 0.3 mm/min at the RF power of 70W. The surface roughness of etched substrates is below 40 nm at the process pressure of 0.3 Pa. We made a titanium micro mold and molded microfluidic chips by using polycarbonate, and microresico® (Polypropylene resin).

    DOI: 10.3131/jvsj2.60.145

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  • Microstructure formation on polytetrafluoroethylene (PTFE) and perfluoroalkoxy (PFA) bulk plates by a magnetron enhanced reactive ion etching system 査読

    Hirofumi Nabesawa, Takeshi Hitobo, Toyohisa Asaji, Takashi Abe, Minoru Seki

    Journal of the Vacuum Society of Japan60 ( 5 ) 176 - 181   2017年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Vacuum Society of Japan  

    The etching characteristics of polytetrafluoroethylene (PTFE) and perfluoroalkoxy (PFA) bulk plates were studied in a magnetron enhanced reactive ion etching (M-RIE) system. The etch rates of the plates for oxygen plasma were investigated under the pressure range 0.1-2.0 Pa, and were found to strongly correlate with the self-bias voltage. The plates presented smooth surface in the 0.1-1.0 Pa pressure range, and rough surfaces at 1.5 Pa and 2.0 Pa. The roughness was introduced by a micromask sputtered from the chamber material. The titanium etching mask exhibited lower etch rates for oxygen plasma than aluminum and silicon dioxide. Finally, using the dry-etched titanium mask in low-pressure oxygen plasma, we fabricated a 5-μm pitch line-and-space structure on a PTFE plate and a 4-μm square pillar array on a PFA plate.

    DOI: 10.3131/jvsj2.60.176

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  • 機能性メタルの熱アシスト型反応性イオンエッチングに対応した自己加熱式ステージの開発 査読

    村田 祐貴, 韓 剛, 大川 太基, 今井 純一, 寒川 雅之, 安部 隆

    電気学会論文誌E137 ( 9 ) 262 - 266   2017年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.137.262

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  • Thermal Reactive Ion Etching of Minor Metals with SF6 Plasma 査読

    Gang Han, Yuki Murata, Yuto Minami, Masayuki Sohgawa, Takashi Abe

    SENSORS AND MATERIALS29 ( 3 ) 217 - 223   2017年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:MYU, SCIENTIFIC PUBLISHING DIVISION  

    In this study, thermally assisted reactive ion etching (TRIE) was evaluated by both experiments and simulations. TRIE employs a self-heated stage instead of the etching stage of a regular RIE apparatus. The self-heated stage was designed on the base of the simulation results, and its heating characteristics upon the application of radio frequency (RF) power were evaluated. The temperature of the stage increases rapidly within 10 min because of the low thermal capacitance of the stage. An etch rate of 0.6 mu m/min and an etch selectivity of about 30 were achieved for titanium etching with SF6 plasma. In addition, we also investigated the application of TRIE for various kinds of minor metals (Mo, Ta, Nb, and Ti alloy) for the first time and achieved higher etch rates and etch selectivities than those of regular reactive ion etching (RIE).

    DOI: 10.18494/SAM.2017.1444

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  • 近接・接触・滑りを検知できるMEMS多軸触覚センサを用いた小型電動マニピュレータ制御 査読

    荒木 凌馬, 安部 隆, 野間 春生, 寒川 雅之

    電気学会論文誌E137 ( 7 ) 212 - 217   2017年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.137.212

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  • 真空中での水晶振動子式小型熱重量分析センサの昇温特性評価 招待 査読

    和田 涼介, 寒川 雅之, 安部 隆

    電気学会論文誌E137 ( 7 ) 180 - 184   2017年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.137.180

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  • 近接覚・触覚コンボセンサにおける周波数変調プローブ光を用いた近接計測手法の検討 査読

    梅木 尚, 野沢 瑛斗, 奥山 雅則, 野間 春生, 安部 隆, 寒川 雅之

    電気学会論文誌E137 ( 5 ) 146 - 150   2017年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.137.146

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  • Deposition and characterization of Al2O3 and BiFeO3 thin films on titanium substrates for tough MEMS devices 査読

    Takeshi Kohno, Masato Mihara, Ataru Tanabe, Takashi Abe, Masanori Okuyama, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines137 ( 1 ) 46 - 47   2017年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Institute of Electrical Engineers of Japan  

    Insulator and piezoelectric thin films were deposited on titanium substrate, and characterized for application in tough MEMS tactile sensors. The titanium substrate was polished by buffing before the deposition of the thin films. An Al2O3 thin film was deposited as an insulator and showed good insulation characteristics on the polished titanium substrate. Piezoelectric BiFeO3 thin films were prepared by RF sputtering. The XRD pattern of the BiFeO3 thin film on the titanium substrate shows the presence of the ferroelectric phase. The polarization-electric field curve also shows a ferroelectric hysteresis loop. The results show that insulator and piezoelectric thin film can be formed on titanium substrate.

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  • Texture Characterization Including Warm/Cool Sensation Using Force-, Light-, and Temperature-Sensitive Micro-electromechanical Systems Sensor 査読

    Fumiya Sato, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    SENSORS AND MATERIALS29 ( 3 ) 311 - 321   2017年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:MYU, SCIENTIFIC PUBLISHING DIVISION  

    In this paper, we report on texture measurements for an object, including tactile, warm/cool, and light sensations using a multimodal micro-electromechanical systems (MEMS) sensor. This MEMS sensor can detect force as a resistance change of the strain gauge on a microcantilever and light as an impedance change of a Si layer by a photoconductive effect. The sensor, which was maintained near human body temperature using a heater, can also detect a temperature drop after heat transfer from the sensor to a contacted object as a resistance change of the strain gauge or an impedance change of the Si layer. In this work, three different materials (copper, acrylic, and wood) were chosen as the target objects for the measurement of surface texture, and they were characterized on the basis of the differences in sensor outputs in active sensing experiments (approaching and pressing of the sensor with a probe light) on the sensor surface. In the proximity process, the impedance change of the Si layer depends on the surface reflectivity of the objects. After the object is touched by the sensor surface, the impedance of the Si layer and the resistance of the strain gauge of the sensor increase with the change in temperature caused by heat transfer. Furthermore, the resistance of the strain gauge decreases with the deformation of the cantilever caused by the pressing force from each object. Therefore, it is demonstrated that surface texture including the mechanical, optical, and thermal characteristics of various materials can be evaluated by active sensing using the proposed MEMS multimodal sensor.

    DOI: 10.18494/SAM.2017.1443

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  • Evaluation method of fabrics by visual and tactile texture information using MEMS combo sensor 査読

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    IEEE Sensors 2016   655 - 657   2016年11月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    DOI: 10.1109/ICSENS.2016.7808624

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  • 水晶振動子を用いた液体分析用コンボセンサにおける形状最適化 査読

    坂井 了, 今井 寛明, 寒川 雅之, 安部 隆

    電気学会論文誌E136 ( 7 ) 319 - 322   2016年7月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.136.343

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  • MASS SENSITIVITY AMPLIFICATION BY USING GAUSSIAN-SHAPED QUARTZ CRYSTAL RESONATOR 査読

    H. Kutsuwada, S. Watanabe, M. Sohgawa, T. Abe

    2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   1022 - 1025   2016年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:IEEE  

    This paper reports mass sensitivity amplification in a Gaussian-shaped quartz crystal resonator (Gaussian-shaped QCR). To achieve amplification, a fabrication process for a Gaussian-shaped (not quasi-Gaussian) QCR was developed using photolithographic methods. Sensitivity amplification in the QCR was observed at the central portion. The mass response was three times higher than the theoretical value for gravimetric measurements of thin, uniform films. The optimized height of the shape, evaluated based on the Q factor, is higher than that of the convex shape. This resonator is expected to be applicable to mass measurement of various micro/nanoparticles.

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  • Preface to the special issue on the awarded papers of the 32nd sensor symposium ' 査読

    Shuichi Shoji, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines136 ( 6 ) 213   2016年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Institute of Electrical Engineers of Japan  

    DOI: 10.1541/ieejsmas.136.213

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  • Shape optimization of combo sensor using quartz crystal resonator for liquid analysis 査読

    Ryo Sakai, Hiroaki Imai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines136 ( 8 ) 343 - 347   2016年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Institute of Electrical Engineers of Japan  

    In this paper, we report the optimized combo sensor using quartz crystal resonator for analyzing the physicochemical properties of liquids. This sensor can measure the mechanical properties and the electrical properties simultaneously by integrating a LFE (Lateral Field Excited) sensor with an ACR (Antiparallel Coupled Resonator) or two types of ACR sensor on a same substrate. We optimized the electrode diameter of resonator for measuring a glucose aqueous solution or NaCl aqueous solution. Moreover, we measured concentration of glucose aqueous solution and NaCl aqueous solution with optimized sensor. This sensor is expected to be used for product quality control in industrial plants.

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  • Contactless Liquid Sensing Technique Using a Quartz Oscillator 査読

    Tsubasa Susa, Takeru Watanabe, Masayuki Sohgawa, Takashi Abe

    SENSORS AND MATERIALS28 ( 4 ) 289 - 294   2016年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:MYU, SCIENTIFIC PUBLISHING DIVISION  

    In this paper, a contactless sensor for the measurement of liquid concentration using a quartz oscillator is reported. An out-of-plane electric field distribution from a planar sensing capacitor (SC) is used for the noncontact sensor measurement of liquid concentration on a spacer. This sensor measures the changes in the capacitance of the SC by the changes in the frequency of the quartz oscillator. Because the capacitance is dependent on the relative permittivity and conductivity of the liquid sample on the spacer, it is pOssible to measure the concentration of the sample. The response is very stable because, in this sensor, the SC is incorporated into the quartz oscillator. Because the SC is in contact with the liquid sample instead of the quartz crystal resonator, the sensor has a high quality factor (approximately 30000). Moreover, this sensor can be used with a general integrated circuit (IC) and an electronic component at a low cost. The sensor is used for the noncontact measurements of liquid concentration.

    DOI: 10.18494/SAM.2016.1179

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  • 微量液体に対応した水晶発振回路式液体濃度センサの開発 査読

    柳田 祐太, 須佐 翼, 寒川 雅之, 安部 隆

    電気学会論文誌E136 ( 7 ) 319 - 322   2016年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.136.319

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  • Characterization of BiFeO3 Thin Film for Tactile Sensor Using Microcantilevers with Piezoelectric Capacitor and Strain-Gauge 査読

    Takeshi Kohno, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    IEEE Sensors 2015   1192 - 1195   2015年11月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    Lead-free BiFeO3 thin films for tactile sensor using microcantilevers have been prepared on Pt and SrRuO3/Pt thin films on a SiO2/Si substrate by RF sputtering, and the electrical characteristics have been optimized by controlling the substrate temperature, gas pressure, and oxygen partial pressure in deposition process. The BiFeO3 thin film (thickness: 300 nm) deposited on SrRuO3 (thickness: 80 nm) deposited at substrate temperature of 500°C in gas pressure of 0.6 Pa and oxygen partial pressure of 0.24 Pa has good crystallinity, ferroelectricity, and piezoelectric property. Therefore, it is demonstrated that BiFeO3 thin film can be a good sensing material as a detection part of tactile sensor. Furthermore, a cantilever structure with piezoelectric capacitor and strain gauge has been fabricated and different time-dependent outputs from them can be obtained.

    DOI: 10.1109/ICSENS.2015.7370483

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  • Basic Study for Tactile and Visual Texture Measurement by Multimodal MEMS Sensor with Force and Light Sensitivity 査読

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    IEEE Sensors 2015   699 - 702   2015年11月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    The tactile and visual texture measurement by multimodal MEMS sensor is reported. This MEMS sensor has two function in a structure: force-sensitivity of resistance of microcantilevers embedded in the elastomer and light-sensitivity of a MOS structure on the Si substrate. Deflection of the cantilever induced by applied force depends on the tactile texture including hardness, thickness, and roughness of the object, and is detected as DC resistance change of the strain gauge film. On the other hand, incident light depends on the visual texture of the object, and is detected as AC impedance change at 5 MHz. It is confirmed that the resistance and impedance changes depend on the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that multimodal texture can be characterized by a single MEMS sensor.

    DOI: 10.1109/ICSENS.2015.7370352

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  • 水晶発振回路を用いた非接触型液体濃度センサ 査読

    須佐 翼, 渡部 尊, 寒川 雅之, 安部 隆

    電気学会論文誌E135 ( 5 ) 158 - 164   2015年6月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.135.210

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  • BiFeO3圧電体薄膜を用いたマイクロカンチレバー触覚センサの検討 査読

    三原 雅人, 野沢 瑛斗, 安部 隆, 奥山 雅則, 野間 春生, 東 輝明, 寒川 雅之

    電気学会論文誌E(センサ・マイクロマシン部門誌)135 ( 5 ) 158 - 164   2015年5月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    エラストマに埋め込んだマイクロカンチレバーを用いた圧電型触覚センサを提案し、これまでのピエゾ抵抗を用いた触覚センサに対して消費電力の低減を目指した。基板温度520℃、ガス圧力0.6 Paで高周波スパッタリングにより作製したBiFeO3薄膜(膜厚: 400 nm)は良好な圧電性を持ち、振動により300 mVの出力電圧を得ることができた。これにより、BiFeO3薄膜を用いて触覚センサへの外力印加によるマイクロカンチレバーの変位を検知できることを示した。

    DOI: 10.1541/ieejsmas.135.158

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  • Thermal reactive ion etching technique involving use of self-heated cathode 査読

    S. Yamada, Y. Minami, M. Sohgawa, T. Abe

    REVIEW OF SCIENTIFIC INSTRUMENTS86 ( 4 )   2015年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    In this work, the thermal reactive ion etching (TRIE) technique for etching hard-to-etch materials is presented. The TRIE technique employs a self-heated cathode and a thermally insulated aluminum plate is placed on the cathode of a regular reactive ion etching (RIE) system. By optimizing the beam size to support the sample stage, the temperature of the stage can be increased to a desired temperature without a cathode heater. The technique was used to etch a bulk titanium plate. An etch rate of 0.6 mu m/min and an etch selectivity to nickel of 100 were achieved with SF6 plasma. The proposed technique makes a regular RIE system a more powerful etcher without the use of chlorine gas, a cathode heater, and an inductively coupled plasma source. (C) 2015 AIP Publishing LLC.

    DOI: 10.1063/1.4917193

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  • Preface to the special issue on "World state-of-the-art research on sensors and micromachines" 査読

    Takashi Abe

    IEEJ Transactions on Sensors and Micromachines135 ( 3 ) 90   2015年3月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Institute of Electrical Engineers of Japan  

    DOI: 10.1541/ieejsmas.135.90

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  • Microheater-integrated quartz crystal microbalance array for thermal desorption spectroscopy 査読

    Jumpei Sakai, Masayuki Sohgawa, Naoyuki Iida, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines135 ( 3 ) 112 - 113   2015年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Institute of Electrical Engineers of Japan  

    In this work, we present a new design involving a microheater-integrated quartz crystal microbalance (QCM) array for thermal desorption spectroscopy. Each QCM consists of two electrodes to excite thickness-shear-mode (TSM) vibrations on the crystal back side and one microheater to increase the temperature on the crystal front side. The resonance frequency was stable when a voltage was applied to the microheater. Carbon microparticles were coated on one of the QCMs for gas adsorption, and its frequency change during the temperature increase was calculated by subtracting the frequency change of an untreated QCM. The proposed QCM array was employed to separate ethanol from methanol. The separation was successful, as confirmed via thermal desorption spectra calculated by differentiating the resonance frequency change with respect to time.

    DOI: 10.1541/ieejsmas.135.112

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  • NON-CONTACT SENSOR FOR MEASUREMENT OF LIQUID CONCENTRATION BASED ON QUARTZ OSCILLATOR 査読

    T. Susa, T. Watanabe, M. Sohgawa, T. Abe

    2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)   1472 - 1475   2015年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:IEEE  

    In this paper, a noncontact sensor for the measurement of liquid concentration using a quartz oscillator is reported. An out-of-plane electric field with a planer sensing capacitor (SC) is used for sensing a liquid on a spacer. This sensor measures the changes in the capacitance of the SC as the changes in the frequency of the quartz oscillator. The capacitance is dependent on the relative permittivity and the conductivity of the liquid sample on the spacer. Therefore, it is possible to measure the concentration of the sample. The response is very stable because in this sensor, the SC is incorporated into the quartz oscillator. Because the quartz crystal resonator is not contact with liquid, the proposed sensor has a high quality factor (approximately 30,000). Moreover, this sensor can be used with a general IC and an electronic component, with a low cost. The proposed sensor can be expected to be used for various kinds of liquid sensing applications.

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  • Multimodal Measurement of Proximity and Touch Force by Light- and Strain-Sensitive Multifunctional MEMS Sensor 査読

    Masayuki Sohgawa, Akito Nozawa, Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    IEEE Sensors 2014   1749 - 1752   2014年11月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    近接と接触力を計測できるPDMSエラストマに埋め込まれたSiマイクロカンチレバーを用いたマルチモーダルセンサを作製・評価した。マイクロカンチレバー上のひずみゲージの直流抵抗は対象物の押込み深さに比例して変化した。一方、光感度を持つSiの成分を含む交流インピーダンス(> 0.5 MHz)は対象物から反射される光の減少によりセンサ表面と対象物間の距離とともに増加する。さらに、交流インピーダンスは、電極間の静電界分布の違いにより、近接物体が電気的に接地しているか浮遊しているかにより異なり、物体近接は光だけでなく静電界によるインピーダンス変化でも計測可能であることを示している。

    DOI: 10.1109/ICSENS.2014.6985362

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  • Texture measurement and identification of object surface by MEMS tactile sensor 査読

    Masayuki Sohgawa, Kosuke Watanabe, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    IEEE Sensors 2014   1706 - 1709   2014年11月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    様々な材質の表面質感をPDMSエラストマに埋め込んだマイクロカンチレバーを用いた触覚センサにより評価した。センサ表面への対象物の押込みによる最大出力(カンチレバー上のひずみゲージ抵抗)変化は対象物の硬さや厚みに依存する。さらに、変形緩和により押込み時と引上げ時で出力変化は非対称になった。一方、対象物表面でセンサが滑り始める時には静止摩擦力により出力が急激に上昇し、滑り後はスティックスリップ振動や表面粗さに応じて周期的に変化する。これらのセンサ出力の特徴量を主成分分析することにより、紙や布、革、プラスチック板等の30種類の材料を5つのクラスタに分類できることを示した。

    DOI: 10.1109/ICSENS.2014.6985351

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  • Miniature quartz crystal –resonator—based thermogravimetric detector 査読

    Sai N, Tagawa Y, Sohgawa M, Abe T

    Rev. of Sci. Instruments85 ( 9 ) 095001   2014年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1063/1.4894385

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  • A Multichannel Chemical Sensing Method Using Single Quartz Resonator and Micro Flow Channel 査読

    Shinjiro Toyama, Takashi Abe

    IEEE SENSORS JOURNAL14 ( 1 ) 135 - 139   2014年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    In this paper, the development of a multi chemical sensing method using a single quartz crystal resonator and micro flow channel has been reported. In the developed device, samples pass through two capacitors that are mounted as sensing parts in a microchannel with a time lag. Connecting the capacitors to the single quartz crystal resonator, one can obtain frequency change Delta F of the resonator as time lag signals depending on the relative permittivity of samples. The optimization of resonator diameter was also carried out in this paper. Using the proposed method, we can realize multi chemical sensing with a single resonator.

    DOI: 10.1109/JSEN.2013.2281099

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  • デスクトップ型DRIE装置を用いたチタニウム微細加工 査読

    山田周史, 人母岳, 寒川雅之, 安部隆

    電気学会論文誌E134 ( 4 ) 96 - 99   2014年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.134.96

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  • 光・歪複合検知MEMSセンサによる近接覚・触覚計測 査読

    横山 輔久登, 金島 岳, 奥山 雅則, 安部 隆, 野間 春生, 東 輝明, 寒川 雅之

    電気学会論文誌E134 ( 7 ) 229 - 234   2014年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.134.229

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  • Active touch sensing by multi-axial force measurement using high-resolution tactile sensor with microcantilevers 査読

    Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines134 ( 3 ) 58 - 63   2014年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    A tactile sensing system that measures normal and shear (triaxial) forces has been developed, and its characteristics such as linearity and crosstalk have been evaluated. Triaxial forces are estimated from the resistance changes of NiCr thin film strain gauge attached to three microcantilevers. The output voltage of the Wheatstone bridge that comprises a gauge film and three reference resistances is acquired using an A/D converter after amplification. Triaxial forces are calculated from the output voltages of three microcantilevers by simple matrix multiplication. Nonlinearity and crosstalk are less than 4% when the normal force applied is up to 1N and less than 10% when the shear force applied is up to 0.2N. Active touch sensing was demonstrated using an object having a striped profile measuring 0.1mm in height and 1mm in width. © 2014 The Institute of Electrical Engineers of Japan.

    DOI: 10.1541/ieejsmas.134.58

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  • 水晶振動子式メタノール濃度センサに関する数値計算と実証 査読

    渡部尊, 外山晋二郎, 寒川雅之, 安部隆

    電気学会論文誌E134 ( 7 ) 224 - 228   2014年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.134.224

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  • Experimental optimization of quartz-crystal-resonator-based methanol sensor connected in series with interdigital capacitor 査読

    Shunpei Ishii, Keito Emura, Takashi Abe

    Japanese Journal of Applied Physics52 ( 12 ) 127201   2013年12月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    In this paper, we report the development of a monolithic methanol concentration sensor. An interdigital capacitor and a resonator are fabricated on a single-crystal substrate. The methanol concentration can be measured by measuring the frequency shift of the resonator because the shift corresponds to a change in the relative permittivity of the capacitor connected in series to the resonator. The quality factor (Q) of the sensor is more than 20,000 since the methanol solution is not in contact with the resonator but with the capacitor. The smallest resonator diameter and sensor size for achieving a resolution of 0.3 wt% were 1.5mm and 2.6 × 10.9 × 0.1mm3, respectively. Because the structure and manufacturing process are simple, the proposed sensor can be expected to be used for various kinds of liquid sensing applications. © 2013 The Japan Society of Applied Physics.

    DOI: 10.7567/JJAP.52.127101

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  • Force intensity and direction measurement in real time using miniature tactile sensor with microcantilevers embedded in PDMS 査読

    Hokuto Yokoyama, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    IEEE Sensors   1090 - 1093   2013年11月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    3つのマイクロカンチレバー上に設けたNiCrひずみゲージ薄膜触覚センサにより垂直力・剪断力(3軸)の大きさと方向を測定した。ひずみゲージを含むホイートストンブリッジの出力電圧を増幅しデジタル信号として計測した。3軸力は3つのカンチレバーの出力から100 msごとに計算した。1 Nまでの垂直力印加に対して、垂直力と剪断力の測定誤差はそれぞれ50 mN,10 mNであった。また、剪断力の方向の誤差は10°以下であった。

    DOI: 10.1109/ICSENS.2013.6688401

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  • Low-pressure plasma-etching of bulk polymer materials using gas mixture of CF4 and O-2 査読

    Hirofumi Nabesawa, Takaharu Hiruma, Takeshi Hitobo, Suguru Wakabayashi, Toyohisa Asaji, Takashi Abe, Minoru Seki

    AIP ADVANCES3 ( 11 ) 112105   2013年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    In this study, we have proposed a low-pressure reactive ion etching of bulk polymer materials with a gas mixture of CF4 and O-2, and have achieved precise fabrication of poly(methyl methacrylate) (PMMA) and perfluoroalkoxy (PFA) bulk polymer plates with high-aspect-ratio and narrow gap array structures, such as, pillar, frustum, or cone, on a nano/micro scale. The effects of the etching conditions on the shape and size of each pillar were evaluated by changing etching duration and the size/material of etching mask. The fabricated PMMA array structures indicate possibilities of optical waveguide and nanofiber array. PFA cone array structures showed super-hydrophobicity without any chemical treatments. Also, polystyrene-coated silica spheres were used as an etching mask for the pillar array structure formation to control the gap between pillars. (c) 2013 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution 3.0 Unported License.

    DOI: 10.1063/1.4830277

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  • Enhancement of Proton Transport in an Oriented Polypeptide Thin Film 査読

    Yuki Nagao, Jun Matsui, Takashi Abe, Hirotsugu Hiramatsu, Hitoshi Yamamoto, Tokuji Miyashita, Noriko Sata, Hiroo Yugami

    LANGMUIR29 ( 23 ) 6798 - 6804   2013年6月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    Proton transport properties of a partially protonated poly(aspartic acid)/sodium polyaspartate (P-Asp) were investigated. A remarkable enhancement of proton conductivity has been achieved in the thin film. Proton conductivity of 60-nm-thick thin film prepared on MgO(100) substrate was 3.4 X 10(-3) S cm(-1) at 298 K. The electrical conductivity of the oriented thin film was 1 order of magnitude higher than the bulk specimen, and the activation energies for the proton conductivity were 0.34 eV for the oriented thin film and 0.65 eV for the pelletized sample, respectively. This enhancement of the proton transport is attributable to the highly oriented structure on MgO(100) substrate. This result proposes great potential for a new strategy to produce a highly proton-conductive material using the concept of an oriented thin film structure without strong acid groups.

    DOI: 10.1021/la400412f

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  • Design and Evaluation of Microheater Combined QCM Array for Thermal Desorption Spectroscopy 査読

    Jumpei Sakai, Naoyuki Iida, Masayuki Sohgawa, Takashi Abe

    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013 & Eurosensors XXVII)   234 - 237   2013年6月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    DOI: 10.1109/Transducers.2013.6626745

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  • A fabrication method of high-Q quartz crystal resonator using double-layered etching mask for DRIE 査読

    Takashi Abe, Yousuke Itasaka

    SENSORS AND ACTUATORS A-PHYSICAL188   503 - 506   2012年12月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    This paper reports a fabrication method of high-Q, quartz-crystal resonator having deep etched structures with precisely modulated surface shape. The method to realize the structures bases on the use of multi-layered mask having different etch selectivity to quartz during deep reactive ion etching (DRIE) process. Here, hard mask (nickel) and soft mask (photoresist) was used for deep etching and modulating etched surface shape, respectively. Because of the large difference in the etch selectivity between quartz/hard-mask (>30) and quartz/soft-mask (0.3-2), the limited range size of modulating shapes in the vertical direction was improved. Inverted-mesa quartz resonators combined with a spherical shape are demonstrated using the proposed method showing the improvement of the device performance. (C) 2012 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.sna.2012.02.006

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  • 液体分析用デュアル水晶センサの開発 査読

    武石大一, 江村恵渡, 安部隆

    電気学会論文誌E132 ( 7 ) 174 - 177   2012年7月

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

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  • A Multichannel Chemical Sensing Method Using Single Quartz Resonator and Micro Flow Channel 査読

    Shinjiro Toyama, Takashi Abe

    2012 IEEE SENSORS PROCEEDINGS   1057 - 1060   2012年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:IEEE  

    In this paper, the development of multi chemical sensing method using a single quartz resonator and micro flow channel has been reeported. In the developed device, samples pass through two capacitors mounted as sensing parts in a microchannnel with a time lag. Connecting the capacitors to thee single quartz resonator, one can obtain frequency change Delta F of the resonator as time lag signals depending on the relative permittivity of samples. Using the proposed method, we can realize multi chemical sensing with a single resonator.

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  • RIE patterning technology of Zr-based metallic glass for MEMS devices fabrication 査読

    Yao-Chuan Tsai, Yu-Ching Lin, Takashi Abe, Masayoshi Esashi, Thomas Gessner

    Proceedings of IEEE Sensors   2012年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    In this work, metallic glass films (Zr-Cu-Al-Ni) were successfully deposited and patterned by sputter and reactive ion etching (RIE) technologies for widening micro electro mechanical system (MEMS) field. The amorphous structure of the deposited Zr-based alloy films were confirmed by X-ray Diffraction (XRD) and transmission electron microscopy (TEM). The home-made RIE equipment was used to dry etch the metallic glass films for patterning. This technique removes the atoms by ion bombardment. The different gases were selected during the RIE plasma etching process such as argon (Ar), octafluorocyclobutane (C4F8) and sulphur hexafluoride (SF6). Two kind photoresists, AZP4620 and OFPR800, were used as the etching masks for transferring the patterns to Zr-based metallic glass thin film. The etching rate and etching selectivity of photoresist and metallic glass were tested in different photoresist hard-baking conditions and different etching RF power. Besides, the condition of employing different working gases during RIE etching process was carried out and studied in this work. As a result, the metallic glass Zr-Cu-Al-Ni films were successfully structured with 20nm/min etching rate and 1:3.2 (metallic glass: photoresist) etching selectivity by using a mixture of Ar and C4F8 gases. This plasma etching technology realizes metallic glass films patterning for advanced MEMS devices fabrication. © 2012 IEEE.

    DOI: 10.1109/ICSENS.2012.6411175

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  • Development of dual quartz sensor for liquid analysis 査読

    Taichi Takeishi, Keito Emura, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines132 ( 7 ) 174 - 177   2012年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:Institute of Electrical Engineers of Japan  

    A dual quartz sensor has been developed which enables the analyses of physicochemical properties of liquids. In this sensor, an ACR (Antiparallel Coupled Resonator) type quartz sensor and a LFE (Lateral Field Excited) type quartz sensor were fabricated on a same plate. The ACR can measure frequency response caused by a mechanical characteristic (viscoelasticity) of liquids. The LFE can measure frequency response caused by both the mechanical characteristic and the electrical characteristics (conductivity and dielectric constant) of liquids. By subtracting the frequency shift of the LFE and the ACR, the dual quartz sensor is possible to calculate the electrical characteristics. Therefore the dual quartz sensor allowed simultaneous measurements of electrical characteristics and the mechanical characteristic of a liquid. © 2012 The Institute of Electrical Engineers of Japan.

    DOI: 10.1541/ieejsmas.132.174

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  • A methanol concentration sensor using a quartz resonator connected in series to interdigital capacitor 査読

    Shunpei Ishii, Keito Emura, Takashi Abe

    Proceedings of IEEE Sensors133 ( 3 ) 96 - 97   2012年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    This paper reports the development of monolithic methanol concentration sensor for direct methanol fuel cell (DMFC). An interdigital capacitor and a resonator are fabricated on a single quartz crystal substrate. Methanol concentration can be measured by the frequency change of the resonator because the change corresponds to the dielectric constant change of the capacitor connected in series to the resonator. The smallest diameter of resonator and size of sensor that achieve a resolution of 0.1 wt% were 1.5 mm and 2.6×10.9×0.1 mm, respectively. Because the structure and the manufacturing process are simple, we expect it will be used for various kinds of liquid sensor. © 2012 IEEE.

    DOI: 10.1109/ICSENS.2012.6411072

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  • A Gaussian-shaped AT-cut quartz crystal resonator 査読

    Takashi Abe, Hiroki Kishi

    SENSORS AND ACTUATORS A-PHYSICAL166 ( 2 ) 173 - 176   2011年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    This paper reports the design and fabrication of a Gaussian-shaped AT-cut quartz crystal resonator. The thickness distribution of the resonator was designed following a Gaussian-type function. The distribution was based on the analysis of thickness shearing vibration calculated using finite element analysis for a flat-shaped resonator. The vibration analysis showed improvement of the energy trapping effect, and the vibration at the wafer edge was negligible. For the experimental verification, we attempted to fabricate a Gaussian-shaped resonator using microfabrication technologies. The resonant characteristics were substantially improved by the shaping. (C) 2010 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.sna.2010.04.005

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  • A Monolithic QCM Array Designed for Mounting on a Flow Cell 査読

    Takashi Abe, Makoto Higuchi

    IEEE SENSORS JOURNAL11 ( 1 ) 86 - 90   2011年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    A monolithic quartz crystal microbalance (QCM) array fabricated with the excitation electrodes located on the airside and the gold conductive layer on the sensing side was evaluated as a biosensor array in a simple flow cell. The electrode configuration of the new QCM is suitable for sensor applications in flow-cell systems compared with standard QCM because the mounting of the QCM on the flow cell and the electric interconnection between the excitation electrode and oscillation circuit does not require considerable skill and effort. Frequency response to the adsorption of human IgG to anti-human IgG antibody at the concentrations of 0.1-100 mu g/ml was successfully measured, and the results showed that this new sensor can be an alternative to the standard QCM. In addition, the affinity difference between the reference QCM coated with bovine serum albumin for reducing nonspecific binding and the antibody-immobilized QCM to anti-human IgG antibody was simultaneously measured by using the monolithic QCM array within the flow cell. The monolithic QCM array designed for mounting on a flow cell will be expected to use for studying a surface science in a microchannel.

    DOI: 10.1109/JSEN.2010.2051662

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  • Deep reactive ion etching of lithium niobate by using low-frequency bias 査読

    Toyohisa Asaji, Hirofumi Nabesawa, Hidefumi Uchiyama, Takashi Abe

    Journal of the Vacuum Society of Japan53 ( 8 ) 501 - 503   2010年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    Lithium niobate (LN) etching has been demonstrated with an electron cyclotron resonance (ECR) plasma and low-frequency bias. The etching was studied by using Ar, BCl3 and SF6 gases. The etch rates of BCl3 and SF6 are about 3.8 and 4.6 times higher than that of Ar, respectively. The highest etch rate (220 nm/min) was obtained under the condition of SF6 plasma and 1 MHz bias. The etching method which can fabricate micro-trenches with high-aspect ratio and smooth surfaces has been achieved.

    DOI: 10.3131/jvsj2.53.501

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  • Real-time measurement of photocatalytic reactions using a monolithic QCM array 招待 査読

    Takashi Abe, Hiroshi Kato

    JOURNAL OF MICROMECHANICS AND MICROENGINEERING19 ( 9 ) 094019   2009年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IOP PUBLISHING LTD  

    This paper reports a real-time measurement of photocatalytic reactions by using a miniaturized quartz-crystal microbalance (QCM) array. The QCM was miniaturized and integrated on the same quartz plate using microfabrication techniques. Two QCMs were located close to each other, with one of the QCMs used as a reference sensor for the accurate and independent determination of mass change effects and environmental change effects. The QCM output was compensated for frequency shifts induced by ultra violet (UV) irradiation by subtracting the frequency shift of the reference sensor. The minimum detectable frequency shift under the irradiation was within 1 Hz. The measured photodecomposition speed of methylene blue dye on a TiO(2)-coated QCM agreed well with that evaluated by the standard optical testing method under dry condition. The developed method enabled us to measure the photodecomposition of a surfactant on a TiO(2)-coated QCM with sub-nanogram mass resolution in real time.

    DOI: 10.1088/0960-1317/19/9/094019

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  • 微小流路中における表面科学研究のためのQCMの集積化 査読

    板坂洋佑, 西澤松彦, 安部隆

    電気学会論文誌E129 ( 12 ) 2 - 443   2009年

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    記述言語:日本語   掲載種別:研究論文(学術雑誌)  

    DOI: 10.1541/ieejsmas.129.439

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  • Polymer surface morphology control by reactive ion etching for microfluidic devices 査読

    Hirofumi Nabesawa, Takeshi Hitobo, Suguru Wakabayashi, Toyohisa Asaji, Takashi Abe, Minoru Seki

    SENSORS AND ACTUATORS B-CHEMICAL132 ( 2 ) 637 - 643   2008年6月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    This paper presents the novel method to control polymer surface morphology using reactive ion etching (RIE) technique and its application to microfluidic devices. By using this method, polymer surface morphology could be controlled in the wide range between smooth surface and grassy surface with a newly developed electron cyclotron resonance (ECR)-RIE system. It was found that the polymer surface morphology is closely related to metal micromask concentration on the surface. Our system could easily control the micromask concentration only by changing the total pressure in the chamber. The etching characteristics of 75 mol% O-2-CF4 gas mixture were systematically investigated as a function of total pressure. The smoothest surface with the arithmetic mean roughness value (R-a) less than 10 nm was achieved at 0.1 Pa. On the other hand, the grassy surface with high aspect ratio of 80 was uniformly formed on the polymer surface under the higher-pressure range from 1.0 Pa to 1.5 Pa. Furthermore, the proposed method was applied to microfluidic channels with multiple pillars, and a hybrid structure with smooth and grassy surfaces. (C) 2008 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.snb.2008.01.050

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  • New surface forces apparatus using two-beam interferometry 査読

    Hiroshi Kawai, Hiroshi Sakuma, Masashi Mizukami, Takashi Abe, Yasuhiro Fukao, Haruo Tajima, Kazue Kurihara

    Review of Scientific Instruments79 ( 4 )   2008年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    We designed a new surface forces apparatus for measuring the interactions between two nontransparent substrates and/or in nontransparent liquids. The small displacement of a surface, the bottom one in this study, was measured by the two-beam (twin path) interferometry technique using the phase difference between the laser light reflected by the fixed mirror and that by the mirror on the back of the bottom surface unit. It is possible to determine the distance with a resolution of 1 nm in the working range of 5 μm. This apparatus was successfully applied to measure the forces between mica surfaces in pure water and aqueous KBr solutions. © 2008 American Institute of Physics.

    DOI: 10.1063/1.2903404

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  • A porous membrane-based culture substrate for localized in situ electroporation of adherent mammalian cells 査読

    Takeshi Ishibashi, Kimiyasu Takoh, Hirokazu Kaji, Takashi Abe, Matsuhiko Nishizawa

    SENSORS AND ACTUATORS B-CHEMICAL128 ( 1 ) 5 - 11   2007年12月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    We report herein the invention of and proof of function for a porous membrane-based electroporation device that can deliver molecules into spatially restricted and predefined areas of a cell monolayer. The device's cell culture substrate is a microporous alumina membrane (pore size 0.02 mu m), with an underlying thin poly-(dimethylsiloxane) (PDMS) film that has one or more holes with diameters in the one-tenth millimeter range. When a transient electric field is generated between the device's two planar electrodes - one of which is placed above the cells and the other below the PDMS layer - the filed condenses only in the volume defined by hole in the PDMS film and therefore localized electroporation can occur. We demonstrate that Lucifer Yellow (LY) and plasmid DNA are selectively introduced into only those HeLa cells located above the holes. Using the device containing a PDMS film with multiple holes, a patterned array of LY-stained cells was resulted. Compared with the operation of and the results obtained from a conventional cuvette electroporation device, our device greatly decreases the necessary operating voltage, can be used with cells attached to a substrate, and increases the number of conditions that can be screened in a single experiment. Finally, since a PDMS film with different sized holes, produces different localized electric field strengths, it is possible to determine the optimum electroporetic conditions in a single experiment. (c) 2007 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.snb.2007.05.027

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  • Design and evaluation of an antiparallel coupled resonator for chemical sensor applications 査読

    Takashi Abe, Hiroshi Kato

    ANALYTICAL CHEMISTRY79 ( 17 ) 6804 - 6806   2007年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    In this paper, a new type of quartz crystal resonator in which the electrodes are located on (me side has been developed for chemical sensing. The resonator has two electrodes for exciting thickness shear mode (TSM) vibrations on one side of the crystal and a conductive layer on the other side. These electrodes are capacitively coupled with the electric fields in opposite directions, forming an antiparallel coupled resonator (ACR). The resonant characteristics of the ACR were evaluated as a function of gap width between the two electrodes used to excite the TSM. The conductance value was observed to increase with decreasing gap width. We also discovered that the gap should be parallel with the crystallographic x-axis to obtain the highest sensitivity. The frequency response to a viscous loading was almost same as that of a standard quartz crystal microbalance (QCM). The ACR sensor is an attractive alternative to a QCM chemical sensor because it can be easily integrated into packaging and film coatings.

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  • Dual-channel quartz-crystal microbalance for sensing under UV radiation 査読

    Takashi Abe, Xinghua Li

    IEEE SENSORS JOURNAL7 ( 3-4 ) 321 - 322   2007年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    In situ measurements of interfacial phenomena with subatomic resolution under environmental disturbances have been a major goal of engineers and scientists engaged in the development of a microbalance sensor. Here, we demonstrate in situ measurements of the photooxidization process of alkanethiol self-assembled monolayers using dual-channel quartz-crystal microbalance (D-QCM) sensor that uses spherically contoured resonators to acoustically separate sensing channels for simultaneous compensation of environmental disturbances. Using a photolithographic method to make the D-QCM, the reference channel used in parallel with the sensing channel has almost the same resonant frequency and temperature coefficient of frequency. As a result, mass changes of 10-pg order accuracy were observed under ultraviolet radiation over four days.

    DOI: 10.1109/JSEN.2006.890165

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  • Electrodeposition of anchored polypyrrole film on microelectrodes and stimulation of cultured cardiac myocytes 査読

    Matsuhiko Nishizawa, Hyuma Nozaki, Hirokazu Kaji, Takahiro Kitazume, Noriyuki Kobayashi, Takeshi Ishibashi, Takashi Abe

    BIOMATERIALS28 ( 8 ) 1480 - 1485   2007年3月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCI LTD  

    The electrically conducting polymer polypyrrole (PPy) was electrochemically deposited onto Pt microelectrodes on a polyimide (PI) substrate. Pre-modification of the PI surface with a self-assembled monolayer of octadecyltrichlorosilane-induced anisotropic lateral growth of PPy along the P1 surface and enhanced adhesive strength of the PPy film. The lateral growth of PPy film around the electrode anchored the whole film to the substrate. External stimulation of cultured cardiac myocytes was carried out using the PPy-coated microelectrode. The myocytes on the microelectrode substrate were electrically conjugated to form a sheet, and showed synchronized beating upon stimulation. The threshold charge for effective stimulation of a 0.8cm(2) sheet of myocytes was around 0.2 mu C, roughly corresponding to a membrane depolarization of 250 mV. (c) 2006 Elsevier Ltd. All rights reserved.

    DOI: 10.1016/j.biomaterials.2006.11.034

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  • Improved wettability of a fluoropolymer from a simple combination of surface modifications using a plasma and surfactant 査読

    Takashi Abe, Masahiro Matsumoto

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS46 ( 1 ) 367 - 369   2007年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:INST PURE APPLIED PHYSICS  

    Wettability control and bonding of fluoropolymers are important in the microfabrication of microfluidic devices. Here, we demonstrate a process that combines a unique plasma surface modification with surfactant. We employed a tetrafluoro-ethylene-hexafluoropropylene copolymer (PFA) plate dipped into a surfactant solution and briefly exposed to oxygen plasma. We discovered that the contact angle of water on a PFA plate depends on volatility of the surfactant. With this treatment, direct bonding between the PFA plates occurred under low temperature conditions. Finally, we demonstrated the micropatterning of the plate with a shadow mask.

    DOI: 10.1143/JJAP.46.367

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  • Generation of patterned cell co-cultures inside tubular structure using electrochemical biolithography and electrostatic assembly 査読

    Hirokazu Kaji, Soichiro Sekine, Takashi Abe, Matsuhiko Nishizawa

    2007 International Symposium on Micro-NanoMechatronics and Human Science, MHS   187 - 192   2007年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    We report a method for producing patterned cell co-cultures inside silicone tubing. A platinum needle microelectrode was inserted through the wall of the tubing and an oxidizing agent electrochemically generated at the inserted electrode. This agent caused local detachment of the anti-biofouling heparin layer from the inner surface of the tubing. The cell-adhesive protein fibronectin selectively adsorbed onto the newly exposed surface, making it possible to initiate a localized cell culture. The electrode could be readily set in place without breaking the tubular structure and, importantly, almost no culture solution leaked from the electrode insertion site after the electrode was removed. Ionic adsorption of poly-L-lysine at the tubular region retaining a heparin coating was used to switch the heparin surface from cell-repellent to cell-adhesive, thereby facilitating the adhesion of a second cell type. The combination of the electrode-based technique with electrostatic deposition enabled the formation of patterned co-cultures within the semi-closed tubular structure. The controlled co-cultures inside the elastic tubing should be of value for cell-cell interaction studies following application of chemical or mechanical stimuli and for tissue engineering-based bioreactors. ©2007 IEEE.

    DOI: 10.1109/MHS.2007.4420850

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  • Polymer surface morphology control for microfluidic devices 査読

    H. Nabesawa, T. Hitobo, S. Wakabayashi, T. Asaji, T. Abe, I. Nakatani, M. Seki

    TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems   199 - 202   2007年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    This paper presents the novel method to control polymer surface morphology using Reactive Ion Etching (RIE) technique and its application to microfluidic devices. This method controls surface morphology in wide range between smooth surface and grassy surface by a newly developed Electron Cyclotron Resonance (ECR)-RIE system. The etching characteristics of 75mol%O2-CF 4 gas mixture were systematically investigated as a function of pressure. The smoothest surface with the roughness (Ra) less than 10 nm was achieved at 0.1 Pa. On the other hand, the grassy surface with high aspect ratio of 80 was uniformly formed in the higher-pressure range from 1.0 Pa to 1.5 Pa. Furthermore, the proposed method was applied to microfluidic channels with multiple pillars, and a hybrid structure with smooth and grassy surfaces. ©2007 IEEE.

    DOI: 10.1109/SENSOR.2007.4300105

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  • Inverted mesa-type quartz crystal resonators fabricated by deep-reactive ion etching 査読

    Takashi Abe, Vu Ngoc Hung, Masayoshi Esashi

    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL53 ( 7 ) 1234 - 1236   2006年7月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    In this letter, we present experimental data showing Q change versus thickness for a quartz-crystal resonator fabricated with deep-reactive ion etching. Measurements show that Q increases as etch depth increases, and further that Q can be optimized as a function of etch depth and diameter of the resonator.

    DOI: 10.1109/TUFFC.2006.1665070

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  • Miniaturization of spherically contoured rectangular AT-cut quartz-crystal resonators by using reactive ion etching 査読

    T Abe, H Shimamoto, XH Li

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS45 ( 6A ) 5283 - 5285   2006年6月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:INST PURE APPLIED PHYSICS  

    This paper describes resonant characteristics of spherically contoured AT-cut quartz-crystal resonators, and a novel fabrication process. The fabrication process is based on a photolithographic process suitable for the mass production. Further, the time required to finish quartz blanks into the spherically contoured shape is dramatically less than for conventional methods. Our measurements show that Q of the spherically contoured resonators fabricated with our method are an order of magnitude higher than those resonators without the spherical shape.

    DOI: 10.1143/JJAP.45.5283

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  • Electrochemical approach to pattern cells within three-dimensional microstructures 査読

    Matsuhiko Nishizawa, Takashi Abe, Hirokazu Kaji

    2006 IEEE INTERNATIONAL SYMPOSIUM ON MICRO-NANOMECHATRONICS AND HUMAN SCIENCE   242 - +   2006年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:IEEE  

    The ability to control of the behavior of living cells in vitro is critical in fundamental cell biology as well as applied biotechnology including tissue engineering and cell-based chip devices. Patterning cells on surfaces is one of the most important approaches to modulate cell behaviors and functions in culture. Here, we describe ongoing work on the newly developed surface patterning technique, "electrochemical bio-lithography", with a focus on the following two subjects: 1) patterning cells within preassembled microfluidic devices and 2) dynamic control of cellular motility.

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  • Deep reactive ion etching of lithium niobate by using low-frequency bias

    Toyohisa Asaji, Hirofumi Nabesawa, Motoichi Kanazawa, Takashi Abe, Shigeyuki Ishii, Junji Saito, Yushi Kato

    Proceeding of 8th International Symposium on Sputtering & Plasma Processes   307 - 309   2005年6月

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    記述言語:英語  

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  • Surface micromachined AlN thin film 2 GHz resonator for CMOS integration 査読

    M Hara, J Kuypers, T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL117 ( 2 ) 211 - 216   2005年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    This paper describes the development of the aluminum nitride (AIN) thin film bulk acoustic resonator (FBAR) using noble MEMS techniques for CMOS integration. An air-gap was fabricated under the resonator for acoustic isolation. Germanium (Ge) was used as a sacrificial layer to make the air-gap. This technique gives high CMOS compatibility. The resonator achieved a Q factor of 780 and an effective electro-mechanical coupling constant (k(eff)(2)) of 5.36% at a resonant frequency of 2 GHz. (C) 2004 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.sna.2004.06.014

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  • A miniaturized and convex-shaped quartz-crystal resonator for multiple chemical sensing in liquid 査読

    L Li, M Esashi, T Abe

    Micro Total Analysis Systems 2004, Vol 2 ( 297 ) 37 - 39   2005年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:ROYAL SOC CHEMISTRY  

    A microfabricated bi-convex quartz-crystal microbalance (QCM) with large-radius spherical thickness distribution was realised by reactive ion etching (RIE) and photoresist reflow with solvent vapor. Due to the spherical thickness distribution, the spurious mode was suppressed very well and the resonator has high Q-factor (c.a. 80000). The vibration energy was trapped around the electrode within 5 wafer thicknesses. This value is three times shorter than that of planer QCM. Thus high-density integration and higher productivity per a wafer were realised without any unwanted influence on the Q-factor. The fabricated sensor also has superior resonant characteristic under the viscoelastic liquid.

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  • Elcrochemical bio-lithography for in-situ immobilization of proteins and cells within microchannels 査読

    Matsuhiko Nishizawa, Hirokazu Kaji, Kazuto Tsukidate, Masahiko Hashimoto, Takashi Abe

    Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '051   151 - 154   2005年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    The use of microfluidic system is a recent trend in diagnostic assays and bioreactors based on the protein and cellular engineering. Most of microfluidic biodevices would require the combination with a technique to pattern proteins and living cells within microchannels just prior to the use of the devices, since these bio-elements are delicate against desiccation, oxidation and heat. Here, we present a simple, electrochemical method to locally immobilize proteins and cells on substrate surface, easily applicable to the microfluidic system. The integration of the technique into a microfluidic device and the on-demand immobilization of proteins and cells were achieved. The sandwich immunoassay within the microchannel was demonstrated, in which a series of protocols from immobilization to measurement can be carried out under physiochemical conditions. © 2005 IEEE.

    DOI: 10.1109/SENSOR.2005.1496381

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  • Microfabricated spherical bi-convex quartz crystal microbalance array 査読

    L Li, T Abe, M Esashi

    MEMS 2005 Miami: Technical Digest   327 - 330   2005年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:IEEE  

    A miniaturized spherical bi-convex quartz crystal microbalance (QCM) array was fabricated by reactive ion etching (RIE) and photoresist reflow with solvent vapor technology. The spherical convex shape is necessary to suppress a spurious mode and obtain a high Q factor. Not only can the large-radius spherical convex shape be achieved by this technology, but also miniaturization and batch fabrication. The Q factor of the fabricated QCM (80000) is two times higher than that of the planar QCM, and the spurious mode around the fundamental vibration mode is suppressed very well. It also has superior resonant characteristic under the viscoelastic liquid.

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  • Fabrication of miniaturized bi-convex quartz crystal microbalance using reactive ion etching and melting photoresist 査読

    L Li, T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL114 ( 2-3 ) 496 - 500   2004年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    In this paper, miniaturized bi-convex quartz crystal microbalance (QCM) has been fabricated using reactive ion etching (RIE) and melting photoresist technology. Due to the convexity of the resonator surface and the small size of the excitation electrode, the energy of the oscillation is trapped at the center so that very little dissipation occurs at the edge. The fabricated bi-convex. QCM has superior resonant characteristics compared. with a QCM without the bi-convex formation. For example, the QCM with a high-quality value (76 000) was realized for a 1 mm-diameter electrode QCM with 1.6 mum-deep and 2 mm-diameter convex formation on both sides. A spurious mode around a fundamental vibration mode became very small or nearly negligible. This technology is useful from the viewpoint of mass production because it does not require polishing. The manufactured bi-convex QCM can be used for sensing liquid properties. (C) 2004 Elsevier B.V. All rights reserved.

    DOI: 10.1016/j.sna.2003.12.031

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  • A miniaturized biconvex quartz-crystal microbalance with large-radius spherical thickness distribution 査読

    L Li, M Esashi, T Abe

    APPLIED PHYSICS LETTERS85 ( 13 ) 2652 - 2654   2004年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    A miniaturized biconvex quartz-crystal microbalance (QCM) with large-radius spherical thickness distribution was fabricated by reactive ion etching (RIE) and photoresist reflow with solvent vapor technology. A conventional polishing method could not manufacture the miniaturized, spherically convex shape, which is necessary to suppress a spurious mode and obtain a high Q factor. Not only can the large-radius spherical convex shape be achieved by this technology, but also miniaturization and batch fabrication. The Q factor of the fabricated QCM (80 000) is two times higher than that of the planar QCM, and the spurious mode around the fundamental vibration mode is suppressed very well. It also has superior resonant characteristic under the viscoelastic liquid. (C) American Institute of Physics.

    DOI: 10.1063/1.1796535

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  • Trench filling characteristics of low stress TEOS/ozone oxide deposited by PECVD and SACVD 査読

    C Chang, T Abe, M Esashi

    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS10 ( 2 ) 97 - 102   2004年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:SPRINGER-VERLAG  

    In this paper low stress silicon oxide was deposited with tetraethylorthosilicate (TEOS, Si(OC2H5)(4))/ozone by plasma enhanced chemical vapor deposition (PECVD) and sub-atmospheric chemical vapor deposition (SACVD) for deep trench filling. Two kinds of PECVD oxide were fabricated: Coil antenna inductively coupled plasma (ICP) oxide and parallel plates capacitive coupled plasma (CCP) oxide. Adding ozone into the deposition process enhances the trench filling capability. Oxide filling in a deep trench (5 mum wide, 52 mum deep) was carried out using the SACVD process, which gave excellent conformal step coverage. However, the coil antenna ICP oxide was suitable as a sealing material. The effects of argon ion sputtering and magnetic field in the PECVD for the trench filling are discussed in this paper. Because the low temperature processes of PECVD and SACVD, the thermal residual stress was reduced and a low stress film of 85 MPa compression is available.

    DOI: 10.1007/s00542-003-0313-z

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  • High-frequency one-chip multichannel quartz crystal microbalance fabricated by deep RIE 査読

    VN Hung, T Abe, PN Minh, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL108 ( 1-3 ) 91 - 96   2003年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    In this work, high-frequency one-chip multichannel quartz crystal microbalance (QCM) prepared by deep reactive ion etching (RIE) is presented. The quartz resonators in one-chip with the diameter in the range 0.05-1.0 mm and thickness in the range 18-82 mum were fabricated. The conductance measurements have shown that Q-factor of the resonators increases with decreasing quartz resonator thickness and reaches the value of about 30,000 for the 94 MHz quartz resonator. By decreasing the thickness, very small resonator with 100 mum diameter can be performed with Q-factor of 5700. The separation of spurious modes from fundamental mode is improved by reducing the diameters of the quartz resonators. The influence of the loading glycerol/water mixtures into the electrical properties of the sensor was conducted. (C) 2003 Published by Elsevier B.V.

    DOI: 10.1016/S0924-4247(03)00260-7

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  • Smooth surface glass etching by deep reactive ion etching with SF6 and Xe gases 査読

    L Li, T Abe, M Esashi

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B21 ( 6 ) 2545 - 2549   2003年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:A V S AMER INST PHYSICS  

    This article reports on a smooth surface glass etching using deep reactive ion etching with a mixture of sulfur hexafluoride (SF6) and xenon (Xe) gases. A surface roughness of 23 Angstrom was achieved with SF6/Xe(= 1/1) and 18 Angstrom with SF6/Ar(= 1/4) tinder a condition of -390 V self-bias voltage and 0.2 Pa pressure. The surface roughness in the order of several. angstroms (5.9 Angstrom) was obtained at a pressure of 0.1 Pa (SF6 /Xe= 1/1). The average surface roughness (R-a) after the etching by SF6/Xe gas was smaller than those after the etching with SF6 only or SF6/Ar at a same mole fraction of the inert gas to SF6+inert gas. Since heavy inert gas increases the physical sputtering effect, the addition of the heavy inert gas helps to remove contaminant residues remaining on the etched surface. The optimum condition of smooth glass etching With high etch selectivity (21) is a pressure of 0.2 Pa and a mole fraction of Xe to SF6 gas is 8 to 7. We also make an analysis of the relationship between the surface average roughness on the bottom and the etched depth. The average roughness of the etched surface was smooth not only for the bottom but also for the sidewalls. The average surface roughness of the sidewalls was about 16 nm for 50-mum-deep etching under the same optimum condition. This technology was applied to a deep etching of quartz crystal used for a mass sensor. (C) 2003 American Vacuum Society.

    DOI: 10.1116/1.1624272

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  • Endpoint detectable plating through femtosecond laser drilled glass wafers for electrical interconnections 査読

    T Abe, XH Li, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL108 ( 1-3 ) 234 - 238   2003年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    An endpoint detectable plating process to avoid over-electroplating was proposed and performed in this work. The technology was developed for fabrication of Pyrex glass wafer with electrical feed-throughs. Thin film of gold was deposited on the glass wafer prior to the femtosecond laser drilling. When the growing metal in the through-holes was contacted to the metal, a resistance between the opposite two electrodes decreases suddenly. Thus, the endpoint detection was realized by in situ monitoring of applied voltage at constant current mode. After the endpoint detection, periodic reverse plating was applied to fill the through-holes uniformly. Finally, uniform copper deposition in the through-holes up to 12 aspect ratios was realized by this method. This technology was also applicable to the fabrication of microstructure based on electroforming. (C) 2003 Elsevier B.V. All rights reserved.

    DOI: 10.1016/S0924-4247(03)00262-0

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  • Highly selective reactive-ion etching using CO/NH3/Xe gases for microstructuring of Au, Pt, Cu, and 20% Fe-Ni 査読

    T Abe, YG Hong, M Esashi

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B21 ( 5 ) 2159 - 2162   2003年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:A V S AMER INST PHYSICS  

    dA highly selective dry-etch process for conductive metals (Au, Pt, and Cu) and magnetic metal (20% Fe-Ni) has been developed using a magnetron reactive-ion-etching system employing a CO/NH3/Xe chemistry. Etch selectivities of these metals to titanium are greater than 80: 1 for Au, 40: 1 for Pt, 30: 1 for Cu, and 15: 1 for permalloy (20% Fe-Ni) at the titanium-etch rate of 1.0 nm/min. The etching was conducted at room temperature. It was observed that the small addition of Xe to CO/NH3 etch gases (molar ratio= 1/7) increased the etch rate of these metals while promoting nitridation of the titanium mask and achieving enhanced selectivity. The titanium can be used both as a mask for the sputter etching of noble metals and as a mask for the reactive-ion etching of magnetic metals in the plasma. By about a factor of 3, the inclusion of Xe enhanced the etch selectivities for noble metals, copper, and a magnetic metal over titanium. (C) 2003 American Vacuum Society.

    DOI: 10.1116/1.1612516

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  • MEMS based thin film 2 GHz resonator for CMOS integration 査読

    M. Hara, J. Kuypers, T. Abe, M. Esashi

    IEEE MTT-S International Microwave Symposium, 2003   2003年8月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    DOI: 10.1109/MWSYM.2003.1210489

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  • Aluminum nitride based thin film bulk acoustic resonator using germanium sacrificial layer etching 査読

    M. Hara, J. Kuypers, T. Abe, M. Esashi

    TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems   2003年6月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

    DOI: 10.1109/SENSOR.2003.1217131

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  • Endpoint detectable plating through femto-laser drilled glass wafers for three-dimentional electric interconnections 査読

    XH Li, T Abe, M Esashi

    MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS   638 - 641   2003年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:IEEE  

    An endpoint detectable plating process to avoid over-electroplating was proposed and performed in this work. The technology was developed for a fabrication of Pyrex glass wafer with electrical feed-throughs. Thin film of gold was deposited on the glass wafer prior to a femto-second laser drilling. When a growing metal in the through-holes was contacted to the gold, a resistance between the opposite two electrodes decreases suddenly. Thus the endpoint detection was realized by in situ monitoring of applied voltage at constant current mode. After the endpoint detection, periodic reverse plating was applied to fill the through-holes uniformly. Finally, uniform copper deposition in the through-holes up to 12 aspect ratios was realized by this method.

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  • Energy dissipation in small-diameter quartz crystal microbalance experimentally studied for ultra-high sensitive gravimetry 査読

    T Abe, L Li, VN Hung, M Esashi

    MEMS-03: IEEE THE SIXTEENTH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS   518 - 521   2003年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:IEEE  

    In this paper, the energy dissipation in small-diameter Quartz Crystal Microbalance (QCM) was experimentally studied for ultra-high sensitive gravimetric measurements. Newly developed deep reactive ion etching technology for smooth surface glass etching was used for the fabrication of small-diameter QCM. Minimum average surface roughness is 2.3 nm for an etching with SF6/Xe (=1/1) gases and 1.8 nm for SF6/Ar (=1/4) gases at a pressure of 0.2 Pa with a self-bias voltage of -390 V. The diameters of fabricated QCM were 0.2-1.0mm and their thickness was in the range of 6-82mum. The Q-factor of the fabricated QCM increases exponentially from 2000 to 10000 as the thickness decreases due to the decrease of supporting loss. Interestingly, the increases of Q-factor deviate from simple exponential function and show a maximum peak of the Q-factor (30000).

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  • High sensitive, miniaturized plano-convex quartz crystal microbalance fabricated by reactive ion etching and melting photoresist 査読

    L Li, T Abe, M Esashi

    BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2   508 - 511   2003年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:IEEE  

    In this paper, high sensitive, miniaturized plano-convex quartz crystal microbalance (QCM) has been fabricated by reactive ion etching (RIE) and melting photoresist technology. Due to the convexity of the resonator surface and the small size of the excitation electrode, the energy of the oscillation is trapped at the center so that very little dissipation occurs at the edge. The fabricated plano-convex QCM has superior resonant characteristics compared with a QCM without the plano-convex formation. For example, the QCM with a high,quality value (60000) was realized for a 1-mm-diameter electrode QCM with 1.6-mum-deep and 2-mm-diameter convex formation on both sides. A spurious mode around a fundamental vibration mode was also suppressed less than 20% from that before the etching. This technology is useful from a. viewpoint of mass production because it needs not polishing.

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  • Glass etching assisted by femtosecond pulse modification 査読

    CL Chang, T Abe, M Esashi

    SENSORS AND MATERIALS15 ( 3 ) 137 - 145   2003年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:MYU, SCIENTIFIC PUBLISHING DIVISION  

    In this paper the etching of Pyrex glass assisted by femtosecond pulses is reported. The process consists of 2 steps: (1) irradiating the glass by focused pulses from a femtosecond laser, (2) etching the glass in diluted HF (hydrofluoric acid) a solution. The glass can be modified without cracking by applying a femtosecond laser with a very low intensity. The etched depth of Pyrex glass increases from 12 to 131 mum with femtosecond laser irradiation from 0 to 1170 kJ/cm(2), and etching in a 5% HF solution for 230 min. This technique provides an alter-native way of achieving a high etching rate of Pyrex glass for applications to micro-electro-mechanical systems (MEMS), and of forming suspended structures on the surface of a Pyrex glass substrate by using modified glass as a sacrificial layer.

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  • Structures and Interactions of Polyelectrolyte Brushes Studied by Surface Forces Measurement 査読

    Kazue Kurihara, Shujiro Hayashi, Takashi Abe, Nobuyuki Hayashi, Masazo Niwa

    IUPAC Polymer Conference (IUPAC-PC2002)   126 - 126   2002年12月

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)  

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  • Fabrication of high-density electrical feed-throughs by deep-reactive-ion etching of Pyrex glass 査読

    XG Li, T Abe, YX Liu, M Esashi

    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS11 ( 6 ) 625 - 630   2002年12月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

    This paper describes the fabrication technology for high-density electrical feed-throughs in Pyrex glass wafers. Small through holes (40-80 mum in diameter) in Pyrex glass wafers have been fabricated using deep-reactive-ion etching (DRIE) in a sulfur hexafluoride (SF6) plasma. The maximum aspect ratios obtained were between 5 and 7 for a hole pattern and 10 for a trench pattern. Through the wafer etching of a hole pattern of 50 pm diameter was carried out using 150-mum-thick Pyrex glass wafers. The electrical feed-throughs in the wafers were fabricated by filling the through-holes with electroplated nickel. We were able to successfully bond the glass wafer to silicon by anodic bonding after removing the electroplated nickel on the surface of the wafer by chemical-mechanical polishing (CMP). The electric resistance of the feed-through was estimated by a 4 point wire sensing method to be about 40 mOmega per hole. The heat cycles test shows that the resistance changes were within 3% after 100 cycles. The fabrication of high density electrical feed-throughs is one of the key processes in the field of MEMS. Probable applications of this technology are in electrical feed-throughs between logic elements and microprobe arrays for high-density data storage and for packaged devices.

    DOI: 10.1109/JMENS.2002.805211

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  • Miniaturized, highly sensitive single-chip multichannel quartz-crystal microbalance 査読

    VN Hung, T Abe, PN Minh, M Esashi

    APPLIED PHYSICS LETTERS81 ( 26 ) 5069 - 5071   2002年12月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER INST PHYSICS  

    A miniaturized highly sensitive single-chip multichannel quartz-crystal microbalance prepared by deep reactive ion etching is presented. In the present work., quartz resonators in a single-chip with the diameters in the range 0.05-1.0 mm and thicknesses in the range 18-82 mum were fabricated. The conductance measurements carried out on the resonators showed that the Q factor is inversely proportional to resonator thickness. The Q-factor value. as high as similar to30000 has been observed in case of a 94 MHz resonator whose diameter is 1 mm and the thickness 17.8 mum. The Q factor of a resonator of very small diameter (0.1 mm) reached the value 5700. (C) 2002 American Institute of Physics.

    DOI: 10.1063/1.1532750

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  • Microprobe array with electrical interconnection for thermal imaging and data storage 査読

    Dong Weon Lee, Takahito Ono, Takashi Abe, Masayoshi Esashi

    Journal of Microelectromechanical Systems11 ( 3 ) 215 - 221   2002年6月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

    In this work, new novel methods for fabricating a thermal probe array with 32 × 32 probes on one chip are proposed. It consists of silicon micromachined probe, AIN actuator, pyramidal SiO2 tip on which the nano-scale metal-metal junction is formed using a self-alignment technique. The nano-junction can be used as a thermocouple to measure a local temperature on a sample surface or as a nano-heater to make a local deformation on a media. In self-alignment process, a metal layer (Pt/Ni) is deposited on the inside of SiO2 hollow tip fabricated by low temperature (950 °C) oxidation of silicon etch pit. This low temperature oxidation results in a smaller oxide thickness at the tip apex than other flat area. Therefore, after selective etching the SiO2 in buffered HF, a small hole surrounding the Pt/Ti tip apex can be created. Another metal (Ni) is deposited outside the Pt/Ti tip to make the nano-junction. For electrical interconnection between the thermal probe and an IC chip, a hole array with 30 μm of a hole diameter is made by dry etching through the 150-μm-thick Pyrex glass, and then Ni is electroplated into the through etched-hole. Finally the Pyrex glass plate was anodically bonded to the probe array. Using the fabricated thermal probe, temperature distribution is measured on a prepared sample surface and the local heating capability of the thermal probe is confirmed. Preliminary experiments for data writing and reading are performed on a phase change medium.

    DOI: 10.1109/JMEMS.2002.1007400

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  • Polyelectrolyte brush layers studied by surface forces measurement: Dependence on pH and salt concentrations and scaling 査読

    S Hayashi, T Abe, N Higashi, M Niwa, K Kurihara

    LANGMUIR18 ( 10 ) 3932 - 3944   2002年5月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    Interactions between opposed brush layers of polyelectrolytes ionized poly(L-glutamic acid) (PLGA) or poly(L-tysine) (PLL) in water were directly investigated using surface forces measurement. The brush layers were prepared by the Langmuir-Blodgett deposition of amphiphiles bearing PLGA (degree of polymerization n = 21,44, and 48) or PLL (n = 41 and 52) as hydrophilic groups. The density of polyelectrolyte chains was around 0.4 chain/nm(2). Surface force profiles, consisting of a long-range electrical double layer repulsion and a short-range steric repulsion, were measured and analyzed with varying pH, salt concentration, and polyelectrolyte chain length. The surface potential obtained from the double layer repulsion indicated that nearly all of the ionized groups in the brush layers were neutralized by counterions. In the case of PLGA, the steric repulsion of the brush layer increased with increasing pH from 9 to 10, reflecting the increase in the ionization degree of the carboxylic groups, and then decreased above pH 10 due to salt effect. Similar behavior was also observed for PLL: the steric repulsion increased when the pH was changed from 4 to 3 and decreased at pH 2. In the cases of both PLGA and PLL, the steric repulsion decreased with increasing salt concentration (0.43-10 mM) at a fixed pH, which was likely due to a decrease in the osmotic pressure of the counterions. The distance at which the steric repulsion appeared (Do) corresponded to twice the length of an extended polyelectrolyte molecule. This distance Do remained practically the same under the pH and salt conditions studied for the brush of an identical polymerization degree. Twice the length of polyelectrolyte chains L-0 was defined as Do - 6 (nm), where 6 nm was twice the length of the long alkyl chains in polyelectrolyte amphiphiles, and was found to be proportional to the polymerization degree of polyelectrolyte n. The stress profiles, obtained by differentiating the force profiles, were scaled according to the distance to provide identical profiles for different polymer chain lengths. An equation describing the stress profiles was derived based on a model that attributed the steric force to the osmotic pressure of the counterions. The equation reproduced well the stress profiles of PLGA and PLL brushes, where the osmotic coefficient was a variable parameter. The osmotic coefficient was estimated to be 0.004 for both PLGA and PLL and much less than the value determined in solution (similar to0.2), indicating that the counterions bound more strongly to the polyelectrolytes in the brush layer than to isolated polyelectrolytes in solution. The advantage of characterizing polyelectrolytes by surface forces measurement was discussed.

    DOI: 10.1021/la0114979

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  • Deep reactive ion etching of silicon carbide 査読

    S Tanaka, K Rajanna, T Abe, M Esashi

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B19 ( 6 ) 2173 - 2176   2001年11月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:A V S AMER INST PHYSICS  

    In this article, we describe more than 100-mum-deep reactive ion etching (RIE) of silicon carbide (SiC) in oxygen-added sulfur hexafluoride (SF6) plasma. We used a homemade magnetically enhanced, inductively coupled plasma reactive ion etcher (ME-ICP-RIE) and electroplated nickel masks. First, 5 h etching experiments using etching gases with 0%, 5%, 100% and 20% oxygen were performed by supplying rf power of 150 and 130W to an ICP antenna and a sample stage, respectively. They demonstrated a maximum etch rate of 0.45 mum/min and residue-free etching in the case of 5% oxygen addition. Observation of the cross sections of etched samples using a scanning electron microscope confirmed a microloading effect, which is reduction of the etched depth with a decrease in the mask opening width. Next, a 7 h etching experiment using an etching gas with 5% oxygen was performed by increasing the rf power to the sample stage to 150 W. This yielded an etched depth of 216 mum. (C) 2001 American Vacuum Society.

    DOI: 10.1116/1.1418401

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  • Deep reactive ion etching of Pyrex glass using SF6 plasma 査読

    XH Li, T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL87 ( 3 ) 139 - 145   2001年1月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    Deep reactive ion etching of Pyrex glass has been characterized in sulfur hexafluoride plasma (SF6). High etch rate (similar to0.6 mum/min) was demonstrated under a condition of low pressure (0.2 Pa) and high self-bias (-390 V) by using a magnetically enhanced inductively coupled plasma reactive ion etching. Vertical etch profile (taper angle similar to 88 degrees), high aspect ratio (>10) and through-wafer etching of Pyrex glass (200 mum in thickness) were achieved under the condition by using thick (20 mum) and vertical electroplated nickel film as mask. The vertical etch profile was achieved when the mask opening is narrower than 20 mum because the deposition of nonvolatile product on the sidewall is reduced. A novel etching technique "scoop-out etching" was demonstrated by using the present etching characteristics. (C) 2001 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0924-4247(00)00482-9

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  • Ultrahydrophobic surface selectively modified by pulse electrodeposition from aqueous dispersion of PTFE particles 査読

    T Abe, M Esashi

    TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2   1044 - 1047   2001年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:SPRINGER-VERLAG BERLIN  

    Micro-pattern formation of PTFE nanoporous film was realized by using pulsed electrodeposition from aqueous disperision of PTFE particles. The volume fraction of PTFE in a nickel matrix was more than 50 vol.% when the pulse-on and the pulse-off time were controlled to be 10 msec and 2 msec, respectively. In this condition, the PTFE particles embedded in the matrix fused each other by annealing the film under the temperature of 300 degreesC. After removing the nickel by acid, the obtaiend PTFE film had nanopore and it brought ultrahydrophobic effect.

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  • High density electrical feedthrough fabricated by deep reactive ion etching of Pyrex glass 査読

    XH Li, T Abe, YX Liu, M Esashi

    14TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST   98 - 101   2001年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:IEEE  

    This paper reports a new fabrication technology of Pyrex glass with a fine pitch electrical feedthrough. Small through holes (40-60 mum in diameter) in Pyrex glass plate have been fabricated using deep reactive ion etching in sulfer hexafluoride (SF6) plasma. By filling the through holes with electroplated metal, the fine pitch electrical feedthrough in Pyrex glass plate becomes enable technology. Pyrex glass can be anodically bonded with silicon. Thus, our technology will be widely used for high density electrical feedthrough to the backside of a plate. The applications of the technology to micro probe array used for high density data storage and packaged devices are expected.

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  • Transition behavior of polyelectrolyte brushes depending on polymer chain density 査読

    S Hayashi, T Abe, N Higashi, M Niwa, K Kurihara

    MOLECULAR CRYSTALS AND LIQUID CRYSTALS371   349 - 354   2001年

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:TAYLOR & FRANCIS LTD  

    Brush layers of polyelectrolytes, ionized poly(L-lysine) (PLL) or poly(L-glutamic acid) (PLGA), at desired densities were prepared by the Langmuir-Blodgett (LB) deposition of amphiphiles bearing PLL or PLGA segments as hydrophilic groups, and subjected to the surface force measurements. Abrupt changes in the surface force, the surface potential, and the transfer ratio of the brush layers were observed at a critical density. The present data is in good agreement with our previous report on the jump in the compressibility of the brushes, and supports the existence of the density dependent transition of polyelectrolytes in solutions.

    DOI: 10.1080/10587250108024758

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  • Charge regulation in polyelectrolyte brushes studied by FTIR spectroscopy 査読

    T Abe, S Hayashi, N Higashi, M Niwa, K Kurihara

    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS169 ( 1-3 ) 351 - 356   2000年9月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE BV  

    Brush layers of a polyelectrolyte, ionized poly(glutamic acid) (polymerization degree n = 48), were studied using FTIR spectroscopy as a function of the polyelectrolyte chain density. The Langmuir-Blodgett (LB) deposition of the mixed monolayers of a poly (glutamic acid) functionalized amphiphile and dioctadecylphospholic acid afforded the preparation of polyelectrolyte brushes at the desired density on various substrates. FTIR spectroscopy on the LB films demonstrated that the ionization degree of the carboxylic acid groups decreased with increasing polyelectrolyte density in order to maintain the charge density below the critical value of 0.8 similar to 1 charge nm(-3). The average distance between the charges at the maximum density was ca. 1.1 +/- 0.1 nm which is close to twice the Bjerrum length, the distance at which the Coulomb interaction between elementary charges is equal to the thermal energy. (C) 2000 Elsevier Science B.V. All rights reserved.

    DOI: 10.1016/S0927-7757(00)00470-2

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  • One-chip multichannel quartz crystal microbalance (QCM) fabricated by Deep RIE 査読

    T Abe, M Esashi

    SENSORS AND ACTUATORS A-PHYSICAL82 ( 1-3 ) 139 - 143   2000年5月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE SA  

    In this paper, we present a one-chip multichannel quartz crystal microbalance (QCM) sensor fabricated by deep reactive ion etching (Deep RIE). An inductively coupled plasma reactive ion etching (ICP RIE) using SF, gas has been applied to the Deep RTE of quartz. High etch rate (similar to 0.5 mu m/min) and mirror surface (roughness, similar to 2 nm) were achieved at the conditions of low process pressure (2 mTorr) and high self-bias voltage (- 340 V). The multichannel QCM sensor, which has different resonance frequencies, was formed by fabricating diaphragms of different thicknesses on a single crystal of quartz plate. The resonance frequencies ranged from 21.7 to 20.75 MHz. The Q factors of each peak were approximately 2000 in air and the resolution for mass change was +/-1 ng on 2-mm-diameter electrode. We have successfully shown that the sensor with different coating films can be applied to chemometric odor sensor. (C) 2000 Elsevier Science S.A. All rights reserved.

    DOI: 10.1016/S0924-4247(99)00330-1

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  • Density-dependent jump in compressibility of polyelectrolyte brush layers revealed by surface forces measurement 査読

    T Abe, N Higashi, M Niwa, K Kurihara

    LANGMUIR15 ( 22 ) 7725 - 7731   1999年10月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    Interactions between apposed brush layers of polyelectrolytes ionized poly(L-glutamic acid) (polymerization degree n = 21, 44, 48) were investigated in water at pH 10 by the direct surface forces measurement. Brush layers were prepared by the Langmuir-Blodgett (LB) deposition of amphiphiles bearing a poly(L-glutamic acid) chain and two octadecyl groups. The obtained surface force and stress profiles consisted of a long-range electrostatic repulsion and a short-range steric repulsion. The distance where the steric repulsion appeared was in good agreement with twice the length of the polyelectrolyte chains in the extended form. The stress profiles of the polyelectrolyte brushes at n = 21, 44, and 48 produced the identical curve when the distance was scaled by the length corresponding to twice the thickness of an undeformed polyelectrolyte layer. Interactions between the layers of a poly(L-glutamic acid) (n = 48) were also studied as a function of the polyelectrolyte chain density in the brush layers. The density was varied by mixing the poly(L-glutamic acid) amphiphile with dioctadecylphosphoric acid. The sudden increase in the short-range repulsion attributed to the steric component was found at the critical density of 0.20 +/- 0.07 chain/nm(2) with decreasing chain density in the brush layers, indicating the existence of the transition in the interaction mode of polyelectrolytes. The steric repulsion was quantitatively analyzed to provide the elastic compressibility modulus of the polyelectrolyte brushes. The obtained modulus of 0.6 +/- 0.1 pN/chain was in the high-density region, and 4.4 +/- 0.7 pN/chain was in the low-density region. The transition in the counterion binding to polyelectrolytes may account for the density-dependent change in the interactions of the polyelectrolyte chains.

    DOI: 10.1021/la990240w

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  • Interactions between Poly (L-lysine) Brush Layers Studied by Surface forces Measurement 招待 査読

    K. Kurihara, T. Abe, N. Higashi, M. Niwa

    Proceeding of Yamada Conference L Polyelectrolytes   7725 - 7731   1999年10月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

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  • Transition in Interactions between Polyelectrolyte Brush Layers as Revealed by Surface Forces Measurements 査読

    Kazue Kurihara, Takashi Abe, Nobuyuki Higashi, Masazo Niwa

    Proceedings of Yamada Conference L Polyelectrolytes   443 - 446   1999年4月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)  

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  • Direct demonstration of attraction for a complementary pair of apposed nucleic acid base monolayers 査読

    K Kurihara, T Abe, N Nakashima

    LANGMUIR12 ( 17 ) 4053 - 4056   1996年8月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    Direct measurement of surface forces has been employed for the systematic determination of interaction forces between nucleic acid base monolayers at various pH values from 5.6 to 9.3. Measured forces have been classified as (1) forces at a distance D > 20 nm, which are attractive or repulsive depending on the hydrophobicity and the charge of the surfaces and which can be accounted for in terms of the sum of ''double-layer forces'' and so-called ''very long ranged hydrophobic attraction''; which are always attractive; and (3) pull-off (adhesive) forces from contact, which reflect characteristics of molecular contact between monolayers of nucleic acid bases. The forces between complementary pairs (adenine-thymine) are found, for the first time, to be always attractive and stable independently of separation distances as well as pH's studied. On the other hand, interactions between noncomplementary pairs (thymine-thymine, adenine-adenine) are found to be regulated by the surface charge; thus, notably the long-ranged forces change from attractive to repulsive at pH's where the nucleobases start to dissociate.

    DOI: 10.1021/la950867o

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  • STERIC FORCES BETWEEN BRUSH LAYERS OF POLY(L-GLUTAMIC ACID) AND THEIR DEPENDENCE ON SECONDARY STRUCTURES AS DETERMINED BY FT-IR SPECTROSCOPY 査読

    K KURIHARA, T ABE, N HIGASHI, M NIWA

    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS103 ( 3 ) 265 - 272   1995年10月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:ELSEVIER SCIENCE BV  

    Interactions between apposed poly(L-glutamic acid) monolayers in water were investigated by direct surface forces measurement. The average degree of polymerization was 21. The monolayers of anchored poly(L-glutamic acid) were prepared on mica surfaces by the Langmuir-Blodgett deposition of monolayers of an amphiphile containing the polypeptide as the hydrophilic head group. Various secondary structures of poly(L-glutamic acid) were formed in this monolayer at the air-water interface, through intra- and intermolecular hydrogen bonding, depending on the surface pressure and the pH value of the aqueous subphase, and transferred onto mica surfaces. Formation of the secondary structures was characterized by Fourier transform-infrared (FT-IR) spectroscopy prior to the forces measurement. Surface force profiles consisted of a long-range electrostatic and a short-range steric repulsion. Secondary structures of poly(L-glutamic acid), identified by FT-IR with respect to their composition and orientation, were found to determine the short-range steric repulsion. The obtained elastic compressibility moduli of the polypeptide monolayers were 5.6 +/- 2.2 MPa for the beta(2)-structure rich layer, and 0.2 +/- 0.1 MPa for the layer of ionized extended chains.

    DOI: 10.1016/0927-7757(95)03295-O

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  • DIRECT MEASUREMENT OF SURFACE FORCES BETWEEN MONOLAYERS OF ANCHORED POLY(L-GLUTAMIC ACID) 査読

    T ABE, K KURIHARA, N HIGASHI, M NIWA

    JOURNAL OF PHYSICAL CHEMISTRY99 ( 7 ) 1820 - 1823   1995年2月

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    記述言語:英語   掲載種別:研究論文(学術雑誌)   出版者・発行元:AMER CHEMICAL SOC  

    Interactions between apposed poly(L-glutamic acid) monolayers in water were investigated by direct surface force measurements. The average degree of polymerization was 21. Surface force profiles consisted of a long-range electrostatic repulsion and a short-range steric repulsion. Secondary structures of the polypeptide were found to determine the short-range steric repulsion. The elastic compressibility moduli of the polypeptide monolayers were obtained to be 5.6 +/- 2.2 MPa for the beta(2)-structure-rich layer and 0.2 +/- 0.1 MPa for the layer of ionized extended chains.

    DOI: 10.1021/j100007a003

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  • SURFACE FORCES BETWEEN MONOLAYERS OF END-ANCHORED POLYELECTROLYTE LAYERS - STRUCTURAL CHANGES AND INTERACTIONS 査読

    K KURIHARA, T ABE, T KUNITAKE, N HIGASHI, M NIWA

    ADVANCED MATERIALS '93, II - A & B15 ( A & B ) 517 - 520   1994年

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    記述言語:英語   掲載種別:研究論文(国際会議プロシーディングス)   出版者・発行元:ELSEVIER SCIENCE PUBL B V  

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  • 複合触覚センシングのためのフレキシブル圧力・曲げセンサ

    寒川雅之, 高橋拓海, 富田亮, 安部隆, 鳴海敬倫

    電子情報通信学会技術研究報告119 ( 103(OME2019 12-16) ) 7‐10   2019年6月

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  • フッ素エラストマとCNT分散樹脂を用いたフレキシブル圧力・曲げセンサの基礎検討

    高橋拓海, 富田亮, 安部隆, 鳴海敬倫, 寒川雅之

    電気学会全国大会講演論文集(CD-ROM)2019   ROMBUNNO.3‐164   2019年3月

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  • 高プロトン伝導性スルホン化ポリイミド薄膜における構造規則性と分子量の相関

    長尾祐樹, 小野祐太朗, 高倉健作, 後藤崚介, 末次輝太, 原光生, 永野修作, 安部隆

    応用物理学会秋季学術講演会講演予稿集(CD-ROM)79th   ROMBUNNO.19a‐211A‐8   2018年9月

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  • スルホン化ポリイミド薄膜における主鎖剛直性とプロトン伝導

    長尾祐樹, 高倉健作, 小野祐太朗, 後藤崚介, 末次輝太, 原光生, 永野修作, 安部隆

    高分子学会予稿集(CD-ROM)67 ( 2 ) ROMBUNNO.1O14   2018年8月

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  • ラメラ構造を有するスルホン化ポリイミド薄膜のプロトン伝導性

    長尾祐樹, KARTHIK Krishnan, 小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆

    高分子学会予稿集(CD-ROM)66 ( 2 ) ROMBUNNO.2G13   2017年9月

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  • スルホン化ポリイミド薄膜における側鎖構造のプロトン伝導性への影響

    小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆, 長尾祐樹

    高分子学会予稿集(CD-ROM)66 ( 2 ) ROMBUNNO.2U10   2017年9月

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  • スルホン化ポリイミド薄膜の組織構造規則性・周期性が高プロトン伝導性へ与える影響

    長尾祐樹, KARTHIK Krishnan, 小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆

    応用物理学会秋季学術講演会講演予稿集(CD-ROM)78th   ROMBUNNO.5p‐C13‐9   2017年8月

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  • 水で組織構造化するスルホン化ポリイミド薄膜におけるプロトン伝導性へのキャスト溶媒依存性

    長尾祐樹, KARTHIK Krishnan, 小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆

    高分子学会予稿集(CD-ROM)66 ( 1 ) ROMBUNNO.3G11   2017年5月

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  • スルホン化ポリイミド薄膜における水分子吸着と組織構造の相関

    小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆, 長尾祐樹

    日本化学会春季年会講演予稿集(CD-ROM)97th   ROMBUNNO.4A2‐05   2017年3月

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  • 組織構造を利用した高プロトン伝導性ポリイミド薄膜

    小野祐太朗, 後藤崚介, 原光生, 永野修作, 安部隆, 長尾祐樹

    高分子学会予稿集(CD-ROM)65 ( 2 ) ROMBUNNO.2X12   2016年8月

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  • MEMS加工技術とその応用 招待

    寒川 雅之, 安部 隆

    機械の研究67 ( 2 ) 99 - 105   2015年2月

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    記述言語:日本語   掲載種別:記事・総説・解説・論説等(学術雑誌)  

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  • ホローカソード型高密度プラズマ源の開発および微細パターン作製への応用

    鍋澤浩文, 人母岳, 加藤裕史, 安部隆, 浅地豊久

    富山県工業技術センター研究報告 ( 27 ) 49   2013年7月

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    記述言語:日本語   掲載種別:機関テクニカルレポート,技術報告書,プレプリント等  

    J-GLOBAL

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  • デスクトップDRIEを用いたチタニウム微細加工

    山田悠貴, 田村卓也, 加勢彩乃, 山田周史, 浅地豊久, 人母岳, 鍋澤浩文, 安部隆

    日本機械学会マイクロ・ナノ工学シンポジウム講演論文集4th   233 - 234   2012年10月

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    記述言語:日本語   掲載種別:研究発表ペーパー・要旨(全国大会,その他学術会議)  

    J-GLOBAL

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  • MEMS応用のためのチタンDRIE技術の開発

    山田悠貴, 田村卓也, 浅地豊久, 人母岳, 鍋澤浩文, 安部隆

    応用物理学会学術講演会講演予稿集(CD-ROM)73rd   ROMBUNNO.12A-E1-12   2012年8月

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    記述言語:日本語   掲載種別:研究発表ペーパー・要旨(全国大会,その他学術会議)  

    J-GLOBAL

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  • ホローカソード型高密度プラズマ源の開発および微細パターン作製への応用

    鍋澤浩文, 浅地豊久, 加藤裕史, 安部隆

    富山県工業技術センター研究報告 ( 26 ) 65   2012年7月

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    記述言語:日本語   掲載種別:機関テクニカルレポート,技術報告書,プレプリント等  

    J-GLOBAL

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  • 圧電材料用卓上型プラズマエッチング装置の開発

    鍋澤浩文, 浅地豊久, 安部隆

    富山県工業技術センター研究報告 ( 25 ) 61   2011年7月

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    記述言語:日本語   掲載種別:機関テクニカルレポート,技術報告書,プレプリント等  

    J-GLOBAL

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  • ポリペプチドの薄膜化によるプロトン伝導促進現象

    長尾祐樹, 松井淳, 安部隆, 佐多教子, 宮下徳治, 湯上浩雄

    日本化学会講演予稿集90th ( 2 ) 446   2010年3月

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    記述言語:日本語  

    J-GLOBAL

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  • アーチ状ECRプラズマによる難加工材料の高速エッチングプロセス

    鍋沢浩文, 浅地豊久, 金沢元一, 安部隆, 石井成行

    応用物理学会学術講演会講演予稿集64th ( 1 ) 113   2003年8月

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    記述言語:日本語   掲載種別:研究発表ペーパー・要旨(全国大会,その他学術会議)  

    J-GLOBAL

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  • ガラス基板貫通配線を用いたアレイMEMSの大口径ウェハ対応プロセス

    李興華, 安部隆, 原基揚, 江刺正喜

    センサ・マイクロマシンと応用システムシンポジウム講演概要集20th   97   2003年7月

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    記述言語:日本語  

    J-GLOBAL

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  • Electrical Modification on Conductive Polymer using a Scanning Probe Microscope 査読

    Shinya Yoshida, Takahito Ono, Takashi Abe, Masayoshi Esashi

    Proceedings of the 20th Sensor Symposium   411 - 414   2003年7月

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    記述言語:英語  

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  • 複合プロセスによるマイクロ・ナノマシニング

    小野 崇人, 田中秀治, 安部隆, 江刺 正喜

    計測と制御42 ( 1 ) 5 - 11   2003年1月

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    記述言語:日本語   掲載種別:記事・総説・解説・論説等(その他)  

    DOI: 10.11499/sicejl1962.42.5

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  • Fabrication of microprobe array with sub-100nm nano-heater for nanometric thermal imaging and data storage 査読

    D. W. Lee, T. Ono, T. Abe, M. Esashi

    Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)   204 - 207   2001年

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    A novel fabrication method of a micro-thermal probe and its array for nanometric thermal imaging and a technological approach for probe-based data storage are presented. A small metal wire for a nano-heater is fabricated at the apex of a pyramidal SiO 2 tip, which is formed by low temperature oxidation of a silicon etch-pit at 950°C, consecutive metal deposition (Pt/Cr or Au/Cr) to fill the metal into the etch-pit, and etching of the SiO 2 in buffered HF solution. Another metal (Ni) is deposited on the small wire to form a metal-to-metal junction that enables to measure the temperature at the tip end. Metal feed-through are formed on a glass substrate that is bonded with the probe array, which enables to transmit a high-speed signal to a processing-circuit and increase the probe array density. Using the thermal probe, temperature distribution on a sample surface is measured. The heating capability of nano-heater is confirmed by the resistivity change and thermophoton emission from the nano-heater when flowing a small current into the nano-heater. By using a micro-probe, preliminary experiment for data writing and erasing is performed on phase change medium.

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受賞

  • 第35回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2018年11月   電気学会 センサ・マイクロマシン部門   水晶発振回路式液体濃度センサの炭酸濃度非接触測定への応用

    小黒 悠, 谷村実紀, 矢田直人, 寒川雅之, 安部 隆

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  • 優秀論文発表賞

    2016年10月   電気学会 センサ・マイクロマシン部門総合研究会   水晶発振回路を用いた2チャンネル型非接触液体センサの開発

    矢田 直人, 寒川 雅之, 安部 隆

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  • 第33回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2016年10月   電気学会センサ・マイクロマシン部門   真空中での水晶振動子式小型熱重量分析センサの昇温特性評価

    和田 涼介, 寒川 雅之, 安部 隆

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  • 第31回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2014年10月   電気学会センサ・マイクロマシン部門   非接触型液体濃度検出用水晶センサ

    須佐 翼, 渡部 尊, 寒川 雅之, 安部 隆

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共同研究・競争的資金等の研究

  • しなやかさ・タフさ・機能性を有する機能性メタルベースMEMSのスマート生産技術

    2016年 - 2018年

    文部科学省  基盤研究(B) 

    安部 隆

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    担当区分:研究代表者  資金種別:競争的資金

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  • マイクロ・ナノ流体回路融合発振回路式化学演算チップの開発

    2016年 - 2017年

    文部科学省  挑戦的萌芽研究 

    安部 隆

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    担当区分:研究代表者  資金種別:競争的資金

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  • 機能材料をベースとしたMEMSのための熱アシスト型反応性イオンエッチングの試験研究,

    2015年 - 2016年

    JST  マッチングプランナープログラム 

    安部 隆

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    担当区分:研究代表者  資金種別:競争的資金

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  • 液体燃料、潤滑剤の効率的利用のための非接触型液体濃度センサの開発

    2014年 - 2015年

    JST  研究成果研究成果展開事業 A-STEP FSステージ 

    安部 隆

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    担当区分:研究代表者  資金種別:競争的資金

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  • 小型・高精度・高速マルチ化学センシングシステムの実用化への展開

    2013年 - 2014年

    JST  知財活用促進ハイウェイ 

    安部 隆

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    担当区分:研究代表者  資金種別:競争的資金

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  • ワンチップ型バルク弾性波型メタノール濃度センサの開発

    2011年12月 - 2012年06月

    JST  研究成果最適支援プログラムA-STEP探索タイプ 

    安部 隆

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    担当区分:研究代表者  資金種別:競争的資金

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  • ガウシアン形状振動子を用いた単一細胞レベル極限センシング

    2011年 - 2013年

    文部科学省  基盤研究(C) 

    安部 隆

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    担当区分:研究代表者  資金種別:競争的資金

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  • 外乱下においてサブ原子層レベルの感度を有するQCMの開発

    2006年06月 - 2010年06月

    NEDO  産業技術研究助成事業(若手グラント) 

    安部 隆

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    担当区分:研究代表者  資金種別:競争的資金

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  • アクティブ環境操作下における原子層レベル表面反応の実時間計測技術

    2006年 - 2008年

    文部科学省  若手研究(A) 

    安部 隆

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    担当区分:研究代表者  資金種別:競争的資金

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  • マイクロ・ナノマシニングを用いた水晶振動子型分子認識チップの創製

    2002年10月 - 2006年03月

    JST  戦略的研究創造研究推進事業(さきがけタイプ) 

    安部 隆

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    担当区分:研究代表者  資金種別:競争的資金

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