Updated on 2024/03/29

写真a

 
SOHGAWA Masayuki
 
Organization
Academic Assembly Institute of Science and Technology SEISAN DESIGN KOUGAKU KEIRETU Associate Professor
Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Mechanical Science and Engineering Associate Professor
Faculty of Engineering Department of Engineering Associate Professor
Title
Associate Professor
External link

Degree

  • 博士(工学) ( 2005.3   大阪大学 )

Research Interests

  • エッチング

  • センサ

  • PDMS

  • カンチレバー

  • マルチモーダル

  • Bio Sensor

  • MEMS

  • マイクロマシニング

  • 触覚センサ

  • 圧電体

  • Micromachining

  • Piezoelectric Thin Film

  • Ferroelectric Thin Film

  • 質感

  • Tactile Sensor

Research Areas

  • Informatics / Perceptual information processing

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Electric and electronic materials

  • Informatics / Mechanics and mechatronics  / ナノマイクロメカトロニクス

  • Informatics / Robotics and intelligent system  / ナノマイクロメカトロニクス

  • Manufacturing Technology (Mechanical Engineering, Electrical and Electronic Engineering, Chemical Engineering) / Electron device and electronic equipment

  • Nanotechnology/Materials / Nano/micro-systems

  • Nanotechnology/Materials / Nanomaterials

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Research History (researchmap)

  • Niigata University   Department of Mechanical and Production Engineering, Faculty of Engineering   Associate Professor

    2016.4

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  • Niigata University   Department of Mechanical and Production Engineering, Faculty of Engineering   Assistant Professor

    2013.4 - 2016.3

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  • Osaka University   Graduate School of Engineering Science   Visiting Academic Staff

    2013.4 - 2014.3

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  • Osaka University   Graduate School of Engineering Science   Assistant Professor

    2007.10 - 2013.3

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  • Osaka University   Graduate School of Engineering Science   Research Associate

    2007.4 - 2007.10

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  • Osaka University   Graduate School of Engineering Science   Researcher

    2005.7 - 2007.3

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  • Osaka Institute of Technology   Faculty of Engineering   Part-time Lecturer

    2002.4 - 2005.3

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Research History

  • Niigata University   Faculty of Engineering Department of Engineering   Associate Professor

    2017.4

  • Niigata University   Graduate School of Science and Technology Advanced Materials Science and Technology Advanced Mechanical Science and Engineering   Associate Professor

    2016.4

  • Niigata University   Abolition organization Creative Engineering   Associate Professor

    2016.4 - 2017.3

  • Niigata University   Abolition organization Creative Engineering   Assistant Professor

    2013.4 - 2016.3

  • Niigata University   Graduate School of Science and Technology Advanced Materials Science and Technology   Assistant Professor

    2013.4 - 2016.3

Education

  • Osaka University   Graduate School of Engineering Science   Department of Physical Science

    2000.4 - 2005.3

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    Country: Japan

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  • Osaka University   Faculty of Engineering Science   Department of Electrical Engineering

    1998.4 - 2000.3

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    Country: Japan

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  • Wakayama National College of Technology   Department of Electrical Engineering

    1993.4 - 1998.3

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    Country: Japan

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Professional Memberships

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Committee Memberships

  • 電気学会   触覚デバイスのためのアクチュエーション技術協同研究委員会(第3期) 委員  

    2022.6 - 2024.5   

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    Committee type:Academic society

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  • 日本機械学会   マイクロ・ナノ工学部門運営委員会 委員  

    2022.4   

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    Committee type:Academic society

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  • 電気学会   機能性材料とヒト感性マイクロシステム調査専門委員会 委員長  

    2021.10 - 2024.9   

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    Committee type:Academic society

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  • 電気学会   触覚デバイスのためのアクチュエーション技術協同研究委員会(第2期) 委員  

    2020.6 - 2022.5   

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    Committee type:Academic society

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  • 電気学会   令和2年度E部門総合研究会実行委員会 論文委員長  

    2020.2 - 2020.9   

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    Committee type:Academic society

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  • 電気学会   令和2年度E部門総合研究会論文委員会委員長  

    2020.2 - 2020.9   

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    Committee type:Academic society

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  • 電気学会   令和2年度E部門総合研究会論文委員会 委員長  

    2020.2 - 2020.9   

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    Committee type:Academic society

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  • 電気学会   令和2年基礎・材料・共通部門大会実行委員会 委員  

    2020.1 - 2020.12   

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    Committee type:Academic society

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  • 日本機械学会   第15回「運動と振動の制御」国際会議(MoViC 2020)現地委員会 委員  

    2019.11 - 2020.10   

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    Committee type:Academic society

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  • 日本機械学会   北陸信越支部 商議員・新潟県幹事  

    2019.4 - 2020.3   

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    Committee type:Academic society

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  • 日本機械学会   ロボティクス・メカトロニクス部門 第7地区技術委員会 幹事  

    2019.4 - 2020.3   

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    Committee type:Academic society

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  • 電気学会   マイクロマシン・センサシステム技術委員会 副委員長  

    2018.9   

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    Committee type:Academic society

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  • 電気学会   スマート社会に向けた高機能・高感度センサ技術に関する調査専門委員会 委員  

    2018.6 - 2021.5   

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    Committee type:Academic society

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  • 電気学会   触覚デバイスのためのアクチュエーション技術協同研究委員会 委員  

    2018.6 - 2020.5   

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    Committee type:Academic society

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  • 電気学会   センサ・マイクロマシン部門研究調査運営委員会 幹事  

    2018.5 - 2019.5   

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    Committee type:Academic society

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  • 電気学会   第35回「センサ・マイクロマシンと応用システム」シンポジウム 論文委員会 委員  

    2018.4 - 2019.1   

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    Committee type:Academic society

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  • 電気学会   平成30年度E部門総合研究会実行委員会委員  

    2018.2 - 2018.9   

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    Committee type:Academic society

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  • 電気学会   平成30年度センサ・マイクロマシン部門総合研究会 実行委員会 委員  

    2018.2 - 2018.9   

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    Committee type:Academic society

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  • 電気学会   平成30年度センサ・マイクロマシン部門総合研究会 論文委員会 幹事  

    2018.2 - 2018.9   

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    Committee type:Academic society

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  • 電気学会   平成30年度E部門総合研究会論文委員会幹事  

    2018.2 - 2018.9   

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    Committee type:Academic society

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  • 電気学会   フィジカルセンサ技術委員会 幹事  

    2017.11 - 2018.12   

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    Committee type:Academic society

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  • 電気学会   センサ・マイクロマシン部門役員会総務企画担当  

    2017.6 - 2019.5   

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    Committee type:Academic society

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  • 電気学会   平成30年全国大会 グループ委員会 第11グループ 主査  

    2017.6 - 2018.6   

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    Committee type:Academic society

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  • 電気学会   平成30年全国大会 論文委員会 委員  

    2017.6 - 2018.6   

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    Committee type:Academic society

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  • 電気学会   平成30年全国大会 小委員会 委員  

    2017.6 - 2018.6   

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    Committee type:Academic society

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  • 電気学会   論文委員会(Eグループ)幹事  

    2017.4   

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    Committee type:Academic society

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  • 電気学会   第34回センサ・マイクロマシンと応用システムシンポジウム論文委員会委員  

    2017.2 - 2017.11   

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    Committee type:Academic society

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  • 電気学会   センサ・マイクロマシン部門総合研究会実行委員会幹事  

    2016.11 - 2017.9   

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    Committee type:Academic society

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  • 電気学会   センサ・マイクロマシン部門総合研究会論文委員会委員  

    2016.11 - 2017.9   

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    Committee type:Academic society

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  • 電気学会   触覚デバイスのための計測技術協同研究委員会  

    2016.7 - 2018.6   

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    Committee type:Academic society

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  • 電気学会   フィジカルセンサ技術委員会 幹事補佐  

    2016.7 - 2017.11   

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    Committee type:Academic society

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  • 電気学会   平成29年全国大会グループ委員会 11グループ委員  

    2016.6 - 2017.6   

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    Committee type:Academic society

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  • 電気学会   圧電MEMSデバイス調査専門委員会 幹事  

    2016.4 - 2019.3   

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    Committee type:Academic society

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  • 応用物理学会   第77回応用物理学会秋季学術講演会 現地実行委員  

    2016.4 - 2016.9   

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    Committee type:Academic society

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  • 電気学会   第33回センサ・マイクロマシンと応用システムシンポジウム論文委員会委員(分野4 フィジカルセンサ 主査)  

    2016.2 - 2016.11   

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    Committee type:Academic society

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  • 電気学会   センサ・マイクロマシン部門編修委員会 委員  

    2015.4   

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    Committee type:Academic society

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  • 電気学会   第32回センサ・マイクロマシンと応用システムシンポジウム論文委員会委員(分野4 フィジカルセンサ 副査)  

    2015.2 - 2015.11   

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    Committee type:Academic society

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  • 電気学会   第32回「センサ・マイクロマシンと応用システム」シンポジウム実行委員会副幹事  

    2014.12 - 2015.11   

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    Committee type:Academic society

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  • 電気学会   社会インフラ用センサシステムセキュリティ特別調査専門委員会 委員  

    2014.11 - 2018.3   

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    Committee type:Academic society

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  • 電気学会   触覚提示デバイスの高度化協同研究委員会  

    2014.5 - 2016.4   

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    Committee type:Academic society

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  • 電気学会   第31回センサ・マイクロマシンと応用システムシンポジウム論文委員会委員  

    2014.2 - 2014.11   

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    Committee type:Academic society

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  • 電気学会   フィジカルセンサ技術委員会 1号委員  

    2013.12 - 2016.7   

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    Committee type:Academic society

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  • 電気学会   第31回「センサ・マイクロマシンと応用システム」シンポジウム実行委員会副幹事  

    2013.12 - 2014.11   

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    Committee type:Academic society

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  • 電気学会   第30回センサ・マイクロマシンと応用システムシンポジウム論文委員会委員  

    2013.2 - 2014.1   

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    Committee type:Academic society

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  • 電気学会   触覚デバイスの高度化協同研究委員会委員  

    2012.8 - 2014.4   

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    Committee type:Academic society

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  • センシング技術応用研究会   GST技術分科会幹事  

    2012.7   

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    Committee type:Academic society

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  • 電気学会   平成23年電気学会全国大会実行委員会委員  

    2010.7 - 2011.6   

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    Committee type:Academic society

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  • International Microprocesses and Nanotechnology Conference   Program Comittee  

    2010.4 - 2014.12   

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    Committee type:Academic society

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  • 電気学会   論文委員会(Eグループ)委員  

    2008.4   

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    Committee type:Academic society

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Papers

  • Elastomer-embedded MEMS Tactile Sensor for Detecting Normal Force, Bending, and Torsion in Grasping Motion Reviewed

    So Okako, Taisei Nambu, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   144 ( 1 )   6 - 11   2024.1

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.6

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  • Titanium Blade with Jagged Micro-scale Structure Fabricated via Electrolytic Etching Reviewed

    Masamune Kurita, Yuki Takizawa, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   144 ( 1 )   2 - 5   2024.1

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.144.2

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  • Adhesion Measurement by Tactile Sensor for Quantitative Evaluation of Stickiness of Skin Reviewed

    So Okako, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   143 ( 8 )   251 - 255   2023.8

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    Authorship:Last author, Corresponding author   Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.143.251

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  • A Rapid, Sensitive, and Specific Detection of Aggregated α-Synuclein by a Liposome-Immobilized Cantilever Sensor

    Ryoko Kobayashi, Kotaro Kamitani, Masanori Sawamura, Hodaka Yamakado, Ryosuke Takahashi, Masayuki Sohgawa, Minoru Noda

    IEEE Sensors Journal   23 ( 12 )   12495 - 12502   2023.6

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    Publishing type:Research paper (scientific journal)  

    Parkinson's disease (PD) is characterized by dopaminergic cell loss and the formation of Lewy bodies, of which the main component is aggregated and fibrillized α -synuclein (aSyn). Recent studies suggested that ultratrace amounts of aSyn aggregates are also present in biofluid specimens, and they can serve as a biomarker for PD. Because aSyn has been shown to possess a prion-like property, we attempted to enhance the sensitivity and specificity of a cantilever microsensor to detect aSyn aggregates by exploiting the properties of self-templating assembly and lipid interaction on the surface of liposome-immobilized cantilever sensor. We found that the liposome-immobilized cantilever sensor was able to successfully detect aSyn fibrils at a very low concentration (100 pg/mL), and the addition of aSyn monomers, which were converted into fibrils in the presence of aSyn aggregates and further acted as a template for fibrillization, lowered the detection limit to 10 pg/mL. The sensitivity of this cantilever sensor was comparable to or slightly superior to that of enzyme-linked immunosorbent assay (ELISA). Moreover, the lag time for the detection of aSyn fibrils has been significantly reduced to 100-120 min, compared to the tens of hours needed in conventional ELISA, real-time quaking-induced conversion (RT-QuIC), and protein misfolding cyclic amplification (PMCA) assays. Finally, preliminary measurements of aSyn aggregates showed the possibilities of discriminating serum from PD and non-PD patients. The liposome-immobilized cantilever sensor could serve as a promising tool for the early or preclinical diagnosis of PD.

    DOI: 10.1109/JSEN.2023.3272659

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  • The New Control Method for Detection of Cold‐Warm sensation using a Heater Integrated Tactile Sensor Reviewed

    Takuma Iwahashi, Naotaka Onda, Hikaru Nagumo, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Electrical and Electronic Engineering   18 ( 7 )   1214 - 1219   2023.4

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/tee.23813

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  • Temperature characteristics of a thickness shear mode quartz crystal resonator bonded to a support substrate

    Hajime Satani, Kuraudo Yasuda, Masayuki Sohgawa, Takashi Abe

    Applied Physics Letters   121 ( 25 )   252903 - 252903   2022.12

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    Publishing type:Research paper (scientific journal)   Publisher:AIP Publishing  

    Thickness shear mode (TSM) resonators consisting of metal films and quartz plates are widely used for sensor applications such as film thickness monitoring, force sensors, and odor sensors. However, the current sensor geometry prevents further improvements in its sensitivity and stability. Thinning the plate is necessary for high sensitivity, and advanced fabrication technologies are required for their commercialization. The solution is to use a support substrate to increase the mechanical strength, which can guide the transmittance of the electric field. Herein, we report a TSM resonator bonded to a support substrate. An AT-cut quartz resonator with a floating electrode on the top side was bonded to the support substrate. Two excitation electrodes were placed under the substrate. The support substrates evaluated in this study included borosilicate glass, Z-cut quartz crystals, and AT-cut quartz crystal plates. The quartz crystal resonator (QCR) bonded to the AT-cut quartz crystal plate and positioned at 90° to the crystallographic x-axis shows an excellent temperature coefficient of frequency of −60 ± 14 ppb/°C for a temperature range 11–40 °C. The proposed method reduces temperature sensitivity to 1/4 or less compared to that without a substrate. Furthermore, the resonator could be used as a quartz crystal microbalance. The proposed method may inspire further high-frequency QCR-based biochemical chips or various sensor applications with TSM resonators.

    DOI: 10.1063/5.0132804

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  • Effects of Ions on Liposome-Immobilized Biosensors for the Detection of Alpha-Synuclein Reviewed

    K. Kamitani, M. Sawamura, H. Yamakado, Y. Takahashi, C. F. Werner, M. Sohgawa, M. Noda

    IEEE Sensors2022, 2317, Dallas, Texas USA, Oct 30 – Nov 2, 2022   2022.10

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    Language:English   Publishing type:Research paper (international conference proceedings)  

    DOI: 10.1109/SENSORS52175.2022.9967179

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  • Tactile sensor with microcantilevers embedded in fluoroelastomer/PDMS for physical and chemical resistance Reviewed

    Yuji Takahashi, Takumi Takahashi, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    Electronics and Communications in Japan   105 ( 3 )   e12369   2022.8

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/ecj.12369

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12369

  • Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors Reviewed International journal

    Ren Kaneta, Takumi Hasegawa, Jun Kido, Takashi Abe, Masayuki Sohgawa

    Journal of Robotics and Mechatronics   34 ( 3 )   677 - 682   2022.6

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:Fuji Technology Press Ltd.  

    We previously reported a microelectromechanical system tactile sensor with elastomer-embedded microcantilevers. The sensor enabled the gripping control of soft objects by a robotic hand and acquisition of the object surface texture data. However, sensitivity improvement for more precise control and better texture information acquisition is desired. Here, the cantilever size and the sensor’s strain-gauge arrangement were redesigned, resulting in a sensor with significantly improved sensitivity. In addition, we report the sensitivity dependence on the cantilever size.

    DOI: 10.20965/jrm.2022.p0677

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  • Tactile Sensor with Microcantilevers Embedded in Fluoroelastomer/PDMS for Physical and Chemical Resistance Reviewed

    Yuji Takahashi, Takumi Takahashi, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   142 ( 5 )   91 - 96   2022.5

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    Authorship:Last author, Corresponding author   Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.142.91

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  • Improvement of Durability of Insulation Film for Low-voltage Electrostatic Tactile Display Reviewed

    Masatoshi Kondo, Junki Satoh, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   142 ( 5 )   85 - 90   2022.5

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    Authorship:Last author, Corresponding author   Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.142.85

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  • Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass Reviewed

    Naotaka Onda, Takaaki Kozuka, Takashi Abe, Masanobu Isshiki, Satoru Tomeno, Masayuki Sohgawa

    Electrical Engineering in Japan   215 ( 1 )   e23370   2022.3

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    Authorship:Last author, Corresponding author   Language:English   Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/eej.23370

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/eej.23370

  • Development of time‐delay analysis method of inductance and capacitance for microfluidic circuit Reviewed

    Ryo Watanabe, Akira Yoshida, Yota Sato, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   105 ( 1 )   e12352   2022.3

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/ecj.12352

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12352

  • Development of Time-Delay Analysis Method of Inductance and Capacitance for Microfluidic Circuit Reviewed

    Ryo Watanabe, Akira Yoshida, Yota Sato, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   142 ( 2 )   17 - 20   2022.2

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    Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.142.17

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  • Development of quartz crystal complex capacitive sensor with microelectrode array for sensitization Reviewed International journal

    Yuki Hashimoto, Takaaki Haino, Masayuki Sohgawa, Takashi Abe

    Electrical Engineering in Japan   214 ( 4 )   e23356   2021.12

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    Language:English   Publishing type:Research paper (scientific journal)   Publisher:Wiley  

    DOI: 10.1002/eej.23356

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    Other Link: https://onlinelibrary.wiley.com/doi/full-xml/10.1002/eej.23356

  • Fabrication of Heater-Integrated MEMS Tactile Sensor for Evaluation of Warm and Cold Sensation by Touching Glass Reviewed

    Naotaka Onda, Takaaki Kozuka, Takashi Abe, Masanobu Isshiki, Satoru Tomeno, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   141 ( 10 )   343 - 348   2021.10

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    Authorship:Last author, Corresponding author   Language:Japanese   Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.141.343

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  • Development of Quartz Crystal Complex Capacitive Sensor with Microelectrode Array for Sensitization

    Yuki Hashimoto, Takaaki Haino, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   141 ( 8 )   279 - 283   2021.8

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    Publishing type:Research paper (scientific journal)   Publisher:Institute of Electrical Engineers of Japan (IEE Japan)  

    DOI: 10.1541/ieejsmas.141.279

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  • Development of dry‐nano‐polishing technique using reactive ion etching for ultra thin titanium wafer

    Teruya Chino, Yuta Watanabe, Yosuke Tsukiyama, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   104 ( 2 )   2021.6

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    DOI: 10.1002/ecj.12317

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  • Development of Dry-nano-polishing Technique using Reactive Ion Etching for Ultra Thin Titanium Wafer Reviewed

    Teruya Chino, Yuta Watanabe, Yosuke Tsukiyama, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   141 ( 4 )   103 - 107   2021.4

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    DOI: 10.1541/ieejsmas.141.103

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  • Multi-frequency Quartz Oscillator Based Liquid Concentration Sensor with External Magnetic Field for Ion Discrimination Reviewed

    Hiroki Fujimori, Yuki Togashi, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   140 ( 12 )   349 - 353   2020.12

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    DOI: 10.1541/ieejsmas.140.349

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  • Detection Area Evaluation of Tactile Sensor Using Microcantilever Embedded in Elastomer Reviewed

    Yuto Abe, Fumitoshi Suga, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   140 ( 10 )   272 - 277   2020.10

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    DOI: 10.1541/ieejsmas.140.272

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  • Contactless Monitoring of Water Treatment Process Using Quartz Oscillator Based Liquid Sensor Reviewed

    Akira Yoshida, Yu Oguro, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   140 ( 10 )   251 - 255   2020.10

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    DOI: 10.1541/ieejsmas.140.251

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  • Detection of Gripping State Using Tactile Sensors Installed on Handgrip for Tools Reviewed

    Taisei Nambu, Tomoya Fujihashi, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   140 ( 9 )   228 - 234   2020.9

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    DOI: 10.1541/ieejsmas.140.228

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  • Detection of α-Synuclein in serum of patients with Parkinson’s disease by liposome-immobilized cantilever sensor

    Kobayashi Ryoko, Sawamura Masanori, Yamakado Hodaka, Sohgawa Masayuki, Noda Minoru

    JSAP Annual Meetings Extended Abstracts   2020.2   1725 - 1725   2020.8

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    DOI: 10.11470/jsapmeeting.2020.2.0_1725

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  • Label‐free, chronological and selective detection of aggregation and fibrillization of amyloid β protein in serum by microcantilever sensor immobilizing cholesterol‐incorporated liposome Reviewed

    Tomoya Taniguchi, Toshinori Shimanouchi, Masayuki Sohgawa, Minoru Noda

    Biotechnology and Bioengineering   117 ( 8 )   2469 - 2478   2020.8

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    To facilitate the early diagnosis of Alzheimer's disease and mild cognitive impairment patients, we developed a cantilever-based microsensor that immobilized liposomes of various phospholipids to detect a trace amount of amyloid beta (A beta) protein, and investigated its aggregation and fibrillization on model cell membranes in human serum. Three species of liposomes composed of different phospholipids of 1,2-dipalmtoyl-sn-glycero-3-phosphocholine (DPPC), DPPC/phosphatidyl ethanolamine and 1,2-dipalmitoyl-sn-glycero-3-phosphorylglycerol having varied hydrophilic groups were applied, which showed different chronological interactions with A beta(1-40) protein and varied sensitivities of the cantilever sensor, depending on their specific electrostatic charged conditions, hydrophilicity, and membrane fluidity. 1,2-dimyristoyl-sn-glycero-3-phosphocholine (DMPC) having short hydrophobic carbon chains confirmed to show a large interaction with A beta(1-40) and a high sensitivity. Furthermore, the incorporation of cholesterol into DMPC was effective to selectively detect A beta(1-40) in human serum, which effect was also checked by quartz crystal microbalance. Finally, A beta detection of 100-pM order was expected selectively in the serum by using the developed biosensor.

    DOI: 10.1002/bit.27380

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  • Tactile Sensor with High-Density Microcantilever and Multiple PDMS Bumps for Contact Detection Reviewed

    Tomoya Fujihashi, Fumitoshi Suga, Ryoma Araki, Jyun Kido, Takashi Abe, Masayuki Sohgawa

    Journal of Robotics and Mechatronics   32 ( 2 )   297 - 304   2020.4

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    In the study, we investigated a detection method of partial contact of an object owing to curved or uneven surface of the contact object by a tactile sensor. The sensor is developed using three microcantilevers embedded in a polydimethylsiloxane (PDMS) bump. First, three bumps were employed to place a bump for each cantilever. It was possible to detect a contact position because the resistance change in the strain gauge on the cantilever under each bump significantly depended on the contact/non-contact state of each bump. Second, a tactile sensor with high-density arrangement of microcantilevers was used to detect partial or tilted contact situations. The results indicated that the output of a tactile sensor with high-density arrangement of microcantilevers reflected partial or tilted contact. It is suggested that a tactile sensor with multiple bumps and high-density microcantilevers allows for more dexterous gripping control based on the shape of the object and contact angle.

    DOI: 10.20965/jrm.2020.p0297

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  • Tactile sensor using a microcantilever embedded in fluoroelastomer with resistance to cleaning and antiseptic solutions Reviewed International journal

    Takumi Takahashi, Shuhei Sato, Takashi Abe, Masayuki Sohgawa

    Sensors and Actuators A: Physical   301 ( 1 )   111774   2020.1

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    File: revisedmanuscript2.pdf

    DOI: 10.1016/j.sna.2019.111774

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  • An ultrasensitive detection of aggregated α-synuclein as a biomarker molecule for Parkinson disease by liposome-immobilized cantilever biosensor using self-templating phenomena of prionoid protein

    Ryoko Kobayashi, Masanori Sawamura, Hodaka Yamakado, Masayuki Sohgawa, Minoru Noda

    MicroTAS 2020 - 24th International Conference on Miniaturized Systems for Chemistry and Life Sciences   1280 - 1281   2020

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    We newly examined a self-templating effect of prionoid protein on a liposome-immobilized cantilever sensor in order to detect a trace amount of α-synuclein fibril as a biomarker molecule for Parkinson Disease. The developed sensor significantly decreased the detection threshold down to several hundreds of fM and its measuring time to a few hours, and could be applied in a clinical setting.

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  • A selective detection of amyloid beta in human serum by strain gauge cantilever sensor immobilizing liposome incorporated with cholesterol

    Tomoya Taniguchi, Yuki Murakami, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

    21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2017   449 - 450   2020

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    We have newly confirmed a selective detection of amyloid beta (Aβ) in human serum with its dynamic behavior by a strain gauge cantilever sensor immobilizing liposome incorporated with cholesterol. We examined the effect of incorporating cholesterol in the liposome in order to decrease the interaction between the liposomes and many proteins in human serum. The result implied that cholesterol suppress the interaction because of stabilizing effect in the lipid membrane [1]. Thus we concluded that we were able to detect Aβ, especially the state of its aggregation and fibrillization, in human serum by the cantilever sensor immobilizing liposome incorporated with cholesterol.

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  • Fabrication and Characterization of Microcantilever for Detection of Vibration Sensation in Tactile Sensing Reviewed

    Harutoshi Takahashi, Yuta Namba, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   139 ( 11 )   375 - 380   2019.11

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    File: 電気学会論文誌-最終原稿.pdf

    DOI: 10.1541/ieejsmas.139.375

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  • Development of a Self-heated-stage for High Speed Process of Titanium by Reactive Ion Etching Reviewed

    Yuya Kiryu, Gang Han, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   139 ( 10 )   341 - 345   2019.10

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    DOI: 10.1541/ieejsmas.139.341

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  • A Novel Detection of Biomarker Molecule of αsynuclein for Parkinson Disease by Phospholipid Liposome-Immobilized Cantilever Biosensor Using Real-Time Quaking-Induced Conversion Method Reviewed

    R. Kobayashi, M. Sawamura, H. Yamakado, M. Sohgawa, M. Noda

    IEEE Sensors 2019, C3L-A-2, Montreal, Canada, October. 27–30 (2019) 1274.   2019.10

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    DOI: 10.1109/SENSORS43011.2019.8956615

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  • Detection of α-Synuclein by liposome immobilized cantilever sensor using RT-QuIC method

    Kobayashi Ryoko, Sawamura Masanori, Yamakado Hodaka, Sohgawa Masayuki, Yamashita Kaoru, Noda Minoru

    JSAP Annual Meetings Extended Abstracts   2019.2   2837 - 2837   2019.9

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    DOI: 10.11470/jsapmeeting.2019.2.0_2837

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  • Development of Quartz Oscillator Based Liquid Concentration Sensor for Contactless Monitoring of Solution in Bottle Reviewed

    Yu Oguro, Miki Tanimura, Naoto Yada, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   139 ( 7 )   169 - 174   2019.7

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    DOI: 10.1541/ieejsmas.139.169

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  • Measurement by Tactile Sensor and FEM Analysis of Multi-layered Flexible Model for Skin Diagnosis Reviewed

    Jun Kido, Yuta Abe, Shuhei Sato, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   139 ( 6 )   149 - 154   2019.6

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    File: 触覚センサによる多層柔軟物モデルの計測と有限要素解析-最終.pdf

    DOI: 10.1541/ieejsmas.139.149

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  • A New Detection of Biomarker Molecule of α-Synuclein for Parkinson Disease by Phospholipid Liposome-Immobilized Cantilever Microsensor with Temperature Stabilization

    Ryoko Kobayashi, Masanori Sawamura, Hodaka Yamakado, Masayuki Sohgawa, Minoru Noda

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII   999 - 1001   2019.6

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    In this work, for the first time, chronological behavior of α-synuclein (aSyn) as causative agent for Parkinson Disease has been measured by phospholipid liposome-immobilized cantilever microsensor. Our goal is to detect aggregated, not a monomeric, forms of aSyn in its initial stage, as it is most toxic in patient's cerebrospinal fluid (CSF). The aSyn aggregates in phosphate buffered saline (PBS) were successfully detected compared to CSF of healthy person. With a developed temperature stabilization method at room temperature, which was stabilized within +/- 0.2/ °C, aSyn aggregation was detected down to 100 pM.

    DOI: 10.1109/TRANSDUCERS.2019.8808657

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  • Fabrication and Evaluation of Quartz Oscillator Based Viscosity / Concentration Sensor for a Drop Sensing Reviewed

    Takuto Shoji, Ryo Ebata, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   139 ( 4 )   81 - 84   2019.4

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    DOI: 10.1541/ieejsmas.139.81

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  • A detection of α-Synuclein as causative agent of Parkinson disease by phospholipid liposome-immobilized cantilever microsenseor

    Kobayashi Ryoko, Sawamura Masanori, Yamakado Hodaka, Sohgawa Masayuki, Yamashita Kaoru, Noda Minoru

    JSAP Annual Meetings Extended Abstracts   2019.1   2531 - 2531   2019.2

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    DOI: 10.11470/jsapmeeting.2019.1.0_2531

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  • Microdroplet monitoring using microfluid circuit combined quartz oscillator based capacitive sensor Reviewed International journal

    Ryo Ebata, Ryo Sakai, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   101 ( 12 )   50 - 55   2018.12

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    In this article, we developed a compact microdroplet monitoring sensor. This sensor is capacitive sensor combined a microfluidic circuit and a crystal oscillator. We succeeded in the generation and monitoring of microdroplets with this sensor. We optimized the sensing capacitor to improve the sensitivity of the sensor. With optimized the sensing capacitor, the frequency response can be increased. We measured NaCl aqueous solution concentration with the optimized sensing capacitor. From the measurement result, the high dynamic range measurement can be made by using two frequencies.

    DOI: 10.1002/ecj.12128

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  • Evaluation of Millimeter-wave Radar Sensor in Water Level Monitoring System for Flood Disaster Prevention Reviewed

    Masayuki Sohgawa, Andrew Whitaker, Naoki Sakai

    IEEJ Transactions on Sensors and Micromachines   138 ( 10 )   461 - 465   2018.10

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    Serious flood disasters have escalated because of climate variation by global warming. For early alert of flood disasters, it is necessary to employ multipoint and wide-area water level monitoring throughout river basins, including headwaters. However, cost issue of the conventional sensing system has prohibited the progress of installation in small rivers. In this work, we propose the low-cost and contactless sensing system for water level in the river using a millimeter-wave radar and LPWA network. The prototype sensor can detect distance with average error rate of 2.56% and monitor water level in the actual river even during stormy weather. Furthermore, it is demonstrated that water level can be monitored by this sensor in various river conditions.

    File: 電気学会論文誌 最終提出原稿.pdf

    DOI: 10.1541/ieejsmas.138.461

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  • Microdroplet Monitoring Using Microfluid Circuit Combined Quartz Oscillator Based Capacitive Sensor Reviewed

    Ryo Ebata, Ryo Sakai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   138 ( 8 )   382 - 386   2018.8

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    In this paper, we developed a compact microdroplet monitoring sensor. This sensor is capacitive sensor combined a microfluidic circuit and a crystal oscillator. We succeeded in the generation and monitoring of microdroplets with this sensor. We optimized the sensing capacitor to improve the sensitivity of the sensor. With optimized the sensing capacitor, the frequency response can be increased. We measured NaCl aqueous solution concentration with the optimized sensing capacitor. From the measurement result, the high dynamic range measurement can be made by using two frequencies.

    DOI: 10.1541/ieejsmas.138.382

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  • Electromotive Manipulator Control by Detection of Proximity, Contact, and Slipping Using MEMS Multiaxial Tactile Sensor Reviewed

    Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    Electrical Engineering in Japan (English translation of Denki Gakkai Ronbunshi)   204 ( 2 )   44 - 49   2018.7

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    In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed single element MEMS sensor which can detect proximity, contact, and slipping to skillful gripping of the object. This MEMS sensor can detect proximity as impedance change of Si substrate by reflected light from the object due to the photoconductive effect. In addition, both normal and shear load can be also detected as resistance change of strain gage on cantilevers located threefold symmetry and embedded in polydimethylsiloxane (PDMS). By attaching the sensor on the electromotive manipulator, accurate control of gripping force was enabled by feedback of the sensor output.

    DOI: 10.1002/eej.23098

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  • Miniaturization and high-density arrangement of microcantilevers in proximity and tactile sensor for dexterous gripping control Reviewed International journal

    Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    Micromachines   9 ( 6 )   301   2018.6

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    In this paper, in order to perform delicate and advanced grip control like human, a proximity and tactile combination sensor using miniaturized microcantilevers one-fifth the size of previous one as the detection part was newly developed. Microcantilevers were arranged with higher spatial density than in previous works and an interdigitated array electrode to enhance light sensitivity was added. It is found that the interdigitated array electrode can detect light with 1.6 times higher sensitivity than that in previous works and the newly fabricated microcantilevers have enough sensitivity to applied normal and shear loads. Therefore, more accurate detection of proximity distance and spatial distribution of contact force become available for dexterous gripping control to prevent 'overshooting', 'force control error', and 'slipping'.

    DOI: 10.3390/mi9060301

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  • Development of Self-Heated Stage Suitable for Thermal Assist Reactive Ion Etching of the Functional Metals Reviewed

    Yuki Murata, Gang Han, Daiki Ohkawa, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    Electronics and Communications in Japan   101 ( 3 )   96 - 102   2018.3

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    This paper describes development of self-heated stage suitable for thermal reactive ion etching (TRIE) of the functional metals. TRIE was evaluated using both experiments and simulations for etching functional metals. The self-heated stage was designed based on the simulation results. TRIE employs a self-heated stage which is thermally insulated aluminum plate as the etching stage of a regular RIE apparatus. The stage temperature increases rapidly within 10 min and etch rate does not depend on process time. TRIE technique was used to etch various kinds of functional metals: Ti, Mo, Ta, Nb, and Ti alloy (Ti-6Al-4V). It did improve the etching rate of these materials greatly.

    DOI: 10.1002/ecj.12046

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  • Texture evaluation for planed surface of polyoxymethylene resin by measuring surface shape and color with light and strain sensitive tactile sensor Reviewed

    Yuta Namba, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   138 ( 6 )   250 - 256   2018

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    In this work, we have evaluated the planed surface of polyoxymethylene resin by light and strain sensitive MEMS tactile sensor. It is confirmed that the sensor output is correlated with surface profile and frictional characteristics of the resin. Additionally, it is demonstrated that difference of the surface color of the resin can be detected by this sensor.

    File: 光・ひずみ複合触覚センサを用いたポリオキシメチレン樹脂の表面形状・色計測による質感評価 最終原稿.pdf

    DOI: 10.1541/ieejsmas.138.250

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  • Electrode-separated quartz crystal microbalance for smart-sensor mounting application Reviewed

    Jun Sakaguchi, Masayuki Sohgawa, Takashi Abe

    Sensors and Materials   30 ( 5 )   1073 - 1080   2018

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    Quartz crystal microbalances (QCMs) have found applications as popular chemical and biological sensing tools. However, their current device geometry prevents their commercialization for industrial use. In this study, we propose a new disposable QCM sensor with an electrode only on the sensing side, making it suitable for sensor mounting. In this sensor system, the excitation electrode is positioned on a glass plate separate from the QCM. Such electrode configurations are suitable for sensor applications in flow cell systems in preference to common QCM systems because QCM mounting on the flow cell and the electrical interconnections between the QCM and the oscillation circuit are simple. The optimized configurations of the electrode diameter, separation distance, and orientation relative to the crystallographic x-axis of the plate are revealed for the first time. The proposed QCM can be applied to realize a disposable QCM-based biochip or hazardous gas sensor located inside a flow tube.

    DOI: 10.18494/SAM.2018.1712

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  • Development of dual channel type contactless liquid sensor using a quartz oscillator circuit Reviewed

    Naoto Yada, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   138 ( 2 )   37 - 40   2018

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    In this paper, we developed a contactless monitoring technique of liquid for measuring the concentration of liquid. This sensor is composed of dual sensing capacitors and quartz oscillation circuits. We succeeded in measuring dielectric and conductivity change at the same time by using dual frequency. Therefore, it can measure liquid tailored to its physicochemical properties with wide frequency range. In this study, we succeeded in monitoring change of concentration of cutting oil. The proposed sensor can be expected to be used for liquid monitoring.

    DOI: 10.1541/ieejsmas.138.37

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  • Surface texture characterization using optical and tactile combined sensor Reviewed

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    Sensors and Materials   30 ( 5 )   1091 - 1101   2018

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    Measurements of the surface texture of objects, including optical and tactile features, using a multimodal micro-electromechanical systems (MEMS) sensor are reported in this paper. The proposed MEMS sensor has two functions in its structure: light sensitivity of the MOS structure in the Si substrate and force sensitivity of the strain resistance gauge on microcantilevers embedded in the elastomer. Deflection of the cantilever, induced by an applied force, can be detected as a DC resistance change of the strain gauge film, which depends on the tactile texture including hardness, thickness, and surface roughness of the object. On the other hand, reflected light from the object, detected as AC impedance change at 5 MHz, depends on the color of the object. It is confirmed that the resistance and impedance changes correlate with the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that the surface texture of the object, including optical and tactile features, can be characterized using a single MEMS sensor.

    File: SS-1786-accepted.pdf

    DOI: 10.18494/SAM.2018.1786

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  • Development of artificial haptic model for human tactile sense using machine learning Reviewed

    Hikaru Shimoe, Kohei Matsumura, Haruo Noma, Masayuki Sohgawa, Masanori Okuyama

    Proceedings of IEEE Sensors   2017-   1 - 3   2017.12

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    Recent studies have proposed a model using the supervised neural-network (NN) as the haptic model. However, this model has the problem in expressing human tactile sense. Therefore, we constructed a haptic stage model based on the model of human-tactile sense and cognitive process. Our NN-based model consists of supervised and unsupervised stages. Using surface-scanning results from our trial micro-tactile sensor, we confirmed the material-identification problem with our model. A conventional full conventional NN(CNN) model achieved a 98.0% correct identification rate for 28 materials
    our model achieved a rate of 67.2%. Our model employed typically is deepening because we used the convolutional process in all layers, therefore, we consider that our learning result lost local features on each material, and then identification rate was declined as result.

    DOI: 10.1109/ICSENS.2017.8234173

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  • Deep reactive ion etching technique involving use of 3D self-heated cathode Reviewed

    Gang Han, Yuki Murata, Daiki Ohkawa, Masayuki Sohgawa, Takashi Abe

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   1281 - 1284   2017.7

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    In this study, a thermally assisted reactive-ion etching (TRIE) technique using a 3D self-heated stage as the etching stage in a conventional reactive-ion etcher was developed and applied to a large size wafer. The 3D stage was designed based on simulation results and its heating characteristics on application of RF power were evaluated. Results indicated that the temperature of the etching stage increased rapidly to 350 °C, but maintained a distribution of ≤ 4 °C. Its application to various minor metals (Ti, Ti 6Al-4V, Ta, Nb, and Mo) was investigated. The resultant etch rates substantially increased with the use of the 3D self-heated cathode in a conventional reactive-ion etcher.

    DOI: 10.1109/TRANSDUCERS.2017.7994289

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  • Gripping control of delicate and flexible object by electromotive manipulator with proximity and tactile combo MEMS sensor Reviewed

    Ryoma Araki, Fumitoshi Suga, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   1140 - 1143   2017.7

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    In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed MEMS sensor to skillful gripping of various objects. This MEMS sensor is responsive to light with the photoconductive effect in Si and force with resistance change in the strain gauge layer on microcantilever structures, as a result, the sensor can detect both proximity and contact. In addition, since the cantilevers are located three-fold symmetry, the direction of applied force can also be detected. It is demonstrated that the proposed manipulator system with the developed sensor can grip not only rigid bodies but also gripping flexible objects.

    DOI: 10.1109/TRANSDUCERS.2017.7994254

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  • Texture measurement for fabrics including warm/cool and fluffiness sensation by multimodal MEMS sensor Reviewed

    Fumiya Sato, Takashi Shiwa, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems   343 - 346   2017.7

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    In this paper, we report that texture measurement of warm/cool and fluffiness sensations of various fabrics has been carried out by a multimodal MEMS sensor. This MEMS sensor can detect force as resistance change of strain gauge on micro-cantilever and light as impedance change of Si layer by the photoconductive effect, respectively. The sensor can also detect a temperature drop by heat transfer from the sensor to the contact object as resistance change of the strain gauge and impedance change of Si. It is demonstrated that warm/cool and fluffiness sensations of fabrics can be evaluated by the measured results of the proposed MEMS sensor depending on temperature drop and contact force.

    File: PID4721655.pdf

    DOI: 10.1109/TRANSDUCERS.2017.7994058

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  • Fabrication of a true-Gaussian-shaped quartz crystal resonator Reviewed

    Hiroki Kutsuwada, Sho Watanabe, Masayuki Sohgawa, Takashi Abe

    SENSORS AND ACTUATORS A-PHYSICAL   260   58 - 61   2017.6

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    In this paper, a simple fabrication method for a Gaussian-shaped quartz crystal resonator was developed based on the surface tension of the photoresist. First, the photoresist profile on a quartz wafer was changed to a lens shape by the photoresist reflow. By changing the viscocity of the photoresist with propylene glycol monomethyl ether acetate, the photoresist profile on the quartz wafer was adjusted to create a Gaussian shape. Finally, the Gaussian-shaped QCR was fabricated by transferring the shape onto the quartz wafer using a reactive ion etching. (C) 2017 Elsevier B.V. All rights reserved.

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  • A Cantilever-based Biosensor for Real-time Monitoring of Interactions between Amyloid-(1-40) and Membranes Comprised of Phosphatidylcholine Lipids with Different Hydrophobic Acyl Chains Reviewed

    Ziyang Zhang, Yuki Murakami, Tomoya Taniguchi, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

    ELECTROANALYSIS   29 ( 3 )   722 - 729   2017.3

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    Accumulating evidence suggests that interaction between amyloid- (A) and cell membrane is crucial to the pathogenesis of Alzheimer's disease (AD), and thus an increasing understanding of the impact of membrane composition on A-membrane interaction becomes essential for the mechanism elucidation of A-membrane interaction and the early diagnosis of AD. In this work, electrically neutral phosphatidylcholine (PC) as the most major class of membrane phospholipids, including 1,2-dipalmitoyl-sn-glycero-3-phosphocholine (DPPC), 1,2-distearoyl-sn-glycero-3-phosphocholine (DSPC), 1-palmitoyl-2-oleoyl-sn-glycero-3-phosphocholine (POPC), and A(1-40) as the most common amyloid protein were selected as the research subjects, and a developed cantilever-based biosensor, on which liposomes comprised of PC lipids were immobilized, was applied to characterize in real time the interactions between A(1-40) and membranes comprised of PC lipids with different hydrophobic acyl chains, and to evaluate the effect of cholesterol incorporated in membrane on A-membrane interaction during the whole process of A(1-40) fibrillization. The results illustrate that the interaction between A(1-40) and PC membrane can be divided into three stages, which are related to the change in molecular states of A. More importantly, it is found that membranes comprised of PC lipids with shorter saturated acyl chains show higher interaction ability with A(1-40), and the incorporation of cholesterol into PC bilayer can remarkably accelerate and strengthen A(1-40)-membrane interaction. These results confirm that hydrophobicity is the main driving force for the interactions between A(1-40) and PC membranes. In return, the above results enlightened us to apply the current micro-cantilever immobilized with cholesterol-containing DPPC liposomes to challenge the detection of low-concentration A(1-40). This time 50-nM A(1-40) in aqueous solution has been effectively detected, suggesting that this proposed detection technique would contribute to A detection and early diagnosis of AD in the future.

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  • Deposition and characterization of Al2O3 and BiFeO3 thin films on titanium substrates for tough MEMS devices Reviewed

    Takeshi Kohno, Masato Mihara, Ataru Tanabe, Takashi Abe, Masanori Okuyama, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   137 ( 1 )   46 - 47   2017

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    Insulator and piezoelectric thin films were deposited on titanium substrate, and characterized for application in tough MEMS tactile sensors. The titanium substrate was polished by buffing before the deposition of the thin films. An Al2O3 thin film was deposited as an insulator and showed good insulation characteristics on the polished titanium substrate. Piezoelectric BiFeO3 thin films were prepared by RF sputtering. The XRD pattern of the BiFeO3 thin film on the titanium substrate shows the presence of the ferroelectric phase. The polarization-electric field curve also shows a ferroelectric hysteresis loop. The results show that insulator and piezoelectric thin film can be formed on titanium substrate.

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  • Measurement techniques with frequency-modulated probe light for proximity and tactile combo sensor Reviewed

    Nao Umeki, Akito Nozawa, Masanori Okuyama, Haruo Noma, Takashi Abe, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   137 ( 5 )   146 - 150   2017

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    We have developed a single sensor which can detect proximity and multi-axial touch force for smart-manipulation control of delicate objects. In this work, a measurement technique with modulated probe light to reduce of the environmental noise for proximity sensing has been reported. The white LED as probe light was switched at 150 Hz. Although the sensor output includes environmental noise from power source and room light, it is demonstrated that the proximity distance can be distinguished as amplitude of frequency component at 150 Hz.

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    DOI: 10.1541/ieejsmas.137.146

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  • Electromotive manipulator control by detection of proximity, contact and slipping using MEMS multi-axial tactile sensor Reviewed

    Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   137 ( 7 )   212 - 217   2017

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    In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed single element MEMS sensor which can detect proximity, contact, and slipping to skillful gripping of the object. This MEMS sensor can detect proximity as impedance change of Si substrate by reflected light from the object due to the photoconductive effect. In addition, both normal and shear load can be also detected as resistance change of strain gauge on cantilevers located three-fold symmetry and embedded in PDMS. By attaching the sensor on the electromotive manipulator, accurate control of gripping force was enabled by feedback of the sensor output.

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  • Thermal Reactive Ion Etching of Minor Metals with SF6 Plasma Reviewed

    Gang Han, Yuki Murata, Yuto Minami, Masayuki Sohgawa, Takashi Abe

    SENSORS AND MATERIALS   29 ( 3 )   217 - 223   2017

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    In this study, thermally assisted reactive ion etching (TRIE) was evaluated by both experiments and simulations. TRIE employs a self-heated stage instead of the etching stage of a regular RIE apparatus. The self-heated stage was designed on the base of the simulation results, and its heating characteristics upon the application of radio frequency (RF) power were evaluated. The temperature of the stage increases rapidly within 10 min because of the low thermal capacitance of the stage. An etch rate of 0.6 mu m/min and an etch selectivity of about 30 were achieved for titanium etching with SF6 plasma. In addition, we also investigated the application of TRIE for various kinds of minor metals (Mo, Ta, Nb, and Ti alloy) for the first time and achieved higher etch rates and etch selectivities than those of regular reactive ion etching (RIE).

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  • Texture Characterization Including Warm/Cool Sensation Using Force-, Light-, and Temperature-Sensitive Micro-electromechanical Systems Sensor Reviewed

    Fumiya Sato, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    SENSORS AND MATERIALS   29 ( 3 )   311 - 321   2017

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    In this paper, we report on texture measurements for an object, including tactile, warm/cool, and light sensations using a multimodal micro-electromechanical systems (MEMS) sensor. This MEMS sensor can detect force as a resistance change of the strain gauge on a microcantilever and light as an impedance change of a Si layer by a photoconductive effect. The sensor, which was maintained near human body temperature using a heater, can also detect a temperature drop after heat transfer from the sensor to a contacted object as a resistance change of the strain gauge or an impedance change of the Si layer. In this work, three different materials (copper, acrylic, and wood) were chosen as the target objects for the measurement of surface texture, and they were characterized on the basis of the differences in sensor outputs in active sensing experiments (approaching and pressing of the sensor with a probe light) on the sensor surface. In the proximity process, the impedance change of the Si layer depends on the surface reflectivity of the objects. After the object is touched by the sensor surface, the impedance of the Si layer and the resistance of the strain gauge of the sensor increase with the change in temperature caused by heat transfer. Furthermore, the resistance of the strain gauge decreases with the deformation of the cantilever caused by the pressing force from each object. Therefore, it is demonstrated that surface texture including the mechanical, optical, and thermal characteristics of various materials can be evaluated by active sensing using the proposed MEMS multimodal sensor.

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  • Evaluation of the heating characteristics of miniature QCR-based thermogravimetric sensor in vacuum Reviewed

    Ryosuke Wada, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   137 ( 7 )   180 - 184   2017

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    In this paper, we proposed a miniature thermogravimetric analysis sensor by using quartz crystal microbalance. We optimized the heating electrode shape of the microheater-integrated QCM for measuring a component of the soil on Mars and physically adsorbed water content in the Martian dust. Then, we evaluated the heating properties of the QCM in vacuum environment. As a result, the temperature of the electrode heated up to 300°C. We found out the optimized QCM showed low power consumption and had superior heating properties.

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  • Development of self-heated stage suitable for thermal assist reactive ion etching of the functional metals Reviewed

    Yuki Murata, Gang Han, Daiki Ohkawa, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   137 ( 9 )   262 - 266   2017

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    This paper describes development of self-heated stage suitable for thermal reactive ion etching (TRIE) of the functional metals. Thermal reactive ion etching was evaluated using both experiments and simulations for etching functional metals. The self-heated stage was designed based on the simulation results. TRIE employs a self-heated stage which is thermally insulated aluminum plate as the etching stage of a regular RIE apparatus. The stage temperature increases rapidly within 10 min and etch rate is not depend on process time. TRIE technique was used to etch various kinds of functional metals: Ti, Mo, Ta, Nb, and Ti alloy (Ti-6Al-4V). It did improve the etching rate of these materials greatly.

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  • Output Characterization of Proximity and Tactile Combination MEMS Sensor for Gripping Control of Flexible Object

    SUGA Fumitoshi, ARAKI Ryoma, ABE Takashi, NOMA Haruo, SOHGAWA Masayuki

    The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)   2017   1A1 - N02   2017

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    <p>In this Paper, we report output characterization of the proximity and tactile combination MEMS sensor for controlling manipulation of flexible objects. This sensor can detect proximity by the internal photoelectric effect in Si substrate and normal and shear loads as tactile information are detectable by deflection of cantilevers, which are fabricated on the substrate surface and embedded in the silicone elastomer. The proximity and tactile outputs from this sensor attached on the electromotive actuator depend on distance to the target object and normal load applied by gripping the object, respectively. Furthermore, sensor output with shear load applied by weight of gripped flexible object is measured and the improved control method for stable gripping control of flexible objects is discussed.</p>

    DOI: 10.1299/jsmermd.2017.1A1-N02

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  • Development of Wirelessly Excited Multi-Channel QCM Sensor for Odor Sensor Applications

    SATO Ikuto, SAKAGUTI Jun, SOHGAWA Masayuki, ABE Takashi

    The Proceedings of JSME annual Conference on Robotics and Mechatronics (Robomec)   2017   1A1 - K11   2017

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    <p>This paper reports the development of wirelessly excited multi-channel QCM sensor for odor sensor applications. In this sensor, the excitation electrodes are positioned on a glass plate separate from the QCM. Such electrode configurations are suitable for odor sensor applications because the electrical interconnections between the QCM and the oscillation circuit are simple. We evaluated the dependence of the resonance frequency on the crystallographic orientation. We found out two vibrational modes that depends on each modulus of elasticity and the frequency responses of each mode are linear for mass loading.</p>

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  • Real-time characterization of fibrillization process of amyloid-beta on phospholipid membrane using a new label-free detection technique based on a cantilever-based liposome biosensor. Reviewed

    Z. Zhang, M. Sohgawa, K. Yamashita, M. Noda

    SENSORS AND ACTUATORS B-CHEMICAL   236   893 - 899   2016.11

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    The dynamic behavior of amyloid-beta protein (A beta) fibrillization on cell membrane is closely related to the progression of Alzheimers disease (AD). In this paper, we reports a new approach for real-time monitoring of the fibrillization process of A beta on lipid membrane using a miniaturized cantilever-based liposome biosensor, which contributes to the technology development of A beta label-free detection and the mechanism elucidation of A beta fibrillization on cell membrane. 1,2-Dipalmitoyl-sn-glycero-3-phosphocholine (DPPC) liposome as model cell membrane was immobilized on the cantilever surface and A beta(140) was selected as a target protein in this work. Liposome-A beta interaction is evaluated by detecting the resistance change rate of the strain gauge embedded in the cantilever, which is directly proportional to the deflection of cantilever. 24-h real-time monitoring result clearly shows chronological change in the resistance with the progress of A beta fibrillization on liposomes. Moreover, it is found that the extent of liposome-A beta interaction is closely dependent on the aggregate state and concentration of A beta but is less dependent on the type of used solvent (water or serum). It is indicated that DPPC liposome shows sufficient affinity and selectivity to A beta even in serum. In particular, a concentration of A beta as low as 1 mu M can be detected using the cantilever-based liposome biosensor. Furthermore, it is confirmed that this biosensor has a potential of recognizing different states of A beta. We expect that the cantilever-based liposome biosensor becomes an effective tool for accelerating amyloid related research and developing the early diagnosis approach of AD. (C) 2016 Elsevier B.V. All rights reserved.

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  • Multifunctional tactile sensors using MEMS cantilevers Reviewed

    Masayuki Sohgawa

    2014 IEEE International Nanoelectronics Conference, INEC 2014   2016.4

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    A multifunctional tactile sensor which can detect approximation, contact, slipping, and surface texture of the target has been developed. The sensor is composed of multiple MEMS cantilevers fabricated on Si substrate embedded in PDMS, and can detect normal and shear forces. By indenting and sliding the sensor on the object surface, output depending on hardness, friction, and roughness, etc. can be obtained. Moreover, a function for detection of proximity was integrated monolithically through photo-sensitivity of Si substrate.

    File: INEC2014sohgawa-final.pdf

    DOI: 10.1109/INEC.2014.7460417

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  • A Micromechanical Cantilever-Based Liposome Biosensor for Characterization of Protein-Membrane Interaction Reviewed

    Z. Zhang, M. Sohgawa, K. Yamashita, M. Noda

    ELECTROANALYSIS   28 ( 3 )   620 - 625   2016.3

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    We have newly evaluated the interaction of lipid membrane with two different proteins of lysozyme and carbonic anhydrase from bovine (CAB) using a micro cantilever-based liposome biosensor with a new droplet-sealing structure. Herein 1,2-dipalmitoyl-sn-glycero-3-phosphocholine (DPPC) liposomes are used as model lipid membrane and are immobilized on the surface of cantilever. The interaction of DPPC liposome with the target protein causes deflection of the micro-cantilever, which can stably be detected by measuring the resistance change of the strain gauge. The resistance change dependent on time is used to evaluate the characteristic of liposome-protein interaction. The resistance of the cantilever-based biosensor increases monotonously with time in both of the two protein solutions. Especially, chronological resistance change depends markedly on both the concentration and species of target proteins. Finally, these results lead us to conclude that the cantilever-based liposome biosensor with the droplet-sealing structure facilitates the characterization of protein-membrane interaction. It also means that this biosensor is a promising candidate device for label-free detection of concentration and species of different target proteins.

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  • Shape optimization of combo sensor using quartz crystal resonator for liquid analysis Reviewed

    Ryo Sakai, Hiroaki Imai, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   136 ( 8 )   343 - 347   2016

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    In this paper, we report the optimized combo sensor using quartz crystal resonator for analyzing the physicochemical properties of liquids. This sensor can measure the mechanical properties and the electrical properties simultaneously by integrating a LFE (Lateral Field Excited) sensor with an ACR (Antiparallel Coupled Resonator) or two types of ACR sensor on a same substrate. We optimized the electrode diameter of resonator for measuring a glucose aqueous solution or NaCl aqueous solution. Moreover, we measured concentration of glucose aqueous solution and NaCl aqueous solution with optimized sensor. This sensor is expected to be used for product quality control in industrial plants.

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  • Evaluation Method of Fabrics by Visual and Tactile Texture Information using MEMS Combo Sensor Reviewed

    Kenta Takahashi, Takashi Abe, Masayuki Sohgawa, Masanori Okuyama, Haruo Noma

    2016 IEEE SENSORS   655 - 657   2016

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    In this paper, we report texture measurement of the fabrics by a multimodal MEMS sensor. This sensor has sensitivity to both multi-axial force vector and light. Therefore, we can evaluate tactile texture by force measurement and visual texture by light measurement. This sensor has a possibility for texture measurement with both visual and tactile information in substitution for the human sensory test. In this work, various fabrics were chosen as the target object and evaluated by sensory test method using 10 test subjects. The dependences of the sensor output on reflection of probe light, reactive force, and frictional force by active approaching and touching of the sensor to the object surface were also evaluated. As a result, it is demonstrated that there is a good correlation between the results of the human sensory test and features of visual and tactile sensor output.

    File: Evaluation Method of Fabrics by Visual and Tactile Texture Information using MEMS Combo Sensor 最終版.pdf

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  • A Highly Sensitive Amyloid-beta Detection by Cantilever Microsensor Immobilized with Liposome with Incorporated Cholesterol and Phosphatidylcholine Lipid with Short Hydrophobic Acyl Chains Reviewed

    Y. Murakami, T. Taniguchi, Z. Zhang, K. Yamashita, M. Noda, M. Sohgawa

    2016 IEEE SENSORS   211 - 213   2016

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    We improved the sensitivity of NiCr strain gauge cantilever immobilized with liposome to detect A beta protein with low concentration. In this work, by immobilizing liposome incorporated cholesterol on cantilever, we could detect 50-nM A beta(1-40). Also, to investigate whether the hydrophobic carbon number of acyl chains of hydrophobic group influences A beta-membrane interaction, DMPC, DPPC, and DSPC liposomes were immobilized, respectively, on the cantilever surface. The results show that DMPC-A beta interaction is much larger than DPPC-A beta and DSPC-A beta interactions. We expect that the cantilever microsensor can apply to detect the A beta(1-40) protein in patients of Alzheimer's disease (AD) and also Mild Cognitive Impairment (MCI).

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  • Contactless Liquid Sensing Technique Using a Quartz Oscillator Reviewed

    Tsubasa Susa, Takeru Watanabe, Masayuki Sohgawa, Takashi Abe

    SENSORS AND MATERIALS   28 ( 4 )   289 - 294   2016

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    In this paper, a contactless sensor for the measurement of liquid concentration using a quartz oscillator is reported. An out-of-plane electric field distribution from a planar sensing capacitor (SC) is used for the noncontact sensor measurement of liquid concentration on a spacer. This sensor measures the changes in the capacitance of the SC by the changes in the frequency of the quartz oscillator. Because the capacitance is dependent on the relative permittivity and conductivity of the liquid sample on the spacer, it is pOssible to measure the concentration of the sample. The response is very stable because, in this sensor, the SC is incorporated into the quartz oscillator. Because the SC is in contact with the liquid sample instead of the quartz crystal resonator, the sensor has a high quality factor (approximately 30000). Moreover, this sensor can be used with a general integrated circuit (IC) and an electronic component at a low cost. The sensor is used for the noncontact measurements of liquid concentration.

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  • MASS SENSITIVITY AMPLIFICATION BY USING GAUSSIAN-SHAPED QUARTZ CRYSTAL RESONATOR Reviewed

    H. Kutsuwada, S. Watanabe, M. Sohgawa, T. Abe

    2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   1022 - 1025   2016

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    This paper reports mass sensitivity amplification in a Gaussian-shaped quartz crystal resonator (Gaussian-shaped QCR). To achieve amplification, a fabrication process for a Gaussian-shaped (not quasi-Gaussian) QCR was developed using photolithographic methods. Sensitivity amplification in the QCR was observed at the central portion. The mass response was three times higher than the theoretical value for gravimetric measurements of thin, uniform films. The optimized height of the shape, evaluated based on the Q factor, is higher than that of the convex shape. This resonator is expected to be applicable to mass measurement of various micro/nanoparticles.

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  • Development of liquid concentration sensor based on crystal oscillator circuit for measuring microdroplet Reviewed

    Yuta Yanagita, Tsubasa Susa, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   136 ( 7 )   319 - 322   2016

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    In this paper, the liquid concentration sensor using crystal oscillator circuit which is available for measuring microdroplet is reported. We optimized the design of the sensing capacitor (SC) for sensing microdroplet. An electric-field-concentrated SC was used for measuring the liquid. The SC incorporated into the quartz oscillator has high-sensitivity because of the high stable crystal oscillator circuit. The SC is embedded in a silicone rubber. A spatially confined electric field is generated over the rubber. Therefore, the frequency of the oscillator changes by the contact with a liquid to the rubber. Moreover, the change less affected by a quantity of liquid. Because the frequency changes relate to the electrical characteristics of the liquid, the concentration of the liquid can be measured by the sensor. This sensor is expected to be applied to factory automation.

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  • Detection of Amyloid Beta Fibril Growth by Liposome-Immobilized Micro-Cantilever With NiCr Thin-Film Strain Gauge Reviewed

    Masayuki Sohgawa, Ziyang Zhang, Toshio Akai, Keisuke Takada, Kaoru Yamashita, Minoru Noda

    IEEE SENSORS JOURNAL   15 ( 12 )   7135 - 7141   2015.12

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    A micro-cantilever with thermally stable strain gauge of a NiCr thin film and a self-assembled monolayer was fabricated by surface micromachining. Liposomes, as biosensing molecules, were immobilized on its surface. To prevent evaporation of the water solvent, a reservoir made of polydimethylsiloxane around the micro-cantilever was fabricated and covered with a glass plate. The resistance of the strain gauge increases with time in the amyloid beta (A beta) solution, because the cantilever is bent downward caused by interaction between A beta and liposomes immobilized on the micro-cantilever surface. Moreover, resistance change depends on the interaction ability of A beta proteins with liposomes. It is therefore indicated that the fabricated static mode micro-cantilever sensor with immobilized liposomes can be used to detect A beta proteins.

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  • Non-contact sensor for measurement of liquid concentration based on quartz oscillator Reviewed

    Tsubasa Susa, Takeru Watanabe, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   135 ( 6 )   210 - 213   2015.6

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    In this paper, we report the non-contact sensor for measurement of liquid concentration based on quartz oscillator. The non-contact sensing can be realized by using a leaked electric field of a planer sensing capacitor for sensing liquid on a spacer. This sensor measures capacitance changes of the sensing capacitor (SC) as frequency changes of the quartz oscillator. Since the capacitance is dependent on relative permittivity or conductivity of liquid on the spacer, it is possible to measure the concentration of them. The response is very stable because this sensor is incorporated the SC into the quartz oscillator. Because the SC is in contact with the sensing liquid instead of the quartz crystal resonator, the proposed sensor has a high quality factor (about 30,000). Moreover, this sensor can be used with general IC and electronic component, which takes low cost. The proposed sensor is expected to use for non-contact measurements of liquid concentration.

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  • Tactile sensor using micro-cantilever with BiFeO&lt;inf&gt;3&lt;/inf&gt; piezoelectric film Reviewed

    Masato Mihara, Akito Nozawa, Takashi Abe, Masanori Okuyama, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   135 ( 5 )   158 - 164   2015.5

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    We have developed the tactile sensor using micro-cantilevers embedded in the elastomer which can measure both the normal and shear forces by piezoresistance. In this work, a piezoelectric tactile sensor using micro-cantilevers embedded in the elastomer has been proposed and fabricated for realizing lower power consumption than the conventional sensor using piezoresistor. The BiFeO&lt
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    /inf&gt
    thin film (thickness: 400 nm) deposited by rf sputtering at substrate temperature of 520°C and gas pressure of 0.6 Pa has a good piezoelectric property because output voltage of 300 mV is obtained for strain induced by vibration of the cantilever. Therefore, it is demonstrated that the BiFeO&lt
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    /inf&gt
    can be used to detect the micro-cantilever deflection by external force applied on the tactile sensor.

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  • Thermal reactive ion etching technique involving use of self-heated cathode Reviewed

    S. Yamada, Y. Minami, M. Sohgawa, T. Abe

    REVIEW OF SCIENTIFIC INSTRUMENTS   86 ( 4 )   2015.4

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    In this work, the thermal reactive ion etching (TRIE) technique for etching hard-to-etch materials is presented. The TRIE technique employs a self-heated cathode and a thermally insulated aluminum plate is placed on the cathode of a regular reactive ion etching (RIE) system. By optimizing the beam size to support the sample stage, the temperature of the stage can be increased to a desired temperature without a cathode heater. The technique was used to etch a bulk titanium plate. An etch rate of 0.6 mu m/min and an etch selectivity to nickel of 100 were achieved with SF6 plasma. The proposed technique makes a regular RIE system a more powerful etcher without the use of chlorine gas, a cathode heater, and an inductively coupled plasma source. (C) 2015 AIP Publishing LLC.

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  • Microheater-integrated quartz crystal microbalance array for thermal desorption spectroscopy Reviewed

    Jumpei Sakai, Masayuki Sohgawa, Naoyuki Iida, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   135 ( 3 )   112 - 113   2015.3

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    In this work, we present a new design involving a microheater-integrated quartz crystal microbalance (QCM) array for thermal desorption spectroscopy. Each QCM consists of two electrodes to excite thickness-shear-mode (TSM) vibrations on the crystal back side and one microheater to increase the temperature on the crystal front side. The resonance frequency was stable when a voltage was applied to the microheater. Carbon microparticles were coated on one of the QCMs for gas adsorption, and its frequency change during the temperature increase was calculated by subtracting the frequency change of an untreated QCM. The proposed QCM array was employed to separate ethanol from methanol. The separation was successful, as confirmed via thermal desorption spectra calculated by differentiating the resonance frequency change with respect to time.

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  • NON-CONTACT SENSOR FOR MEASUREMENT OF LIQUID CONCENTRATION BASED ON QUARTZ OSCILLATOR Reviewed

    T. Susa, T. Watanabe, M. Sohgawa, T. Abe

    2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)   1472 - 1475   2015

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    In this paper, a noncontact sensor for the measurement of liquid concentration using a quartz oscillator is reported. An out-of-plane electric field with a planer sensing capacitor (SC) is used for sensing a liquid on a spacer. This sensor measures the changes in the capacitance of the SC as the changes in the frequency of the quartz oscillator. The capacitance is dependent on the relative permittivity and the conductivity of the liquid sample on the spacer. Therefore, it is possible to measure the concentration of the sample. The response is very stable because in this sensor, the SC is incorporated into the quartz oscillator. Because the quartz crystal resonator is not contact with liquid, the proposed sensor has a high quality factor (approximately 30,000). Moreover, this sensor can be used with a general IC and an electronic component, with a low cost. The proposed sensor can be expected to be used for various kinds of liquid sensing applications.

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  • Characterization of BiFeO3 Thin Film for Tactile Sensor Using Microcantilevers with Piezoelectric Capacitor and Strain-Gauge Reviewed

    Takeshi Kohno, Takashi Abe, Masayuki Sohgawa, Masanori Okuyama, Haruo Noma

    2015 IEEE SENSORS   1192 - 1195   2015

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    Lead-free BiFeO3 thin films for tactile sensor using microcantilevers have been prepared on Pt and SrRuO3/Pt thin films on a SiO2 /Si substrate by RF sputtering, and the electrical characteristics have been optimized by controlling the substrate temperature, gas pressure, and oxygen partial pressure in deposition process. The BiFeO3 thin film (thickness: 300 nm) deposited on SrRuO3 (thickness: 80 nm) deposited at substrate temperature of 500 degrees C in gas pressure of 0.6 Pa and oxygen partial pressure of 0.24 Pa has good crystallinity, ferroelectricity, and piezoelectric property. Therefore, it is demonstrated that BiFeO3 thin film can be a good sensing material as a detection part of tactile sensor. Furthermore, a cantilever structure with piezoelectric capacitor and strain gauge has been fabricated and different time-dependent outputs from them can be obtained.

    File: IEEE-paper-final-sohgawaconverttoPDF.pdf

    DOI: 10.1109/ICSENS.2015.7370483

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  • Basic Study for Tactile and Visual Texture Measurement by Multimodal MEMS Sensor with Force and Light Sensitivity Reviewed

    Kenta Takahashi, Takashi Abe, Masayuki Sohgawa, Masanori Okuyama, Haruo Noma

    2015 IEEE SENSORS   699 - 702   2015

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    The tactile and visual texture measurement by multimodal MEMS sensor is reported. This MEMS sensor has two function in a structure: force-sensitivity of resistance of microcantilevers embedded in the elastomer and light-sensitivity of a MOS structure on the Si substrate. Deflection of the cantilever induced by applied force depends on the tactile texture including hardness, thickness, and roughness of the object, and is detected as DC resistance change of the strain gauge film. On the other hand, incident light depends on the visual texture of the object, and is detected as AC impedance change at 5 MHz. It is confirmed that the resistance and impedance changes depend on the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that multimodal texture can be characterized by a single MEMS sensor.

    File: PID3845957.pdf

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  • Multimodal measurement of proximity and touch force by light- and strain-sensitive multifunctional MEMS sensor Reviewed

    Masayuki Sohgawa, Akito Nozawa, Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    Proceedings of IEEE Sensors   2014- ( December )   1749 - 1752   2014.12

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    A multimodal sensor with Si micro-cantilever embedded in PDMS elastomer for measurement of proximity and touch forces has been fabricated and characterized. DC resistance of the strain gauge on the cantilever changes in proportion to the indentation depth of the object. On the other hand, the AC (&gt
    0:5 MHz) impedance including photo-sensitive component of Si increases with increase of distance between the sensor surface and the object because of decrease of light intensity reflected on the object surface. Moreover, the AC impedance is different between grounding and floating of the proximate object because of difference of distribution of electrostatic field between electrodes, so that it is suggested that proximity can be detected as the impedance change by light as well as the electric field.

    File: PID3327207.pdf

    DOI: 10.1109/ICSENS.2014.6985362

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  • Texture measurement and identification of object surface by MEMS tactile sensor Reviewed

    Masayuki Sohgawa, Kosuke Watanabe, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    Proceedings of IEEE Sensors   2014- ( December )   1706 - 1709   2014.12

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    The surface texture of various materials has been characterized by tactile sensor with a micro-cantilever embedded in the PDMS elastomer. The maximum output (resistance of strain gauge on the cantilever) change of the sensor by indentation of the object on the sensor surface depends on the hardness or thickness of the object. Moreover, output change is asymmetric in a back-and-forth indentation test because of relaxation of deformation. On the other hand, the output increases rapidly at beginning of stepwise sliding of the sensor at the object surface because of static friction, and changes periodically corresponding to stick-slip oscillation or surface roughness after slipping. It is demonstrated that about 30 materials of papers, clothes, leathers, and plastic sheets, have been classified into 5 clusters by the principal component analysis using feature quantities extracted from the sensor outputs.

    File: PID3327209.pdf

    DOI: 10.1109/ICSENS.2014.6985351

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  • Miniature quartz crystal-resonator-based thermogravimetric detector Reviewed

    N. Sai, Y. Tagawa, M. Sohgawa, T. Abe

    REVIEW OF SCIENTIFIC INSTRUMENTS   85 ( 9 )   095001   2014.9

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    In this work, a new design for a microheater combined with a quartz crystal microbalance (QCM) array for thermogravimetric analysis is presented. Each QCM consists of two electrodes to excite thickness-shear-mode vibrations and one microheater to increase the temperature on the crystal backside. In addition, all the electrode pads are patterned on the crystal backside, making the design of the QCM compact and user-friendly. Finally, the proposed QCM array was employed to separate ethanol from methanol. This was successfully achieved via thermal desorption spectra calculated by differentiating the frequency changes. (C) 2014 AIP Publishing LLC.

    File: Miniature quartz crystal-resonator-based thermogravimetric detector(著者校正).pdf

    DOI: 10.1063/1.4894385

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  • Bioassay of Proteins in Stable Solution State Using a Novel Cantilever-based Liposome Biosensor Reviewed

    Z. Zhang, T. Akai, K. Takada, K. Yamashita, M. Noda, M. Sohgawa

    2014 IEEE SENSORS   317 - 320   2014

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    We have developed a micro-cantilever biosensor with embedded NiCr thin film strain gauge. Meanwhile, DPPC liposomes have been selected as sensing biomolecules to be immobilized on the surface of the micro-cantilever. The liposome-protein interaction was detected by measuring the resistance change rate of the strain gauge. In this work, a PDMS-based sealed reservoir structure was newly fabricated and added on the sensor to keep the target solution stable, where a long-time stable detection was achieved. The resistance of the cantilever-based biosensor increased with time in lysozyme or carbonic anhydrase from bovine (CAB) aqueous solution, and the characteristic of chronological resistance change varied with the concentration and kind of the proteins. It is expected that the micro-cantilever sensor with droplet-sealing structure can be used for bioassay of various proteins in future.

    File: IEEE SENSORS 2014 PROCEEDINGS.pdf

    DOI: 10.1109/ICSENS.2014.6984997

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  • Multifunctional Tactile Sensors using MEMS Cantilevers Reviewed

    Masayuki Sohgawa

    2014 IEEE INTERNATIONAL NANOELECTRONICS CONFERENCE (INEC)   2014

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    A multifunctional tactile sensor which can detect approximation, contact, slipping, and surface texture of the target has been developed. The sensor is composed of multiple MEMS cantilevers fabricated on Si substrate embedded in PDMS, and can detect normal and shear forces. By indenting and sliding the sensor on the object surface, output depending on hardness, friction, and roughness, etc. can be obtained. Moreover, a function for detection of proximity was integrated monolithically through photo-sensitivity of Si substrate.

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  • Active touch sensing by multi-axial force measurement using high-resolution tactile sensor with microcantilevers Reviewed

    Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   134 ( 3 )   58 - 63   2014

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    A tactile sensing system that measures normal and shear (triaxial) forces has been developed, and its characteristics such as linearity and crosstalk have been evaluated. Triaxial forces are estimated from the resistance changes of NiCr thin film strain gauge attached to three microcantilevers. The output voltage of the Wheatstone bridge that comprises a gauge film and three reference resistances is acquired using an A/D converter after amplification. Triaxial forces are calculated from the output voltages of three microcantilevers by simple matrix multiplication. Nonlinearity and crosstalk are less than 4% when the normal force applied is up to 1N and less than 10% when the shear force applied is up to 0.2N. Active touch sensing was demonstrated using an object having a striped profile measuring 0.1mm in height and 1mm in width. © 2014 The Institute of Electrical Engineers of Japan.

    File: IEEJ_Manuscript_proof.pdf

    DOI: 10.1541/ieejsmas.134.58

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  • Micromachining of titanium using a desktop DRIE Reviewed

    Shuji Yamada, Takeshi Hitobo, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   134 ( 4 )   96 - 99   2014

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    In this paper, we report a micromachining of titanium using a desktop DRIE and fabrication of microstructure. We found out high speed exhaust characteristic is indispensable in the etching of titanium, and the etching rate more than 0.2 μm/min (a maximum rate is 0.4 μm/min) was provided in a small amount of etching gas (SF6). As the demonstration of the method, we fabricated microneedles imitating mosquito's proboscis. We revealed that it is available for fabricating precision microstructure. Titanium has excellent mechanical property and corrosion resistance, and it is expected to be used as a material for MEMS. In this method, it is expected to apply to fabricate the three-dimensional structures. © 2014 The Institute of Electrical Engineers of Japan.

    File: 提出稿・デスクトップ型DRIE装置を用いたチタニウム微細加工.pdf

    DOI: 10.1541/ieejsmas.134.96

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  • Proximity and tactile sensing using a single MEMS sensor with photo- and strain sensitivities Reviewed

    Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma, Masayuki Sohgawa

    IEEJ Transactions on Sensors and Micromachines   134 ( 7 )   229 - 234   2014

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    A novel method has been proposed to detect proximity and tactile information using a single MEMS sensor. Tactile information is obtained from DC resistance change of NiCr strain gauge film. In contrast, proximity information is obtained from AC impedance change, which is caused by photo-absorption of Si wafer irradiated by a neighboring LED. Therefore, selection of the information to be acquired is performed by switching the DC and AC measurement system. Experimental results show almost linear tactile output to indentation of 0 to 0.5mm and non-linear proximity output to distance of 0 to 50 mm, respectively. Moreover, the sensor is able to acquire rough shape of a toroidal object by proximity measurement. © 2014 The Institute of Electrical Engineers of Japan.

    File: Sensor-symp_IEEJ_final.pdf

    DOI: 10.1541/ieejsmas.134.229

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  • Numerical calculation and experimental verification of a quartz-crystal-resonator-based methanol concentration sensor Reviewed

    Takeru Watanabe, Shinjiro Toyama, Masayuki Sohgawa, Takashi Abe

    IEEJ Transactions on Sensors and Micromachines   134 ( 7 )   224 - 228   2014

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    In this paper, we report the numerical calculation and experimental verification of a quartz-crystal-resonator-based methanol concentration sensor for fuel cell applications. This sensor is composed of a quartz crystal resonator (QCR) and an interdigital capacitor (IDC). Our sensor can detect a very small capacitance change with a resolution of sub fF. The fabricated sensor can measure a methanol concentration with a resolution of 0.008 wt%. In the present study, we found out optimized sensor design (QCR and IDC) for the substrate thickness and the range of the methanol concentration. By the use of this study, the capacitive sensor with higher resolution can be realized, and it can be expected to apply to various types of capacitive sensors. © 2014 The Institute of Electrical Engineers of Japan.

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  • Fabrication and noise reduction of the miniature tactile sensor using through-silicon-via connection with signal amplifier Reviewed

    Hokuto Yokoyama, Masayuki Sohgawa, Takeshi Kanashima, Teruaki Azuma, Masanori Okuyama, Haruo Noma

    Japanese Journal of Applied Physics   52 ( 6 )   06GL08   2013.6

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    A miniature tactile sensor has been fabricated by connecting stress-sensitive part with an amplifier of integrated circuit through through-silicon-via (TSV) electrically. The sensitive part consists of three warped cantilevers with piezoresistive NiCr thin film which are prepared on a silicon-oninsulator wafer by the surface micromachining technique. The TSV connection can reduce noise of detected change of the piezoresistive output induced by wire between the sensitive part and the amplifier. Fabricated tactile sensor of 5 μ 5mm2 size has linear dependence of the output on both normal and shear forces. The output noise has been successfully decreased by 14 and 34% in the sensor using the TSVs compared with that using wires of 3 and 6mm lengths, respectively. © 2013 The Japan Society of Applied Physics.

    File: MN12071.pdf

    DOI: 10.7567/JJAP.52.06GL08

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  • Repetition rate dependence of ferroelectric properties of polycrystalline BiFeO<inf>3</inf> films prepared by pulsed laser deposition method Reviewed

    Jung Min Park, Seiji Nakashima, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama

    Ferroelectrics   453 ( 1 )   1 - 7   2013.1

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    Polycrystalline BiFeO3 (BFO) films on Pt/TiO2/ SiO2/Si substrate have been prepared by a pulsed laser deposition (PLD) method with various repetition rates. The X-ray diffraction (XRD) pattern observes single-phase perovskite structure with a small secondary phase. While the film-thickness is increased with increasing repetition rates, the grain size increases, and the leakage current reduces. Also, good polarization versus electric field (P-E) hysteresis loops of all polycrystalline BFO films were obtained at room temperature (RT). It is seen that the polarization value (Pr) practically remains almost constant for all the BFO films, and the coercive field (Ec) decreases with increasing the film thickness. © 2013 Copyright Taylor and Francis Group, LLC.

    DOI: 10.1080/00150193.2013.842064

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  • Review of texture measurement of object surface by tactile sensor with inclined micro-cantilevers Reviewed

    Masayuki Sohgawa, Kosuke Watanabe, Takeshi Kanashima, Masanori Okuyama, Haruo Noma, Teruaki Azuma

    IEEJ Transactions on Sensors and Micromachines   133 ( 5 )   147 - 154   2013

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    A measurement method of surface texture of objects using active touching of a tactile sensor which has inclined micro-cantilevers with strain gauge film on Si has been reviewed. The fabricated tactile sensors have an ability of detecting roughness of more than ∼20 μm, and they can detect striped pattern on the Japanese banknote. Various kinds of blank paper which have different properties including hardness, friction coefficient, and surface roughness were identified using output from the fabricated tactile sensor. The feature quantities which depend on paper properties were defined from the resistance change by pushing, moving, and stopping of the sensor. The papers were classified in four clusters by principal component analysis of defined feature quantities. © 2013 The Institute of Electrical Engineers of Japan.

    File: 電気学会論文誌投稿(レビュー)-ver13.pdf

    DOI: 10.1541/ieejsmas.133.147

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  • Design and evaluation of microheater combined QCM array for thermal desorption spectroscopy Reviewed

    J. Sakai, N. Iida, M. Sohgawa, T. Abe

    2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013   234 - 237   2013

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    In this paper, we propose a single microheater combined quartz crystal microbalance array for thermal desorption spectroscopy. The each QCM has two electrodes for exciting thickness shear mode (TSM) vibrations on one side of the crystal and a double-spiral-shape heater on the other side. The resonance frequency is stable when a voltage was applied on the microheater. Carbon microparticles for gas adsorption were coated on one of the QCMs and the frequency change during temperature increase was extracted by subtracting the change of the other QCM. The proposed QCM array can monitor small mass changes at sub-ng level as a function of temperature. © 2013 IEEE.

    DOI: 10.1109/Transducers.2013.6626745

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  • Multi-axial tactile sensor with micro-cantilever embedded in hemispherical elastomer for surface texture measurement Reviewed

    K. Watanabe, M. Sohgawa, T. Kanashima, M. Okuyama, H. Noma, T. Azuma

    2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013   1012 - 1015   2013

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    We have fabricated the multi-axial tactile sensor which has micro-cantilevers with strain gauge film on Si embedded in hemispherical elastomer, and various kinds of papers have been identified by active touch. Transient responses of the resistance change have been obtained when the sensor was pushed and moved on various kinds of blank papers successively. Some features are extracted from the response by a principal component analysis and the papers are classified in several clusters. © 2013 IEEE.

    File: 1274.watanabe.jpn.pdf

    DOI: 10.1109/Transducers.2013.6626941

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  • Detection of Interaction between Biological Proteins and Immobilized Liposomes by a Micro-cantilever with NiCr Thin Film Strain Gauge Reviewed

    Masayuki Sohgawa, Takashi Fujimoto, Keisuke Takada, Kaoru Yamashita, Minoru Noda

    2013 IEEE SENSORS   846 - 849   2013

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    A micro-cantilever with thermally stable strain gauge of a NiCr thin film and a self-assembled monolayer (SAM) was fabricated by surface micromachining and liposomes, as biosensing molecules, were immobilized on its surface. The resistance of the strain gauge increases with time in a biological protein (carbonic anhydrase from bovine: CAB) solution because the cantilever is bent downward by surface adsorption of CAB molecules. On the other hand, the resistance changes differently with the growth of another type protein, amyloid beta (A beta) fibrils. It is therefore demonstrated that the fabricated static mode micro-cantilever sensor can detect the interaction between the liposomes and the biological proteins.

    File: PID2894703.pdf

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  • Force Intensity and Direction Measurement in Real Time Using Miniature Tactile Sensor with Microcantilevers Embedded in PDMS Reviewed

    Hokuto Yokoyama, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    2013 IEEE SENSORS   1090 - 1093   2013

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    Intensity and direction of normal and shear (3-axial) forces have been measured by using a tactile sensor with NiCr strain gauge film on 3 microcantilevers. Output voltage of the Wheatstone bridge which includes a gauge film is measured as digital signal after amplification. 3-axial forces are calculated from the output voltages of 3 microcantilevers every 100 ms. When normal force is applied from 0 to 1 N, the measurement errors of normal and shear forces are less than 50 mN and 10 mN, respectively. When shear force of 0.1 and 0.2 N is applied, the angle error of evaluated direction is less than 10 degrees.

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  • Preparation of epitaxial BiFeO<inf>3</inf> thin films on La-SrTiO<inf>3</inf> substrate by using magnetic-field-assisted pulsed laser deposition Reviewed

    Jung Min Park, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Seiji Nakashima

    Journal of the Korean Physical Society   62 ( 7 )   1041 - 1045   2013

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    Epitaxial BiFeO3 (BFO) thin films have been prepared on La-doped (001) SrTiO3 substrates (La-STO) by using magnetic-field-assisted pulsed laser deposition. X-ray diffraction patterns of the epitaxial BFO thin films prepared under magnetic fields of 0, 0. 1, and 0. 4 T show only (00ℓ) diffraction peaks without secondary phases. From the results of reciprocal space mapping for all epitaxial BFO thin films, (003) reflections show splitting spots, and asymmetric spots of (-103) and (103) reflections exhibit a rhombohedral structure. The microstructure of the epitaxial thin films was modified by the strength of magnetic field, and a columnar structure was shown in the film prepared under a high deposition rate for a magnetic field of 0. 4 T. The polarization versus electric field hysteresis loops were obtained at room temperature (RT) in all the epitaxial films; in particular, the remanent polarization for the epitaxial film prepared under a magnetic field of 0. 1 T was 46 μC/cm2 at RT while the current density was reduced in comparison with those of other epitaxial films. © 2013 The Korean Physical Society.

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  • Identification of Various Kinds of Papers Using Multi-axial Tactile Sensor with Micro-cantilevers

    Kosuke Watanabe, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    2013 WORLD HAPTICS CONFERENCE (WHC)   139 - 144   2013

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    Various kinds of papers have been identified by active touch of a multi-axial tactile sensor which has micro-cantilevers with strain gauge film on Si. When fine surface of the standard surface roughness scale and the printed stripe pattern on a banknote have been scanned by the tactile sensor, it allows to measure such fine roughness as a resistance change of the gauge film, and the triangular unevenness could be obtained down to 20 mu m. Transient responses of the resistance change have been obtained when the sensor was pushed and moved on various kinds of blank papers successively. Some features are extracted from the response by a principal component analysis and the papers are classified in four clusters.

    File: Technical paper.Watanabe(Osaka.Univ.,Jpn).pdf

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  • Tactile sensor array using microcantilever with nickel-chromium alloy thin film of low temperature coefficient of resistance and its application to slippage detection Reviewed

    Masayuki Sohgawa, Daiki Hirashima, Yusuke Moriguchi, Tatsuya Uematsu, Wataru Mito, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    SENSORS AND ACTUATORS A-PHYSICAL   186   32 - 37   2012.10

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    A tactile sensor consisting of microcantilevers has been fabricated using the NiCr-thin-film strain gauge with low noise by surface micromachining and the slippage has been detected by using the fabricated tactile sensor array. The NiCr alloy thin film of Cr: 75 wt% has very low temperature coefficient of resistance (TCR) and is employed to suppress the temperature noise and drift. The fabricated tactile sensor with the NiCr thin film (Cr: 75 wt%) has linear dependencies of the resistance on normal and shear forces, and shows lower noise and temperature drift than that with conventional NiCr (Cr: 20 wt%) film. Normal and shear forces measured by fabricated sensor well coincide with applied forces with errors of 3-3.5 kPa. Moreover, the gripping status of the robotic hand was detected by using fabricated tactile sensor array, and the slipping condition can be judged at the rate of 76.5%. A (C) 2012 Elsevier B.V. All rights reserved.

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  • Ferroelectric and Piezoelectric Properties of Polycrystalline BiFeO3 Thin Films Prepared by Pulsed Laser Deposition under Magnetic Field Reviewed

    Jung Min Park, Seiji Nakashima, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama

    Japanese Journal of Applied Physics   51 ( 9S2 )   09MD05 - 09MD05-4   2012.9

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    Polycrystalline BiFeO3 (BFO) thin films have been prepared on Pt/TiO2/SiO2/Si substrates by using a pulsed laser deposition (PLD) method under a magnetic field. The X-ray diffraction (XRD) pattern shows a single-phase perovskite structure with no secondary phases, and (010) and (020) peaks slightly shift to lower angles in comparison with those of a BFO thin film prepared without a magnetic field. A columnar structure and small grain size were observed and the leakage current is slightly high in comparison with that of a BFO thin film prepared without a magnetic field. A polarization versus electric field (P–E) hysteresis loop was obtained at RT and the polarization at zero electric field is 50 µC/cm2. Ferroelectric domain switching corresponding to up and down polarization states was confirmed. An enhanced piezoelectric coefficient (d33) of about 100 pm/V has been obtained at a certain point. Ferroelectric and piezoelectric properties were affected by a columnar microstructure formed by magnetic field application.

    DOI: 10.1143/JJAP.51.09MD05

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  • Ferroelectric and piezoelectric properties of polycrystalline BiFeO <inf>3</inf> thin films prepared by pulsed laser deposition under magnetic field Reviewed

    Jung Min Park, Seiji Nakashima, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama

    Japanese Journal of Applied Physics   51 ( 9 PART3 )   2012.9

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    Polycrystalline BiFeO 3 (BFO) thin films have been prepared on Pt/TiO 2/SiO 2/Si substrates by using a pulsed laser deposition (PLD) method under a magnetic field. The X-ray diffraction (XRD) pattern shows a single-phase perovskite structure with no secondary phases, and (010) and (020) peaks slightly shift to lower angles in comparison with those of a BFO thin film prepared without a magnetic field. A columnar structure and small grain size were observed and the leakage current is slightly high in comparison with that of a BFO thin film prepared without a magnetic field. A polarization versus electric field (P-E) hysteresis loop was obtained at RT and the polarization at zero electric field is 50 μC/cm 2. Ferroelectric domain switching corresponding to up and down polarization states was confirmed. An enhanced piezoelectric coefficient (d 33) of about 100 pm/V has been obtained at a certain point. Ferroelectric and piezoelectric properties were affected by a columnar microstructure formed by magnetic field application. © 2012 The Japan Society of Applied Physics.

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  • Multi-axial Tactile Sensor for Dynamic Measurement of the Surface Texture with Hemisphere and Cylindrical Elastomer

    Masayuki Sohgawa, Tatsuya Uematsu, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    Technical Meeting on Sensors and Micromachines   2012 ( 8 )   1 - 6   2012.6

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  • Heterogeneous Integration of LSI Amplifier and the Tactile Sensor Using Stacking and through-Si-via Techniques Reviewed

    Masayuki Sohgawa, Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    Material Research Society Symposium Proceedings   1427   2012.4

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    We have developed the tactile sensor using the microcantilevers with strain gauge film which can detect normal and shear forces simultaneously. In this work, the tactile sensor and the IC amplifier have been integrated heterogeneously to shorten the wire length by chip-on-chip stacking and reduce the noise in the output voltage. Standard deviation of the noise can be reduced from 27.6 mV to 3.3 mV by heterogeneous integration of the tactile sensor and the IC amplifier using Au wire bonding. By this heterogeneous integration, the device size and wiring numbers can be reduced, and installation of more sensors is allowed on fingertips of the robot. Moreover, through-silicon-via (TSV) holes were fabricated to mount an IC amplifier on the backside of the sensor chip, instead of using Au wires. Although TSV can be fabricated successfully, resistance to sacrificial etching process is problem. As a result, Si3N4 used instead of SiO2 has improved insulation between TSVs.

    File: proceedings-sohgawa-rev-120530.pdf

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  • Heterogeneous integration of LSI amplifier and the tactile sensor using stacking and through-Si-via techniques Reviewed

    Masayuki Sohgawa, Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    Materials Research Society Symposium Proceedings   1427   14 - 19   2012

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    We have developed the tactile sensor using the microcantilevers with strain gauge film which can detect normal and shear forces simultaneously. In this work, the tactile sensor and the IC amplifier have been integrated heterogeneously to shorten the wire length by chip-on-chip stacking and reduce the noise in the output voltage. Standard deviation of the noise can be reduced from 27.6 mV to 3.3 mV by heterogeneous integration of the tactile sensor and the IC amplifier using Au wire bonding. By this heterogeneous integration, the device size and wiring numbers can be reduced, and installation of more sensors is allowed on fingertips of the robot. Moreover, through-silicon-via (TSV) holes were fabricated to mount an IC amplifier on the backside of the sensor chip, instead of using Au wires. Although TSV can be fabricated successfully, resistance to sacrificial etching process is problem. As a result, Si 3N4 used instead of SiO2 has improved insulation between TSVs. © 2012 Materials Research Society.

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  • Miniature ultrasonic and tactile sensors for dexterous robot

    Masanori Okuyama, Kaoru Yamashita, Minoru Noda, Masayuki Sohgawa, Takeshi Kanashima, Haruo Noma

    Transactions on Electrical and Electronic Materials   13 ( 5 )   215 - 220   2012

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    Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/SiO&lt
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    the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or Si:B piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor. © 2012 KIEEME.

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  • Preparation of BiFe0.9Co0.1O3 Films by Pulsed Laser Deposition under Magnetic Field Reviewed

    Jung Min Park, Fumiya Gotoda, Seiji Nakashima, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama

    Japanese Journal of Applied Physics   50 ( 9S2 )   09NB03   2011.9

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    BiFe0.9Co0.1O3 (BFCO) films have been prepared on Pt/TiO2/SiO2/Si substrates with a magnetic field of 0.4 T by pulsed laser deposition. BFCO films prepared under magnetic field show a single-phase perovskite structure with a little secondary phase, and their (010) and (020) peaks shift to lower angles than those of the film prepared without magnetic field. The BFCO film of about 1 µm thickness shows a columnar structure, although the BFCO film of about 350 nm prepared without magnetic field shows a grain like structure. The leakage current density of the BFCO film prepared under magnetic field is much lower than that of the BFCO film prepared without magnetic field. The saturated P–E hysteresis loops of both BFCO films are obtained at 80 K, and the M–H hysteresis loops of both BFCO films show a weak ferromagnetism behavior at room temperature.

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  • Preparation of BiFe<inf>0.9</inf>Co<inf>0.1</inf>O<inf>3</inf> films by pulsed laser deposition under magnetic field Reviewed

    Jung Min Park, Fumiya Gotoda, Seiji Nakashima, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama

    Japanese Journal of Applied Physics   50 ( 9 PART 3 )   2011.9

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    BiFe0.9Co0.1O3 (BFCO) films have been prepared on Pt/TiO2/SiO2/Si substrates with a magnetic field of 0.4 T by pulsed laser deposition. BFCO films prepared under magnetic field show a single-phase perovskite structure with a little secondary phase, and their (010) and (020) peaks shift to lower angles than those of the film prepared without magnetic field. The BFCO film of about 1 μm thickness shows a columnar structure, although the BFCO film of about 350nm prepared without magnetic field shows a grain like structure. The leakage current density of the BFCO film prepared under magnetic field is much lower than that of the BFCO film prepared without magnetic field. The saturated P-E hysteresis loops of both BFCO films are obtained at 80 K, and the M-H hysteresis loops of both BFCO films show a weak ferromagnetism behavior at room temperature. © 2011 The Japan Society of Applied Physics.

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  • High Resolution Tactile Sensor with Microcantilevers by Redusing TCR of NiCr-Gauge-Thin-Film

    MORIGUCHI Y, HIRASHIMA D, UEMATSU T, SOHGAWA M, KANASHIMA T, OKUYAMA M, NOMA H

    電気学会研究会資料. PHS, フィジカルセンサ研究会   2011 ( 19 )   15 - 19   2011.6

  • Crosstalk reduction of tactile sensor array with projected cylindrical elastomer over sensing element Reviewed

    Masayuki Sohgawa, Tatsuya Uematsu, Wataru Mito, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    Japanese Journal of Applied Physics   50 ( 6 )   06GM08   2011.6

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    A tactile sensor array covered by a projected cylindrical elastomer has been designed and fabricated for crosstalk reduction among sensor elements caused by the lateral deformation of the elastomer. The analysis of elastomer deformation by the finite element method showed that the optimal thickness of the flat elastomer between cylinders and the substrate is 50-100μm, because the sensor structure has not only a low crosstalk but also a high robustness. A tactile sensor array having the flat elastomer of 70 μm thickness has little crosstalk and high robustness. © 2011 The Japan Society of Applied Physics.

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  • Fabrication of a Flexible Array for Tactile Sensors with Microcantilevers and the Measurement of the Distribution of Normal and Shear Forces Reviewed

    Daiki Hirashima, Tatsuya Uematsu, Masayuki Sohgawa, Wataru Mito, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 6 )   2011.6

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    A Tactile sensor system consisting of elements with three microcantilevers embedded in a cylindrical elastomer has been fabricated by micro electromechanical systems (MEMS) technology. These sensor small size (3 x 4 mm(2)) chips are mounted on a flexible sheet, and thus the fabricated sensor array can be set even on a curved surface. In addition, the spacial distribution of normal and shear forces is obtained when two kinds of objects (an acrylic hemisphere and a brass cylinder) come in contact with the fabricated sensor shifted laterally. The distribution results appropriately reflect the surface shape of the object and give the behavior of the forces vector. (c) 2011 The Japan Society of Applied Physics

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  • Fabrication of a flexible array for Tactile sensors with microcantilevers and the measurement of the distribution of normal and shear forces Reviewed

    Daiki Hirashima, Tatsuya Uematsu, Masayuki Sohgawa, Wataru Mito, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    Japanese Journal of Applied Physics   50 ( 6 )   06GM02   2011.6

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    A Tactile sensor system consisting of elements with three microcantilevers embedded in a cylindrical elastomer has been fabricated by micro electromechanical systems (MEMS) technology. These sensor small size (3 × 4mm2) chips are mounted on a flexible sheet, and thus the fabricated sensor array can be set even on a curved surface. In addition, the spacial distribution of normal and shear forces is obtained when two kinds of objects (an acrylic hemisphere and a brass cylinder) come in contact with the fabricated sensor shifted laterally. The distribution results appropriately reflect the surface shape of the object and give the behavior of the forces vector. © 2011 The Japan Society of Applied Physics.

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  • Crosstalk Reduction of Tactile Sensor Array with Projected Cylindrical Elastomer over Sensing Element Reviewed

    Masayuki Sohgawa, Tatsuya Uematsu, Wataru Mito, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    JAPANESE JOURNAL OF APPLIED PHYSICS   50 ( 6 )   2011.6

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    A tactile sensor array covered by a projected cylindrical elastomer has been designed and fabricated for crosstalk reduction among sensor elements caused by the lateral deformation of the elastomer. The analysis of elastomer deformation by the finite element method showed that the optimal thickness of the flat elastomer between cylinders and the substrate is 50-100 mu m, because the sensor structure has not only a low crosstalk but also a high robustness. A tactile sensor array having the flat elastomer of 70 mu m thickness has little crosstalk and high robustness. (c) 2011 The Japan Society of Applied Physics

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  • Confirmation of Gripping Status Classification using an Array of Micro Cantilever Type Tactile Sensor Reviewed

    Wataru Mito, Tatsuya Mima, Hirotake Yamazoe, Shunsuke Yoshida, Masahiro Tada, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    Transactions of the Society of Instrument and Control Engineers   47 ( 1 )   40 - 42   2011.1

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    We have designed and fabricated a tactile array sensors with three inclined micro-cantilevers embedded in elastomer, which can detect both normal and shear stresses. In this paper, we confirmed gripping status classification using sensor output. Using our sensor, four gripping status (free, grasping, holding and slipping) could be classified significantly.

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  • Fabrication of tactile sensor array using microcantilever with low-TCR nickel-chromium alloy thin film for slippage detection

    M. Sohgawa, D. Hirashima, Y. Moriguchi, T. Uematsu, W. Mito, T. Kanashima, M. Okuyama, H. Noma

    EUROSENSORS XXV   25   627 - 630   2011

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    A tactile sensor has been fabricated using NiCr-thin-film strain gauge with low noise by surface micromachining and slippage has been detected by using the tactile sensor. NiCr alloy thin film of Cr: 75wt% has very low temperature coefficient of resistance (TCR) and is employed for suppressing the temperature noise and drift. The fabricated tactile sensor with NiCr thin film (Cr: 75wt%) has linear dependences of the resistance on normal and shear forces, and shows lower noise and temperature drift than that with conventional NiCr (Cr:20wt%). Normal and shear forces measured by fabricated sensor well coincide with applied forces with errors of 3-3.5 kPa. Moreover, detection of slippage between the robotic hand and an acrylic object was detected by using fabricated tactile sensor array, and slipping condition can be judged at the rate of 76.5%. (C) 2011 Published by Elsevier Ltd.

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  • Ferroelectric properties of Bi1.1Fe1-xCo xO3 thin films prepared by chemical solution deposition using iterative rapid thermal annealing in N2 and O2 Reviewed

    Nguyen Truong Tho, Takeshi Kanashima, Masayuki Sohgawa, Dan Ricinschi, Minoru Noda, Masanori Okuyama

    Japanese Journal of Applied Physics   49 ( 9 )   09MB05   2010.9

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    Ferroelectric Bi1:1Fe1-xCoxO3 (BFCO) thin films with x = 0-0:3 have been prepared on Pt/Ti/SiO2/Si substrates by chemical solution deposition (CSD) using iterative rapid thermal annealing (RTA) in nitrogen and oxygen. The crystallization of the rhombohedral structure of BiFeO3 (BFO) is observed clearly in all thin films, and a monoclinic Bi2O3 phase is also observed and is markedly larger in Co-doped BFO thin films than in BFO thin films. An electric field of 2MV/cm is applied to the Bi1.1Fe0.9Co0.1O 3 thin film annealed in nitrogen at 520 °C without dielectric breakdown, but its polarization versus electric field (P-E) hysteresis loops are not saturated owing to its high leakage current density. The Bi1.1 Fe0.8Co0.2O3 thin film prepared at 520 °C in oxygen shows a very good saturation of P-E hysteresis loops at room temperature (RT) at the low leakage current of about 8:7 × 10 -3A/cm2 under a high electric field of 1.5MV/cm. The leakage current at a low electric field may be Ohmic emission at any temperature
    however at a high electric field, it may be attributed to tunnel emission at 80 K and Schottky emission at RT. © 2010 The Japan Society of Applied Physics.

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  • Confirmation of gripping surface status classification using HMM and tactile sensor array

    MITO Wataru, YAMAZOE Hirotake, YOSHIDA Shunsuke, TADA Masahiro, SOHGAWA Masayuki, KANASHIMA Takeshi, OKUYAMA Masanor, NOMA Haruo

    ITE Technical Report   34 ( 18 )   39 - 42   2010.5

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    We have designed and fabricated a tactile sensors array with three inclined micro-cantilevers on a single sensor embedded in elastomer. Each sensor element can detect both normal and shear stresses. In this paper, we propose classification method of gripping status using sensor array and machine learning algorithm based on hidden marcov model. By integrating multiple sensor data using machine learning algorithm using hidden marcov model, our method allows to detect partial contact status such as non-contact, three types of partial contact, full-contact. Through experiments, we confirmed tha...

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  • Ferroelectric Properties of Bi1.1Fe1-xCoxO3 Thin Films Prepared by Chemical Solution Deposition Using Iterative Rapid Thermal Annealing in N-2 and O-2 Reviewed

    Nguyen Truong Tho, Takeshi Kanashima, Masayuki Sohgawa, Dan Ricinschi, Minoru Noda, Masanori Okuyama

    JAPANESE JOURNAL OF APPLIED PHYSICS   49 ( 9 )   2010

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    Ferroelectric Bi1.1Fe1-xCoxO3 (BFCO) thin films with x = 0-0.3 have been prepared on Pt/Ti/SiO2/Si substrates by chemical solution deposition (CSD) using iterative rapid thermal annealing (RTA) in nitrogen and oxygen. The crystallization of the rhombohedral structure of BiFeO3 (BFO) is observed clearly in all thin films, and a monoclinic Bi2O3 phase is also observed and is markedly larger in Co-doped BFO thin films than in BFO thin films. An electric field of 2 MV/cm is applied to the Bi1.1Fe0.9Co0.1O3 thin film annealed in nitrogen at 520 degrees C without dielectric breakdown, but its polarization versus electric field (P-E) hysteresis loops are not saturated owing to its high leakage current density. The Bi1.1Fe0.8Co0.2O3 thin film prepared at 520 degrees C in oxygen shows a very good saturation of P-E hysteresis loops at room temperature (RT) at the low leakage current of about 8.7 x 10(-3) A/cm(2) under a high electric field of 1.5 MV/cm. The leakage current at a low electric field may be Ohmic emission at any temperature; however at a high electric field, it may be attributed to tunnel emission at 80 K and Schottky emission at RT. (C) 2010 The Japan Society of Applied Physics

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  • Fabrication and basic characteristics of multiaxial tactile sensor with 3 cantilevers Reviewed

    Hiroto Tachibana, Shiro Kamanaru, Tatsuya Mima, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Kaoru Yamashita, Minoru Noda, Haruo Noma, Masayoshi Higuchi

    IEEJ Transactions on Sensors and Micromachines   130 ( 6 )   223 - 229   2010

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    Tactile array sensors with three inclined micro-cantilevers embedded in elastomer, which can detect both normal and shear forces, have been designed and fabricated. The inclined cantilevers consist of multilayer of Polymer/NiCr/SiN/Si and the normal and shear forces are detected as resistance change of NiCr thin film induced by deformation of the cantilever. This tactile sensor has sensitivity linear to normal and shear forces. Moreover, this sensor can detect normal and shear force by the resistance changes of 3 cantilevers. © 2010 The Institute of Electrical Engineers of Japan.

    File: E部門誌投稿論文rev100217.pdf

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  • Gripping status classification using an array of micro cantilever type tactile sensor

    Mito Wataru, Yamazoe Hirotake, Yoshida Shunsuke, Tada Masahiro, Sohgawa Masayuki, Kanashima Takeshi, Okuyama Masanori, Noma Haruo

    The Abstracts of the international conference on advanced mechatronics : toward evolutionary fusion of IT and mechatronics : ICAM   2010   351 - 354   2010

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    We have designed and fabricated a tactile sensors array with three inclined micro-cantilevers on a single sensor embedded in elastomer. Each sensor element can detect both normal and shear stress. In this paper, we propose classification method of gripping status using sensor array and a machine learning algorithm. By integrating multiple sensor data using machine learning algorithm, our method allows to detect partial slipping on contact surface as an initial sign of slipping. Through experiments, we confirmed that our method achieves better classification ratio than existing methods using single sensor data.

    DOI: 10.1299/jsmeicam.2010.5.351

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  • Fabrication of Multi-axis Tactile Sensor for Future Robots by Using Micro electromechanical Systems

    SOHGAWA Masayuki, KANASHIMA Takeshi, YAMASHITA Kaoru, NODA Minoru, OKUYAMA Masanori, NOMA Haruo

    IEICE technical report. Electron devices   109 ( 157 )   41 - 46   2009.7

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    Tactile array sensors with macro-cantilevers embedded in elastomer which can detect both normal and shear stresses have been designed and fabricated. Inclined cantilevers sensitive to normal and shear stresses can be obtained by using Cr/Si bilayer structure. These cantilevers can be successfully embedded in the elastomer without their destruction. The outputs from opposite cantilevers are same signs in the case of normal stress application, but the outputs are opposite signs in the case of shear stress. So, normal and shear stresses can be distinguished by summation and difference of outpu...

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  • Reduction of Temperature Coefficient of Resistance of NiCr-Gauge-Thin-Film for Intergraded Tactile Sensor

    TACHIBANA H, KAMANARU S, MATSUURA H, SOHGAWA M, KANASHIMA T, OKUYAMA M, YAMASHITA K, NODA M, NOMA M

    電気学会研究会資料. PHS, フィジカルセンサ研究会   2009 ( 16 )   97 - 102   2009.7

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  • Stability improvement of tactile sensor of normal and shear stresses using Ni-Cr thin film gauge Reviewed

    Hiroyuki Onishi, Masayuki Sohgawa, Hiroto Tachibana, Yu Ming Huang, Takeshi Kanashima, Masanori Okuyama, Kaoru Yamashita, Minoru Noda, Haruo Noma

    IEEJ Transactions on Sensors and Micromachines   129 ( 11 )   7 - 416   2009

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    Tactile sensor consisted of micro-cantilevers has been developed to detect both normal and shear stresses, and have human-friendly surface. NiCr thin film is used as strain gauge having low resistance drift, although Si piezo-resistance gauge shows the large resistance drift induced by large temperature coefficient of resistance (TCR) and its output is unstable. TCRs of NiCr films prepared by vacuum evaporation and sputtering (at RT and 600°C) are 0.054%, 0.082%, and 0.0065%, respectively, and are much lower than that of Si, 0.25%. As a result, reduction of resistance drift and stabilization of the sensor have been obtained by using NiCr thin gauge. © 2009 The Institute of Electrical Engineers of Japan.

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  • Tactile array sensor with inclined chromium/silicon piezoresistive cantilevers embedded in elastomer

    M. Sohgawa, T. Mima, H. Onishi, T. Kanashima, M. Okuyama, K. Yamashita, M. Noda, M. Higuchi, H. Noma

    TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems   284 - 287   2009

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    Tactile array sensor of the micro-cantilevers embedded in the elastomer has been fabricated to detect normal and 2-axes shear stresses. It is demonstrated that tactile array sensor with 3 x 3 detective elements can be fabricated with excellent yield. The sensor element is sensitive to both normal and shear stresses applied on entire sensor surface. Moreover, it has good directional characteristics so that it is shown that magnitude and direction of shear stress can be obtained by difference of output voltages of adjacent sensor cantilevers. The sensor output has good reproducibility for multiple measurement. The output from sensor element drastically changes with shifting applying position of force. It is considered that we can obtain pressed position from distribution of output from sensor element array. ©2009 IEEE.

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  • Fabrication of High Resolution Multi-axis Tactile Sensor by Using Polymer/Si Cantilever with NiCr Thin Film Strain Gauge

    HUANG Yu-Ming, SOHGAWA Masayuki, ONISHI Hiroyuki, KANASHIMA Takeshi, OKUYAMA Masanori, YAMASHITA Kaoru, NODA Minoru, NOMA Haruo

    電気学会研究会資料. PHS, フィジカルセンサ研究会   2008 ( 7 )   31 - 34   2008.6

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  • Fabrication and normal/shear stress responses of tactile sensors of polymer/Si cantilevers embedded in PDMS and urethane gel elastomers Reviewed

    Yu Ming Huang, Masayuki Sohgawa, Kaoru Yamashita, Takeshi Kanashima, Masanori Okuyama, Minoru Noda, Haruo Noma

    IEEJ Transactions on Sensors and Micromachines   128 ( 5 )   193 - 197   2008

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    Cantilever-type tactile sensors of silicon-polymer beam structures were fabricated by surface micromachining and covering with elastomers. Two kinds of elastomers with different Young's modulus PDMS and urethane gel have been used to control deflection of the cantilevers and adjust the sensitivity cantilever-type tactile sensors. The resistance change of the sensor with PDMS has linear dependence on normal and shear stresses, but that of the sensor with urethane gel is nonliner to normal and shear stresses. However, the sensitivity of urethane gel type sensor is about 30 times larger than PDMS type sensor. © 2008 The Institute of Electrical Engineers of Japan.

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  • Fabrication and characterization of normal and shear stresses sensitive tactile sensors by using inclined mcro-cantilevers covered with elastomer Reviewed

    Masayuki Sohgawa, Yu-Ming Huang, Minoru Noda, Takeshi Kanashima, Kaoru Yamashita, Masanori Okuyama, Masaaki Ikeda, Haruo Noma

    MICROELECTROMECHANICAL SYSTEMS - MATERIALS AND DEVICES   1052   151 - +   2008

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    Tactile sensors of Si microcantilevers with a piezoresistive layer have been proposed for detection of both normal and shear stresses. Micro-cantilevers were fabricated by the surface micromachining of SOI wafers and were adequately inclined by controlling deflection with a Cr layer. The cantilevers were embedded in the PDMS elastomer to create a human-friendly surface. When a stress is applied to the surface of elastomer, the deformation of the cantilevers along with the elastomer is detected as a resistance change in the piezoresistive layer of the cantilevers. The piezoresistive response of the cantilever was analyzed by FEM calculations. The fabricated tactile sensor is sensitive to both normal and longitudinal shear stresses and its responses agree closely with the calculated value. Moreover, it has little sensitivity to shear stress in the transverse direction to the cantilever, which means that the tactile sensor can. distinguish the direction of shear stress. This sensor can be utilized for tactile sensing in human support robots.

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  • Fabrication and Characterization of Normal and Shear Stresses Sensitive Tactile Sensors by Using Inclined Micro-cantilevers Covered with Elastomer Reviewed

    Masayuki Sohgawa, Yu-Ming Huang, Minoru Noda, Takeshi Kanashima, Kaoru Yamashita, Masanori Okuyama, Masaaki Ikeda, Haruo Noma

    Material Research Society Symposium Proceedings   1052   151 - 156   2007.12

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    The tactile sensors for human support robots which can detect both normal stress and shear stress and have human-friendly surface have been proposed. Micro-cantilevers adequately inclined by Cr deflection control layer were fabricated by the surface micromachining on SOI wafer. The cantilevers were covered with the PDMS elastomer for human-friendly surface. When the stress is added to the surface of elastomer, the deformation of cantilevers along with elastomer is detected as piezoresistive layer in the cantilevers. The piezoresistive response of the cantilever is analyzed by FEM calculation. The response of the fabricated tactile sensor to normal stress and shear stress was measured by output from this resistance. The tactile sensor with PDMS elastomer can detect both normal stress and shear stress. On the other hand, it hardly has sensitivity to shear stress of orthogonal direction to the cantilever. It means that the tactile sensor can distinguish the direction of shear stress. The sensitivity of tactile sensor vary widely with cantilever pattern and relation between direction of cantilever and crystallite orientation of Si. It is suggested that the sensitivity of tactile sensor can be improved by using FEM estimation and selective ion implantation.

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  • Fabrication and Characterization of Multi-axis Tactile Sensors with Reasonably Sloped Cr/Si Micro Cantilever Structures

    SOHGAWA Masayuki, HUANG Yu-Ming, KANASHIMA Takeshi, YAMASHITA Kaoru, OKUYAMA Masanori, NODA Minoru, IKEDA Masaaki, NOMA Haruo

    電気学会研究会資料. PHS, フィジカルセンサ研究会   2007 ( 14 )   47 - 50   2007.7

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  • Fabrication and characterization of silicon-polymer beam structures for cantilever-type tactile sensors

    M. Sohgawa, Y. -M. Huang, K. Yamashita, T. Kanashima, M. Noda, M. Okuyama, H. Noma

    TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2   1461 - 1464   2007

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    Silicon-fluoropolymer beam structures for cantilever-type tactile sensors have been fabricated and characterized. Curvature shape and tip height of fabricated cantilever agree well with theoretical calculated results. The deposition condition of polymer layer has been optimized in terms of process yield and tip height. The optimal thickness and curing temperature are 4-5 mu m and 200 degrees C for 1.5 mu m thick Si, respectively. The response of the tactile sensor with PDMS elastomer has been investigated against pressure. Although resistance of the platinum strain gauge has large temperature drift, it is obviously proportional to pressure, so that it becomes evident that the pressure can be detected by tactile sensor embedded in the elastomer.

    File: PID370781.pdf

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  • Studies on curvature deformation control of bilayer cantilever fabricated by surface micromachining of SOI wafer Reviewed

    Yu-Ming Huang, Masayuki Sohgawa, Minoru Noda, Kaoru Yamashita, Masanori Okuyama, Haruo Noma

    HETEROGENEOUS INTEGRATION OF MATERIALS FOR PASSIVE COMPONENTS AND SMART SYSTEMS   969   119 - +   2007

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    Cr/Si bilayer cantilevers for an integrated multi-axis tactile sensor were fabricated by Si surface micromachining process. Among the cantilevers with various shapes, the rectangular and semicircular cantilevers were deflected upward with good controllability. The maximum deflections were compared with those calculated by the finite element method. Calculated deflections of Cr/Si cantilevers agree considerably with the experimental results. So, it is considered that the analysis by finite element method is useful to optimize layer thickness and size to obtain Cr/Si bilayer cantilevers with accurate deflection.

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  • Studies on Curvature Deformation Control of Bilayer Cantilever Fabricated by Surface Micromachining of SOI Wafer Reviewed

    Yu-Ming Huang, Masayuki Sohgawa, Minoru Noda, Kaoru Yamashita, Masanori Okuyama, Haruo Noma

    Material Research Society Symposium Proceedings   969   0969-W05-01   2006.11

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    The Cr/Si bilayer cantilevers for an integrated multi-axis tactile sensor were fabricated by Si surface micromachining process. Among the cantilevers with various shapes, the rectangular and semicircular cantilevers can be deflected upward with good controllability. The maximum deflections are compared with those calculated by finite element method. Calculated deflections of Cr/Si cantilever agree considerably with the measured one. So, it is considered that the analysis by finite element method is useful as optimization of layer thickness and size to obtain the Cr/Si bilayer cantilevers with accurate deflection.

    File: MRSprocpublished.pdf

    DOI: 10.1557/PROC-0969-W05-01

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  • Contactless characterization of fixed charges in HfO(2) thin film from photorellectance Reviewed

    M Sohgawa, M Yoshida, T Naoyama, T Tada, K Ikeda, T Kanashima, A Fujimoto, M Okuyama

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS   44 ( 4B )   2409 - 2414   2005.4

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    Fixed oxide charges in HfO(2) thin films have been characterized by photoreflectance spectroscopy (PRS). HfO(2) films were deposited on Si by pulsed laser deposition (PLD) in N(2), O(2) and a Mixture of these gases. PRS spectral intensity decreases with increasing positive charge in a film. HfO(2) deposited in N(2) has larger positive charges than that deposited in O(2) because of smaller PRS spectral intensity of the former. It is confirmed by ArF laser irradiation that this positive charge is caused by oxygen defects in HfO(2). Moreover, the effects of rapid thermal annealing (RTA) on HfO(2)/Si have been evaluated by PRS. The PRS spectral intensity becomes maximum by RTA at 600 degrees C in N(2) or O(2) It is suggested that the suitable temperature for the RTA of the HfO(2)/Si structure prepared by PLD is 600 degrees C.

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    DOI: 10.1143/JJAP.44.2409

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  • Characterization of Dielectric-Silicon Structure by Photore frectance Spectroscopy

    Masayuki Sohgawa

    2005.3

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  • Electrodeless characterization of memorized states of MFIS structure by photoreflectance spectroscopy Reviewed

    M Sohgawa, M Yoshida, T Kanashima, M Okuyama

    JOURNAL OF THE KOREAN PHYSICAL SOCIETY   46 ( 1 )   262 - 264   2005.1

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    SrBi2Ta2O9 (SBT)/SiO2/Si structures have been characterized by photoreflectance spectroscopy (PRS) without electrode formation. SBT film was deposited on SiO2/n-Si by the metal-organic decomposition (MOD) method and annealed in O-2 atmosphere at 600degreesC. The voltage was applied by attaching ITO transparent electrodes during PRS measurement. The PRS spectral intensity of SBT/SiO2/Si structure has hysteresis characteristics as well as a C-V curve. Additionally, the spectral intensity gradually decreases with time, in a similar way to reduction of the capacitance. These results mean that the spectral intensity indicates the ferroelectricity of SBT film in SBT/SiO2/Si structure, so that it is considered that characterization of MFIS structure without electrode can be measured by PRS.

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  • Electrodeless Characterization of Memorized States of MFIS Structure by Photoreflectance Spectroscopy Reviewed

    Masayuki Sohgawa, Masato Yoshida, Takeshi Kanashima, Akira Fujimoto, Masanori Okuyama

    Journal of Korean Physical Society   46 ( 1 )   262 - 264   2005.1

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    SrBi2Ta2O9 (SBT)/SiO2/Si structures have been characterized by photoreflectance spectroscopy (PRS) without electrode formation. SBT film was deposited on SiO2/n-Si by the metal-organic decomposition (MOD) method and annealed in O2 atmosphere at 600 C. The voltage was applied by attaching ITO transparent electrodes during PRS measurement. The PRS spectral intensity of SBT/SiO2/Si structure has hysteresis characteristics as well as a C-V curve. Additionally, the spectral intensity gradually decreases with time, in a similar way to reduction of the capacitance. These results mean that the spectral intensity indicates the ferroelectricity of SBT film in SBT/SiO2/Si structure, so that it is considered that characterization of MFIS structure without electrode can be measured by PRS.

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  • Electron Spin Resonance Characterization of Defects in High-k HfO2 Thin Film Prepared by Pulsed Laser Deposition Reviewed

    Takeshi Kanashima, Koji Ikeda, Taizo Tada, Masayuki Sohgawa, Masanori Okuyama

    Journal of Korean Physical Society   46 ( 1 )   258 - 261   2005.1

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    High-k HfO2 thin films have been prepared mainly at 400C in O2 atmosphere by pulsed laser deposition (PLD), and defects in the film have been characterized by electron spin resonance (ESR). Two ESR peaks are found at g ~ 2.003 and 2.006. The g ~ 2.006 peak intensity is higher in the sample deposited at target-sample distance of 45 mm than in that deposited at 60 mm. This is because part of the substrate and the film are exposed to high-energy particles ablated during deposition and are hence damaged. Moreover, the peak at g ~ 2.006 is related to the interface state density calculated from the high-frequency C-V curve. On the other hand, the peak at g ~ 2.003 is related to the thickness of the interfacial layer, and thus may be attributed to defects in the interfacial layer.

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  • Electron spin resonance characterization of defects in high-k HfO2 thin film prepared by pulsed laser deposition Reviewed

    T Kanashima, K Ikeda, T Tada, M Sohgawa, M Okuyama

    JOURNAL OF THE KOREAN PHYSICAL SOCIETY   46 ( 1 )   258 - 261   2005.1

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    High-k HfO2 thin films have been prepared mainly at 400degreesC in O-2 atmosphere by pulsed laser deposition (PLD), and defects in the film have been characterized by electron spin resonance (ESR). Two ESR peaks are found at 9 similar or equal to 2.003 and 2.006. The g similar or equal to 2.006 peak intensity is higher in the sample deposited at target-sample distance of 45 mm than in that deposited at 60 mm. This is because part of the substrate and the film are exposed to high-energy particles ablated during deposition and are hence damaged. Moreover, the peak at g similar or equal to 2.006 is related to the interface state density calculated from the high-frequency C - V curve. On the other hand, the peak at g similar or equal to 2.003 is related to the thickness of the interfacial layer, and thus may be attributed to defects in the interfacial layer.

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  • Characterization of Fixed Charge in High-k Dielectric Thin Film by Photoreflectance

    SOHGAWA Masayuki, KANASHIMA Takeshi, YOSHIDA Masato, TADA Taizo, OKUYAMA Masanori, FUJIMOTO Akira

    Technical report of IEICE. SDM   104 ( 510 )   25 - 30   2004.12

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    The fixed oxide charge in HfO_2 thin films have been characterized by photorenectance spectroscopj-.HfO_2 films were deposited on Si by pulsed laser deposition (PLD) in N_2, O_2 and mixture of these gases. The PRS spectral intensity decreases with increasing the positive charge in the film. HfO_2 deposited in N_2 has larger positive charge than that deposited in O_2, because PRS spectral intensity of the former is smaller than the latter. It is confirmed by ArF laser irradiation that this positive charge is caused by oxygen defects in HfO_2. Moreover, effects of rapid thermal annealing (RTA...

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  • Characterization of Defects in HfO2 by ESR

    KANASHIMA Takeshi, IKEDA Koji, TADA Taizo, SOHGAWA Masayuki, OKUYAMA Masanori

    Technical report of IEICE. SDM   104 ( 135 )   43 - 48   2004.6

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    Hf0_2 thin films have been prepared on Si(1OO) wafer by pulsed laser deposition (PLD) method, and characterized by electrical technique and ESR method. The peaks at g&amp;sime;2.006 and 2.003 are found in ESR spectra of Hf0_2 thin film deposited by PLD. The g&amp;sime;2.006 peak increased with decreasing gas pressure and the distance between target and substrate during deposition. This peak is considered to the defects from near the interface and is reduced because the energy of ablated particles is small when the distance between target and substrate is large and gas pressure is high. The g&amp;sime;2...

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  • Characterization of ferroelectric thin film/SiO2/Si structure by photoreflectance Reviewed

    Masayuki Sohgawa, Hirofumi Kanda, Takeshi Kanashima, Akira Fujimoto, Masanori Okuyama

    Ferroelectrics   303 ( 1 )   119 - 123   2004.1

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    SrBi2Ta2O9(SBT)/SiO2/n-Si stacked structures have been characterized by photoreflectance spectroscopy (PRS). The spectrum near E1 critical point energy is enhanced by deposition of SBT film. Annealing effect of the spectral intensity corresponds to that of (115) peak in XRD pattern of SBT film. Moreover, the PRS intensity increases when SBT film is poled by negative voltage. These spectral changes depend on the Si surface potential increase induced by remanent polarizations in the SBT film. The Si surface potential increase is 0.05 eV for -3 V poling. Critical point energy was estimated by peak positions of the PRS and large tensile stress is increased by the poling. It has been found that the spectral intensity closely corresponds to the ferroelectricity of the SBT film.

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    DOI: 10.1080/00150190490452929

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  • Characterization of HfO2/Si interface deposited by PLD

    Takeshi Kanashima, Masayuki Sohgawa, Koji Ikeda, Masato Yoshida, Masanori Okuyama

    Technical report of IEICE. SDM   103 ( 533 )   51 - 56   2003.12

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    HfO_2 thin films have been prepared on Si(100) wafer by pulsed laser deposition (PLD) method, and characterized by electrical and optical techniques. The samples were deposited at various temperature in O_2. From the results of I-V and C-V characteristics, the sample deposited at 400℃ at pressure of 0.2 Torr, shows relatively small interface state and fiat-band shift. Moreover, the sample is grown in O_2 and N_2 mixture ambient to reduce the interfacial layer. The film whose interfacial layer is relatively small is obtained, but an interface trap is increased. It needs to optimize the deposition conditions. Interface strain of Si and insulator is characterized by photoreflectance spectroscopy (PRS). PRS intensity increases with increasing growth temperature, and an interfacial layer increases with increasing growth temperature. The strain on the Si surface also increases. Moreover, PRS spectrum is not observed in the sample deposited at the O_2 pressure of 0.05 Torr. This suggests that the interfacial layer is small.

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  • Characterization of ZrO2 and PrOx thin films for high-k gate insulator prepared by pulsed laser deposition Reviewed

    T Kanashima, M Sohgawa, H Kanda, K Ikeda, M Okuyama

    JOURNAL OF THE KOREAN PHYSICAL SOCIETY   42   S1357 - S1361   2003.4

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    High-k thin films of ZrO2, PrOx of similar to10 nm thickness have been prepared by pulsed laser deposition, and characterized in microscopic structure and electrical properties. Crystallization is promoted in ZrO2 films deposited above 400 degreesC, but a significant XRD peak was not observed in the ZrO2 film grown below 400 degreesC. The leakage current is decreased by increasing growth temperature, but all equivalent-oxide thickness (EOT) obtained from accumulation capacitance of C-V characteristics becomes large. The films deposited at 400 degreesC were annealed at 400 degreesC in O-2 gas to reduce the leakage. The leakage current change to be small, but the EOTs become large. Oxygen radical annealing is carried out to reduced the leakage, and is effective for ZrO2 thin film. Oil the other hand. only small improvement is observed ill the PrOx films.

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  • Characterization of ZrO2 and PrOx Thin Films for High-k Gate Insulator Prepared by Pulsed Laser Deposition Reviewed

    Takeshi Kanashima, Masayuki Sohgawa, Hirofumi Kanda, Koji Ikeda, Masanori Okuyama

    Journal of Korean Physical Society   42   1357 - 1361   2003.4

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    High-k thin films of ZrO2, PrOx of ~ 10 nm thickness have been prepared by pulsed laser deposition, and characterized in microscopic structure and electrical properties. Crystallization is promoted in ZrO2 films deposited above 400C, but a significant XRD peak was not observed in the ZrO2 film grown below 400C. The leakage current is decreased by increasing growth temperature, but an equivalent-oxide thickness (EOT) obtained from accumulation capacitance of CV characteristics becomes large. The films deposited at 400C were annealed at 400C in O2 gas to reduce the leakage. The leakage current change to be small, but the EOTs become large. Oxygen radical annealing is carried out to reduced the leakage, and is effective for ZrO2 thin film. On the other hand, only small improvement is observed in the PrOx films.

    File: kps.pdf

    DOI: 10.3938/jkps.42.1357

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  • Characterization of Si Interface in FIS Structure by Photoreflectance Spectroscopy Reviewed

    Hirofumi Kanda, Masayuki Sohgawa, Yoshihide Toyoshima, Takeshi Kanashima, Masanori Okuyama, Akira Fujimoto

    Journal of Korean Physical Society   42   1072 - 1075   2003.4

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    SrBi2Ta2O9(SBT) thin film grown on SiO2/Si by a pulsed laser deposition was evaluated by photoreflectance spectroscopy (PRS) which is one of the non-destructive techniques to characterize an interface. The stress of a SiO2/Si interface of ferroelectric-insulator-semiconductor (FIS) structure has been evaluated by using this method. As a result, there is a tensile stress which is larger than that before deposition, and the stress becomes large according to increasing SBT thickness. Moreover, when ferroelectric thin film is poled, the stress becomes small with increase of the voltage.

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  • Characterization of Si interface in FIS structure by photoreflectance spectroscopy Reviewed

    H Kanda, M Sohgawa, Y Toyoshima, T Kanashima, M Okuyama, A Fujimoto

    JOURNAL OF THE KOREAN PHYSICAL SOCIETY   42 ( SUPPL. )   S1072 - S1075   2003.4

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    SrBi2Ta2O9(SBT) thin film grown on SiO2/Si by a pulsed laser deposition was evaluated by photoreflectance spectroscopy (PRS) which is one of the non-destructive techniques to characterize an interface. The stress of a SiO2/Si interface of ferroelectric-insulator-semiconductor (FIS) structure has been evaluated by using this method. As a result, there is a tensile stress which is larger than that before deposition, and the stress becomes large according to increasing SBT thickness. Moreover, when ferroelectric thin film is poled, the stress becomes small with increase of the voltage.

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  • Electrical and Optical Properties of PrOx Thin Film for High-k Gate Insulator

    Takeshi Kanashima, Masayuki Sohgawa, Koji Ikeda, Hirofumi Kanda, Masanori Okuyama

    Technical report of IEICE. SDM   102 ( 540 )   45 - 49   2002.12

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    PrOx thin films have been prepared on Si(100) wafer by pulsed laser deposition (PLD) method, and characterized by electrical and optical techniques. The samples were deposited at 400℃ in O_2 at pressure of 0.2 Torr and post-annealed by RTA. Accumulate capacitance shown in C-V curve is increased by low-temperature and short-time annealing, but is decreased by high-temperature and long-time annealing. Moreover, interfacial layer is grown for high-temperature annealing for 60s. The fixed charge in the film is decreased by RTA at 400℃ for 20s and 60s, but interface trap is increased. Interface ...

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  • Preparation by pulsed laser deposition and characterization of ZrO2, HfO2 and PrOx thin films for high-k gate insulator

    T Kanashima, S Kitai, M Sohgawa, H Kanda, M Okuyama

    ISAF 2002: PROCEEDINGS OF THE 13TH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS   199 - 202   2002

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    High-k thin films of ZrO2, HfO2 PrOx, of similar to10 nm thickness have been prepared by pulsed laser deposition (PLD), and characterized in microscopic structure and electrical properties. Crystallization is promoted in ZrO2 films deposited above 400degreesC, but a significant XRD peak was not observed in the ZrO2 film grown below 400degreesC. Moreover, density of the film is confirmed to saturate above 400degreesC by grazing incident angle X-ray reflectance. The leakage current is decreased by increasing growth temperature, but an equivalent-oxide thickness (EOT) obtained from accumulation capacitance of C - V characteristics becomes large. HfO2 films show the similar behaviors to ZrO2 films. The films deposited at 400degreesC were annealed at 400degreesC in O-2 gas to reduce the leakage, but the EOTs become large. So, these films were irradiated with oxygen radical at the pressure of 10(-3) Pa both to prevent the growth of interfacial layer and to enhance the oxidation of only the films. Although the leakage of ZrO2 films can be reduced by oxygen radical irradiation, only small improvement is observed in the PrOx films.

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    DOI: 10.1109/ISAF.2002.1195904

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  • Preparation of PrOx gate insulators using Pulsed Laser Deposition

    Satoshi Kitai, Masayuki Sohgawa, Hirofumi Kanda, Takeshi Kanashima, Masanori Okuyama

    Technical report of IEICE. SDM   101 ( 515 )   11 - 16   2001.12

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    PrO_x thin films have been prepared on Si(100)wafer by pulsed laser deposition method. It is shown from XPS spectra and TEM image of PrO_x film that the deposition in O_2 ambient of 0.2 Torr produces an interfacial silicate layer. Deposition in high vacuum at RT has only an ultra-thin interfacial layer, but both hysteresis in C-V characteristic and leakage current are large. After an O_2 annealing, the accumulation capacitance has increased, and the hysteresis and the leakage current have been improved, but the interfacial layer was grown. In deposition method using shadow mask, thin films ...

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  • フォトレフレクタンス分光法によるSiの表面応力の非接触・非破壊評価

    藤本 晶, 寒川 雅之, 金島 岳, 奥山 雅則

    和歌山工業高等専門学校研究紀要   ( 36 )   15 - 19   2001.10

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    Language:Japanese   Publishing type:Research paper (bulletin of university, research institution)   Publisher:和歌山工業高等専門学校  

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  • Preparation of PrO<sub>x</sub> high-k gate insulator by PLD and its characterization.

    北井聡, 寒川雅之, 神田浩文, 金島岳, 奥山雅則

    電気学会電子材料研究会資料   EFM-01 ( 6-13 )   43 - 47   2001.9

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  • Preparation and Characterization of ZrO2 high-k gate insulator films by PLD

    KITAI Satoshi, SOUGAWA Masayuki, KANDA Hirofumi, KANASHIMA Takeshi, OKUYAMA Masanori

    Technical report of IEICE. SDM   101 ( 108 )   19 - 24   2001.6

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    We have prepared uniform ZrO_2 thin films for high-k gate dielectrics in the next generation ULSI ZrO_2 thin films have been grown on Si(100) wafer by pulsed laser deposition at 400℃. An uniform ZrO_2 thin film (of EOT=2.7 nm) is obtained. Oxygen radical annealing gives little change of EOT, and the leakage current is less than 1x10^&lt;-7 A/cm^2 at 1 MV/cm. Moreover, the interface between high-k material and Si has been characterized by photoreflectance spectroscopy. The stress on Si with ZrO_2 prepared by MOD, is smaller than the case of Si/SiO_2.

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  • Nondestructive and contactless monitoring technique of Si surface stress by photoreflectance Reviewed

    M Sohgawa, M Agata, T Kanashima, K Yamashita, K Eriguchi, A Fujimoto, M Okuyama

    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS   40 ( 4B )   2844 - 2848   2001.4

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    Strain and stress at the Si surface have been studied by photoreflectance (PR) spectroscopy. A Si diaphragm structure has been fabricated in order to produce the surface strain caused by N-2 gas pressure which changes the PR spectra of the Si diaphragm. The transition energy obtained from the PR peak energy of approximately 3.4 eV is proportional to the surface stress, which is calculated by elastic analysis. Additionally, PR spectroscopy was applied to measure stress at the interface between the Si and thermal oxide. As the SiO2 growth temperature increases, the interface stress decreases. From our experimental results, it is considered that PR spectroscopy is effective as a contactless and nondestructive monitoring technique for Si surface stress.

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  • Preparation and characterization of ZrO2/Si structure Reviewed

    M. Sohgawa, S. Kitai, H. Kanda, T. Kanashima, A. Fujimoto, M. Okuyama

    Extended Abstracts of International Workshop on Gate Insulator, IWGI 2001   170 - 173   2001

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    In this paper, we have prepared ZrO2 and lanthanide oxide thin films by PLD (Pulsed Laser Deposition) method and characterized these electrical properties by using C-V and J-V characteristics and these interfacial properties by using PR spectroscopy.

    File: PROCEEDINGS-1.PDF

    DOI: 10.1109/IWGI.2001.967576

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  • Optical characterization of antenna-area-dependent gate oxide charging damage in MOS capacitors by photoreflectance spectroscopy Reviewed

    M Agata, M Sogawa, O Maida, K Eriguchi, A Fujimoto, T Kanashima, M Okuyama

    2000 5TH INTERNATIONAL SYMPOSIUM ON PLASMA PROCESS-INDUCED DAMAGE   97 - 100   2000

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    Thin gate oxide charging damage has been studied by photoreflectance (PR) spectroscopy in MOS structure samples. Antenna-area-dependent oxide charging damage such as the generation of SiO2/Si interface states as well as that of electron trap sites in the oxides, has been also addressed by the decrease of the PR peak signal intensity from MOS capacitors, and also confirmed by the capacitance-voltage (C-V) characteristics.

    DOI: 10.1109/PPID.2000.870621

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  • Optical Characterization of Gate Oxide Charging Damage by Photoreflectance Spectroscopy

    Masashi Agata, Masayuki Sohgawa, Osamu Maida, Koji Eriguchi, Akira Fujimoto, Takeshi Kanashima, Masanori Okuyama

    Technical report of IEICE. SDM   99 ( 491 )   75 - 80   1999.12

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    Charging damage of metal/Si/SiO2 structure induced by the plasma exposure has been studied by the photoreflectace (PR) spectroscopy. The increase of the SiO2/Si interface states as well as that of the electron trap sites in the oxide is considered to be induced by the Ar plasma exposure. The interface states reduce the surface potential change and the signal intensity. The electron trapped in the oxide increase the surface potential and the signal intensity. The PR signal intensity decreases as the plasma exposure time increases. Therefore, the PR spectrum is considered to give primarily th...

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  • VR/AR 技術における感覚の提示、拡張技術と最新応用事例

    技術情報協会( Role: Contributor ,  第4章 第3節 超小形MEMS触覚センサの原理、特性と応用展開)

    技術情報協会  2021.6  ( ISBN:9784861048500

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    Total pages:576p   Responsible for pages:pp. 155-164   Language:Japanese Book type:Scholarly book

    CiNii Books

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  • 人工知能を用いた五感・認知機能の可視化とメカニズム解明

    技術情報協会( Role: Contributor ,  第4章 第5節 力・光・温度複合検知超小型センサによる繊維製品の質感評価指標構築)

    技術情報協会  2021.6  ( ISBN:9784861048494

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    Total pages:533p   Responsible for pages:pp. 176-185   Language:Japanese Book type:Scholarly book

    CiNii Books

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  • 生体情報センシングデバイス ~センサ設計開発に求められる要素技術・課題と対策ノウハウ~

    寒川 雅之( Role: Contributor ,  第8節 医療・ヘルスケア用センサの高付加価値化とMEMSを用いた小型化・コスト低減)

    情報機構  2018.5  ( ISBN:9784865021509

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    Total pages:260   Responsible for pages:165-177   Language:Japanese Book type:Scholarly book

    医療、ヘルスケア用センシングと高付加価値化について解説し、MEMS技術を用いたヘルスケアセンサの小型化・高精度化・低コスト化への取り組み例として、タンパク質検知のためのMEMSバイオセンサと柔軟物・皮膚性状計測のためのMEMS触覚センサについて紹介した。

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MISC

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Presentations

  • Tactile Sensor Combining MEMS Cantilevers and Pressure-Sensitive Conductive Elastomer International conference

    Ryusuke Mitobe, Yingquan Zheng, Takashi Abe, Masayuki Sohgawa

    34th 2023 International Symposium on Micro-NanoMechatronics and Human Science (MHS 2023)  2023.11 

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    Event date: 2023.11

    Language:English   Presentation type:Poster presentation  

    Venue:Nagoya   Country:Japan  

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  • 樹脂コンパウンドの視覚・触覚複合計測のための光・温度検知素子集積化

    中村 眞子, 安部 隆, 寒川 雅之

    第40回「センサ・マイクロマシンと応用システム」シンポジウム  2023.11  電気学会

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    Event date: 2023.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:熊本城ホール   Country:Japan  

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  • 電解エッチング法を用いたチタン製マイクロメスの刃先形状の制御

    滝澤 勇貴, 栗田 政宗, 寒川 雅之, 安部 隆

    第40回「センサ・マイクロマシンと応用システム」シンポジウム  2023.11  電気学会

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    Event date: 2023.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:熊本城ホール   Country:Japan  

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  • 水晶発振回路式複素容量センサによるRC構造体内部の非破壊センシング

    横山 猛輝, 高橋 良輔, 岩本 啓吾, 寒川 雅之, 安部 隆

    第40回「センサ・マイクロマシンと応用システム」シンポジウム  2023.11  電気学会

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    Event date: 2023.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:熊本城ホール   Country:Japan  

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  • 質感検知に向けた指紋型表面触覚センサによるなぞり計測

    岡固 創, 月山 陽介, 安部 隆, 寒川 雅之

    第40回「センサ・マイクロマシンと応用システム」シンポジウム  2023.11  電気学会

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    Event date: 2023.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:熊本城ホール   Country:Japan  

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  • 鏡面加工が可能なチタン製マイクロ構造形成プロセスの開発

    大石 恭徳, 西村 哲登, 寒川 雅之, 安部 隆

    第14回マイクロ・ナノ工学シンポジウム  2023.11  日本機械学会

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    Event date: 2023.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:熊本城ホール   Country:Japan  

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  • 支持基板上ATカット水晶振動子の励振電極形状の最適化

    新田 智也, 諸橋 奎人, 安田 倉土, 寒川 雅之, 安部 隆

    第40回「センサ・マイクロマシンと応用システム」シンポジウム  2023.11  電気学会

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    Event date: 2023.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:熊本城ホール   Country:Aruba  

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  • 横感度を利用したCr-N薄膜ひずみゲージの設計とそれを用いた触覚センサの試作評価

    木下 萌香, 水戸部 龍介, 長谷川 拓海, 安部 隆, 丹羽 英二, 寒川 雅之

    第14回マイクロ・ナノ工学シンポジウム  2023.11  日本機械学会

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    Event date: 2023.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:熊本城ホール   Country:Japan  

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  • 水晶発振回路式複素容量センサによる乳化状態のモニタリングシステムの開発

    川口 大輔, 奥脇 琢朗, 寒川 雅之, 安部 隆

    第40回「センサ・マイクロマシンと応用システム」シンポジウム  2023.11  電気学会

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    Event date: 2023.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:熊本城ホール  

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  • エラストマシート封止MEMS触覚センサの曲げ・ねじり応答の封止深度依存性

    若林 陽彩, 南部 泰生, 安部 隆, 野間 春生, 寒川 雅之

    第40回「センサ・マイクロマシンと応用システム」シンポジウム  2023.11  電気学会

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    Event date: 2023.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:熊本城ホール   Country:Aruba  

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  • 触覚センサ用カンチレバー型検知素子のCr-N薄膜横感度を利用した小型化

    木下 萌香, 水戸部 龍介, 長谷川 拓海, 安部 隆, 丹羽 英二, 寒川 雅之

    令和5年電気学会基礎・材料・共通部門全国大会  2023.9 

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:愛知工業大学自由ヶ丘キャンパス   Country:Japan  

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  • FPGAによる抵抗型触覚センサのデジタルシリアル変換器の開発

    三木 克人, 斎藤 竜也, 安藤 潤人, 寒川 雅之, 泉 知論, 秋田 純一, 野間 春生

    令和5年電気学会基礎・材料・共通部門全国大会  2023.9  電気学会

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:愛知工業大学自由ヶ丘キャンパス   Country:Japan  

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  • 薄膜応力による微小構造の形状制御と触覚センサ応用 Invited

    寒川 雅之

    令和5年電気学会基礎・材料・共通部門全国大会  2023.9  電気学会

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    Event date: 2023.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:愛知工業大学自由ヶ丘キャンパス   Country:Japan  

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  • MEMS触覚センサのカンチレバー平面形状の改良による感度向上

    水戸部 龍介, 村上 健, 鄭 盈權, 門田 秀人, 安部 隆, 寒川 雅之

    日本機械学会2023年度年次大会  2023.9  日本機械学会

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    Event date: 2023.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:東京都立大学南大沢キャンパス   Country:Japan  

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  • 電解エッチング法によるモリブデンマイクロマシニング技術の開発

    橋爪 紀人, 大石 恭徳, 寒川 雅之, 安部 隆

    日本機械学会2023年度年次大会  2023.9  日本機械学会

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    Event date: 2023.9

    Language:Japanese   Presentation type:Poster presentation  

    Venue:東京都立大学南大沢キャンパス   Country:Japan  

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  • Immobilization Strategy of Liposome Modified Cantilever Biosensor Arrays Combined with Microfluidic Channels International conference

    Carl Frederik Werner, Yuya Takahashi, Ryusuke Mitobe, Masayuki Sohgawa, Minoru Noda

    IEEE Biosensors 2023  2023.7 

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    Event date: 2023.7 - 2023.8

    Language:English   Presentation type:Poster presentation  

    Venue:London   Country:United Kingdom  

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  • 多軸触覚センサのための検知素子の位置最適化

    若林陽彩, 門田秀人, 安部 隆, 寒川雅之

    令和5年度電気学会センサ・マイクロマシン部門総合研究会  2023.7  電気学会

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    Event date: 2023.6 - 2023.7

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:豊田工業大学   Country:Japan  

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  • Contact bump attachment and stress layer formation method for fabrication yield improvement and individual difference reduction in cantilever-based tactile sensor

    Ryota Fujita, Yuki Kawasaki, Takashi Abe, Masayuki Sohgawa

    2023.6 

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    Event date: 2023.6 - 2023.7

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

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  • Evaluation of Cold-warm Sensation of Microroughness Surface using Tactile Sensor with VO2 Resistance Temperature Detector

    Mako Nakamura, Hikaru Nagumo, Takashi Abe, Masayuki Sohgawa

    2023.6 

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    Event date: 2023.6 - 2023.7

    Language:Japanese   Presentation type:Oral presentation (general)  

    Country:Japan  

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  • Synthetic vibration presentation by tactile display combining electrostatic and piezoelectric-type vibrator and its sensory evaluation

    Ryuga Sano, Masatoshi Kondo, Takashi Abe, Masayuki Sohgawa

    2023.6 

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    Event date: 2023.6 - 2023.7

    Language:Japanese   Presentation type:Poster presentation  

    Country:Japan  

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  • FPGA-BASED ASYNCHRONOUS SPIKE PERCEPTRON FOR TINY MEMS TACTILE SENSORS International conference

    Masanori Aoki, Tatsuya Saito, Mitsuhito Ando, Masayuki Sohgawa, Tomonori Izumi, Junichi Akita, Haruo Noma

    The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023)  2023.6 

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    Event date: 2023.6

    Language:Japanese   Presentation type:Poster presentation  

    Venue:Kyoto   Country:Japan  

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  • IMPROVED REPRODUCIBILITY OF DEFLECTION CONTROL PROCESS FOR CANTILEVER-TYPE MEMS TACTILE SENSORS International conference

    Harufumi Hosokawa, Yuki Kawasaki, Yingquan Zheng, Takashi Abe, Masayuki Sohgawa

    The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2023)  2023.6 

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    Event date: 2023.6

    Language:English   Presentation type:Poster presentation  

    Venue:Kyoto   Country:Japan  

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  • マイクロ流体デバイス一体化バイオセンサにおけるリポソーム固定化プロトコルとセンサ特性の検討

    高橋 悠矢, 宮岡 一輝, 紙谷 虎太郎, 水戸部 龍介, 長谷川 拓海, Werner Carl Frederik, 寒川 雅之, 野田 実

    第70回応用物理学会春季学術講演会  2023.3  応用物理学会

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:上智大学四谷キャンパス   Country:Japan  

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  • 40個の検知素子を有する高集積カンチレバー型触覚センサ

    細川陽史, 川﨑雄記, 安部隆, 野間春生, 寒川雅之

    令和5年電気学会全国大会  2023.3  電気学会

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

    File: (細川)40個の検知素子を有するカンチレバー型MEMS触覚センサ.pdf

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  • 接触部交換可能なMEMS触覚センサの振動特性評価

    LIU TINGXUAN, 川﨑 雄記, 長谷川 拓海, 安部 隆, 寒川 雅之

    日本機械学会北陸信越支部2023年合同講演会  2023.3  日本機械学会

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    Event date: 2023.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:名古屋大学   Country:Japan  

    File: F006.pdf

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  • 温度特性の優れた支持基板一体型水晶振動子のQCMへの応用

    安田 倉土, 佐谷 元, 寒川 雅之, 安部 隆

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11  電気学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:アスティとくしま   Country:Japan  

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  • 反応性イオンエッチングと電解加工によるチタンウェハの微細加工プロセスの開発

    西村 哲登, 渡邉 悠太, 千野 輝弥, 寒川 雅之, 安部 隆

    第13回マイクロ・ナノ工学シンポジウム  2022.11  日本機械学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

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  • カンチレバー型MEMS触覚センサの接触部突起位置合わせ手法の開発

    岩橋 拓磨, 川崎 雄記, 矢島 樹, 安部 隆, 野間 春生, 寒川 雅之

    第13回マイクロ・ナノ工学シンポジウム  2022.11  日本機械学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

    File: 【16P2-PN-6】岩橋拓磨.pdf

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  • 汎用作製プロセス化を指向したマイクロ流体デバイスとカンチレバーアレイセンサへの適用

    高橋 悠矢, 紙谷 虎太郎, 水戸部 龍介, 長谷川 拓海, Werner Carl Frederik, 寒川 雅之, 野田 実

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11  電気学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

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  • 水晶発振回路式複素容量センサによるセメント系材料の非破壊モニタリング技術の開発

    岩本 啓吾, 王 鶴鳴, 寒川 雅之, 安部 隆

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11  電気学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

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  • 荷重ベクトル計測のための触覚センサのカンチレバー設計最適化による高感度化

    川崎 雄記, 高橋 佑司, 安部 隆, 野間 春生, 寒川 雅之

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11  電気学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:アスティとくしま   Country:Japan  

    File: (川﨑)講演論文.pdf

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  • ひずみゲージ・圧電体薄膜積層カンチレバーを用いた触覚センサの応答性評価

    水戸部 龍介, 佐藤 淳喜, 安部 隆, 神田 健介, 寒川 雅之

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11  電気学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:アスティとくしま   Country:Japan  

    File: ひずみゲージ・圧電体薄膜を集積した検知素子を持つ触覚センサの作製および複数検知素子の同時計測評価.pdf

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  • リポソーム固定化センサを用いたパーキンソン病原因タンパク質の 特異的高感度検出における塩効果

    紙谷 虎太郎, 澤村 正典, 山門 穂高, 高橋 悠矢, Werner Carl Frederik, 寒川 雅之, 野田 実

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11  電気学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

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  • 電解エッチング法によるTi系材料の微細構造形成と強度評価

    大石 恭徳, 佐々木 朋祐, 寒川 雅之, 安部 隆

    第13回マイクロ・ナノ工学シンポジウム  2022.11  日本機械学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

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  • 水晶発振回路式複素容量センサによる食肉センシングシステムの開発

    大島 悠, 寒川 雅之, 安部 隆

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11  電気学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

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  • チタン箔ベースMEMSのための生産プロセスの開発

    海野 一真, 寒川 雅之, 安部 隆

    第13回マイクロ・ナノ工学シンポジウム  2022.11  日本機械学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

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  • 有限要素法によるTi製MEMS圧力センサの感度解析

    中井 遥介, 安部 隆, 寒川 雅之

    第13回マイクロ・ナノ工学シンポジウム  2022.11  日本機械学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

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  • 局所測定に対応した水晶発振回路式複素容量センサの開発

    高橋 良輔, 櫻井 洋輔, 寒川 雅之, 安部 隆

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11  電気学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

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  • 肌のベタつき感定量評価のための触覚センサによる粘着性計測

    岡固 創, 安部 隆, 寒川 雅之

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11  電気学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

    File: センサシンポ 投稿論文 岡固再修正.pdf

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  • Siウェハを用いた静電力提示触覚ディスプレイと圧電アクチュエータとの複合化

    近藤 雅敏, 高橋 駿, 安部 隆, 寒川 雅之

    第13回マイクロ・ナノ工学シンポジウム  2022.11  日本機械学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

    File: 14P3-PN-50「Siウェハを用いた静電力提示触覚ディスプレイと圧電アクチュエータとの複合化」.pdf

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  • MEMS触覚センサのためのカンチレバーたわみ形状制御手法の開発

    鄭 盈権, 川﨑 雄記, 安部 隆, 寒川 雅之

    第13回マイクロ・ナノ工学シンポジウム  2022.11  日本機械学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

    File: MEMS触覚センサのためのカンチレバーたわみ形状制御手法の開発.pdf

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  • 表面微細構造を利用したフッ素樹脂接合チタンウェハの開発

    新保 元哉, 佐々木 朋裕, 寒川 雅之, 安部 隆

    第13回マイクロ・ナノ工学シンポジウム  2022.11  日本機械学会

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

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  • 触覚ディスプレイにおける摩擦制御のための静電引力提示デバイスの低電圧化

    高橋 駿, 近藤 雅敏, 佐藤 淳喜, 安部 隆, 寒川 雅之

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11  電気学会

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    Event date: 2022.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

    File: センサシンポ アブスト 修正3.pdf

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  • 非接触型水晶発振回路式複素容量センサによるフォトリソグラフィ工程の終点検出技術の開発

    奥脇 琢朗, 灰野 貴晶, 寒川 雅之, 安部 隆

    第39回「センサ・マイクロマシンと応用システム」シンポジウム  2022.11  電気学会

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:アスティとくしま   Country:Japan  

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  • Effects of Ions on Liposome-Immobilized Biosensors for the Detection of Alpha-Synuclein International conference

    Kotaro Kamitani, Masanori Sawamura, Hodaka Yamakado, Yuya Takahashi, Carl Frederik Werner, Masayuki Sohgawa, Minoru Noda

    IEEE Sensors 2022  2022.10 

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    Event date: 2022.10 - 2022.11

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Dallas, Texas   Country:United States  

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  • MULTI-ANALYTE SENSING MICROFLUIDIC STRUCTURE FOR ARRAY SENSORS AND ITS USAGE WITH A CANTILEVER BIO SENSOR International conference

    Yuya Takahashi, Kotaro Kamitani, Carl Frederik Werner, Masayuki Sohgawa, Minoru Noda

    The 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS 2022)  2022.10 

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    Language:English   Presentation type:Poster presentation  

    Venue:Virtual Conference  

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  • A HIGH-SENSITIVE DETECTION OF AGGREGATED α-SYNUCLEIN BY SALT ADDITION FOR LIPOSOME-IMMOBILIZED QCM MECHANICAL SENSOR International conference

    Kotaro Kamitani, Masanori Sawamura, Hodaka Yamakado, Yuya Takahashi, Carl Frederik Werner, Masayuki Sohgawa, Minoru Noda

    The 26th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS 2022)  2022.10 

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    Language:English   Presentation type:Poster presentation  

    Venue:Virtual Conference  

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  • 超小型触覚センサによる大腸モデル挿入時における内視鏡把持状態の検出

    岩橋 拓磨, 山岸 守央, 安部 隆, 今村 孝, 寒川, 雅之

    日本機械学会2022年度年次大会  2022.9  日本機械学会

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:富山大学   Country:Japan  

    File: 2022機械学会年次大会講演原稿【岩橋拓磨】.pdf

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  • マイクロ鉗子・メス用チタン箔ベースフォースセンサの開発

    海野 一真, 野澤 慎児, 寒川 雅之, 安部 隆

    日本機械学会2022年度年次大会  2022.9  日本機械学会

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    Event date: 2022.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:富山大学   Country:Japan  

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  • 油劣化評価のための水晶複素容量センサの開発

    大島 悠, 高橋良輔, 寒川雅之, 安部 隆

    令和4年度電気学会センサ・マイクロマシン部門総合研究会  2022.6 

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    Event date: 2022.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:金沢商工会議所会館   Country:Japan  

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  • 非接触式水晶複素容量センサを用いたモルタル劣化度の評価

    岩本啓吾, 佐伯竜彦, 寒川雅之, 安部 隆

    令和4年度電気学会センサ・マイクロマシン部門総合研究会  2022.6 

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    Event date: 2022.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:金沢商工会議所会館   Country:Japan  

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  • 高周波BAWセンサに適した支持基板一体型水晶振動子の開発

    安田倉土, 佐谷 元, 寒川雅之, 安部 隆

    令和4年度電気学会センサ・マイクロマシン部門総合研究会  2022.6 

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    Event date: 2022.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:金沢商工会議所会館   Country:Japan  

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  • 温冷感評価用ヒータ集積型触覚センサの加熱温度低減

    南雲光, 恩田尚隆, 安部隆, 寒川雅之

    令和4年度電気学会センサ・マイクロマシン部門総合研究会  2022.6 

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    Event date: 2022.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:金沢商工会議所会館   Country:Japan  

    File: (南雲)電気学会.pdf

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  • エラストマシート封止MEMS触覚センサを用いた人の手による物体把持の計測

    門田秀人, 南部泰生, 安部 隆, 寒川雅之

    令和4年度電気学会センサ・マイクロマシン部門総合研究会  2022.6  電気学会

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    Event date: 2022.6

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:金沢商工会議所会館   Country:Japan  

    File: 門田_電気学会_石川_決定版.pdf

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  • 科学的トレーニングのための足裏にかかる荷重計測システムの開発

    船橋佑, 安藤潤人, 寒川雅之, 秋田純一, 野間春生

    ロボティクス・メカトロニクス講演会2022  2022.6 

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:SORA 札幌コンベンションセンター   Country:Japan  

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  • エラストマシートに封止したMEMS触覚センサによる垂直力・曲げ・ねじり検知

    岡固創, 南部泰生, 安部隆, 寒川雅之

    ロボティクス・メカトロニクス講演会2022  2022.6 

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:SORA 札幌コンベンションセンター   Country:Japan  

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  • The New Control Method for Detection of Cold-warm Sensation Using a Heater Integrated Tactile Sensor International conference

    Takuma Iwahashi, Naotaka Onda, Hikaru Nagumo, Takashi Abe, Masayuki Sohgawa

    The 10th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2022)  2022.5 

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    Event date: 2022.5 - 2022.6

    Language:English   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • カンチレバーアレイバイオセンサ用マイクロ流体デバイスの検討

    高橋 悠矢, 紙谷 虎太郎, Werner Carl Frederik, 寒川 雅之, 野田 実

    第69回応用物理学会春季学術講演会  2022.3 

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    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

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  • 圧・振動・温冷複合触覚センサデバイスと応用展開 Invited

    寒川雅之

    令和4年電気学会全国大会  2022.3  電気学会

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    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:オンライン開催  

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  • 二つのひずみゲージを搭載したカンチレバー型MEMS触覚センサ

    岡固 創, 髙橋佑司, 安部 隆, 野間春生, 寒川雅之

    令和4年電気学会全国大会  2022.3  電気学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 遠隔内視鏡検査システムにおける挿入時の力覚提示機構の開発

    村山 健, 今村 孝, 寒川 雅之

    日本機械学会北陸信越支部 2022年合同講演会  2022.3  日本機械学会北陸信越支部

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 皮膚診断用MEMS複合センサの光検出部のS/N比向上

    佐藤 広夢, 安部隆, 寒川雅之

    日本機械学会北陸信越支部 2022年合同講演会  2022.3  日本機械学会北陸信越支部

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:オンライン開催  

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  • 口腔ケアシミュレータに向けたMEMSセンサ搭載歯-歯茎モデルの検討

    寒川雅之, 兒玉崇行, 安部 隆, 三谷篤史

    交通・電気鉄道/マイクロマシン・センサシステム合同研究会  2022.3  電気学会

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    Event date: 2022.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • バイオセンサ・触覚センサ応用に向けたカンチレバーアレイチップの設計と試作評価

    水戸部龍介, 長谷川拓海, 高橋悠矢, 紙谷虎太郎, 安部 隆, 野田 実, 寒川雅之

    交通・電気鉄道/マイクロマシン・センサシステム合同研究会  2022.3  電気学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 触診用MEMS触覚センサの感度向上と接触動作検討

    門田秀人, 安部 隆, 寒川雅之

    マグネティックス/マイクロマシン・センサシステム/バイオ・マイクロシステム合同研究会  2021.12  電気学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:米子コンベンションセンター   Country:Japan  

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  • A highly sensitive and specific detection of biomarker of Parkinson's disease by liposome-immobilized cantilever sensor International conference

    Kotaro Kamitani, Masanori Sawamura, Hodaka Yamakado, Masayuki sohgawa, Minoru Noda

    The 2021 International Meeting for Future of Electron Devices, Kansai (IMFEDK 2021)  2021.11 

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    Language:English   Presentation type:Poster presentation  

    Venue:Kyoto   Country:Japan  

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  • 布の触感評価における視覚と触覚の寄与度に関する基礎検討

    今村 孝, 昆 ひより, 寒川 雅之

    第64回 自動制御連合講演会  2021.11 

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  • 反応性イオンエッチング技術を用いたAl2O3絶縁層を有するTiウェハの鏡面加工プロセス

    渡邉 悠太, 月山 陽介, 寒川 雅之, 安部 隆

    第12回マイクロ・ナノ工学シンポジウム  2021.11  日本機械学会マイクロ・ナノ工学部門

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 電界集中型水晶複素容量センサによる皮膚内部イメージングシステムの開発

    高橋 良輔, 藤森 弘貴, 寒川 雅之, 安部 隆

    第38回「センサ・マイクロマシンと応用システム」シンポジウム  2021.11  電気学会センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:オンライン開催  

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  • 水晶発振回路式MHz帯複素容量センサを用いた土壌状態の非接触モニタリング

    LIU JIANI, 寒川 雅之, 安部 隆

    第38回「センサ・マイクロマシンと応用システム」シンポジウム  2021.11  電気学会センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:オンライン開催  

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  • 電解エッチング法を用いた微細構造を有するチタン製マイクロメスの開発

    栗田 政宗, 寒川 雅之, 安部 隆

    第38回「センサ・マイクロマシンと応用システム」シンポジウム  2021.11  電気学会センサ・マイクロマシン部門

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    Event date: 2021.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:オンライン開催  

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  • 触診用MEMS触覚センサの接触部改良による圧力低減

    門田 秀人, 小河原 周, 寒川 雅之, 安部 隆

    第38回「センサ・マイクロマシンと応用システム」シンポジウム  2021.11  電気学会センサ・マイクロマシン部門

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    Event date: 2021.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:オンライン開催  

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  • 水晶発振回路式複素容量センサを用いた金エッチングの非接触エンドポイントディテクター

    奥脇 琢朗, 灰野 貴晶, 寒川 雅之, 安部 隆

    第38回「センサ・マイクロマシンと応用システム」シンポジウム  2021.11  電気学会センサ・マイクロマシン部門

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    Event date: 2021.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:オンライン開催  

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  • Al₂O₃絶縁薄膜を用いた静電型触覚ディスプレイに関する基礎検討

    近藤 雅敏, 佐藤 淳喜, 安部 隆, 寒川 雅之

    第38回「センサ・マイクロマシンと応用システム」シンポジウム  2021.11  電気学会センサ・マイクロマシン部門

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    Event date: 2021.11

    Language:Japanese   Presentation type:Poster presentation  

    Venue:オンライン開催  

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  • TOIウェハの層間膜の膜厚調整技術の開発

    土田 和弥, 長谷川 穂高, 寒川 雅之, 安部 隆

    第12回マイクロ・ナノ工学シンポジウム  2021.11  日本機械学会マイクロ・ナノ工学部門

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:オンライン開催  

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  • 物理的・化学的耐久性を兼備するフッ素エラストマ積層コーティング PDMS封止カンチレバー型触覚センサ

    髙橋 佑司, 髙橋 拓海, 安部 隆, 野間 春生, 寒川 雅之

    第38回「センサ・マイクロマシンと応用システム」シンポジウム  2021.11  電気学会センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 接着剤を用いたMEMS触覚センサの接触部取り外し・交換可能化

    川﨑 雄記, 安部 隆, 野間 春生, 寒川 雅之

    第38回「センサ・マイクロマシンと応用システム」シンポジウム  2021.11  電気学会センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • ヒータ集積型触覚センサによる温冷感評価のための温度制御手法の検討

    恩田 尚隆, 安部 隆, 寒川 雅之

    第12回マイクロ・ナノ工学シンポジウム  2021.11  日本機械学会マイクロ・ナノ工学部門

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 触覚センサ感度のマイクロカンチレバーサイズおよびひずみゲージ形状・材料依存性評価

    長谷川 拓海, 金田 蓮, 安部 隆, 丹羽 英二, 寒川 雅之

    第12回マイクロ・ナノ工学シンポジウム  2021.11  日本機械学会マイクロ・ナノ工学部門

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • Sensitivity Enhancement of MEMS Tactile Sensor by Redesign of Microcantilever and Strain Gauge International conference

    Ren Kaneta, Takumi Hasegawa, Takashi Abe, Masayuki Sohgawa

    IEEE Sensors 2021  2021.11 

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  • Detection of Rigid Object Embedded in Skin Model Using Tactile Sensor for Palpation International conference

    Shu Ogawara, Jun Kido, Takashi Abe, Masayuki Sohgawa

    IEEE Sensors 2021  2021.11 

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  • 口腔ケアシミュレータのためのMEMSセンサによるブラッシング検知

    寒川雅之, 三谷篤史

    第9回看護理工学会学術集会  2021.10 

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  • パーキンソン病患者血清中αシヌクレインのリポソーム固定化センサにおける高感度検出の検討

    紙谷 虎太郎, 高橋 悠矢, Werner Carl Frederik, 澤村 正典, 山門 穂高, 寒川 雅之, 野田 実

    第82回応用物理学会秋季学術講演会  2021.9 

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  • マイクロカンチレバー触覚センサにおけるひずみゲージ用NiCr薄膜特性のスパッタリング成膜温度依存性評価

    GONG LIQIANG, 安部 隆, 寒川 雅之

    日本機械学会 2021年度年次大会  2021.9  日本機械学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 低電圧静電触覚ディスプレイ用絶縁膜の耐久性向上

    近藤雅敏, 佐藤淳喜, 安部 隆, 寒川雅之

    令和3年度電気学会センサ・マイクロマシン部門総合研究会  2021.7  電気学会

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    Event date: 2021.7

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 温冷感計測用マルチモーダル触覚センサにおけるエラストマ材料の検討

    南雲 光, 恩田尚隆, 安部 隆, 寒川雅之

    令和3年度電気学会センサ・マイクロマシン部門総合研究会  2021.7 

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • MEMS触覚センサの校正処理手法の実装と評価

    河内彪博, 安藤潤人, 寒川雅之, 野間春生

    令和3年度電気学会センサ・マイクロマシン部門総合研究会  2021.7 

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • CONTACTLESS ENDPOINT DETECTION OF GOLD ETCHING USING QUARTZ-BASED CAPACITIVE DETECTOR International conference

    Takuro Okuwaki, Takaaki Haino, Masayuki Sohgawa, Takashi Abe

    The 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2021)  2021.6 

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    Language:English   Presentation type:Poster presentation  

    Venue:Virtual Conference  

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  • 内視鏡操作のデータ化に向けた超小型触覚センサによる把持状態の検出

    山岸守央, 寒川雅之, 今村孝, 安部隆

    ロボティクス・メカトロニクス講演会2021  2021.6 

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    Language:Japanese   Presentation type:Poster presentation  

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  • 皮膚診断のための MEMS 触覚センサの接触部最適化

    門田秀人, 小河原 周, 南部泰生, 安部 隆, 寒川雅之

    令和3年電気学会全国大会  2021.3  電気学会

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 水晶発振回路式複素容量センサを用いたシール材料の化学耐久性評価

    齋藤 響太, 寒川 雅之, 安部 隆

    令和3年電気学会全国大会  2021.3  電気学会

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 水晶発振回路式容量センサを用いた土壌の性質の非接触モニタリング

    JIANI LIU, 吉田 晃, 寒川雅之, 安部 隆

    令和3年電気学会全国大会  2021.3  電気学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • TOIウェハを用いた表面マイクロマシニング

    長谷川穂高, 守屋赳利, 土田和弥, 寒川雅之, 安部 隆

    令和3年電気学会全国大会  2021.3  電気学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 接触部を交換可能としたMEMS触覚センサ

    川崎雄記, 髙橋佑司, 安部 隆, 野間春生, 寒川雅之

    令和3年電気学会全国大会  2021.3  電気学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 耐水性MEMS触覚センサを用いた吐水力計測

    高橋佑司, 高橋拓海, 安部 隆, 寒川雅之

    交通・電気鉄道/マイクロマシン・センサシステム合同研究会  2021.3  電気学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • MEMS触覚センサによる樹脂・金属表面質感識別

    佐藤淳喜, 本間 遼, 安部 隆, 寒川雅之

    交通・電気鉄道/マイクロマシン・センサシステム合同研究会  2021.3  電気学会

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    Event date: 2021.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 皮膚診断のためのMEMS触覚センサによる柔軟物内しこり検出

    小河原周, 木藤 潤, 安部 隆, 寒川雅之

    交通・電気鉄道/マイクロマシン・センサシステム合同研究会  2021.3  電気学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • Improvement of Durability of Micro Tactile Sensor by Protection of Bonding-Wire with UV Curable Resin International conference

    Yuji Takahashi, Takumi Takahashi, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    The 15th International Conference on Motion and Vibration Control (MoViC 2020)  2020.12  The Japan Society of Mechanical Engineers

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    Event date: 2020.12

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Virtual Conference  

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  • Analysis of Deflection Behavior of Microcantilevers Embedded in Elastomer for Miniature Tactile Sensor International conference

    Jun Kido, Takashi Abe, Masayuki Sohgawa

    The 15th International Conference on Motion and Vibration Control (MoViC 2020)  2020.12  The Japan Society of Mechanical Engineers

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    Event date: 2020.12

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    Venue:Virtual Conference  

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  • ひずみゲージ・圧電体薄膜集積触覚センサの検知部形状の設計・評価

    GONG LIQIANG, 高橋 春暁, 安部 隆, 神田 健介, 寒川 雅之

    第11回マイクロ・ナノ工学シンポジウム  2020.10 

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  • リポソーム固定化カンチレバーセンサを用いたパーキンソン病原因物質αシヌクレイン凝集体の超高感度検出

    小林 亮子, 澤村 正典, 山門 穂高, 寒川 雅之, 野田 実

    第37回「センサ・マイクロマシンと応用システム」シンポジウム  2020.10 

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    Language:Japanese   Presentation type:Oral presentation (general)  

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  • マイクロ配列電極を用いた局所増感型水晶複素容量センサの開発

    橋本 祐希, 灰野 貴晶, 寒川 雅之, 安部 隆

    第37回「センサ・マイクロマシンと応用システム」シンポジウム  2020.10 

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    Language:Japanese   Presentation type:Oral presentation (general)  

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  • ガラスの温冷感評価のためのヒータ集積型MEMS触覚センサの作製

    恩田 尚隆, 小塚 貴暁, 安部 隆, 一色 眞誠, 留野 暁, 寒川 雅之

    第37回「センサ・マイクロマシンと応用システム」シンポジウム  2020.10 

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  • 反応性イオンエッチングを用いた極薄チタンウェハのドライナノ研磨技術の開発

    千野 輝弥, 渡邉 悠太, 月山 陽介, 寒川 雅之, 安部 隆

    第37回「センサ・マイクロマシンと応用システム」シンポジウム  2020.10 

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  • 薄膜対応熱重量分析⽤QCMの開発と評価

    佐谷 元, 寒川 雅之, 安部 隆

    第37回「センサ・マイクロマシンと応用システム」シンポジウム  2020.10 

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  • 振動刺激と摩擦力を同時に提示可能な複合触覚ディスプレイの基礎検討

    本間 遼, 佐藤 淳喜, 安部 隆, 寒川 雅之

    第11回マイクロ・ナノ工学シンポジウム  2020.10 

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  • 微小流体回路のためのインダクタンスとキャパシタンスの時差式分析技術の開発

    渡部 亮, 吉田 晃, 佐藤 洋太, 寒川 雅之, 安部 隆

    第37回「センサ・マイクロマシンと応用システム」シンポジウム  2020.10 

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  • エラストマ封⽌カンチレバー型触覚センサの繰返し耐久性評価

    高橋 拓海, 安部 隆, 野間 春生, 寒川 雅之

    第37回「センサ・マイクロマシンと応用システム」シンポジウム  2020.10 

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  • 把持状況検出のための⼯具把持部埋込触覚センサとその解析

    南部 泰生, 寒川 雅之, 安部 隆

    第37回「センサ・マイクロマシンと応用システム」シンポジウム  2020.10 

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  • MEMS触覚センサを用いた皮膚診断のための力・色・温度の複合計測

    小河原 周, 安部 隆, 寒川 雅之

    日本機械学会 2020年度年次大会  2020.9  日本機械学会

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    Event date: 2020.9

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • リン脂質リポソーム固定化カンチレバーセンサを用いたパーキンソン病患者血清中αシヌクレインの検出

    小林 亮子, 澤村 正典, 山門 穂高, 寒川 雅之, 野田 実

    第81回応用物理学会秋季学術講演会  2020.9 

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    Language:Japanese   Presentation type:Oral presentation (general)  

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  • 高ゲージ率Cr-N薄膜及び設計改良によるMEMS触覚センサの感度向上

    金田 蓮, 安部 隆, 丹羽 英二, 寒川 雅之

    令和2年度電気学会A部門大会  2020.9 

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    Language:Japanese   Presentation type:Oral presentation (general)  

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  • エラストマ埋込マイクロカンチレバー触覚センサの挙動と解析

    寒川 雅之, 木藤 潤, 安部 隆

    令和2年度電気学会A部門大会  2020.9 

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  • Contactless Monitoring of Cement Curing Process Using Quartz Oscillator Based Capacitive Sensor

    王 鶴鳴, 藤森 弘貴, 寒川 雅之, 安部 隆

    令和2年度電気学会A部門大会  2020.9 

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  • Micro-TAS用脱着可能な水晶複素容量センサの開発

    櫻井洋輔, 灰野貴晶, 寒川雅之, 安部 隆

    令和2年度電気学会センサ・マイクロマシン部門総合研究会  2020.7 

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    Event date: 2020.7

    Language:Japanese   Presentation type:Oral presentation (general)  

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  • MEMS触覚センサの温度変化による出力信号のドリフト特性の考察

    河内彪博, 川田智晴, 岡田一志, 寒川雅之, 野間春生

    令和2年度電気学会センサ・マイクロマシン部門総合研究会  2020.7 

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • 小型化・低電圧化に向けた絶縁樹脂薄膜静電触覚ディスプレイの基礎検討

    佐藤淳喜, 本間 遼, 安部 隆, 寒川雅之

    令和2年度電気学会センサ・マイクロマシン部門総合研究会  2020.7 

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:オンライン開催  

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  • チタン製カンチレバーを用いた高耐久性MEMSフォースセンサのモデル作製と評価

    野澤慎児, 大塚善久, 安部 隆, 寒川雅之

    令和2年度電気学会センサ・マイクロマシン部門総合研究会  2020.7 

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  • 端子部への負荷を軽減するFPCを用いたMEMS触覚センサの実装

    岡田一志, 川田智晴, 河内彪博, 大井翔, 松村耕平, 寒川雅之, 野間春生

    ロボティクス・メカトロニクス講演会2020  2020.5 

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  • 遠隔内視鏡検査システムにおける力覚提示の基礎検討

    村山健, 今村孝, 水野研一, 寒川雅之, 三好孝典

    ロボティクス・メカトロニクス講演会2020  2020.5 

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  • マイクロカンチレバーの設計改良によるMEMS触覚センサの感度向上

    金田蓮, 安部隆, 寒川雅之

    ロボティクス・メカトロニクス講演会2020  2020.5 

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    Language:Japanese   Presentation type:Poster presentation  

    File: robomech原稿-final.pdf

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  • ボンディングワイヤのUV硬化樹脂封止によるMEMS触覚センサの耐久性向上

    高橋 佑司, 高橋 拓海, 安部 隆, 野間 春生, 寒川 雅之

    令和2年電気学会全国大会  2020.3  電気学会

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京電機大学東京千住キャンパス   Country:Japan  

    File: 電気学会全国大会原稿 改訂版-完成.pdf

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  • マイクロ配列電極を用いた局所増感型水晶発振回路式複素容量センサの開発

    橋本 祐希, 灰野 貴晶, 寒川 雅之, 安部 隆

    令和2年電気学会全国大会  2020.3  電気学会

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京電機大学東京千住キャンパス   Country:Japan  

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  • タフMEMSのための絶縁層を有するチタン基板の開発

    守屋 赳利, 長谷川 穂高, 佐々木 朋裕, 寒川 雅之, 安部 隆

    令和2年電気学会全国大会  2020.3  電気学会

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京電機大学東京千住キャンパス   Country:Japan  

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  • 包丁手技訓練を目的とした把持力信号の自動ストローク切り出し手法の検討

    川田 智晴, 岡田 一志, 大井 翔, 松村 耕平, 寒川 雅之, 野間 春生

    インタラクション2020  2020.3  情報処理学会

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:学術総合センター/一橋大学一橋講堂   Country:Japan  

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  • ヒトを模した人工触覚の触り動作における素材識別率を向上させる学習モデルの研究

    岡田 一志, 下江 輝, 大井 翔, 松村 耕平, 寒川 雅之, 杉山 治, 野間 春生

    インタラクション2020  2020.3  情報処理学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:学術総合センター/一橋大学一橋講堂   Country:Japan  

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  • MEMS触覚センサにおける弾性樹脂中カンチレバー挙動の分析

    木藤 潤, 安部 隆, 寒川 雅之

    電気学会交通・電気鉄道/マイクロマシン・センサシステム合同研究会  2020.3  電気学会

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:三島  

    File: TER-MSS合同研究会原稿(木藤・寒川).pdf

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  • MEMS触覚センサを用いた物体把持状況検出手法の検討

    南部 泰生, 藤橋 智哉, 安部 隆, 寒川 雅之

    電気学会交通・電気鉄道/マイクロマシン・センサシステム合同研究会  2020.3  電気学会

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    Event date: 2020.3

    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:三島  

    File: TER-MSS合同研究会原稿(南部).pdf

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  • A New Temperature-Stabilized Biosensor System for Phospholipid-Immobilized Cantilever Sensor to Detect Biomaker Amyloid Protein for Parkinson Disease International conference

    Ryoko Kobayashi, Minoru Noda, Masanori Sawamura, Hodaka Yamakado, Masayuki Sohgawa

    The 2019 International Meeting for Future of Electron Devices, Kansai (IMFEDK 2019)  2019.11  IEEE EDS Kansai Chapter

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    Event date: 2019.11

    Language:English   Presentation type:Poster presentation  

    Venue:Ryukoku University Avanti Kyoto Hall, Kyoto   Country:Japan  

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  • A Novel Detection of Biomarker Molecule of α-Synuclein for Parkinson Disease by Phospholipid Liposome-Immobilized Cantilever Biosensor Using Real-Time Quaking-Induced Conversion Method International conference

    Ryoko Kobayashi, Minoru Noda, Masanori Sawamura, Hodaka Yamakado, Masayuki Sohgawa

    IEEE Sensors 2019  2019.10 

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    Event date: 2019.10

    Language:English   Presentation type:Oral presentation (general)  

    Venue:Palais des congrès de Montréal, Motreal   Country:Canada  

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  • リポソーム固定化カンチレバーセンサを用いた ヒト由来αシヌクレイン線維化の検出

    小林 亮子, 澤村 正典, 山門 穂高, 寒川 雅之, 野田 実

    第67回応用物理学会春季学術講演会  2020.3 

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  • ワイヤレス発振式水晶振動子型薄膜用熱重量分析センサの開発

    千野 輝弥, 丸山 耕平, 内木 舜也, 寒川 雅之, 安部 隆

    第36回「センサ・マイクロマシンと応用システム」シンポジウム  2019.11 

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  • ひずみ・圧電触覚センサのためのPDMS封止カンチレバーによる荷重・振動検知

    高橋 春暁, 安部 隆, 神田 健介, 寒川 雅之

    第10回マイクロ・ナノ工学シンポジウム  2019.11 

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  • Cr-N薄膜ひずみゲージ触覚センサにおける感度・温度特性の熱処理温度依存性

    本間 遼, 米原 洸平, 安部隆, 丹羽 英二, 寒川 雅之

    第10回マイクロ・ナノ工学シンポジウム  2019.11 

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  • チタン合金製マイクロ金型の作製および評価

    韓 剛, 劉 若愚, 寒川 雅之, 安部 隆

    第10回マイクロ・ナノ工学シンポジウム  2019.11 

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  • 深さ方向成分分析に対応した非接触型水晶発振回路式複素容量センサの開発

    灰野 貴晶, 江端 亮, 寒川 雅之, 安部 隆

    第36回「センサ・マイクロマシンと応用システム」シンポジウム  2019.11 

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  • 外部磁場を利用した多周波水晶発振回路式液体センサによるイオン種分析

    藤森 弘貴, 富樫 裕基, 寒川 雅之, 安部 隆

    第36回「センサ・マイクロマシンと応用システム」シンポジウム  2019.11 

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  • エラストマ封止カンチレバー型触覚センサの検出エリア評価

    阿部 由杜, 菅 史賢, 安部 隆, 野間 春生, 寒川 雅之

    第36回「センサ・マイクロマシンと応用システム」シンポジウム  2019.11 

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  • さまざまな洗浄に耐えるフッ素エラストマ封止カンチレ バー型触覚センサ

    髙橋 拓海, 安部 隆, 野間 春生, 寒川 雅之

    第36回「センサ・マイクロマシンと応用システム」シンポジウム  2019.11 

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  • チタンMEMSのためのアルミナ絶縁層の評価

    大塚 善久, 安部 隆, 寒川 雅之

    第10回マイクロ・ナノ工学シンポジウム  2019.11 

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  • 水処理プロセスの非接触モニタリング用水晶発振回路式液体センサの開発

    吉田 晃, 小黒 悠, 寒川 雅之, 安部 隆

    第36回「センサ・マイクロマシンと応用システム」シンポジウム  2019.11 

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  • 多周波水晶発振回路式液体センサによる多成分イオンの非接触分析

    庄司 拓人, 吉田 晃, 小黒 悠, 寒川 雅之, 安部 隆

    第36回「センサ・マイクロマシンと応用システム」シンポジウム  2019.11 

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  • RT-QuIC 法を用いたリポソーム固定化カンチレバーセンサによる αシヌクレインの検出

    小林 亮子, 澤村 正典, 山門 穂高, 寒川 雅之, 山下 馨, 野田 実

    第80回応用物理学会秋季学術講演会  2019.9  応用物理学会

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    Venue:北海道大学札幌キャンパス  

    我々はリポソーム固定化カンチレバーセンサを用いて,パーキンソン病発症原因物質 αシヌクレイン(αSyn)の検出を行っている。αSynはモノマーから凝集,線維化し,フィブリルに変化することで毒性を獲得する。また,モノマーの中に極少量のフィブリルが存在すると凝集現象が促進される。RT-QuIC 法は このαSynの凝集現象の促進を利用する方法で,本研究では RT-QuIC 法に着目し,本センサに応用して,αSyn の凝集過程の検出と,極低濃度のαSynの検出を目指した。

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  • 摩擦・凹凸感を含む触感提示のためのMEMS複合触覚センサによる質感計測と評価

    本間 遼, 安部 隆, 寒川 雅之

    2019年 電気学会 電子・情報・システム部門大会  2019.9 

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    Venue:琉球大学工学部  

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  • 複合触覚センシングのためのフレキシブル圧力・曲げセンサ

    寒川 雅之, 高橋 拓海, 富田 亮, 安部 隆, 鳴海 敬倫

    電気学会誘電・絶縁材料研究会  2019.7 

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    Venue:トキ交流会館  

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  • 力・光・温度複合触覚センサを用いた濡れによる質感変化の評価

    小塚 貴暁, 安部 隆, 寒川 雅之

    電気学会センサ・マイクロマシン部門総合研究会(マイクロマシン・センサシステム研究会)  2019.7 

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    Venue:東京工業大学すずかけ台キャンパス  

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  • 複雑形状物体把持制御のための複数接触部を有する触覚センサ

    菅 史賢, 藤橋 智哉, 阿部 由杜, 安部 隆, 野間 春生, 寒川 雅之

    電気学会センサ・マイクロマシン部門総合研究会(マイクロマシン・センサシステム研究会)  2019.7 

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    Venue:東京工業大学すずかけ台キャンパス  

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  • A New Detection of Biomarker Molecule of Alpha-Synuclein for Parkinson Disease by Phospholipid Liposome-Immobilized Cantilever Microsensor with Temperature Stabilization International conference

    Ryoko Kobayashi, Masanori Sawamura, Hodaka Yamakado, Masayuki Sohgawa, Minoru Noda

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019 - EUROSENSORS XXXIII)  2019.6 

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    Venue:Berlin, Germany  

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  • Design and Evaluation of an Electrode Separated Quartz Crystal Microbalance Array as a Disposable Weighing Dish International conference

    Shunya Uchiki, Ikuto Sato, Masayuki Sohgawa, Takashi Abe

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019 - EUROSENSORS XXXIII)  2019.6 

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    Venue:Berlin, Germany  

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  • Tactile Sensor Using Microcantilever Embedded in Fluoropolymer for Water and Ethanol Resistance International conference

    Takumi Takahashi, Shuhei Sato, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    The 20th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2019 - EUROSENSORS XXXIII)  2019.6 

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  • 口腔ケアシミュレーション用舌モデルへのMEMS触覚センサ搭載と接触検知

    兒玉 崇行, 安部 隆, 三谷 篤史, 寒川 雅之

    ロボティクス・メカトロニクス講演会2019  2019.6 

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    Venue:広島国際会議場  

    File: robomech原稿.pdf

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  • 微小流体チップ用水晶発振回路式液体濃度センサのための回路の最適化

    佐藤 洋太, 江端 亮, 寒川 雅之, 安部 隆

    平成31年電気学会全国大会  2019.3 

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    Venue:北海道科学大学  

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  • フッ素エラストマとCNT分散樹脂を用いたフレキシブル圧力・曲げセンサの基礎検討

    高橋 拓海, 富田 亮, 安部 隆, 鳴海 敬倫, 寒川 雅之

    平成31年電気学会全国大会  2019.3 

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    Venue:北海道科学大学  

    File: 電気学会全国大会原稿.pdf

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  • 非接触型水晶発振回路式複素容量センサの土壌モニタリングへの応用

    村上 尚駿, 江端 亮, 寒川 雅之, 安部 隆

    平成31年電気学会全国大会  2019.3 

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    Venue:北海道科学大学  

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  • リン脂質リポソーム固定化カンチレバーセンサによるパーキンソン病原因物質αシヌクレインの検出

    小林 亮子, 澤村 正典, 山門 穂高, 寒川 雅之, 山下 馨, 野田 実

    第66回応用物理学会春季学術講演会  2019.3  応用物理学会

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    Venue:東京工業大学  

    人工細胞膜リポソームを歪みゲージカンチレバー上に固定化したカンチレバー型センサを用いて,パーキンソン病の原因物質であるαシヌクレインタンパク質(αSyn)の検出を行った。αSynは,その性質や機能がまだ多く不明であるが,アルツハイマー病原因物質のAβタンパク質と同様に線維伸長・凝集化が生じる。そこで,Aβと同様に,αSynとリポソームの相互作用で発生する応力によるカンチレバーの撓みを,歪ゲージの抵抗変化から検出できる可能性があると考え,αSynの検出とその経時特性を得ること,同時により低濃度での線維伸長・凝集の検出を目的とした。

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  • 複雑形状物体把持時の接触状況検出のためのマイクロ触覚センサ

    菅 史賢, 藤橋 智哉, 阿部 由杜, 安部 隆, 寒川 雅之

    日本機械学会北陸信越支部第56期講演会  2019.3 

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    Venue:富山大学五福キャンパス  

    File: 複雑形状物体把持時の接触状況検出のためのマイクロ触覚センサ1.pdf

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  • Cr-N薄膜ひずみゲージ触覚センサの感度と温度特性評価

    米原 洸平, 安部 隆, 丹羽 英二, 寒川 雅之

    交通・電気鉄道/マイクロマシン・センサシステム合同研究会  2019.2 

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    Venue:名古屋  

    File: TER-MSS研究会2019(米原).pdf

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  • MEMS触覚センサによる材質感計測と感性評価との比較

    志和 昂, 難波 勇太, 安部 隆, 寒川 雅之

    交通・電気鉄道/マイクロマシン・センサシステム合同研究会  2019.2 

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    Venue:名古屋  

    File: TER-MSS研究会2019(寒川).pdf

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  • Cr-N薄膜ひずみゲージを用いたMEMS触覚センサの感度向上

    米原 洸平, 木藤 潤, 藤橋 智哉, 高橋 春暁, 安部 隆, 丹羽 英二, 寒川 雅之

    第9回マイクロ・ナノ工学シンポジウム  2018.11 

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    File: Cr-N薄膜ひずみゲージを用いたMEMS触覚センサの感度向上.pdf

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  • 人間に近い触覚検知のためのエラストマ埋め込みPZT /Siカンチレバー振動覚センサ

    高橋 春暁, 難波 勇太, 安部 隆, 寒川 雅之

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  2018.11 

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  • 触覚センサの柔軟物硬さ及び接触形状に対する依存性評価と検知部の高密度化

    藤橋 智哉, 菅 史賢, 荒木 凌馬, 安部 隆, 野間 春生, 寒川 雅之

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  2018.11 

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  • 粘弾性液体と接した電極分離型QCMセンサの周波数応答特性

    佐藤 育人, 坂口 淳, 寒川 雅之, 安部 隆

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  2018.11 

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  • 皮膚診断のための触覚センサによる多層柔軟物モデルの計測と有限要素解析

    木藤 潤, 阿部 裕太, 佐藤 周平, 安部 隆, 野間 春生, 寒川 雅之

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  2018.10 

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  • 湿潤・水中環境でも計測可能なフッ素エラストマを用いた触覚センサ

    佐藤 周平, 安部 隆, 寒川 雅之

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  2018.10 

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  • 水晶発振回路式液体濃度センサの炭酸濃度非接触測定への応用

    小黒 悠, 谷村 実紀, 矢田 直人, 寒川 雅之, 安部 隆

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  2018.10 

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  • タフMEMSのためのチタン合金製微小試験片の力学的特性評価

    吉田 将希, 韓 剛, 寒川 雅之, 安部 隆

    第9回マイクロ・ナノ工学シンポジウム  2018.10 

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  • 1滴を評価できる水晶発振回路式粘度・濃度複合センサの作製と評価

    庄司 拓人, 江端 亮, 寒川 雅之, 安部 隆

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  2018.10 

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  • 熱アシスト式反応性イオンエッチング法によるチタン合金製微小メスの作製と評価

    近藤 正之, 吉田 将希, 桐生 祐弥, 韓 剛, 寒川 雅之, 安部 隆

    第9回マイクロ・ナノ工学シンポジウム  2018.10 

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  • チタンを反応性イオンエッチングで高速加工するための自己加熱式ステージの開発

    桐生 祐弥, 韓 剛, 今井 純一, 寒川 雅之, 安部 隆

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  2018.10 

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  • 熱アシスト反応性イオンエッチングを用いたTi/Ti合金製マイクロモールドの開発

    劉 若愚, 韓 剛, 人母 岳, 寒川 雅之, 安部 隆

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  2018.10 

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  • 河川防災システムのためのミリ波センサによる非接触水位計測

    寒川 雅之, ウィタカ アンドリュー, 酒井 直樹

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  2018.10 

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    File: SS35_Paper_新潟大学寒川.pdf

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  • ワイヤレス駆動可能な多チャンネル型片面励起式QCMセンサの開発

    内木 舜也, 佐藤 育人, 寒川 雅之, 安部 隆

    第35回「センサ・マイクロマシンと応用システム」シンポジウム  2018.10 

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  • Evaluation of Time-course Behavior of Amyloid-beta on Cell Membrane Model Liposome by Micro Cantilever Sensor Technique

    Tomoya Taniguchi, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

    2018.9 

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  • Characterization of PZT Thin Film Deposited on Si Cantilever Embedded in PDMS for Tactile Sensing as Force and Vibration Detection International conference

    Harutoshi Takahashi, Yuta Namba, Takashi Abe, Masayuki Sohgawa

    The 12th Japan-Korea Conference on Ferroelectrics  2018.8 

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  • 触覚センサと質感定量評価の試み Invited

    寒川 雅之

    第5回 EIIRIS インテリジェントセンサ・MEMS研究会  2018.7  豊橋技術科学大学 エレクトロニクス先端融合研究所

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    Venue:豊橋商工会議所3階ホール  

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  • ミリ波レーダを用いた河川防災用センサシステムの開発

    寒川 雅之, ウィタカ アンドリュー, 酒井 直樹

    平成30年度電気学会センサ・マイクロマシン部門総合研究会(マイクロマシン・センサシステム研究会)  2018.7 

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    Venue:奈良  

    File: E総研2018寒川.pdf

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  • エラストマ封止PZT/Siマイクロカンチレバー振動覚センサの試作評価

    高橋 春暁, 難波 勇太, 安部 隆, 寒川 雅之

    平成30年度電気学会センサ・マイクロマシン部門総合研究会(フィジカルセンサ研究会)  2018.7 

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    Venue:奈良  

    File: エラストマ封止PZT・Siマイクロカンチレバー振動覚センサの試作評価修正.pdf

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  • Suppression of Deformation for Gripping Soft Objects Using Miniature Tactile Sensor with Hemisphere PDMS International conference

    Fumitoshi Suga, Ryoma Araki, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    The 9th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2018)  2018.6 

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    Venue:Hong Kong  

    File: apcot2018 abstract - final.pdf

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  • Thermally Assisted Reactive-Ion Etching Technique Using Detachable Self-Heated Stage International conference

    Gang Han, Yuka Kiryu, Daiki Ohkawa, Junichi Imai, Masayuki Sohgawa, Takashi Abe

    The 9th Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2018)  2018.6 

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    Venue:Hong Kong  

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  • 柔軟物把持制御用近接触覚センサの接触部形状の検討とカンチレバーの小型高密度配置による荷重分布計測

    菅 史賢, 荒木 凌馬, 安部 隆, 野間 春生, 寒川 雅之

    ロボティクス・メカトロニクス講演会2018  2018.6 

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    File: Microsoft Word - robomec2018 原稿-最終版.pdf

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  • Aβ検出用カンチレバーセンサ感度向上に向けたセンシングバイオ分子の検討

    谷口 智哉, 島内 寿徳, 寒川 雅之, 山下 馨, 野田 実

    第65回応用物理学会春季学術講演会  2018.3 

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    Venue:早稲田大学  

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  • フッ素エラストマを用いたMEMS触覚センサの耐水性向上

    佐藤 周平, 安部 隆, 寒川 雅之

    平成30年電気学会全国大会  2018.3  電気学会

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    Venue:九州大学伊都キャンパス  

    File: 2018電気学会全国大会予稿.pdf

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  • 近接・触覚複合MEMSセンサへのプローブ光LED集積化

    志和 昂, 荒木 凌馬, 安部 隆, 野間 春生, 寒川 雅之

    電気学会交通・電気鉄道/フィジカルセンサ合同研究会  2018.3  電気学会

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    Venue:刈谷商工会議所 大会議室  

    File: 近接・触覚複合MEMSセンサへのプローブ光LED集積化.pdf

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  • Development of Thermally Assisted Reactive Ion Etching with Desktop Type RIE System International conference

    Gang Han, Daiki Ohkawa, Takeshi Hitobo, Masayuki Sohgawa, Takashi Abe

    The 6th International Symposium on Fusion Technology 2018  2018.1 

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    Venue:Niigata, Japan  

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  • 小型電動マニピュレータによる柔軟物把持制御のための 近接・接触・滑り検知触覚センサ

    菅 史賢, 荒木 凌馬, 安部 隆, 寒川 雅之, 野間 春生

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  2017.11  電気学会センサ・マイクロマシン部門

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    Venue:広島国際会議場  

    File: 小型電動マニピュレータによる柔軟物把持制御のための 近接・接触・滑り検知触覚センサ.pdf

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  • 3D自己加熱ステージを用いたマイナーメタルの深掘り反応性イオンエッチング技術の開発

    韓 剛, 村田 祐貴, 大川 太基, 今井 純一, 寒川 雅之, 安部 隆

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  2017.11  電気学会センサ・マイクロマシン部門

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    Venue:広島国際会議場  

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  • 卓上型熱アシスト式反応性イオンエッチングシステムの開発

    大川 太基, 韓 剛, 人母 岳, 寒川 雅之, 安部 隆

    第8回マイクロ・ナノ工学シンポジウム  2017.11  日本機械学会マイクロ・ナノ工学部門

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    Venue:広島国際会議場  

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  • 繊細な把持制御に向けた近接触覚複合マイクロカンチレバーセンサの小型化・多素子化

    荒木 凌馬, 寒川 雅之, 野間 春生, 安部 隆

    第8回マイクロ・ナノ工学シンポジウム  2017.11  日本機械学会マイクロ・ナノ工学部門

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    Venue:広島国際会議場  

    File: 繊細な把持制御に向けた近接触覚複合マイクロカンチレバーセンサの小型化・多素子化.pdf

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  • MEMS触覚センサによる布の接触温冷感と風合いを合わせた評価

    志和 昂, 佐藤 文哉, 高橋 賢太, 安部 隆, 寒川 雅之, 野間 春生

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  2017.11  電気学会センサ・マイクロマシン部門

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    Venue:広島国際会議場  

    File: MEMS触覚センサによる布の接触温冷感と風合いを合わせた評価.pdf

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  • 光・ひずみ複合触覚センサを用いたポリオキシメチレン樹脂の表面形状・色計測による質感評価

    難波 勇太, 安部 隆, 寒川 雅之

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  2017.11  電気学会センサ・マイクロマシン部門

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    Venue:広島国際会議場  

    File: 光・ひずみ複合触覚センサを用いたポリオキシメチレン樹脂の表面形状・色計測による質感評価.pdf

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  • 外部磁場を利用した水晶発振回路式濃度センサに関する基礎研究

    富樫 裕基, 矢田 直人, 寒川 雅之, 安部 隆

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  2017.11  電気学会センサ・マイクロマシン部門

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    Venue:広島国際会議場  

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  • 微小流体回路融合型水晶発振回路式容量センサを用いた微小液滴のモニタリング

    江端 亮, 坂井 了, 寒川 雅之, 安部 隆

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  2017.10  電気学会センサ・マイクロマシン部門

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    Venue:広島国際会議場  

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  • Development of Artificial Haptic Model for Human Tactile Sense Using Machine Learning International conference

    Hikaru Shimoe, Kohei Matsumura, Haruo Noma, Masayuki Sohgawa, Masanori Okuyama

    IEEE Sensors 2017  2017.10 

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    Venue:Glasgow, Scotland, UK  

    We constructed a haptic stage model based on the model of human-tactile sense and cognitive process. Our model is a neural-network-based model that consists of supervised and unsupervised stages. Using surface-scanning results from our trial micro-tactile sensor, we confirmed the material- identification problem with our model. A conventional full CNN model achieved a 98.0% correct identification rate for 28 materials; however, our model achieved a rate of 67.2%.

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  • 皮膚性状計測へ向けた光・力複合MEMSセンサの研究

    佐藤 周平, 阿部 祐太, 安部 隆, 野間 春生, 寒川 雅之

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  2017.10  電気学会センサ・マイクロマシン部門

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    Venue:広島国際会議場  

    File: 皮膚性状計測へ向けた光・力複合MEMSセンサの研究.pdf

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  • ワイヤレス発振式水晶振動子型熱重量分析センサの開発と評価

    丸山 耕平, 坂口 淳, 寒川 雅之, 安部 隆

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  2017.10  電気学会センサ・マイクロマシン部門

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    Venue:広島国際会議場  

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  • ワイヤレス駆動可能なデュアルモード型QCMセンサの開発

    佐藤 育人, 坂口 淳, 寒川 雅之, 安部 隆

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  2017.10  電気学会センサ・マイクロマシン部門

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    Venue:広島国際会議場  

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  • ミネラルウォーターの品質評価のための非接触型水分析センサの開発

    小黒 悠, 矢田 直人, 清水 健司, 寒川 雅之, 安部 隆

    第34回「センサ・マイクロマシンと応用システム」シンポジウム  2017.10  電気学会センサ・マイクロマシン部門

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    Venue:広島国際会議場  

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  • A Selective Detection of Amyloid Beta in Human Serum by Strain Gauge Cantilever Sensor Immobilizing Liposome Incorporated with Cholesterol International conference

    Tomoya Taniguchi, Yuki Murakami, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

    The 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2017)  2017.10 

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    Venue:Savannah, Georgia, USA  

    We have newly confirmed a selective detection of amyloid beta (Aβ) in human serum with its dynamic behavior
    by a strain gauge cantilever sensor immobilizing liposome incorporated with cholesterol. We examined the effect
    of incorporating cholesterol in the liposome in order to decrease the interaction between the liposomes and many
    proteins in human serum. The result implied that cholesterol suppress the interaction because of stabilizing effect
    in the lipid membrane. Thus we concluded that we were able to detect Aβ, especially the state of its aggregation
    and fibrillization, in human serum by the cantilever sensor immobilizing liposome incorporated with cholesterol.

    File: Re_MicroTAS 2017_manuscript_0299_Tomoya Taniguchi.pdf

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  • 接触力・光・温度複合MEMSセンサによる布の温冷感センシング

    志和 昂, 佐藤 文哉, 高橋 賢太, 安部 隆, 野間 春生, 寒川 雅之

    平成29年電気学会電子・情報・システム部門大会  2017.9  電気学会 電子・情報・システム部門

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    Venue:サンポートホール高松  

    File: 電気学会原稿完成版.pdf

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  • Detection of Aβ(1-40) Protein in Human Serum as a Causative Agent of Alzheimer's Disease by Strain Gauge Cantilever Biosensor Immobilizing Liposome Incorporating Cholesterol International conference

    SOHGAWA Masayuki

    Eurosensors 2017  2017.9 

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    Venue:Paris, France  

    We have successfully measured amyloid beta (Aβ) (1-40) protein added in human serum by a NiCr strain gauge cantilever biosensor immobilized with liposomes incorporating cholesterol. Importantly, we investigated the effect of incorporation of cholesterol in the liposome in order to suppress the interaction between the liposome and many different proteins included in the human serum. It was revealed that incorporating cholesterol suppresses the interaction between the proteins other than Aβ in human serum and the liposome. Finally, we detected Aβ(1-40) in human serum with typical chronological behaviors due to Aβ aggregation and fibrillization. Furthermore, as a digital low-pass filtering procedure could reduce external noises, the cantilever sensor immobilized with liposome incorporating cholesterol can detect low-concentrated Aβ in human serum.

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  • 光・ひずみ複合MEMSセンサによるポリオキシメチレン樹脂加工表面の質感評価

    難波 勇太, 安部 隆, 寒川 雅之

    平成29年度電気学会E部門総合研究会(フィジカルセンサ研究会)  2017.6  電気学会センサ・マイクロマシン部門

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    Venue:イーグレひめじ  

    File: 光・ひずみ複合MEMSセンサによるポリオキシメチレン樹脂加工表面の質感評価-提出版-寒川修正案.pdf

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  • DEEP REACTIVE ION ETCHING TECHNIQUE INVOLVING USE OF 3D SELF-HEATED CATHODE International conference

    Gang Han, Yuki Murata, Daiki Ohkawa, Masayuki Sohgawa, Takashi Abe

    The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2017)  2017.6 

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    Venue:Kaohsiung, Taiwan  

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  • GRIPPING CONTROL OF DELICATE AND FLEXIBLE OBJECT BY ELECTROMOTIVE MANIPULATOR WITH PROXIMITY AND TACTILE COMBO MEMS SENSOR International conference

    Ryoma Araki, Fumitoshi Suga, Takashi Abe, Haruo Noma, Masayuki Sohgawa

    The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2017)  2017.6 

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    Venue:Kaohsiung, Taiwan  

    File: PID4722959.pdf

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  • TEXTURE MEASUREMENT FOR FABRICS INCLUDING WARM/COOL AND FLUFFINESS SENSATION BY MULTIMODAL MEMS SENSOR International conference

    Fumiya Sato, Takashi Shiwa, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2017)  2017.6 

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    Venue:Kaohsiung, Taiwan  

    File: PID4721655.pdf

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  • 匂いセンサ応用のためのワイヤレス発振式マルチチャンネルQCMセンサの開発

    佐藤 育人, 坂口 淳, 寒川 雅之, 安部 隆

    ロボティクス・メカトロニクス講演会  2017.5  日本機械学会 ロボティクス・メカトロニクス部門

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    Venue:ビッグパレットふくしま  

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  • 柔軟物把持制御のための近接触覚複合MEMSセンサの出力評価

    菅 史賢, 荒木 凌馬, 安部 隆, 野間 春生, 寒川 雅之

    ロボティクス・メカトロニクス講演会2017  2017.5  日本機械学会 ロボティクス・メカトロニクス部門

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    Venue:ビッグパレットふくしま  

    File: robomech2017 原稿 修正完了(寒川先生確認済み) .pdf

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  • ひと触覚を模した人工触覚モデル実現の試み

    下江 輝, 松村 耕平, 寒川 雅之, 野間 春生

    力触覚の提示と計算研究会  2017.3  日本バーチャルリアリティ学会

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    Venue:東京農工大学 小金井キャンパス  

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  • 微小流体チップ対応水晶発振回路式液体センサの電極サイズ最適化

    江端 亮, 坂井 了, 寒川 雅之, 安部 隆

    平成29年電気学会全国大会  2017.3 

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    Venue:富山大学 五福キャンパス  

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  • 視覚・触覚複合MEMSセンサのエラストマ形状による力感度制御

    佐藤 周平, 安部 隆, 野間 春生, 寒川 雅之

    平成29年電気学会全国大会  2017.3 

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    Venue:富山大学 五福キャンパス  

    File: 視覚・触覚複合MEMSセンサのエラストマ形状による力感度制御.pdf

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  • AD患者血清中のおけるアミロイドβタンパク質検出に向けたリポソーム固定化カンチレバーバイオセンサにおける脂質種の検討

    谷口 智哉, 村上 祐樹, 西本 凌, 尾淵 浩也, 寒川 雅之, 山下 馨, 野田 実

    第64回応用物理学会春季学術講演会  2017.3  応用物理学会

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    Venue:パシフィコ横浜  

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  • 皮膚組織ひずみ計測のための柔軟物の多層構造とMEMS多軸力複合センサ出力の相関性評価

    阿部 祐太, 佐藤 周平, 安部 隆, 野間 春生, 寒川 雅之

    交通・電気鉄道/フィジカルセンサ合同研究会  2017.3  電気学会

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    Venue:愛知県産業労働センター ウインクあいち  

    File: 交通・電気鉄道フィジカルセンサ合同研究会完成3.pdf

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  • Development of self-heated cathode for thermally assisted reactive ion etching of minor metals International conference

    Gang Han, Yuki Murata, Daiki Okawa, Masayuki Sohgawa, Takashi Abe

    International Symposium on Micro-Nano Science and Technology 2016  2016.12 

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    Venue:Tokyo, Japan  

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  • Improvement of optical sensitivity for proximity and tactile combo sensor International conference

    Nao Umeki, Masanori Okuyama, Haruo Noma, Takashi Abe, Masayuki Sohgawa

    International Symposium on Micro-Nano Science and Technology 2016  2016.12 

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    File: IMPROVEMENT OF OPTICAL SENSITIVITY FOR PROXIMITY AND TACTILE COMBO SENSOR.pdf

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  • 触覚センシングのためのBiFeO3圧電体薄膜積層マイクロカンチレバーの作製

    河野 壮, 安部 隆, 寒川 雅之

    2016年度精密工学会北陸信越支部学術講演会  2016.11  精密工学会

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    Venue:新潟大学五十嵐キャンパス  

    File: 精密工学会原稿-河野.pdf

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  • 機能性メタル加工のための熱アシスト型反応性イオンエッチング技術の開発

    大川 太基, 村田 祐貴, 韓 剛, 今井 純一, 寒川 雅之, 安部 隆

    2016年度精密工学会北陸信越支部学術講演会  2016.11  精密工学会

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    Venue:新潟大学五十嵐キャンパス  

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  • Evaluation Method of Fabrics by Visual and Tactile Texture Information Using MEMS Combo Sensor International conference

    Kenta Takahashi, Masanori Okuyama, Haruo Noma, Takashi Abe, Masayuki Sohgawa

    IEEE Sensors 2016  2016.11  IEEE Sensors Council

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    Venue:Orlando, FL, USA  

    In this paper, we report texture measurement of the fabrics by a multimodal MEMS sensor. This sensor has sensitivity to both multi-axial force vector and light. Therefore, we can evaluate tactile texture by force measurement and visual texture by light measurement. This sensor has a possibility for texture measurement with both visual and tactile information in substitution for the human sensory test. In this work, various fabrics were chosen as the target object and evaluated by sensory test method using 10 test subjects. The dependences of the sensor output on reflection of probe light, reactive force, and frictional force by active approaching and touching of the sensor to the object surface were also evaluated. As a result, it is demonstrated that there is a good correlation between the results of the human sensory test and features of visual and tactile sensor output.

    File: Evaluation Method of Fabrics by Visual and Tactile Texture Information using MEMS Combo Sensor 最終版.pdf

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  • A Highly Sensitive Amyloid-β Detection by Cantilever Microsensor Immobilized with Liposome with Incorporated Cholesterol and Phosphatidylcholine Lipid with Short Hydrophobic Acyl Chains International conference

    Yuki Murakami, Tomoya Taniguchi, Ziyang Zhang, Kaoru Yamashita, Minoru Noda, Masayuki Sohgawa

    IEEE Sensors 2016  2016.10 

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    Venue:Orlando, FL, USA  

    We improved the sensitivity of NiCr strain gauge cantilever immobilized with liposome to detect Aβ protein with low concentration. In this work, by immobilizing liposome incorporated cholesterol on cantilever, we could detect 50-nM Aβ(1-40). Also, to investigate whether the hydrophobic carbon number of acyl chains of hydrophobic group influences Aβ-membrane interaction, DMPC, DPPC, and DSPC liposomes were immobilized, respectively, on the cantilever surface. The results show that DMPC-Aβ interaction is much larger than DPPC-Aβ and DSPC-Aβ interactions. We expect that the cantilever
    microsensor can apply to detect the Aβ(1-40) protein in patients of Alzheimer’s disease (AD) and also Mild Cognitive Impairment (MCI).

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  • ひずみ・光・熱複合センサを用いた布に対するマルチモーダル質感計測

    高橋 賢太, 佐藤 文哉, 志和 昂, 安部 隆, 奥山 雅則, 野間 春生, 寒川 雅之

    知覚情報研究会  2016.10  電気学会電子・情報・システム部門

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    File: ひずみ・光・熱複合センサを用いた布に対するマルチモーダル質感計測.pdf

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  • 近接・接触・滑りを検知できるMEMS多軸触覚センサを用いた小型電動マニピュレータ制御

    荒木 凌馬, 安部 隆, 野間 春生, 寒川 雅之

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  2016.10 

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    Venue:平戸文化センター  

    File: 近接・接触・滑りを検知できるMEMS多軸触覚センサを用いた小型マニピュレータ制御.pdf

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  • 真空中での水晶振動子式小型熱重量分析センサの昇温特性評価

    和田 涼介, 寒川 雅之, 安部 隆

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  2016.10 

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    Venue:平戸文化センター  

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  • 近接覚・触覚コンボセンサを用いた周波数変調近接計測

    梅木 尚, 奥山 雅則, 野間 春生, 安部 隆, 寒川 雅之

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  2016.10 

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    Venue:平戸文化センター  

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  • エネルギーキャリアモニタリング用水晶発振回路式非接触濃度センサの開発

    清水 健司, 柳田 祐太, 寒川 雅之, 安部 隆

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  2016.10 

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    Venue:平戸文化センター  

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  • 検出距離の長距離化のための非接触型水晶発振回路式液体濃度センサの開発

    南 宗君, 寒川 雅之, 安部 隆

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  2016.10 

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    Venue:平戸文化センター  

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  • 機械のヘルスケアモニタリング用水晶発振回路式非接触液体濃度センサの開発

    矢田 直人, 柳田 祐太, 寒川 雅之, 安部 隆

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  2016.10 

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    Venue:平戸文化センター  

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  • 機能性メタルの熱反応性イオンエッチングに対応した自己加熱式ステージの開発

    村田 祐貴, 韓 剛, 大川 太基, 今井 純一, 寒川 雅之, 安部 隆

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  2016.10 

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    Venue:平戸文化センター  

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  • 光・多軸力複合MEMSセンサによる多層柔軟物の変色・ひずみ評価

    阿部 祐太, 安部 隆, 奥山 雅則, 野間 春生, 寒川 雅之

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  2016.10  電気学会 センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:平戸文化センター  

    File: 光・多軸力複合MEMSセンサによる多層柔軟物の変色・ひずみ評価(阿部).pdf

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  • 光・力・温度複合MEMSセンサによる冷温感を含む質感の評価

    佐藤 文哉, 高橋 賢太, 安部 隆, 奥山 雅則, 野間 春生, 寒川 雅之

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  2016.10 

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:平戸文化センター  

    File: 光・力・温度複合MEMSセンサによる冷温感を含む質感の評価 最終版.pdf

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  • 片面励起型無線発振式QCMの周波数安定性の電極径,結晶方向依存性

    坂口 淳, 寒川 雅之, 安部 隆

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  2016.10 

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    Venue:平戸文化センター  

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  • 光・ひずみ複合センサを用いた布の視覚的・触覚的質感評価

    高橋 賢太, 安部 隆, 奥山 雅則, 野間 春生, 寒川 雅之

    第33回「センサ・マイクロマシンと応用システム」シンポジウム  2016.10 

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    Venue:平戸文化センター  

    File: 光・ひずみ複合センサを用いた布の視覚的・触覚的質感評価最終版.pdf

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  • Improvement of Sensitivity for Aβ Protein on Cantilever Biosensor by Incorporating DPPC Liposome with Cholesterol International conference

    Yuki Murakami, Ziyang Zhang, Tomoya Taniguchi, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

    The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences  2016.10 

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    Venue:Dublin, Ireland  

    This paper reports the sensitivity of cantilever biosensor with liposome as sensing biomolecules immobilized on the cantilever surface is improved by incorporating cholesterol in phospholipid membrane of DPPC liposome. We especially investigate whether incorporating cholesterol in the membrane is effective to influence and improve the sensitivity for Aβ protein as a causative agent of Alzheimer’s disease (AD). Consequently, the sensitivity of the cantilever sensor is significantly improved as 50-nM Aβ(1-40) has been detected by the incorporation of cholesterol. This result implies that the sensor has the possibility to detect Aβ(1-40) in plasma of AD patients.

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  • ひずみ・光・熱複合センサを用いたマルチモーダル質感計測の基礎検討

    高橋 賢太, 佐藤 文哉, 安部 隆, 奥山 雅則, 野間 春生, 寒川 雅之

    第77回応用物理学会秋季学術講演会  2016.9 

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    Venue:朱鷺メッセ  

    File: ひずみ・光・熱複合センサを用いたマルチモーダル質感計測の基礎検討修正版.pdf

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  • 低濃度Aβタンパク質検出用NiCr歪みゲージカンチレバーセンサの温度補償特性向上

    谷口 智哉, 寒川 雅之, 村上 祐樹, 張 子洋, 山下 馨, 野田 実

    第77回応用物理学会秋季学術講演会  2016.9 

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    Venue:朱鷺メッセ  

    File: 秋応物 2016.pdf

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  • 炭素鎖長の短い疎水基のリン脂質リポソームを用いたカンチレバーバイオセンサのAβタンパク質の検出感度向上の検討

    村上 祐樹, 谷口 智哉, 張 子洋, 寒川 雅之, 山下 馨, 野田 実

    第77回応用物理学会秋季学術講演会  2016.9 

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    Venue:朱鷺メッセ  

    File: 秋2016応物 (1).pdf

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  • A High-Sensitive Detection of Several Tens of nM of Amyloid-Beta by Cantilever-Type Biosensor Immobilized DPPC Liposome Incorporated with Cholesterol International conference

    Yuki Murakami, Ziyang Zhang, Tomoya Taniguchi, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

    Eurosensors XXX  2016.9 

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    Venue:Budapest, Hungry  

    We have previously developed a NiCr strain-gauge cantilever-based biosensor with liposomes as sensing biomolecules immobilized on the cantilever surface to investigate time course of dynamic behaviour of amyloid-beta (1-40) protein on lipid membrane. In this work, we attempt to improve effectively the sensitivity of the cantilever sensor by incorporating liposome with cholesterol to enhance Aβ-membrane interaction. Consequently, the sensitivity of the biosensor is significantly improved as 50-nM Aβ(1-40) has been detected. This result shows the possibility of detecting Aβ(1-40) in plasma of Alzheimer's disease (AD) patients because Aβ concentration in the plasma of AD patients is reported to be in the range from 75 to 100 nM.

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  • 片面励起型振動子を用いた無線発振式QCMの電極形状の最適化

    坂口 淳, 寒川 雅之, 安部 隆

    センサ・マイクロマシン部門総合研究会  2016.6  電気学会センサ・マイクロマシン部門

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    Venue:金沢市文化ホール  

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  • 近接覚・触覚コンボセンサにおける周波数変調プローブ光を用いた近接計測手法の検討

    梅木 尚, 野沢 瑛斗, 安部 隆, 奥山 雅則, 野間 春生, 寒川 雅之

    センサ・マイクロマシン部門総合研究会  2016.6  電気学会センサ・マイクロマシン部門

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    Venue:金沢市文化ホール  

    File: 近接覚・触覚コンボセンサにおける周波数変調プローブ光を用いた近接計測手法の検討.pdf

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  • 水晶発振回路を用いた2チャンネル型非接触液体センサの開発

    矢田 直人, 寒川 雅之, 安部 隆

    センサ・マイクロマシン部門総合研究会  2016.6  電気学会センサ・マイクロマシン部門

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    Venue:金沢市文化ホール  

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  • Thermal Reactive Ion Etching of Ti, Ta, Mo and Nb with SF6 Plasma International conference

    Gang Han, Yuki Murata, Yuto Minami, Masayuki Sohgawa, Takashi Abe

    The 8th Asia-Pacific Conference of Transducers and Micro/Nano Technologies (APCOT 2016)  2016.6 

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    Venue:Kanazawa, Japan  

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  • MEMSを利用した小型多機能触覚センサの開発 Invited

    寒川 雅之

    高分子ナノテクノロジー研究会  2016.6  高分子学会

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    Language:Japanese   Presentation type:Oral presentation (invited, special)  

    Venue:東京工業大学大岡山キャンパス  

    File: 原稿-新潟大学寒川.pdf

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  • Texture Characterization Including Warm/cool Sensation by Force, Light, and Temperature Sensitive MEMS Sensor International conference

    Fumiya Sato, Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    The 8th Asia-Pacific Conference of Transducers and Micro/Nano Technologies (APCOT 2016)  2016.6 

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    Venue:Kanazawa, Japan  

    File: APCOT2016-Sohgawa20160212.pdf

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  • 水晶発振回路を用いたエネルギーキャリアの非接触濃度モニタリング技術の開発

    清水 健司, 寒川 雅之, 安部 隆

    ロボティクス・メカトロニクス講演会2016  2016.6  日本機械学会 ロボティクス・メカトロニクス部門

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    Venue:パシフィコ横浜  

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  • スマートマニピュレーション制御のための近接触覚複合MEMSセンサ

    荒木 凌馬, 安部 隆, 野間 春生, 寒川 雅之

    ロボティクス・メカトロニクス講演会2016  2016.6  日本機械学会 ロボティクス・メカトロニクス部門

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    Venue:パシフィコ横浜  

    File: スマートマニピュレーション制御のための近接触覚複合MEMSセンサ.pdf

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  • Enhanced sensitivity of cantilever-based liposome biosensor for detection of Aβ aggregation and fibril growth by incorporating DPPC liposome with cholesterol International conference

    Ziyang Zhang, Yuuki Murakami, Tomoya Taniguchi, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

    Biosensors 2016  2016.5 

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    Venue:Gothenburg, Sweden  

    アルツハイマー病(AD)の原因タンパク質と言われるアミロイドβ(Aβ)のラベルフリー検知技術の開発はその病理解析や初期診断に寄与する。我々は近年Aβの凝集と繊維成長の検知にNiCrひずみゲージカンチレバー型リポソームバイオセンサの応用可能性を提案してきた。しかし、その検知濃度限界(1 μM)はAD患者の血漿中におけるAβの濃度範囲である75~100 nMに対して不足していた。本研究ではコレステロールの取り込みによるリン脂質の特性変化によりバイオセンサの感度の向上を目指した。カンチレバー表面にセンシングバイオ分子としてリポソームを固定化し、リポソーム-Aβ間の相互作用によるカンチレバー変位を検知する。高コレステロールはADのリスクを高めるとの各種報告から、コレステロールを取り込んだDPPCリポソームを作製、カンチレバー上に固定化することで、脂質膜とAβの相互作用におけるコレステロールの効果を調べ、感度向上のための実現性を確認した。コレステロールの取り込みにより相互作用の開始時間が早まり、また相互作用の強さも増加した。これにより100 nMのAβ溶液においても変化がみられ、本提案手法がAD患者の血漿中におけるAβ検知への可能性を持つことが示された。

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  • 圧電型触覚センサのためのBiFeO3薄膜の作製と評価

    河野 壮, 三原 雅人, 田辺 任, 安部 隆, 奥山 雅則, 寒川 雅之

    第63回応用物理学会春季学術講演会  2016.3  応用物理学会

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    Venue:東京工業大学大岡山キャンパス  

    我々はこれまで、マイクロカンチレバー構造とNiCrひずみゲージを用いた触覚センサの研究を行ってきた。今回、低消費電力化や出力の安定化のため、圧電体を検知部として用いることを目指し、鉛・アルカリフリーのBiFeO3薄膜をSi基板およびTi基板上に製膜し特性を評価した。いずれの基板の場合でも良好な結晶性と強誘電性が得られたが、Siに比べてTi上では残留分極が1/10以下と小さくなった。

    File: 圧電型触覚センサのためのBiFeO3薄膜の作製と評価.pdf

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  • コレステロール含有リポソームによるカンチレバーバイオセンサのAβ検出感度の向上

    村上 祐樹, 張 子洋, 谷口 智哉, 寒川 雅之, 山下 馨, 野田 実

    第63回応用物理学会春季学術講演会  2016.3  応用物理学会

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    Venue:東京工業大学大岡山キャンパス  

    我々はAβ検出用リポソーム固定カンチレバーセンサを開発した。現時点で同センサの検出感度を高めるための改良を進めている。コレステロールはAβの凝集過程を促進し、脂質膜とAβとの相互作用を増強するという報告がある。そこでバイオセンシング分子であるDPPCリポソームにコレステロールを含有させることにより、同センサの感度向上を試みた。その結果、10 nMオーダーの低濃度Aβの検出可能性が示唆された。

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  • 親水基の異なるリン脂質リポソームを用いたマイクロカンチレバーセンサによるAβタンパク質識別能力の評価

    張 子洋, 村上 祐樹, 谷口 智哉, 寒川 雅之, 山下 馨, 野田 実

    第63回応用物理学会春季学術講演会  2016.3  応用物理学会

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    Venue:東京工業大学大岡山キャンパス  

    近年我々はAβ非標識検出用リポソーム固定NiCr歪ゲージカンチレバーセンサを開発している。同センサを用いて種々のリン脂質膜上でのAβ動態変化の特徴を評価し、Aβとの相互作用が強いリン脂質種を選定することによりAβの高感度検出を実現できると考えられる。今回は、親水基の異なるリン脂質膜からなるリポソームをカンチレバー上に固定化したセンサを作製し、Aβとの相互作用を評価してその特徴を比較、検討した。

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  • 片面励起型振動子を用いた脱着式QCMセンサ

    坂口 淳, 田川 侑弥, 寒川 雅之, 安部 隆

    平成28年電気学会全国大会  2016.3  電気学会

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    Venue:東北大学川内北キャンパス  

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  • 熱反応性イオンエッチング法によるマイナーメタルの微細加工

    村田 祐貴, 南 佑人, 韓 剛, 寒川 雅之, 安部 隆

    平成28年電気学会全国大会  2016.3  電気学会

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    Venue:東北大学川内北キャンパス  

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  • コレステロール添加リポソーム固定カンチレバーセンサによる低濃度Aβタンパク質の検出

    谷口 智哉, 村上 祐樹, 張 子洋, 山下 馨, 野田 実, 寒川 雅之

    平成28年電気学会全国大会  2016.3  電気学会

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    Venue:東北大学川内北キャンパス  

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  • 近接覚・触覚コンボセンサの光検出感度最適化

    梅木 尚, 野沢 瑛斗, 奥山 雅則, 野間 春生, 安部 隆, 寒川 雅之

    交通・電気鉄道/フィジカルセンサ合同研究会  2016.3  電気学会

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    Venue:愛知県産業労働センター ウインクあいち  

    介護ロボットや器用な産業用ロボットにおいて、対象物の近接と接触を検知するセンサは重要である。我々はこれまで近接と触覚を単一の素子で同時検知できる光・ひずみ検出MEMSセンサを提案し、その光検知感度について実験的に明らかにしてきた。本研究では、これまでの実験結果をもとに、近接検知のための光検出部の設計最適化および作製と評価を行ったので報告する。

    File: (梅木)フィジカルセンサ研究会論文-修正4.pdf

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  • Mass sensitivity amplification by using Gaussian-shaped quartz crystal resonator International conference

    Hiroki Kutsuwada, Sho Watanabe, Masayuki Sohgawa, Takashi Abe

    2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)  2016.1 

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  • Characterization of BiFeO3 Thin Film for Tactile Sensor Using Microcantilevers with Piezoelectric Capacitor and Strain-Gauge International conference

    Takeshi Kohno, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    IEEE Sensors 2015  2015.11 

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    Lead-free BiFeO3 thin films for tactile sensor using microcantilevers have been prepared on Pt and SrRuO3/Pt thin films on a SiO2 /Si substrate by RF sputtering, and the electrical characteristics have been optimized by controlling the substrate temperature, gas pressure, and oxygen partial pressure in deposition process. The BiFeO3 thin film (thickness: 300 nm) deposited on SrRuO3 (thickness: 80 nm) deposited at substrate temperature of 500°C in gas pressure of 0.6 Pa and oxygen partial pressure of 0.24 Pa has good crystallinity, ferroelectricity, and piezoelectric property. Therefore, it is demonstrated that BiFeO3 thin film can be a good sensing material as a detection part of tactile sensor. Furthermore, a cantilever structure with piezoelectric capacitor and strain gauge has been fabricated and different time-dependent outputs from them can be obtained.

    File: Characterization of BiFeO3 Thin Film for Tactile Sensor Using Microcantilevers with Piezoelectric Capacitor and Strain-Gauge.pdf

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  • Basic Study for Tactile and Visual Texture Measurement by Multimodal MEMS Sensor with Force and Light Sensitivity International conference

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    IEEE Sensors 2015  2015.11 

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    The tactile and visual texture measurement by
    multimodal MEMS sensor is reported. This MEMS sensor has two function in a structure: force-sensitivity of resistance of microcantilevers embedded in the elastomer and light-sensitivity of a MOS structure on the Si substrate. Deflection of the cantilever induced by applied force depends on the tactile texture including hardness, thickness, and roughness of the object, and is detected as DC resistance change of the strain gauge film. On the other hand, incident light depends on the visual texture of the object, and is detected as AC impedance change at 5 MHz. It is confirmed that the resistance and impedance changes depend on the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that multimodal texture can be characterized by a single MEMS sensor.

    File: PID3845957.pdf

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  • 水晶振動子を用いた液体分析用コンボセンサにおける形状最適化

    坂井 了, 今井 寛明, 寒川 雅之, 安部 隆

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  2015.10  電気学会センサ・マイクロマシン部門

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    Venue:朱鷺メッセ  

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  • 光・ひずみ複合センサによるマルチモーダルな質感計測の基礎検討

    高橋 賢太, 安部 隆, 奥山 雅則, 野間 春生, 寒川 雅之

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  2015.10  電気学会センサ・マイクロマシン部門

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    Venue:朱鷺メッセ  

    File: 光・ひずみ複合センサによるマルチモーダルな質感計測の基礎検討.pdf

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  • 微量液体に対応した水晶発振回路式液体濃度センサの開発

    柳田 祐太, 須佐 翼, 寒川 雅之, 安部 隆

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  2015.10  電気学会センサ・マイクロマシン部門

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    Venue:朱鷺メッセ  

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  • 水晶振動子を用いた小型熱重量分析用センサシステムの開発

    和田 涼介, 飯田 尚之, 寒川 雅之, 安部 隆

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  2015.10  電気学会センサ・マイクロマシン部門

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    Venue:朱鷺メッセ  

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  • 水晶発振回路を用いた二周波型非接触ケミカルコンボセンサ

    須佐 翼, 矢田 直人, 寒川 雅之, 安部 隆

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  2015.10  電気学会センサ・マイクロマシン部門

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    Venue:朱鷺メッセ  

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  • 自己加熱式ステージを用いたチタンの熱反応性イオンエッチングとその最適化

    村田 祐貴, 南 佑人, 寒川 雅之, 安部 隆

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  2015.10  電気学会センサ・マイクロマシン部門

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    Venue:朱鷺メッセ  

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  • 水晶振動子を用いた熱重量センサの高性能化

    信濃 耀介, 田川 侑弥, 寒川 雅之, 安部 隆

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  2015.10  電気学会センサ・マイクロマシン部門

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    Venue:朱鷺メッセ  

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  • 時間応答性の異なる検知部を集積したマイクロカンチレバー型触覚センサの基礎検討

    河野 壮, 三原 雅人, 安部 隆, 奥山 雅則, 野間 春生, 寒川 雅之

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  2015.10  電気学会センサ・マイクロマシン部門

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    Venue:朱鷺メッセ  

    File: 時間応答性の異なる検知部を集積したマイクロカンチレバー型触覚センサの基礎検討.pdf

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  • Aβタンパク質検知のためのリポソーム固定マイクロカンチレバーの温度補償と微小流路構造内での計測の検討

    安部 裕太, 安部 隆, 張 子洋, 野田 実, 寒川 雅之

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  2015.10  電気学会センサ・マイクロマシン部門

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  • ガウシアン形状ATカット水晶振動子の作製および評価

    轡田 浩規, 渡辺 将, 寒川 雅之, 安部 隆

    第32回「センサ・マイクロマシンと応用システム」シンポジウム  2015.10  電気学会センサ・マイクロマシン部門

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    Venue:朱鷺メッセ  

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  • Detection of Amyloid-beta at Different Stages of Fibrillization Using a Cantilever-based Liposome Biosensor International conference

    Ziyang Zhang, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

    The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2015)  2015.10 

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    This paper reports a new approach for label-free detection of Alzheimer's disease (AD)-causative agent, namely amyloid-beta protein (Aβ). We selected Aβ(1-40) as a target for detection using a strain-gauge cantilever-based biosensor with liposomes as sensing biomolecules immobilized on the cantilever surface. The Aβ(1-40) proteins at different stages of fibrillization process were prepared and detected, respectively. The result shows that characteristic of chronological change of the gauge resistance depends on the aggregation state of Aβ(1-40). Then time course of dynamic behaviour of Aβ(1-40) on liposome was investigated. The result clearly exhibits the fibrillization process of Aβ(1-40) on lipid membrane.

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  • Detection of Amyloid-Beta Proteins during Fibrillization Process by Liposome-Immobilized Microcantilevers in Microfluidic Channel International conference

    Masayuki Sohgawa, Ziyang Zhang, Yuta Abe, Takashi Abe, Kaoru Yamashita, Minoru Noda

    The 2015 International Conference on Solid State Devices and Materials (SSDM2015)  2015.9  The Japan Society of Applied Physics

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    Venue:Sapporo Convention Center  

    We have fabricated a microfluidic channel for a long-term stable supply of target solution for a continuous measurement and a characterization of the fibrillization process in order to characterize amyloid beta (Aβ) as a causative protein of Altzheimer diseases at different stages of fibrillization on a model cell membrane as a label-free detection. The microfluidic channel was integrated with a liposome-immobilized microcantilever sensor for detection of liposome-Aβ interaction by measuring the resistance change of NiCr strain gauge embedded in the cantilever. Finally, it is found that the characteristic of chronological resistance change depends clearly on the states of Aβ during fibrillization. It is available by the developed device to distinguish the states of Aβ (monomer, aggregation-intermediate, or fibril) and evaluate the aggregation/fibrillization process of Aβ proteins.

    File: Abstract_SSDM2015-sohgawa-rev2.pdf

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  • カンチレバーバイオセンサによる異種脂質膜-Aβタンパク質間相互作用の検出

    張 子洋, 寒川 雅之, 山下 馨, 野田 実

    第76回応用物理学会秋季学術講演会  2015.9  応用物理学会

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    Venue:名古屋国際会議場  

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  • Characterization of Fibrillization Process of Amyloid-Beta on Lipid Membrane Utilizing a Cantilever-Based Liposome Biosensor Invited International conference

    Ziyang Zhang, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

    Eurosensors 2015  2015.9 

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    We have developed a strain-gauge cantilever-based biosensor with liposomes as model cell membrane immobilized on the cantilever surface to investigate time course of dynamic behavior of amyloid-beta (1-40) protein (Aβ(1-40)) on lipid membrane. The results of this work clearly exhibit the characteristic of chronological change of the gauge resistance, which is closely related to the dependence of Aβ-liposome interaction extent on the state of Aβ during fibrillization and the type of lipid molecule. Therefore, it is considered that these results can adequately reflect the fibrillization process of Aβ(1-40) on different kinds of lipid membranes. Meanwhile, it means that we are able to discriminate the molecular states of Aβ and evaluate Aβ fibrillization process using the cantilever-based liposome biosensor.

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  • Optimization of the electrode shape of a microheater-integrated QCM for thermogravimetric analysis

    Yuya Tagawa, Yosuke Shinano, Masayuki Sohgawa, Takashi Abe

    2015.7 

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    We optimized the electrode shape of a microheater-integrated QCM sensor for evaluating spacecraft materials. Then,we evaluated heating properties and temperature distributions of the QCM sensor. Finally, we found out the optimized QCM shows low power consumption and the high stability of frequency at the desired temperature.

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  • Investigation of temperature compensated detection of amyloid beta proteins by liposome-immobilized micro-cantilevers in microchannel

    Yuta Abe, Takashi Abe, Ziang Zhang, Minoru Noda, Masayuki Sohgawa

    2015.7 

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    We have measured the interaction between amyloid beta proteins and liposomes immobilized on micro-cantilever surface with NiCr thin film as strain gauge. In this work, the compensation method to distinguish mechanical deflection of the micro-cantilever from thermal effects is investigated. Furthermore, measurement in the solution flow with a microchannel is also investigated.

    File: Aβタンパク質検知のためのリポソーム固定マイクロカンチレバーセンサの温度補償とマイクロ流路中計測の検討.pdf

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  • Evaluation of mass response characteristics of Gaussian-shaped AT-cut quartz crystal resonator

    Hiroki Kutsuwada, Sho Watanabe, Yuki Kitani, Masayuki Sohgawa, Takashi Abe

    2015.7 

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    In this work, the mass response distribution and the sensitivity on the electrode of quartz resonator are presented for various shapes of AT-cut quartz crystal resonator. Interestingly, the sensitivity amplification in the Gaussian-shaped resonator was measured. This resonator is expected to apply for the mass measurement of the various particles.

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  • Non-contact Sensor for Measurement of Liquid Concentration Based on Quartz Oscillator International conference

    Non-contact Sensor for Measurement of Liquid Concentration Based on Quartz Oscillator

    Transducers 2015  2015.6 

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    In this paper, a noncontact sensor for the measurement of liquid concentration using a quartz oscillator is reported. An out-of-plane electric field with a planer sensing capacitor (SC) is used for sensing a liquid on a spacer. This sensor measures the changes in the capacitance of the SC as the changes in the frequency of the quartz oscillator. The capacitance is dependent on the relative permittivity and the conductivity of the liquid sample on the spacer. Therefore, it
    is possible to measure the concentration of the sample. The response is very stable because in this sensor, the SC is incorporated into the quartz oscillator. Because the quartz crystal resonator is not contact with liquid, the proposed
    sensor has a high quality factor (approximately 30,000). Moreover, this sensor can be used with a general IC and an
    electronic component, with a low cost. The proposed sensor can be expected to be used for various kinds of liquid sensing applications.

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  • Development of Liquid Concentration Sensor Using Crystal Oscillator Circuit Embedded in a Robotic Artificial Skin

    Yuta Yanagita, Masayuki Sohgawa, Takashi Abe

    The Robotics and Mechatronics Conference 2015  2015.5  JSME Robotics and Mechatronics division

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    Venue:Miyako Messe, Kyoto  

    We report the development of liquid concentration sensor using crystal oscillator circuit embedded in a robotic artificial skin. We optimized the shape of the sensing capacitor for sensing a small quantity of liquid locally. This sensor is composed of the sensing capacitor and quartz crystal resonator (QCR). The frequency of QCR changes by a liquid in contact with the artificial skin on the sensing capacitor. The sensor can measure the concentration of the liquid.

    File: 人工皮膚下への埋め込みを想定した水晶発振回路式液体濃度センサの開発.pdf

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  • Characterization of Surface Texture Depending on Hardness, Thickness, and Roughness Using MEMS Tactile Sensor

    Kenta Takahashi, Takashi Abe, Masanori Okuyama, Haruo Noma, Masayuki Sohgawa

    The Robotics and Mechatronics Conference 2015  2015.5  JSME Robotics and Mechatronics division

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    Venue:Miyako Messe, Kyoto  

    In this paper, we report the texture quantitative measurement using the miniature multi-axial tactile sensor with microcantilevers which are fabricated by MEMS technology and embedded in the elastomer. The Si microcantilevers are deformed by both normal and shear forces and the deflection of the cantilever can be detected as resistance change of a strain gauge. The resistance changes by active-touching (pushing and sliding) to the object have been characterized and they are correlated with hardness, thickness, and roughness of the object. The first component obtained by principal component analysis of the correlation matrix among the resistance changes shows the surface texture characteristics (roughness, smoothness, friction) of the object. On the other hand, the second principal component shows texture characteristics including both bulky and elastic feelings of the object.

    File: MEMS多軸触覚センサを用いた定量的質感計測のための基礎検討.pdf

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  • Fabrication of Multi-layer Micro-cantilever Structure and Its Application to Miniature Sensor Devices

    Masayuki Sohgawa, Takashi Abe

    2015.3 

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    Venue:Toyohashi University of Technology  

    We have fabricated micro-cantilevers of silicon or titanium using wet or dry etching process. The micro-cantilevers with functional thin films can be applied to micro-mechanical sensors such as tactile sensors. In this paper, fabrication process and application to miniature sensor devices of the micro-cantilevers have been reported.

    File: TM_paper_stylefile_word-sohgawa.pdf

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  • Time Course Investigation of Dynamic Behavior of Amyloid Beta Protein on Liposome Using Cantilever-based Biosensor

    Ziyang Zhang, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

    The 62nd JSAP Spring Meeting  2015.3  The Japan Society of Applied Physics

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    Venue:Tokai Univeisity  

    File: 2015春_張子洋(最終版).pdf

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  • 褥瘡管理用装置のためのマイクロメカニカルセンサ

    寒川 雅之, 安部 隆, 奥山 雅則, 野間 春生, 縄田 厚

    日本機械学会北陸信越支部 第52期 総会・講演会  2015.3  日本機械学会北陸信越支部

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    Venue:新潟工科大学  

    File: hs52sohgawa_final.pdf

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  • マイクロマシニングによるチタン製微小手術針の一括加工

    南 佑人, 山田 周史, 寒川 雅之, 安部 隆

    日本機械学会北陸信越支部 第52期 総会・講演会  2015.3  日本機械学会北陸信越支部

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    Venue:新潟工科大学  

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  • 微細表面形状に基づ くテクスチャ提示における触覚情報と視覚情報の効果の評価

    小里 篤史, Garcia Josue David, 若尾 あすか, 寒川 雅之, 奥山 雅則, 野間 春生, 田中 弘美

    第15回計測自動制御学会システムインテグレーション部門講演会  2014.12  計測自動制御学会システムインテグレーション部門

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    Venue:東京ビッグサイト  

    File: si2014(kosato.ver8).pdf

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  • 液滴保持構造付きNiCr薄膜歪ゲージカンチレバーセンサを用いたリポソーム—タンパク質間相互作用の検出

    張 子洋, 赤井 俊夫, 寒川 雅之, 高田 佳祐, 山下 馨, 野田 実

    電気学会バイオ・マイクロシステム研究会  2014.12  電気学会

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    Venue:名古屋駅前イノベーションハブ会議室  

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  • Evaluation of Effect on Visual and Tactile Impression in Texture Display Based on Fine Surface Profile International conference

    Atsushi Kosato, Garcia Josue David, Asuka Wakao, Masayuki Sohgawa, Masanori Okuyama, Haruo Noma, Hiromi Tanaka

    AsiaHaptics 2014  2014.11  The Virtual Reality Society of Japan

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    Venue:Tsukuba, Japan  

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  • Texture Measurement and Identification of Object Surface by MEMS Tactile Sensor International conference

    Masayuki Sohgawa, Kosuke Watanabe, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    IEEE Sensors 2014  2014.11 

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    The surface texture of various materials has been characterized by tactile sensor with a micro-cantilever embedded in the PDMS elastomer. The maximum output (resistance of strain gauge on the cantilever) change of the sensor by indentation of the object on the sensor surface depends on the hardness or thickness of the object. Moreover, output change is asymmetric in a back-and-forth indentation test because of relaxation of deformation. On the other hand, the output increases rapidly at beginning of stepwise sliding of the sensor at the object surface because of static friction, and changes periodically corresponding to stick-slip oscillation or surface roughness after slipping. It is demonstrated that about 30 materials of papers, clothes, leathers, and plastic sheets, have been classified into 5 clusters by the principal component analysis using feature quantities extracted from the sensor outputs.

    File: PID3327209.pdf

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  • Multimodal Measurement of Proximity and Touch Force by Light- and Strain-sensitive Multifunctional MEMS Sensor International conference

    Masayuki Sohgawa, Akito Nozawa, Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    IEEE Sensors 2014  2014.11 

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    A multimodal sensor with Si micro-cantilever embedded in PDMS elastomer for measurement of proximity and touch forces has been fabricated and characterized. DC resistance of the strain gauge on the cantilever changes in proportion to the indentation depth of the object. On the other hand, the AC (> 0.5 MHz) impedance including photo-sensitive component of Si increases with increase of distance between the sensor surface and the object because of decrease of light intensity reflected on the object surface. Moreover, the AC impedance is different between grounding and floating of the proximate object because of difference of distribution of electrostatic field between electrodes, so that it is suggested that proximity can be detected as the impedance change by light as well as the electric field.

    File: PID3327207.pdf

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  • Bioassay of Proteins in Stable Solution State Using A Novel Cantilever-based Biosensor International conference

    Ziyang Zhang, Toshio Akai, Masayuki Sohgawa, Keisuke Takada, Kaoru Yamashita, Minoru Noda

    IEEE Sensors 2014  2014.11 

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    We have developed a micro-cantilever biosensor with embedded NiCr thin film strain gauge. Meanwhile, DPPC liposomes have been selected as sensing biomolecules to be immobilized on the surface of the micro-cantilever. The liposome-protein interaction was detected by measuring the resistance change rate of the strain gauge. In this work, a PDMS-based sealed reservoir structure was newly fabricated and added on the sensor to keep the target solution stable, where a long-time stable detection was achieved. The resistance of the cantilever-based biosensor increased with time in lysozyme or carbonic anhydrase from bovine (CAB) aqueous solution, and the characteristic of chronological resistance change varied with the concentration and kind of the proteins. It is expected that the micro-cantilever sensor with droplet-sealing structure can be used for bioassay of various proteins in future.

    File: IEEE SENSORS 2014 PROCEEDINGS.pdf

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  • A Novel Micro-Cantilever Biosensor with Droplet Sealed Structure for Stable Detection of Target Proteins International conference

    Ziyang Zhang, Toshio Akai, Masayuki Sohgawa, Keisuke Takada, Kaoru Yamashita, Minoru Noda

    The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014)  2014.10 

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    We have developed Si micro-cantilever biosensor with embedded NiCr thin film strain gauge and liposomes immobilized on its surface. This time, a PDMS-based sealed reservoir structure was newly fabricated and added on the sensor to keep the protein solution stable, where a long-time stable detection was achieved. The resistance of the cantilever sensor increased with time in carbonic anhydrase from bovine (CAB) or lysozyme aqueous solution, and the characteristic of chronological resistance change varied with the kind and concentration of proteins. It is expected that this micro-cantilever sensor with droplet-sealed structure becomes an effective device for bioassay of proteins.

    File: uTAS-14 manuscript (Z. Zhang).pdf

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  • チタニウムウェハの貫通加工のための熱反応性イオンエッチング法の開発

    山田 周史, 南 佑人, 寒川 雅之, 安部 隆

    第31回「センサ・マイクロマシンと応用システム」シンポジウム  2014.10  電気学会センサ・マイクロマシン部門

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    Venue:くにびきメッセ(松江市)  

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  • DRIE技術により作製したチタン製微小手術針の機械的特性評価

    南 佑人, 山田 周史, 寒川 雅之, 安部 隆

    第31回「センサ・マイクロマシンと応用システム」シンポジウム  2014.10  電気学会センサ・マイクロマシン部門

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    Venue:くにびきメッセ(松江市)  

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  • 非接触型液体濃度検出用水晶センサ

    須佐 翼, 渡部 尊, 寒川 雅之, 安部 隆

    第31回「センサ・マイクロマシンと応用システム」シンポジウム  2014.10  電気学会センサ・マイクロマシン部門

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    Venue:くにびきメッセ(松江市)  

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  • 近接覚・触覚マルチモーダルセンサの近接検知原理の解析

    野沢 瑛斗, 安部 隆, 奥山 雅則, 野間 春生, 東 輝明, 寒川 雅之

    第31回「センサ・マイクロマシンと応用システム」シンポジウム  2014.10  電気学会センサ・マイクロマシン部門

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    Venue:くにびきメッセ(松江市)  

    File: センサシンポジウム原稿.pdf

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  • Label-Free Sensing of Various Proteins Using NiCr Strain Gauge Cantilever with Immobilized Liposome

    Ziyang Zhang, Masayuki Sohgawa, Kaoru Yamashita, Minoru Noda

    第31回「センサ・マイクロマシンと応用システム」シンポジウム  2014.10  電気学会センサ・マイクロマシン部門

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    Venue:くにびきメッセ(島根県立産業交流会館)  

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  • Aβラベルフリー検知リポソーム固定NiCr歪ゲージカンチレバーセンサ

    張 子洋, 寒川 雅之, 山下 馨, 野田 実

    第75回応用物理学会秋季学術講演会  2014.9  応用物理学会

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    Venue:北海道大学札幌キャンパス  

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  • Bioassay of Target Proteins Using A NiCr Strain Gauge-Cantilever Liposome Biosensor with Droplet-Sealed Structure International conference

    Ziyang Zhang, Toshio Akai, Masayuki Sohgawa, Keisuke Takada, Kaoru Yamashita, Minoru Noda

    International Conference on Solid State Devices and Materials (SSDM2014)  2014.9 

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    We have developed Si micro-cantilever biosensor with embedded NiCr thin film strain gauge and DPPC liposome immobilized on its surface. This time, a PDMS-based sealed reservoir structure was newly fabricated and added on the sensor to keep the protein solution stable, where a long-time stable detection was achieved. The resistance of the cantilever sensor increased with time in carbonic anhydrase from bovine (CAB) or lysozyme aqueous solution, and the characteristic of chronological resistance change varied with the kind and concentration of proteins. We expect that this micro-cantilever sensor with droplet sealed structure becomes an effective device for bioassay of proteins.

    File: SSDM2014_Z. ZHANG (1).pdf

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  • Multifunctional tactile sensors using MEMS cantilevers Invited International conference

    Masayuki Sohgawa

    The 6th IEEE International Nanoelectronics Conference (IEEE INEC 2014)  2014.7  IEEE

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    Venue:Hokkaido University, Sapporo, Hokkaido, Japan  

    A multifunctional tactile sensor which can detect approximation, contact, slipping, and surface texture of the target has been developed. The sensor is composed of multiple MEMS cantilevers fabricated on Si substrate embedded in PDMS, and can detect normal and shear forces. By indenting and sliding the sensor on the object surface, output depending on hardness, friction, and roughness, etc. can be obtained. Moreover, a function for detection of proximity was integrated monolithically through photo-sensitivity of Si substrate.

    File: INEC2014sohgawa-final.pdf

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  • 人間の物質表面感の識別とMEMS多軸センサの計測結果に関する研究

    若尾 あすか, 渡部 公介, 寒川 雅之, 奥山 雅則, 野間 春生

    マルチメディア・仮想環境基礎研究会  2014.7  電子情報通信学会

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    Venue:東京大学 山上会館(本郷キャンパス)  

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  • BiFeO3圧電体薄膜を用いたマイクロカンチレバー触覚センサの検討

    三原 雅人, 安部 隆, 奥山 雅則, 野間 春生, 東 輝明, 寒川 雅之

    平成26年度電気学会センサ・マイクロマシン部門総合研究会  2014.5  電気学会センサ・マイクロマシン部門

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    Venue:東京大学生産技術研究所  

    我々はマイクロカンチレバーをエラストマで封止し、圧力と剪断力の両方を検出できる触覚センサの研究を行っているが、今回、検出部として圧電体薄膜を用いることでその省電力化を試みた。人体に有害な鉛を含まないBiFeO3薄膜をスパッタリングによって製膜し、結晶性と組成から圧電性を示す薄膜を得て、さらにそれを製膜したカンチレバーを振動させることで、最大で約300 mVの出力電圧を測定することができた。

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  • DRIE技術によるチタン製微小手術針の開発

    南 佑人, 山田 周史, 寒川 雅之, 安部 隆

    平成26年度電気学会センサ・マイクロマシン部門総合研究会  2014.5  電気学会センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京大学生産技術研究所  

    本研究ではDRIE技術によるチタン製微小手術針の試作について報告する.手術用微小針のモデルを作製し,その針を使用して穿刺実験および穿刺角度実験を行い,寸法変化に伴う穿刺抵抗力の影響とチタン製針の機械的特性について検討した.穿刺力は太さを細くするにつれて低減することと,穿刺角度が小さい場合でも折損しないことを確認した.この実験結果から,チタンの特性を生かした医療用マイクロ加工ツールの応用が期待される.

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  • 光・ひずみ複合MEMSセンサを用いた近接覚・触覚マルチモーダル計測

    野沢 瑛斗, 横山 輔久登, 金島 岳, 奥山 雅則, 安部 隆, 野間 春生, 東 輝明, 寒川 雅之

    ロボティクス・メカトロニクス講演会2014  2014.5  日本機械学会 ロボティクス・メカトロニクス部門

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:富山市総合体育館  

    MEMS技術により作製したマイクロカンチレバーを用いて物体の接触を検知すると同時に、半導体の光導電効果により物体の近接情報を取得できる近接覚・触覚マルチモーダルセンサを作製した。接触力はカンチレバー上のひずみゲージ抵抗の変化として、物体近接は半導体を含む交流インピーダンス変化として検出できた。また、近接計測の環境温度、環境光に対する影響を調べ、通常の環境ではそれらの影響はほとんど見られなかった。さらに、極近傍の物体近接距離は静電界分布によるインピーダンス変化で検知できる可能性が示された。

    File: robomechsohgawa-rev4.pdf

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  • 水晶振動子を用いた非接触型アルコール濃度検出法の開発

    須佐 翼, 寒川 雅之, 安部 隆

    ロボティクス・メカトロニクス講演会2014  2014.5  日本機械学会 ロボティクス・メカトロニクス部門

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    Venue:富山市総合体育館  

    File: ロボメック論文 .pdf

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  • MEMS触覚センサによる物体表面質感の計測法

    渡部 公介, 金島 岳, 奥山 雅則, 野間 春生, 東 輝明, 安部 隆, 寒川 雅之

    平成26年電気学会全国大会  2014.3  電気学会

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    Venue:愛媛大学 城北キャンパス  

    マイクロカンチレバーを半球形状PDMSに埋め込んだ触覚センサを作製し、それを用いた種々の物体表面質感の計測と識別を行った。計測方法としては、人間の指先のアクティブタッチと同様、センサを対象物表面に押し当てて、水平方向に滑らせることで行う。その時の出力から、対象物の種類によって異なる変化を特徴量として抽出する。今回、既報告の特徴量に加え、スティックスリップや凹凸による変化をフーリエ変換した周波数スペクトルから特徴量等を新たに抽出し、計7つの特徴量を用いた主成分分析を行うことで、紙や布、プラスチック板等を含む32種類の対象物を質感の似た5つのグループに分類することが出来た。

    File: H26電気学会全国大会 予稿-寒川.pdf

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  • リポソーム固定NiCr歪ゲージカンチレバーセンサを用いたタンパク質検知

    張 子洋, 赤井 俊夫, 寒川 雅之, 高田 佳祐, 山下 馨, 野田 実

    第61回応用物理学会春季学術講演会  2014.3  応用物理学会

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    Venue:青山学院大学相模原キャンパス  

    File: 2014春応物_張子洋(最終版).pdf

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  • 生体タンパク質識別用リポソーム固定NiCr薄膜ひずみゲージカンチレバーセンサ

    寒川 雅之, 張 子洋, 赤井 俊夫, 高田 佳祐, 山下 馨, 野田 実

    平成26年電気学会全国大会  2014.3  電気学会

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    Venue:愛媛大学 城北キャンパス  

    表面MEMSプロセスにより作製したマイクロカンチレバー上に自己組織化単分子(SAM)膜によりリポソームを固定化し、カンチレバー表面と生体蛋白質の相互作用による撓み変化をNiCr薄膜ひずみゲージの抵抗変化として電気的・静的に検出する。純水液滴中にカンチレバーを浸漬した場合には抵抗は時間的に安定であった。一方、複数の生体タンパク質水溶液に浸漬した場合、タンパク質のカンチレバーへの吸着により抵抗が時間的に増加した。その変化率はタンパク質の種類によって異なり、900秒後に炭酸脱水酵素(CAB)では約70ppm、リゾチームでは約20ppm増加した。これは分子量の違いやリポソームとの相互作用の大きさの違いを反映したものと考えられる。

    File: 電気学会全国大会予稿-寒川.pdf

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  • 水晶振動子式モノリシックメタノール濃度センサに関する理論解析

    渡部 尊, 石井 駿平, 外山 晋二郎, 寒川 雅之, 安部 隆

    第30回「センサ・マイクロマシンと応用システム」シンポジウム  2013.11  電気学会センサ・マイクロマシン部門

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    Venue:仙台  

    File: 講演論文.pdf

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  • 昇温脱離式QCMにおいセンサの形状最適化

    酒井 盾平, 飯田 尚之, 寒川 雅之, 安部 隆

    第5回マイクロ・ナノ工学シンポジウム  2013.11  日本機械学会マイクロ・ナノ工学部門

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    Venue:仙台  

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  • デスクトップ型DRIE装置を用いたチタニウム製マイクロ構造体の作製

    山田 周史, 加勢 彩乃, 人母 岳, 寒川 雅之, 安部 隆

    第30回「センサ・マイクロマシンと応用システム」シンポジウム  2013.11  電気学会センサ・マイクロマシン部門

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    Venue:仙台  

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  • 楕円形状ATカット水晶振動子の形状最適化

    渡邉 将, 気谷 裕樹, 寒川 雅之, 安部 隆

    第30回「センサ・マイクロマシンと応用システム」シンポジウム  2013.11  電気学会センサ・マイクロマシン部門

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    Venue:仙台  

    File: watanabe.pdf

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  • 宇宙応用のための昇温脱離式QCMセンサの開発

    飯田 尚之, 酒井 盾平, 寒川 雅之, 安部 隆

    第30回「センサ・マイクロマシンと応用システム」シンポジウム  2013.11  電気学会センサ・マイクロマシン部門

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    Venue:仙台  

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  • Detection of Interaction Between Biological Proteins and Immobilized Liposomes by a Micro-Cantilever with NiCr Thin Film Strain Gauge International conference

    Masayuki Sohgawa, Takashi Fujimoto, Keisuke Takada, Kaoru Yamashita, Minoru Noda

    IEEE Sensors 2013  2013.11 

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  • 水晶振動子を用いたドロップレットリアクタ用多点濃度計測法の開発

    外山 晋二郎, 渡部 尊, 寒川 雅之, 安部 隆

    第30回「センサ・マイクロマシンと応用システム」シンポジウム  2013.11  電気学会センサ・マイクロマシン部門

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    Venue:仙台  

    File: センサシンポ 2013.pdf

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  • 漏れ電界を用いた液体分析用デュアル水晶センサの開発

    今井 寛明, 武石 大一, 寒川 雅之, 安部 隆

    第5回マイクロ・ナノ工学シンポジウム  2013.11  日本機械学会マイクロ・ナノ工学部門

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    Venue:仙台  

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  • High Resolution Measurement of Multi-axial Force in Real Time Using Miniature Tactile Sensor with Microcantilevers Embedded in PDMS International conference

    Hokuto Yokoyama, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Takashi Abe, Haruo Noma, Teruaki Azuma

    IEEE Sensors 2013  2013.11 

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  • 単一MEMSセンサ素子による近接覚・触覚計測手法の検討

    横山 輔久登, 金島 岳, 奥山 雅則, 安部 隆, 野間 春生, 東 輝明, 寒川 雅之

    第30回「センサ・マイクロマシンと応用システム」シンポジウム  2013.11  電気学会センサ・マイクロマシン部門

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    Venue:仙台  

    File: SS30_Paper_yokoyama_final.pdf

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  • PTFEモールドを用いた機能性PDMSのマイクロパターニングプロセスの開発

    佐山 祐亮, 高久 応祐, 寒川 雅之, 安部 隆

    第30回「センサ・マイクロマシンと応用システム」シンポジウム  2013.11  電気学会センサ・マイクロマシン部門

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    Venue:仙台  

    File: 講演論文.pdf

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  • 微細加工QCMを用いた単一微粒子計測技術の開発

    気谷 裕樹, 渡邉 将, 寒川 雅之, 安部 隆

    第30回「センサ・マイクロマシンと応用システム」シンポジウム  2013.11  電気学会センサ・マイクロマシン部門

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    Venue:仙台  

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  • Multi-axial Tactile Sensor with Micro-cantilever Embedded in Hemispherical Elastomer for Surface Texture Measurement International conference

    Kosuke Watanabe, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Haruo Noma, Teruaki Azuma

    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013 & Eurosensors XXVII)  2013.6 

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    Venue:Barcelona, Spain  

    We have fabricated the multi-axial tactile sensor which has micro-cantilevers with strain gauge film on Si embedded in hemispherical elastomer, and various kinds of papers have been identified by active touch. Transient responses of the resistance change have been obtained when the sensor was pushed and moved on various kinds of blank papers successively. Some features are extracted from the response by a principal component analysis and the papers are classified in several clusters.

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  • Design and Evaluation of Microheater Combined QCM Array for Thermal Desorption Spectroscopy International conference

    Jumpei Sakai, Naoyuki Iida, Masayuki Sohgawa, Takashi Abe

    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013 & Eurosensors XXVII)  2013.6 

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    Venue:Barcelona, Spain  

    In this paper, we propose a single microheater combined quartz crystal microbalance array for thermal desorption spectroscopy. The each QCM has two electrodes for exciting thickness shear mode (TSM) vibrations on one side of the crystal and a double-spiral-shape heater on the other side. The resonance frequency is stable when a voltage was applied on the microheater. Carbon microparticles for gas adsorption were coated on one of the QCMs and the frequency change during temperature increase was extracted by subtracting the change of the other QCM. The proposed QCM array can monitor small mass changes at sub-ng level as a function of temperature.

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  • Identification of Various Kinds of Papers Using Multi-axial Tactile Sensor with Micro-cantilevers International conference

    Kosuke Watanabe, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    The IEEE World Haptics Conference 2013  2013.4 

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    Venue:Daejeon Convention Center, Daejeon, Korea  

    Various kinds of papers have been identified by active touch of a multi-axial tactile sensor which has micro-cantilevers with strain gauge film on Si. When fine surface of the standard surface roughness scale and the printed stripe pattern on a banknote have been scanned by the tactile sensor, it allows to measure such fine roughness as a resistance change of the gauge film, and the triangular unevenness could be obtained down to 20 μm. Transient responses of the resistance change have been obtained when the sensor was pushed and moved on various kinds of blank papers successively. Some features are extracted from the response by a principal component analysis and the papers are classified in four clusters.

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  • NiCr薄膜歪ゲージマイクロカンチレバーセンサを用いたリポソーム‐タンパク質間相互作用検出

    藤本 貴士, 寒川 雅之, 高田 佳祐, 山下 馨, 野田 実

    第60回応用物理学会春季学術講演会  2013.3  応用物理学会

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    Venue:神奈川工科大学  

    File: NiCr 薄膜歪ゲージマイクロカンチレバーセンサを用いたリポソーム‐タンパク質間相互作用検出.pdf

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  • マイクロカンチレバー型触覚センサを用いた多軸力計測システムの構成と評価

    横山 輔久登, 寒川 雅之, 金島 岳, 奥山 雅則, 東 輝明, 野間 春生

    平成25年電気学会全国大会  2013.3  電気学会

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    Venue:名古屋大学  

    File: H25電気学会原稿final(横山).pdf

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  • NiCr薄膜歪ゲージマイクロカンチレバー構造によるリポソーム-蛋白質間相互作用検出

    寒川 雅之, 藤本 貴士, 高田 佳祐, 山下 馨, 野田 実

    平成25年電気学会全国大会  2013.3  電気学会

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    Venue:名古屋大学  

    File: H25電気学会全国大会予稿(寒川)ver3.pdf

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  • Fabrication of High Resolution Tactile Sensor Using Through-Si-via Technology International conference

    Hokuto Yokoyama, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    25th International Microprocesses and Nanotechnology Conference  2012.11  The Japan Society of Applied Physics

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    Venue:Kobe Meriken Park Oriental Hotel, Kobe, Japan  

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  • Dynamic Measurement of Surface Texture of Paper Using the Multi-axial Tactile Sensor with Micro-cantilevers

    Kosuke Watanabe, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    2012.10 

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  • MEMSカンチレバー型触覚センサを用いた紙葉類の表面触感識別手法の開発

    渡部 公介, 寒川 雅之, 金島 岳, 奥山 雅則, 野間 春生

    第二回次世代センサ研究発表会  2012.10  次世代センサ協議会

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    Venue:東京ビッグサイト 西3・4ホール センサエキスポジャパン2012展示会場内 特設会場  

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  • 3次元集積化MEMSカンチレバー型多軸触覚センサ

    横山 輔久登, 寒川 雅之, 金島 岳, 奥山 雅則, 野間 春生

    第二回次世代センサ研究発表会  2012.10  次世代センサ協議会

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    Venue:東京ビッグサイト 西3・4ホール センサエキスポジャパン2012展示会場内 特設会場  

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  • 磁場中90°off-axis PLD法による多結晶BiFeO3薄膜の作製と評価

    朴 正敏, 中嶋 誠二, 寒川 雅之, 金島 岳, 奥山 雅則

    第73回応用物理学会学術講演会  2012.9  応用物理学会

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    Venue:愛媛大学・松山大学  

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  • Preparation of Epitaxial BiFeO3 Thin Films on La-SrTiO3 Substrate by Magnetic-Field-Assisted Pulsed Laser Deposition International conference

    Jung Min Park, Seiji Nakashima, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama

    The 9th Korea-Japan Conference on Ferroelectrics  2012.8 

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  • 球・円柱表面形状を用いた動的表面テクスチャ計測多軸触覚センサ

    寒川 雅之, 植松 達也, 金島 岳, 奥山 雅則, 野間 春生

    電気学会センサ・マイクロマシン部門総合研究会フィジカルセンサ研究会  2012.6  電気学会 センサ・マイクロマシン部門, センサ・マイクロマシン部門各技術委員会

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    Venue:京都大学 百周年時計台記念館  

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  • Heterogeneous Integration of LSI Amplifier and the Tactile Sensor Using Stacking and Through-Si-via Techniques International conference

    Masayuki Sohgawa, Hokuto Yokoyama, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    2012 MRS Spring Meeting & Exhibit  2012.4 

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  • 信号増幅回路を積層集積化したマイクロカンチレバー型多軸触覚センサの作製

    横山 輔久登, 平嶋 大樹, 寒川 雅之, 金島 岳, 奥山 雅則, 野間 春生

    平成24年電気学会全国大会  2012.3  電気学会

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    Venue:広島工業大学  

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  • 磁場中PLD法によるエピタキシャルBiFeO3薄膜の作製と評価

    朴 正敏, 中嶋 誠二, 寒川 雅之, 金島 岳, 奥山 雅則

    第59回応用物理学関係連合講演会  2012.3  応用物理学会

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    Venue:早稲田大学 早稲田キャンパス  

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  • 3次元集積化多軸触覚センサのためのTSV作製

    平嶋 大樹, 横山 輔久登, 寒川 雅之, 金島 岳, 奥山 雅則, 野間 春生

    第59回応用物理学関係連合講演会  2012.3  応用物理学会

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    Venue:早稲田大学 早稲田キャンパス  

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  • Ferroelectric Property and Microstructure Evolution of Polycrystalline BiFeO3 Films Prepared by Pulsed Laser Deposition under Magnetic Field International conference

    Jung Min Park, Seiji Nakashima, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama

    International Conference on Advanced Electromaterials (ICAE2011)  2011.11  The Korean Institute of Electrical and Electronic Material Engineers (KIEEME)

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    Venue:Jeju, Korea  

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  • マイクロカンチレバー型多軸触覚センサによる物体表面のテクスチャ計測

    植松 達也, 横山 輔久登, 寒川 雅之, 金島 岳, 奥山 雅則, 野間 春生

    第28回「センサ・マイクロマシンと応用システム」シンポジウム  2011.9  電気学会センサ・マイクロマシン部門

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    Venue:東京 タワーホール船堀  

    触覚センサ素子を動的に接触させて測定することで、物体表面の微小な凹凸や摩擦状態を検出する方法を開発した。上に印刷したインクと印刷していない紙面の摩擦係数の違いで、センサ出力の時間変化が異なった。また、静摩擦・動摩擦状態の間におけるスティック・スリップ現象も検知することができた。

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  • 小型多軸触覚センサを用いた物体表面の質感計測

    植松 達也, 横山 輔久登, 寒川 雅之, 金島 岳, 奥山 雅則, 野間 春生

    第16回日本バーチャルリアリティ学会大会  2011.9  日本バーチャルリアリティ学会(VRSJ)

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:はこだて未来大学  

    触覚センサ素子を動的に接触させて測定することで、物体表面の微小な凹凸や摩擦状態を検出する方法を開発した。上に印刷したインクと印刷していない紙面の摩擦係数の違いで、センサ出力の時間変化が異なった。また、一万円札の数十μmの微小な縞模様も、センサを動かしてなぞることで出力に一定周期の変化が見られたことから検出が可能であると考えられる。

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  • Fabrication of Tactile Sensor Array Using Microcantilever with Low-TCR Nickel-Chromium Alloy Thin Film for Slippage Detection International conference

    Masayuki Sohgawa, Daiki Hirashima, Yusuke Moriguchi, Tatsuya Uematsu, Wataru Mito, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    EUROSENSORS XXV  2011.9 

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    Venue:Athens, Greece  

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  • 磁場中PLD法によるBiFeO3薄膜の微細構造と強誘電特性

    朴 正敏, 中嶋 誠二, 寒川 雅之, 金島 岳, 奥山 雅則

    第72回応用物理学会学術講演会  2011.8  応用物理学会

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    Venue:山形大学  

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  • NiCrゲージ薄膜の抵抗温度係数低減によるカンチレバー型触覚センサの高分解能化

    守口 祐介, 平嶋 大樹, 植松 達也, 寒川 雅之, 金島 岳, 奥山 雅則, 野間 春生

    電気学会センサ・マイクロマシン部門総合研究会フィジカルセンサ研究会  2011.6  電気学会センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京工業大学  

    カンチレバー構造を作製することにより、熱膨張差で起きる熱変形により歪みが変化し、見かけ上の抵抗温度係数になる。エラストマに埋め込むことで低減できるが、エラストマ自体も熱膨張を起こすのでそれによる影響もあり、見かけの抵抗温度係数をゼロにするのは難く、熱膨張の少ないエラストマ材料を用いる必要がある。NiCr組成を最適化したターゲットを用いスパッタリング製膜することで、安定して抵抗温度係数を低減できるようになった。

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  • マイクロカンチレバー型触覚センサアレイを用いた回転滑りの検出手法

    水戸 和, 山添 大丈, 多田 昌裕, 寒川 雅之, 金島 岳, 奥山 雅則, 野間 春生

    日本機械学会ロボティクス・メカトロニクス講演会2011(ROBOMEC2011)  2011.5  日本機械学会

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:岡山  

    本報告では触覚センサをロボットの指先に実装した場合の、把持物体のモーメント力と回転滑りの識別手法についてのものである。識別には触覚センサアレイ3素子からの出力を用い、あらかじめそれぞれの状態での各センサ信号を教示データとして学習させておき、把持状態は学習データに対してk-最近傍法を用いて判別する。

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  • NiCrひずみゲージ薄膜を用いたエラストマ埋込型触覚センサの熱膨張率差による影響

    守口 裕介, 平嶋 大樹, 寒川 雅之, 金島 岳, 奥山 雅則, 野間 春生

    平成23年電気学会全国大会  2011.3  電気学会

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    Venue:大阪大学  

    これまでNiCr薄膜の組成比を最適化することで抵抗温度係数を低減できることを示したが、今回はさらにカンチレバー上に成膜することによる熱的変形による影響を調べた。温度変化が起きるとカンチレバーを構成する層間の熱膨張差で熱変形が起き、歪みの変化から抵抗が変化し、これが見かけの抵抗温度係数となることを確認した。

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  • Signal Processing Methods for Micro Cantilever Type Tactile Sensor International conference

    Wataru Mito, Hirotake Yamazoe, Shunsuke Yoshida, Masahiro Tada, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    8th France-Japan Congress and 6th Europe-Asia Congress on Mechatronics (Mecatronics 2010)  2010.11 

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    Venue:Yokohama, Japan  

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  • Crosstalk Reduction of Tactile Sensor Array with Projected Cylindrical Elastomer over Sensing Element International conference

    Tatsuya Uematsu, Masayuki Sohgawa, Wataru Mito, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    23rd International Microprocesses and Nanotechnology Conference (MNC2010)  2010.11  The Japan Society of Applied Physics

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    Language:English   Presentation type:Poster presentation  

    Venue:Kokura, Fukuoka, Japan  

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  • Distribution Measurement of Normal and Shear Forces by using Tactile Sensor Array with Micro-cantilevers International conference

    Daiki Hirashima, Tatsuya Uematsu, Masayuki Sohgawa, Wataru Mito, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    23rd International Microprocesses and Nanotechnology Conference (MNC2010)  2010.11  The Japan Society of Applied Physics

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    Venue:Kokura, Fukuoka, Japan  

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  • 凸部エラストマを有する触覚センサアレイのクロストーク低減

    植松 達也, 寒川 雅之, 水戸 和, 金島 岳, 奥山 雅則, 野間 春生

    第27回「センサ・マイクロマシンと応用システム」シンポジウム  2010.10  電気学会 センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松江  

    エラストマの横方向への変形によるセンサ素子間のクロストークを低減するために、円筒状エラストマを用いた触覚センサアレイを設計した。円筒形状を用いることでクロストークは低減できるが横方向の変形に対し耐久性が弱くなる。そこでエラストマの変形を有限要素法を用いて解析し、円筒の間に50-100μmの平坦部を設けることでそれらを両立できることが分かった。

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  • マイクロカンチレバー型触覚センサによる圧力・剪断力分布測定

    平嶋 大樹, 植松 達也, 寒川 雅之, 水戸 和, 金島 岳, 奥山 雅則, 野間 春生

    第27回「センサ・マイクロマシンと応用システム」シンポジウム  2010.10  電気学会 センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:松江  

    マイクロカンチレバー型触覚センサを用い、仮想的にアレイを構成して垂直力と剪断力の空間分布の測定を行った。センサ素子の位置を少しずつ動かしながら、半球と円柱をセンサ表面に押し当て計測し、それぞれの形状に応じた垂直力・剪断力の分布を得ることができた。

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  • Gripping status classification using an array of micro cantilever type tactile sensor International conference

    Wataru Mito, Hirotake Yamazoe, Shunsuke Yoshida, Masahiro Tada, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

    International Conference on Advanced Mechatronics 2010  2010.10 

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    Venue:Osaka, Japan  

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  • Confirmation of gripping status classification using an array of micro cantilever type tactile sensor

    2010.5 

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    We have designed and fabricated a tactile sensors array with three inclined micro-cantilevers on a single sensor embedded in elastomer. Each sensor element can detect both normal and shear stresses. In this paper, we propose classification method of gripping status using sensor array and machine learning algorithm based on hidden marcov model. By integrating multiple sensor data using machine learning algorithm using hidden marcov model, our method allows to detect partial contact status such as non-contact, three types of partial contact, full-contact. Through experiments, we confirmed that our method achieves better classification ratio than existing methods using single sensor data.

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  • NiCrゲージ薄膜を用いたエラストマ埋込型触覚センサの出力ドリフト低減と高感度化

    寒川 雅之, 植松 達也, 橘 弘人, 美馬 達也, 金島 岳, 奥山 雅則, 山下 馨, 野田 実, 野間 春生

    平成22年電気学会全国大会  2010.3  電気学会

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    Venue:明治大学  

    組成比を最適化し抵抗温度係数を小さくしたNiCr合金薄膜を用いて、マイクロカンチレバー型触覚センサの抵抗値のドリフト・ノイズを低減し、出力の安定性・再現性を高めた。これにより5kPa以下の誤差で力ベクトルを検知することが可能となった。

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  • 3方向カンチレバーを用いた多軸触覚センサの作製と基礎特性

    橘 弘人, 釜鳴 志朗, 美馬 達也, 寒川 雅之, 金島 岳, 奥山 雅則, 山下 馨, 野田 実, 野間 春生, 樋口 誠良

    第26回「センサ・マイクロマシンと応用システム」シンポジウム  2009.10  電気学会 センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:東京 タワーホール船堀  

    エラストマ中に埋め込まれた3つの異なる方向を向いたマイクロカンチレバーを用いた触覚センサアレイを作製・評価した。印加力ベクトルの各軸の成分に対し各カンチレバーの抵抗は線形な変化を示した。これによりあらかじめ各軸の力に対する係数を実験的に決定しておけば、3つの抵抗変化から力ベクトルの各成分を求めることができる。

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  • MEMS技術を用いた次世代ロボット用多軸触覚センサの作製

    寒川 雅之, 金島 岳, 山下 馨, 野田 実, 奥山 雅則, 野間 春生

    電子情報通信学会電子デバイス研究会  2009.7  電子情報通信学会

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    Venue:大阪大学  

    近年注目されているサポートロボットや器用な産業用ロボット用に集積化多軸触覚センサを開発している。このセンサは垂直力と剪断力を同時に計測でき、ヒューマンフレンドリーな表面を持ち、さらにLSI技術との融合が可能である。現在、力の大きさと方向を検知でき、さらにアレイ化にも成功している。

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  • 集積化触覚センサ用NiCrゲージ薄膜の抵抗温度係数の低減

    橘 弘人, 釜鳴 志郎, 松浦 宏俊, 寒川 雅之, 金島 岳, 奥山 雅則, 山下 馨, 野田 実, 野間 春生

    電気学会センサ・マイクロマシン部門総合研究会フィジカルセンサ研究会  2009.7  電気学会 センサ・マイクロマシン部門

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    Venue:東京工科大学  

    触覚センサの出力安定性はスパッタリングで成膜したNiCrを用いることで大きく改善できたが、さらなる安定化を目指してNiCrの組成比をコントロールすることで抵抗温度係数の低減を試みた。NiとCrのターゲットの面積比を変えることで様々な組成の薄膜を作製し、温度特性や結晶性等を調べた結果、Crの量が40~60%のときに温度係数が小さくなることが分かった。

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  • Tactile Array Sensor with Inclined Chromium/Silicon Piezoresistive Cantilevers Embedded in Elastomer International conference

    Masayuki Sohgawa, Tatsuya Mima, Hiroyuki Onishi, Takeshi Kanashima, Masanori Okuyama, Kaoru Yamashita, Minoru Noda, Masayoshi Higuchi, Haruo Noma

    The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2009)  2009.6 

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    Venue:Denver, CO USA  

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  • リポソーム固定化カンチレバー型歪み抵抗センサの検討

    吉村 友里, 浅井 健, 寒川 雅之, 島内 寿徳, 馬越 大, 山下 馨, 奥山 雅則, 久保井 亮一, 野田 実

    第56回応用物理学関係連合講演会  2009.3  応用物理学会

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    Venue:筑波大学  

    リポソームは生体分子と相互作用することがしられており、カンチレバー上に固定化して相互作用による質量変化などに基づく歪み変化の検知を検討した。カンチレバー表面をSAM処理し、液滴滴下によりリポソームが固定化され出力が変化した。さらにリポソームを固定化後のカンチレバー表面状態と出力の相関関係について評価した。

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  • Siピエゾ抵抗を用いた傾斜カンチレバー触覚アレイセンサ

    美馬 達也, 大西 浩之, 寒川 雅之, 金島 岳, 奥山 雅則, 山下 馨, 野田 実, 樋口 誠良, 野間 春生

    平成21年電気学会全国大会  2009.3  電気学会

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    Venue:北海道大学  

    マイクロカンチレバー型触覚センサ素子を複数配置し、アレイセンサの構成を検討した。アレイセンサ表面全体に力を印加した場合、すべての素子で垂直力・剪断力ともに対して出力が得られた。しかし、センサ表面の一部に力を印加した場合、力を印加していない素子にもエラストマの横方向への変形により出力が現れてしまい、対策が必要であることを示した。

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  • リポソーム固定化カンチレバー型歪み抵抗センサの検討

    吉村 友里, 浅井 健, 山下 馨, 野田 実, 寒川 雅之, 島内 寿徳, 馬越 大, 奥山 雅則, 久保井 亮一

    平成21年電気学会全国大会  2009.3  電気学会

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    Venue:北海道大学  

    リポソームは生体分子と相互作用することがしられており、カンチレバー上に固定化して相互作用による質量変化などに基づく歪み変化の検知を検討した。カンチレバー表面をSAM処理し、液滴滴下によりリポソームが固定化され出力が変化した。

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  • Stability Improvement of Tactile Sensor of Normal and Shear Stresses Using Ni-Cr Thin Film Gauge International conference

    Masayuki Sohgawa, Hiroyuki Onishi, Yu-Ming Huang, Hiroto Tachibana, Minoru Noda, Takeshi Kanashima, Kaoru Yamashita, Masanori Okuyama, Haruo Noma

    2008 Material Research Society Fall Meeting  2008.12  Materials Research Society

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    Language:English   Presentation type:Poster presentation  

    Venue:Boston, MA USA  

    Tactile sensing is important to detect objects and their weight for various robots especially used for nursing-care and precise parts assembly. This tactile sensing of the robots must be similar to humans sensing. So in order o fulfill these requirements, we propose tactile sensor of micro-cantilevers which can detect both normal and shear stresses and have human-friendly surface. Micro-cantilevers were fabricated on SOI wafer ( ~2 μm thick Si layer, 1 - 2 μm thick BOX layer) by the surface micromachining and were adequately inclined using internal stresses produced by deflection control layer (200 nm thick chromium or 2 μm thick perfluoropolymer) . Micro-cantilevers are covered with elastomer (PDMS) to protect micro-cantilevers and to control stress detection range. When the stress is added to the surface of elastomer, the deformation of micro-cantilevers along with elastic polymer is detected as resistance change of strain gauge layer formed on the cantilevers. The normal and shear stresses can be distinguished by using two face-to-face cantilevers. When only shear stress is added to the tactile sensor, the summation of resistance change of two cantilevers becomes very small, but the differential of resistance change increases. In the case of normal stress, the summation increases but the differential becomes very small. Therefore, our tactile sensor can detect both normal and shear stresses independently. In earlier work, Si piezo-resistance gauge to sense the stress is used as sensing element, but Temperature Coefficient of Resistance (TCR) of the gauge is large and resistance drift may disturb the sensing precision. To decrease the resistance drift, we use NiCr thin film as strain gauge. TCR of NiCr changes with the deposition condition. Vacuum evaporation and sputtering are used for NiCr deposition, and sputtering temperature is changed between RT and 600°C. As a result, TCR is 0.054%/K (vacuum evaporation), 0.0082%/K (sputtering, RT) and 0.0065%/K (sputtering, 600°C). TCR of Si piezo-resistance is 0.25%/K but NiCr thin film decreases TCR well. By using NiCr thin film, temperature drift of this sensor is suppressed enough and the minimum sensitivity is obtained to be 0.5kPa (5g/cm2). This work was supported by NEDO.

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  • NiCr薄膜歪みゲージを用いた圧力・剪断力触覚センサの出力特性改善

    大西 浩之, 橘 弘人, 黄 裕銘, 寒川 雅之, 金島 岳, 奥山 雅則, 山下 馨, 野田 実, 野間 春生

    第25回「センサ・マイクロマシンと応用システム」シンポジウム  2008.10  電気学会 センサ・マイクロマシン部門

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    Venue:沖縄コンベンションセンター  

    マイクロカンチレバー型触覚センサにおいて検知部に温度係数の小さいNiCr合金薄膜を用いているが、今回スパッタリング法を用いて成膜することでさらに抵抗温度係数を小さくすることができた。温度係数は製膜温度に依存し、600℃での製膜で最小値0.0065%となった。

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  • Detection of Normal and Shear Stresses by Tactile Sensors with Piezoresistive Micro-cantilever and Elastomer International conference

    Masayuki Sohgawa, Hiroyuki Onishi, Tatsuya Mima, Yu-Ming Huang, Takeshi Kanashima, Kaoru Yamashita, Minoru Noda, Masanori Okuyama, Masaaki Ikeda, Haruo Noma

    2008 Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT)  2008.6 

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    Venue:Tainan, Taiwan  

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  • NiCr薄膜歪みゲージによるポリマー/Siカンチレバー型多軸触覚センサの高分解能化

    黄 裕銘, 寒川 雅之, 大西 浩之, 金島 岳, 奥山 雅則, 山下 馨, 野田 実, 野間 春生

    電気学会センサ・マイクロマシン部門総合研究会フィジカルセンサ研究会  2008.6  電気学会 センサ・マイクロマシン部門

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    Venue:仙台  

    これまでポリマー/Siカンチレバー型触覚センサの検知部としてはPtひずみゲージを用いていたが、抵抗の温度依存性が大きく出力に大きなドリフトが表れていた。そこで温度係数の小さいNiCr薄膜を用いて温度特性を改善し高分解能化を試みた。真空蒸着により作製したNiCrひずみゲージはバルク材料に比べれば大きいものの、Ptに比較すれば温度係数を1/3に低減できた。

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  • Cr/Si傾斜カンチレバーとエラストマを用いた多軸触覚センサの作製と有限要素解析

    寒川 雅之, 美馬 達也, 大西 浩之, 黄 裕銘, 金島 岳, 奥山 雅則, 山下 馨, 野田 実, 池田 正哲, 野間 春生

    平成20年電気学会全国大会  2008.3  電気学会

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    Venue:福岡工業大学  

    Cr/Siカンチレバー型触覚センサの感度の改善を目指して有限要素法により出力の解析を行った。カンチレバー構造をエラストマに埋め込んだモデルを作製し、力を印加した時のカンチレバーの変形量からカンチレバー上のひずみゲージの抵抗変化を計算した。計算値と実際の変化はおおよそ一致し、有限要素モデルを用いることで最適な出力が得られるセンサ形状を設計できることを示した。

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  • Fabrication and Characterization of Normal and Shear Stresses Sensitive Tactile Sensors by Using Inclined Micro-cantilevers Covered with Elastomer International conference

    Masayuki Sohgawa, Yu-Ming Huang, Minoru Noda, Takeshi Kanashima, Kaoru Yamashita, Masanori Okuyama, Masaaki Ikeda, Haruo Noma

    2007 Material Research Society Fall Meeting  2007.11  Materials Research Society

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    Language:English   Presentation type:Oral presentation (general)  

    Venue:Boston, MA USA  

    Recently, human support robots to carry out nursing-care have attracted much attention. To assure safety for human body, human support robots require human like tactile sensing ability to support us. In this work, we propose tactile sensors for human support robots which can detect both normal and shear stresses and have human-friendly surface. Micro-cantilevers adequately inclined by deflection control layer (200 nm thick chromium or 2 μm thick perfluoropolymer) were fabricated by the surface micromachining on SOI wafer (1.5 or 2.5 μm thick Si layer, 1 or 2 μm thick BOX layer). The cantilevers were covered with the elastomer (PDMS or urethane gel) for human-friendly surface and stress detection range control. When the stress is added to the surface of elastomer, the deformation of micro-cantilevers along with elastic polymer is detected as resistance change of strain gauge layer (p-Si, Pt or Ni-Cr) placed on the cantilevers. The normal and shear stresses can be distinguished by using two face-to-face cantilevers. When only shear stress is added to the tactile sensor, the summation of outputs from two cantilevers becomes almost zero, but the differential of outputs from these cantilevers increases with increasing shear stress. In the case of normal stress, the summation increases and the differential becomes almost zero. Therefore, it is considered that our tactile sensor can detect both normal and shear stresses independently. The response of the fabricated tactile sensor to normal and shear stresses was measured by output from this resistance. The tactile sensor with PDMS elastomer can detect up to about 200 kPa (~2 kgf/cm2) of normal stress without breaking of micro-cantilever. Moreover, small normal stress of about 0.5 kPa (~5 gf/cm2) can be detected. Similarly, fabricated tactile sensor can detect 0.5 kPa shear stress along lateral direction to the cantilever. On the other hand, it hardly has sensitivity to shear stress of orthogonal direction to the cantilever. It means that the tactile sensor can distinguish the direction of shear stress. Moreover, the sensitivity of tactile sensor covered with urethane gel is about 30 times larger than that covered with PDMS, since urethane gel (Young's modulus: E = 0.03 MPa) is softer than PDMS (E = 1.5 MPa). From this result, it is demonstrated that sensitivity and measurement range of the tactile sensor can be controlled by hardness of elastomer material.

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  • ANSYSによるマイクロ物理センサの形状解析

    寒川 雅之

    2007 Japan ANSYS Conference  2007.11 

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    Language:Japanese   Presentation type:Public lecture, seminar, tutorial, course, or other speech  

    Venue:東京  

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  • エラストマーとポリマー/Si傾斜カンチレバーを用いた触覚センサによる圧力と剪断力の計測

    黄 裕銘, 寒川 雅之, 山下 馨, 金島 岳, 奥山 雅則, 野田 実, 野間 春生

    第24回「センサ・マイクロマシンと応用システム」シンポジウム  2007.10  電気学会 センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京 タワーホール船堀  

    ロボット用多軸触覚センサを試作し評価した。有限要素法による解析に基づき、力検知用のSiピエゾ抵抗を設けたCr/Siカンチレバー構造を最適な傾斜形状に作製し、これをエラストマ中に埋め込むことでセンサ素子を完成した。作製したセンサ表面に垂直力と剪断力を印加したところ、どちらに対しても感度が得られ、多軸触覚センサが実現可能であることを示した。

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  • 適度な傾斜形状を有するCr/Siマイクロカンチレバー構造を用いた多軸触覚センサの作製と評価

    寒川 雅之, 野田 実, 黄 裕銘, 金島 岳, 山下 馨, 奥山 雅則, 池田 正哲, 野間 春生

    電気学会センサ・マイクロマシン部門総合研究会フィジカルセンサ研究会  2007.7  電気学会 センサ・マイクロマシン部門

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:筑波大学  

    ロボット用多軸触覚センサを試作し評価した。有限要素法による解析に基づき、力検知用のSiピエゾ抵抗を設けたCr/Siカンチレバー構造を最適な傾斜形状に作製し、これをエラストマ中に埋め込むことでセンサ素子を完成した。作製したセンサ表面に垂直力と剪断力を印加したところ、どちらに対しても感度が得られ、多軸触覚センサが実現可能であることを示した。

    File: 2007総合研究会原稿.pdf

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  • Fabrication and Characterization of Silicon-Polymer Beam Structures for Cantilever-Type Tactile Sensors International conference

    Masayuki Sohgawa, Yu-Ming Huang, Kaoru Yamashita, Takeshi Kanashima, Minoru Noda, Masanori Okuyama, Haruo Noma

    The 14th International Conference on Solid-state Sensors, Actuators and Microsystems (Transducers '07 & Eurosensors XXI)  2007.6 

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    Language:English   Presentation type:Oral presentation (general)  

    Venue:Lyon, France  

    File: TRANS07_sohgawa.pdf

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  • カンチレバー型触覚センサ用シリコン・ポリマービーム構造の作成と評価

    黄 裕銘, 山下 馨, 寒川 雅之, 金島 岳, 野田 実, 奥山 雅則, 野間 春生

    平成19年電気学会全国大会  2007.3  電気学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:富山大学  

    我々はカンチレバーに傾斜を持たせ垂直・水平両方向に変形させ垂直力と剪断力を同時に計測できる触覚センサを提案している。これに用いるためのSi表面マイクロマシニングプロセスによりポリマー/Siカンチレバー構造を作製し、その反り形状を評価した。反りの量は有限要素法による解析とよく一致した。ポリマーの膜厚は薄すぎても厚過ぎても反り量は小さくなり、反り量が最大になる膜厚が存在することが分かった。

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  • Studies on Curvature Deformation Control of Bilayer Cantilever Fabricated by Surface Micromachining of SOI Wafer International conference

    Yu-Ming Huang, Masayuki Sohgawa, Minoru Noda, Kaoru Yamashita, Masanori Okuyama, Haruo Noma

    2006 Material Research Society Fall Meeting  2006.11  Materials Research Society

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    Language:English   Presentation type:Oral presentation (general)  

    Venue:Boston, MA USA  

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  • SOI基板表面マイクロマシンプロセスによるバイレイヤーカンチレバー構造の反り量制御の検討

    寒川 雅之, 野田 実, 黄 裕銘, 山下 馨, 金島 岳, 奥山 雅則, 野間 春生

    第23回「センサ・マイクロマシンと応用システム」シン ポジウム  2006.10  電気学会 センサ・マイクロマシン準部門

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:高松  

    Si表面マイクロマシニングプロセスにより2層カンチレバー構造を作製し、その反り形状を評価した。Cr/Siカンチレバー構造では有限要素法により解析した結果と作製結果が良く一致した。一方、SiN/Siカンチレバーでは解析値と実験値に大きな乖離がみられた。このことからCr/Siカンチレバー構造では有限要素法により反りの量を最適化できることを示した。

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  • HfO2膜中欠陥の第一原理計算による解析

    寒川 雅之, 吉田 真人, 松本 淳也, 金島 岳, 奥山 雅則

    第52回応用物理学関係連合講演会  2005.3  応用物理学会

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    Venue:埼玉大学  

    HfO2に酸素欠損が導入された場合の荷電状態を第一原理計算により解析し、その場合正電荷が存在すると安定することを確認した。実際フォトレフレクタンススペクトルからも酸素欠損を導入した時に正電荷が膜中に現れることが示唆されている。また、計算結果からバンドギャップ中に準位が生じバンドギャップが狭まることが示唆され、これも吸収係数の測定結果と一致することが確認された。

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  • PRSによるHigh-kゲート絶縁膜中の固定電荷の評価

    寒川 雅之, 吉田 真人, 金島 岳, 奥山 雅則, 藤本 晶

    シリコン材料・デバイス研究会  2004.12  電子情報通信学会

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    Venue:京都大学  

    )HfO2薄膜のフォトレフレクタンス(PRS)スペクトル強度を膜中電荷に対応づけ、種々の評価と比較検討した。PRSスペクトル強度はSi表面電界に依存するため、膜中に正電荷が存在すると強度が減少する。HfO2薄膜は酸素、窒素及びそれらの混合ガス中で製膜したが、PRSスペクトルにより窒素中で製膜したものは酸素中で製膜したものより多くの正電荷を含むことが示された。

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  • Characterization of Space Oxide Charge in HfO2 Thin Film for High-k Gate Insulator by Photoreflectance Spectroscopy International conference

    Masayuki Sohgawa, Masato Yoshida, Takeshi Kanashima, Masanori Okuyama

    International Workshop on "Material Science and Nano-Engineering"  2004.12 

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    Venue:Osaka, Japan  

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  • Contactless Characterization of Fixed Charge in HfO2 Thin Film by Photoreflectance International conference

    Masayuki Sohgawa, Masato Yoshida, Takuji Naoyama, Taizo Tada, Koji Ikeda, Takeshi Kanashima, A. Fujimoto, M. Okuyama

    2004 International Conference on Solid State Devices and Materials  2004.9  The Japan Society of Applied Physics

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    Venue:Tokyo, Japan  

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  • PhotoreflectanceによるMFIS構造の容量保持特性の非接触評価

    寒川 雅之, 吉田 真人, 金島 岳, 藤本 晶, 奥山 雅則

    第65回応用物理学会学術講演会  2004.9  応用物理学会

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    Venue:東北学院大学  

    SrBi2Ta2O9(SBT)/SiO2/n-Si積層構造の電気特性をフォトレフレクタンス分光法(PRS)を用いて電極形成無に評価した。SBTはMOD法により製膜し、600℃の酸素中で熱処理した。SBTの残留分極の時間変化をPRSスペクトルより計測できることを示した。さらに酸素中での急速加熱処理により、残留分極が保持される時間が延びることをPRSにより非接触で評価できた。

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  • Electron Spin Resonance Characterization of the Defects in High-k HfO2 Thin Film Prepared by Pulsed Laser Deposition International conference

    Takeshi Kanashima, Koji Ikeda, Taizo Tada, Masanori Sohgawa, Masanori Okuyama

    The 5th Korea-Japan Conference on Ferroelectricity  2004.8 

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    Venue:Seoul, Korea  

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  • Electrodeless Characterization of Memorized States of MFIS Structure by Photoreflectance Spectroscopy International conference

    Masayuki Sohgawa, Masato Yoshida, Takeshi Kanashima, Akira Fujimoto, Masanori Okuyama

    The 5th Korea-Japan Conference on Ferroelectricity  2004.8 

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    Venue:Seoul, Korea  

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  • ESRによるHfO2薄膜の欠陥評価

    金島 岳, 池田 幸司, 多田 泰三, 寒川 雅之, 奥山 雅則

    シリコン材料・デバイス研究会  2004.6  電子情報通信学会

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    Venue:東京  

    )HfO2薄膜をレーザアブレーション法により作製し、その電気的およびESRによる欠陥評価を行った。欠陥に起因するESRスペクトルのピークは製膜時圧力を下げるかターゲット・基板間距離を短くすることで小さくなる。製膜時に蒸発された粒子の運動エネルギーが小さくなることにより界面欠陥が減少していると考えられる。

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  • PLD法により作製されたHfO2薄膜のESRによる欠陥評価

    池田 幸司, 多田 泰三, 寒川 雅之, 金島 岳, 奥山 雅則

    第51回応用物理学関係連合講演会  2004.3  応用物理学会

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    Venue:東京工科大学  

    HfO2薄膜をレーザアブレーション法により作製し、その電気的およびESRによる欠陥評価を行った。欠陥に起因するESRスペクトルのピークは製膜時圧力を下げるかターゲット・基板間距離を短くすることで小さくなる。製膜時に蒸発された粒子の運動エネルギーが小さくなることにより界面欠陥が減少していると考えられる。

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  • Photoreflectance分光法によるHfO2/Si構造の評価

    吉田 真人, 直山 卓示, 寒川 雅之, 金島 岳, 藤本 晶, 奥山 雅則

    第51回応用物理学関係連合講演会  2004.3  応用物理学会

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    Venue:東京工科大学  

    高誘電率HfO2薄膜をレーザアブレーション法によりSi基板上に作製し、そのフォトレフレクタンス分光法(PRS)による評価を行った。その結果、製膜温度の上昇とともにPRSのピーク強度が増加し、界面に酸化層が形成されていることが示唆された。

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  • PLDにより製膜したHf酸化物の界面評価

    金島 岳, 寒川 雅之, 池田 幸司, 吉田 真人, 奥山 雅則

    シリコン材料・デバイス研究会  2003.12  電子情報通信学会

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    Venue:奈良先端科学技術大学院大学  

    次世代High-kゲート絶縁膜材料として期待されるHfO2薄膜をレーザアブレーション法により作製し、その電気的および光学的手法による評価を行った。基板温度および酸素分圧を変化させて製膜しI-V、C-V特性を解析したところ基板温度400℃で0.2Torrの酸素中で製膜することで界面準位密度の低減およびフラットバンドシフト量の改善がみられた。

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  • フォトレフレクタンス分光法による強誘電体/SiO2/Si構造の評価

    寒川 雅之

    STARCシンポジウム2003  2003.9  (株)半導体理工学研究センター

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    Language:Japanese   Presentation type:Poster presentation  

    Venue:千里ライフサイエンスセンター  

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  • Photoreflectanceによる強誘電体薄膜/SiO2/Si構造の解析

    寒川 雅之, 吉田 真人, 金島 岳, 藤本 晶, 奥山 雅則

    第64回応用物理学会学術講演会  2003.8  応用物理学会

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    Venue:福岡大学  

    SrBi2Ta2O9(SBT)薄膜をSiO2/Si基板上に製膜して積層構造を作製し、その特性をフォトレフレクタンス分光法(PRS)を用いて評価した。SBTを製膜する前はPRSスペクトルのピークは見えなかったが、SBTを製膜することで大きなピークが出現した。SBT膜中の自然分極によりSi表面電位が大きくなったことによると考えられる。またSBT膜の分極処理によりピーク位置のシフトが起き、圧電効果によりSi表面応力が変化していると考えられる。

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  • Characterization of Ferroelectric Thin Film/SiO2/Si Structure by Photoreflectance International conference

    Masayuki Sohgawa, Hirofumi Kanda, Takeshi Kanashima, Akira Fujimoto, Masanori Okuyama

    The 10th European Meeting on Ferroelectricity  2003.8 

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    Venue:Cambridge, U.K.  

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  • PLD法により作製したPrOx薄膜のRTA効果

    池田 幸司, 寒川 雅之, 金島 岳, 奥山 雅則

    第50回応用物理学関係連合講演会  2003.3  応用物理学会

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    Venue:神奈川大学  

    レーザアブレーション法により製膜したPrOx高誘電率薄膜について製膜後の急速加熱処理による電気特性の変化について調べた。

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  • SPring-8高輝度・高強度放射光を用いた弗化物・酸化物のエッチング

    藤田 哲士, 多田 泰三, 金島 岳, 寒川 雅之, 神田 浩文, 奥山 雅則, 大橋 治彦, 為則 雄祐, 石黒 英治

    第50回応用物理学関係連合講演会  2003.3  応用物理学会

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    Venue:神奈川大学  

    放射光施設Spring-8の高輝度・高強度の放射光を用いフッ化物および酸化物のエッチングを行った。SiO2については表面の放射光照射部でのみ効果的なエッチングが起きた。MgF2、CaF2、BaF2のフッ化物では酸化物に比べ非常に高速でエッチングされることが分かった。

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  • High‐k PrOxゲート絶縁膜の電気的・光学的特性

    金島 岳, 寒川 雅之, 池田 幸司, 神田 浩文, 奥山 雅則

    シリコン材料・デバイス研究会  2002.12  電子情報通信学会

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    Venue:京都大学  

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  • high-k/SiO2/Si構造のフォトレフレクタンス評価

    寒川 雅之, 神田 浩文, 金島 岳, 藤本 晶, 奥山 雅則

    第63回応用物理学会学術講演会  2002.9  応用物理学会

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    Venue:新潟大学  

    SiO2、high-k薄膜、強誘電体薄膜とSiの積層構造におけるSi表面応力をフォトレフレクタンス分光法(PRS)を用いて評価した。Si表面の自然酸化によりSi表面の引張応力が増加することがPRSスペクトルのシフトにより分かる。また、PrOx/Si構造では製膜温度により表面応力が異なることが分かった。これは自然酸化と同様にPrOx/Si界面に酸素とSiの反応による酸化膜層ができるためと考えられる。

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  • SBTとPZT膜を用いたMFIS構造におけるSiO2/Si界面の光学的評価

    神田 浩文, 寒川 雅之, 豊嶋 吉英, 金島 岳, 奥山 雅則, 藤本 晶, 江利口 浩二

    第63回応用物理学会学術講演会  2002.9  応用物理学会

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    Venue:新潟大学  

    神田浩文・寒川雅之・北井聡・児玉一志・金島岳・他2名
    強誘電体薄膜/ゲート絶縁膜/Si(FIS)構造のSi表面の特性をフォトレフレクタンス分光法を用いて評価した。今回、強誘電体材料として従来用いてきたSBTに加え、残留分極量に優れ一般的に用いられているsol-gel法により製膜したPZTを用いて、各材料による違いを調べた。

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  • Characterization of Si Surface Stress in Various Dielectric Thin Film/Si Structure by Photoflectance Spectroscopy International conference

    Masayuki Sohgawa, Hirofumi Kanda, Takeshi Kanashima, Akira Fujimoto, Masanori Okuyama

    The 2002 International Conference on Solid State Devices and Materials (SSDM 2002)  2002.9  The Japan Society of Applied Physics

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    Venue:Nagoya, Japan  

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  • Characterization of Si Interface in FIS Structure by Photoreflectance Spectroscopy International conference

    Hirofumi Kanda, Masayuki Sohgawa, Yoshihide Toyoshima, Takeshi Kanashima, Akira Fujimoto, Masanori Okuyama

    4th Japan-Korea Conference on Ferroelectrics  2002.8 

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    Language:English   Presentation type:Poster presentation  

    Venue:Osaka, Japan  

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  • Characterization of ZrO2 and PrOx Thin Films for high-k Gate Insulator Prepared by Pulsed Laser Deposition International conference

    Takeshi Kanashima, Satoshi Kitai, Masayuki Sohgawa, Hirofumi Kanda, Masanori Okuyama

    4th Japan-Korea Conference on Ferroelectrics  2002.8 

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    Language:English   Presentation type:Poster presentation  

    Venue:Osaka, Japan  

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  • Preparation by Pulsed Laser Deposition and Characterization of ZrO2, HfO2 and PrOx Thin Films for High-k Gate Insulator International conference

    Takeshi Kanashima, Satoshi Kitai, Masayuki Sohgawa, Hirofumi Kanda, Masanori Okuyama

    The 13th International Symposium on the Applications of Ferroelectrics (XIII ISAF 2002)  2002.5  The Ultrasonics, Ferroelectrics and Frequency Control Society (UFFC-S) of the IEEE

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    Language:English   Presentation type:Poster presentation  

    Venue:Nara, Japan  

    High-k thin films of ZrO2, HfO2 PrOx of ∼10 nm thickness have been prepared by pulsed laser deposition (PLD), and characterized in microscopic structure and electrical properties. Crystallization is promoted in ZrO2 films deposited above 400°C, but a significant XRD peak was not observed in the ZrO2 film grown below 400°C. Moreover, density of the film is confirmed to saturate above 400°C by grazing incident angle X-ray reflectance. The leakage current is decreased by increasing growth temperature, but an equivalent-oxide thickness (EOT) obtained from accumulation capacitance of C - V characteristics becomes large. HfO2 films show the similar behaviors to ZrO2 films. The films deposited at 400°C were annealed at 400°C in O2 gas to reduce the leakage, but the EOTs become large. So, these films were irradiated with oxygen radical at the pressure of 10-3 Pa both to prevent the growth of interfacial layer and to enhance the oxidation of only the films. Although the leakage of ZrO2 films can be reduced by oxygen radical irradiation, only small improvement is observed in the PrOx films.

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  • 高誘電率ゲート用ZrO2およびPrOx薄膜の作製と評価

    寒川雅之, 北井 聡, 神田 浩文, 金島 岳, 藤本 晶, 奥山 雅則

    第49回応用物理学関係連合講演会  2002.3  応用物理学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東海大学  

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  • 軟X線アンジュレータからの高輝度放射光アブレーションによるフッ化物薄膜の作製

    藤田 哲士, 折田 智洋, 寒川 雅之, 金島 岳, 奥山 雅則

    第49回応用物理学関係連合講演会  2002.3  応用物理学会

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    Venue:東海大学  

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  • Preparation of PrOx gate insulators using Pulsed Laser Deposition

    Satoshi Kitai, Masayuki Sohgawa, Hirofumi Kanda, Takeshi Kanashima, Masanori Okuyama

    2001.12 

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    Language:Japanese   Presentation type:Oral presentation (general)  

    PrO_x thin films have been prepared on Si(100)wafer by pulsed laser deposition method. It is shown from XPS spectra and TEM image of PrO_x film that the deposition in O_2 ambient of 0.2 Torr produces an interfacial silicate layer. Deposition in high vacuum at RT has only an ultra-thin interfacial layer, but both hysteresis in C-V characteristic and leakage current are large. After an O_2 annealing, the accumulation capacitance has increased, and the hysteresis and the leakage current have been improved, but the interfacial layer was grown. In deposition method using shadow mask, thin films were very flat, but growth of the interfacial layer could not be prevented. The thinnest PrO_x thin film in our study has also been obtained by enlarging the distance between substrate and target.

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  • Preparation and Characterization of ZrO2/Si Structure International conference

    Masayuki Sohgawa, Satoshi Kitai, Hirofumi Kanda, Takeshi Kanashima, Akira Fujimoto, Masanori Okuyama

    2001 International Workshop on Gate Insulator  2001.11  IEEE

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    Language:English   Presentation type:Poster presentation  

    Venue:Tokyo, Japan  

    In this paper, we have prepared ZrO2 and lanthanide oxide thin films by PLD (Pulsed Laser Deposition) method and characterized these electrical properties by using C-V and J-V characteristics and these interfacial properties by using PR spectroscopy.

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  • PrOx高誘電率ゲート絶縁膜のPLDによる作製と評価

    北井 聡, 寒川 雅之, 神田 浩文, 金島 岳, 奥山 雅則

    電子材料研究会  2001.9  電気学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:東京大学  

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  • Figure-8アンジュレータからの高輝度放射光を用いた電子材料のエッチング

    藤田 哲士, 寒川 雅之, 神田 浩文, 金島 岳, 奥山 雅則

    第62回応用物理学会学術講演会  2001.9  応用物理学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:愛知工業大学  

    放射光施設Spring-8の軟X線アンジュレータからの高輝度放射光により、フッ素との結合を光励起により切断することで、フッ化物薄膜の高アスペクト比のエッチング加工が可能であることを示した。

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  • FIS構造における界面Siのフォトレフレクタンス分光法による評価

    神田 浩文, 寒川 雅之, 北井 聡, 金島 岳, 児玉 一志, 奥山 雅則

    第62回応用物理学会学術講演会  2001.9  応用物理学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:愛知工業大学  

    強誘電体薄膜/ゲート絶縁膜/Si(FIS)構造は次世代不揮発性メモリとして期待される1T型FeRAMの中心構造である。特にトランジスタのチャネルが形成されるSi表面の特性が重要である。そこでフォトレフレクタンス分光法を用いることでFIS構造におけるSi表面の光学的評価を行った。

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  • Preparation and Characterization of ZrO_2 high-k gate insulator films by PLD

    2001.6 

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    Language:Japanese   Presentation type:Oral presentation (general)  

    We have prepared uniform ZrO_2 thin films for high-k gate dielectrics in the next generation ULSI ZrO_2 thin films have been grown on Si(100) wafer by pulsed laser deposition at 400℃. An uniform ZrO_2 thin film (of EOT=2.7 nm) is obtained. Oxygen radical annealing gives little change of EOT, and the leakage current is less than 1x10^<-7 A/cm^2 at 1 MV/cm. Moreover, the interface between high-k material and Si has been characterized by photoreflectance spectroscopy. The stress on Si with ZrO_2 prepared by MOD, is smaller than the case of Si/SiO_2.

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  • 高誘電率ゲート絶縁膜/Si界面のフォトレフレクタンス分光法による評価

    寒川 雅之, 神田 浩文, 北井 聡, 上野 正人, 江利口 浩二, 藤本 晶, 金島 岳, 奥山 雅則

    第48回応用物理学関係連合講演会  2001.3  応用物理学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:明治大学  

    MOSFETデバイスにおいてZrO2を始めとした高誘電率材料はSiO2に代わるゲート絶縁膜として期待されているが、そのSiとの界面の特性は不明な部分が多いため、非破壊非接触の光学測定であるフォトレフレクタンス分光法を用いて評価を試みた。

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  • フォトレフレクタンス分光法を用いたSi/SiO2界面の応力評価

    寒川 雅之, 江利口 浩二, 藤本 晶, 金島 岳, 奥山 雅則

    第61回応用物理学会学術講演会  2000.9  応用物理学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:北海道工業大学  

    フォトレフレクタンス分光法によりSiO2/Si界面の応力を評価した。Si基板を熱酸化することによりSiO2を製膜すると、界面に応力が発生する。PRスペクトルのピークシフトから、発生する応力は熱酸化の温度が低いほど大きいことが分かった。

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  • Non-Destructive and Contactless Monitoring Technique of Si Surface Stress by Photoreflectance International conference

    Masayuki Sougawa, Takeshi Kanashima, Masashi Agata, Kaoru Yamashita, Masanori Okuyama, Akira Fujimoto, Koji Eriguchi

    2000 International Conference on Solid State Devices and Materials  2000.8  The Japan Society of Applied Physics

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    Language:English   Presentation type:Oral presentation (general)  

    Venue:Sendai, Japan  

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  • Optical Characterization of Antenna-Area-Dependent Gate Oxide Charging Damage in MOS Capacitors by Photoreflectance Spectroscopy International conference

    Masashi Agata, Masayuki Sogawa, Osamu Maida, Koji Eriguchi, Akira Fujimoto, Takeshi Kanashima, Masanori Okuyama

    The 5th International Symposium on Plasma-Process Induced Damage  2000.5  IEEE

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    Language:English   Presentation type:Oral presentation (general)  

    Venue:Santa Clara, CA, USA  

    Thin gate oxide charging damage has been studied by photoreflectance (PR) spectroscopy in MOS structure samples. Antenna-area-dependent oxide charging damage such as the generation of SiO2/Si interface states as well as that of electron trap sites in the oxides, has been also addressed by the decrease of the PR peak signal intensity from MOS capacitors, and also confirmed by the capacitance-voltage (C-V) characteristics.

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  • フォトレフレクタンス分光法によるSiO2/Si界面の歪みの解析

    阿形 眞司, 寒川 雅之, 毎田 修, 江利口 浩二, 藤本 晶, 金島 岳, 奥山 雅則

    第47回応用物理学関係連合講演会  2000.3  応用物理学会

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    Language:Japanese   Presentation type:Oral presentation (general)  

    Venue:青山学院大学  

    フォトレフレクタンス分光法を用いてSiO2/Si界面に加わる歪みの計測を行った。Siダイアフラム構造を作製し、それに圧力を加えることで界面に歪みを印加したときの材料力学的に求めた歪みとPRスペクトルのピーク位置との関係を求めた。

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  • Optical Characterization of Gate Oxide Charging Damage by Photoreflectance Spectroscopy

    Masashi Agata, Masayuki Sohgawa, Osamu Maida, Koji Eriguchi, Akira Fujimoto, Takeshi Kanashima, Masanori Okuyama

    1999.12 

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Industrial property rights

  • センサ素子及びセンサ素子の製造方法

    寒川雅之, 川﨑雄記

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    Applicant:国立大学法人新潟大学

    Application no:特願2023-092837  Date applied:2023.6

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  • MEMSセンサ

    寒川雅之, 野間春生

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    Applicant:国立大学法人新潟大学、学校法人立命館

    Application no:特願2022-030470  Date applied:2022.2

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  • MEMSセンサ

    寒川雅之, 野間春生, 川崎雄記

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    Applicant:学校法人立命館、国立大学法人新潟大学

    Application no:特願2021-118295  Date applied:2021.7

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  • 触覚センサ及び荷重解析装置

    寒川雅之

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    Applicant:新潟大学

    Application no:特願2019-123853  Date applied:2019.7

    Announcement no:特開2021-009110  Date announced:2021.1

    Patent/Registration no:特許7265767  Date registered:2023.4 

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  • MEMSセンサ

    寒川 雅之

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    Applicant:国立大学法人新潟大学

    Application no:特願2016-087136  Date applied:2016.4

    Announcement no:特開2017-67755  Date announced:2017.4

    Patent/Registration no:特許6721900  Date registered:2020.6  Date issued:2020.7

    Rights holder:国立大学法人 新潟大学

    触覚、視覚と冷温覚の情報から物体の質感を単一のMEMSセンサで計測する技術に関するものである。このセンサは多軸接触力、光、温度に感度を持っている。視覚情報としては、LEDの波長を切り替えて物体に光を照射し、その反射光から反射率や色の情報を得る。一方、触覚情報は半導体をMEMS加工したカンチレバー構造を透明弾性体樹脂に埋め込み、接触時の変形をカンチレバーのたわみ変化によるひずみゲージ抵抗の変化として検知する。また、冷温の情報は材料の導電性の温度依存性を利用して計測する。

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  • MEMSセンサ

    寒川 雅之

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    Application no:特願2016-87138  Date applied:2016.4

    Announcement no:特開2017-198472  Date announced:2017.11

    複数の計測回路の切り替えを必要とせずに近接覚計測及び触覚計測を行うことができるMEMSセンサを提供する。交流電圧を用いる場合、センサを含めて構成した共振回路の共振周波数と共振の鋭さの変化から近接距離と接触力を分離して検知する。直流電圧を用いる場合、ダイオードを含んだ回路の電圧の正負を切り替えることで、近接出力と触覚出力を切り替える。

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  • MEMSセンサ

    寒川 雅之, 奥山 雅則, 野間 春生

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    Applicant:国立大学法人新潟大学、学校法人立命館

    Application no:特願2013-223626  Date applied:2013.10

    Announcement no:特開2015-087129  Date announced:2015.5

    Patent/Registration no:特許6160917  Date issued:2017.6

    近接覚計測及び触覚計測を単一のMEMSセンサで検出する技術に関するものである。近接覚は近接物体からの反射光を半導体のインピーダンス変化として検知し、触覚は半導体をMEMS加工したカンチレバー構造を透明弾性体樹脂に埋め込み、接触時の変形をカンチレバーのたわみ変化によるひずみゲージ抵抗の変化として検知する。

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  • 物体表面の質感計測装置およびそれを用いた紙葉類判別装置

    寒川 雅之, 奥山 雅則, 野間 春生

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    Applicant:国立大学法人大阪大学 株式会社国際電気通信基礎技術研究所

    Application no:特願2011-198993  Date applied:2011.9

    Announcement no:特開2013-061201  Date announced:2013.4

    Patent/Registration no:特許5807463  Date issued:2015.9

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  • センサ装置の製造方法

    中榮 穣, 佐々木 敬彦, 野間 春生, 寒川 雅之

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    Applicant:株式会社国際電気通信基礎技術研究所、国立大学法人大阪大学

    Application no:特願2009-053110  Date applied:2009.3

    Announcement no:特開2010-204069  Date announced:2010.9

    Patent/Registration no:特許5487387  Date issued:2014.3

    J-GLOBAL

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Awards

  • SEMICON JAPAN 第1回アカデミアAward 優秀賞

    2022.12   SEMIジャパン   圧・振動・温冷を含む触覚を再現する触覚デバイス技術

    新潟大学 安部/寒川研究室

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  • 第35回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2018.11   電気学会センサ・マイクロマシン部門   水晶発振回路式液体濃度センサの炭酸濃度非接触測定への応用

    小黒 悠, 谷村 実紀, 矢田 直人, 寒川 雅之, 安部 隆

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    Award type:Award from Japanese society, conference, symposium, etc. 

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  • センサ・マイクロマシン部門総合研究会優秀論文発表賞

    2016.10   電気学会センサ・マイクロマシン部門   水晶発振回路を用いた2チャンネル型非接触液体センサの開発

    矢田 直人, 寒川 雅之, 安部 隆

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    Award type:Award from Japanese society, conference, symposium, etc. 

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  • 第31回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2016.10   電気学会センサ・マイクロマシン部門   真空中での水晶振動子式小型熱重量分析センサの昇温特性評価

    和田 涼介, 寒川 雅之, 安部 隆

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    Award type:Award from Japanese society, conference, symposium, etc. 

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  • センサ・マイクロマシン部門総合研究会優秀論文発表賞

    2016.7   電気学会センサ・マイクロマシン部門   近接覚・触覚コンボセンサにおける周波数変調プローブ光を用いた近接計測手法の検討

    梅木 尚, 野沢 瑛斗, 安部 隆, 奥山 雅則, 野間 春生, 寒川 雅之

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    Award type:Award from Japanese society, conference, symposium, etc. 

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  • 第19回北陸信越支部賞(優秀講演賞)

    2015.3   日本機械学会北陸信越支部   褥瘡管理用装置のためのマイクロメカニカルセンサ

    寒川 雅之

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    Award type:Award from Japanese society, conference, symposium, etc. 

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  • 第31回「センサ・マイクロマシンと応用システム」シンポジウム 優秀ポスター賞

    2014.10   電気学会センサ・マイクロマシン部門   非接触型液体濃度検出用水晶センサ

    須佐 翼, 渡部 尊, 寒川 雅之, 安部 隆

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    Award type:Award from Japanese society, conference, symposium, etc. 

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  • 第29回「センサ・マイクロマシンと応用システム」シンポジウム 最優秀ポスター賞

    2012.10   電気学会センサ・マイクロマシン部門   Dynamic Measurement of Surface Texture of Paper Using the Multi-axial Tactile Sensor with Micro-cantilevers

    渡部 公介, 寒川 雅之, 金島 岳, 奥山 雅則, 野間 春生

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  • The Excellent Presentation Award in the 9th Korea-Japan Conference on Ferroelectrics

    2012.8   The 9th Korea-Japan Conference on Ferroelectrics   Preparation of Epitaxial BiFeO3 Thin Films on La-SrTiO3 Substrate by Magnetic-Field-Assisted Pulsed Laser Deposition

    Jung Min Park, Seiji Nakashima, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama

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  • Outstanding Paper at International Conference on Advanced Electromaterials

    2011.11   International Conference on Advanced Electromaterials   Ferroelectric Property and Microstructure Evolution of Polycrystalline BiFeO3 Films Prepared by Pulsed Laser Deposition under Magnetic Field

    Jung Min Park, Seiji Nakashima, Masayuki Sohgawa, Takeshi Kanashima, Masanori Okuyama

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    Award type:Award from international society, conference, symposium, etc. 

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Research Projects

  • Basic technology of lipid membrane immunosensor for detection of pathogenic protein in blood contributing to ultra-early diagnosis of dementia

    Grant number:23K17476

    2023.6 - 2026.3

    System name:Grants-in-Aid for Scientific Research

    Research category:Grant-in-Aid for Challenging Research (Pioneering)

    Awarding organization:Japan Society for the Promotion of Science

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    Grant amount:\25870000 ( Direct Cost: \19900000 、 Indirect Cost:\5970000 )

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  • 形状記憶膜/有機半導体ハイブリッド型の高出力フレキシブル触覚ディスプレイ開発

    Grant number:23H01371

    2023.4 - 2027.3

    System name:科学研究費助成事業

    Research category:基盤研究(B)

    Awarding organization:日本学術振興会

    峯田 貴, 徐 嘉楽, 寒川 雅之, 松井 弘之

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    Grant amount:\18720000 ( Direct Cost: \14400000 、 Indirect Cost:\4320000 )

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  • Human-like machine tactile sensation using recurrent temporal and spacial reduction

    Grant number:22H00542

    2022.4 - 2027.3

    System name:Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (A)

    Research category:Grant-in-Aid for Scientific Research (A)

    Awarding organization:Japan Society for the Promotion of Science

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    Grant amount:\41860000 ( Direct Cost: \32200000 、 Indirect Cost:\9660000 )

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  • Combined micro tactile sensor chip with mechanical and thermal stimuli recreating the frequency and spatial characteristics of human receptors

    Grant number:22H01442

    2022.4 - 2026.3

    System name:Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

    Research category:Grant-in-Aid for Scientific Research (B)

    Awarding organization:Japan Society for the Promotion of Science

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    Grant amount:\17550000 ( Direct Cost: \13500000 、 Indirect Cost:\4050000 )

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  • MEMSハプティクスセンサ実用化に向けた封止・実装量産技術の開発

    2022.3 - 2024.3

    System name:官民による若手研究者発掘支援事業・共同研究フェーズ

    Awarding organization:国立研究開発法人新エネルギー・産業技術総合開発機構

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    Authorship:Principal investigator 

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  • Fundamental study on bioelectronic chip for diagnosis of pathologic conditions based on specific and ultrahighly sensitive detection of prion-like protein

    Grant number:20H00663

    2020.4 - 2024.3

    System name:Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (A)

    Research category:Grant-in-Aid for Scientific Research (A)

    Awarding organization:Japan Society for the Promotion of Science

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    Grant amount:\44980000 ( Direct Cost: \34600000 、 Indirect Cost:\10380000 )

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  • 近接・触覚MEMSセンサの実用化開発

    2019.9 - 2020.8

    System name:2019年度A-STEP機能検証フェーズ試験研究タイプ

    Awarding organization:科学技術振興機構

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\2886000 ( Direct Cost: \2220000 、 Indirect Cost:\666000 )

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  • A construction of new biosensor technology enabling highly sensitive detection of alpha-synuclein fibril originated from Parkinson's disease patient

    Grant number:19K22964

    2019.6 - 2022.3

    System name:Grants-in-Aid for Scientific Research Grant-in-Aid for Challenging Research (Exploratory)

    Research category:Grant-in-Aid for Challenging Research (Exploratory)

    Awarding organization:Japan Society for the Promotion of Science

    Noda Minoru

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    Grant amount:\6370000 ( Direct Cost: \4900000 、 Indirect Cost:\1470000 )

    In this research, the detectivity of aggregated alpha-Syunuclein (aSyn) as a causative agent of Parkinson Disease (PD) was markedly improved by newly developed approaches and techniques. Starting from the aspects of phospholipid membrane, especially, 1) Confirmation on high-sensitivity for the aggregated aSyn down to 10 pg/ml by combination of the interaction with the phospholipid membrane and the self-templating phenomena of aSyn. Improved sensitivities; 2) by concentrating mechanical stress on piezoresistance part of cantilever sensor itself (increased by about an order), 3) by optimizing the salt concentration of target solution (increased by 5 times). Finally, 4) by using the developed biosensor technologies, the serums of PD patients were effectively discriminated from those from non-patients.

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  • Development of Micro Tactile Sensor Chip Including Pressure, Vibration, and Temperature Sensations

    Grant number:19K04290

    2019.4 - 2022.3

    System name:Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (C)

    Research category:Grant-in-Aid for Scientific Research (C)

    Awarding organization:Japan Society for the Promotion of Science

    Sohgawa Masayuki

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    Grant amount:\4420000 ( Direct Cost: \3400000 、 Indirect Cost:\1020000 )

    This study was designed to develop a tactile sensor on a universal chip that can compositely detect pressure, vibration, and warm/cool sensations using the MEMS technologies. For pressure-vibration sensing, a chip with a piezoelectric and a strain-resistive elements with different electrical time response characteristics stacked on a single sensing element was fabricated, and different responses were successfully obtained simultaneously for each. On the other hand, for warm/cool sensing, a heater, which serves as a thermal source for heat transfer, was integrated on the chip to enable measurement by the chip standalone. Furthermore, by improving the thermometric element and increasing the thermal conductivity of the contact bump, stable and high-sensitivity hot/cold sensation measurement was achieved.

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  • Human like tactile sensation using stage learning model on MEMS tactile sensor

    Grant number:18H03314

    2018.4 - 2021.3

    System name:Grants-in-Aid for Scientific Research Grant-in-Aid for Scientific Research (B)

    Research category:Grant-in-Aid for Scientific Research (B)

    Awarding organization:Japan Society for the Promotion of Science

    Noma Haruo

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    Authorship:Coinvestigator(s) 

    Grant amount:\17290000 ( Direct Cost: \13300000 、 Indirect Cost:\3990000 )

    In this study, we constructed a machine haptic recognition model using an ultra-small tactile sensor and a staged neural network that mimics a human tactile recognition model, and aimed to realize human-like machine haptic perception and elucidate human haptic recognition based on the similarity between machine and human haptic perception. Here, we focused on the tracing recognition task, in which eight kinds of materials are identified by tracing them, and evaluated the recognition rate depending on five DNN model (Dense, 1D-CNN, RNN, LSTM, and GRU) and the number of layers (1-4). As a result, the highest identification rate of 97.8% was achieved. In addition, the intermediate features obtained in the course of the identification process showed results similar to the features that human shows.

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  • 単一MEMSセンサによる視感・触感・温冷感を含む質感のアクティブ計測

    2017.4 - 2019.3

    System name:科学研究費助成事業(学術研究助成基金助成金)若手研究(B)

    Awarding organization:日本学術振興会

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\4290000 ( Direct Cost: \3300000 、 Indirect Cost:\990000 )

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  • 76GHzミリ波レーダーとLPWAを用いた防災IoT・環境モニタリングの研究開発

    2017.4 - 2018.3

    System name:戦略的情報通信研究開発推進事業(SCOPE)電波有効利用促 進型研究開発 (先進的電波有効利用型)

    Awarding organization:総務省

    酒井 直樹

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    Grant type:Competitive

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  • 力・光・温度複合MEMSセンサによる金属・樹脂表面仕上げの質感評価

    2017.4 - 2018.3

    System name:2017年度 研究助成(A)

    Awarding organization:公益財団法人立石科学技術振興財団

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\2500000 ( Direct Cost: \2500000 )

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  • 力・光・温度複合検知超小型センサによる繊維製品の質感評価指標構築

    2017.2 - 2019.1

    System name:第27回人工知能研究助成

    Awarding organization:公益財団法人人工知能研究振興財団

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\500000 ( Direct Cost: \500000 )

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  • 非鉛圧電体薄膜を積層したマイクロチタンカンチレバーデバイス

    2016.7 - 2017.3

    System name:試験研究費助成金

    Awarding organization:公益財団法人内田エネルギー科学振興財団

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\210000

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  • Aβオリゴマー化動態検出センサの構築

    2016.4 - 2017.3

    System name:科学研究費助成事業(学術研究助成基金助成金)

    Awarding organization:日本学術振興会

    野田 実

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    Grant type:Competitive

    Grant amount:\286000 ( Direct Cost: \220000 、 Indirect Cost:\66000 )

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  • 触覚・視覚・冷温覚を含む質感を計測するマイクロセンサ

    2016.4 - 2017.3

    System name:平成28年度研究助成金

    Awarding organization:公益財団法人ユニオンツール育英奨学会

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\1500000 ( Direct Cost: \1500000 )

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  • 接触力・光・電界複合マイクロセンサによる褥瘡リスク評価

    2015.10 - 2017.3

    System name:試験研究費

    Awarding organization:新潟工学振興会

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\400000 ( Direct Cost: \400000 )

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  • 近接・触覚複合センサによる柔軟物把持制御

    2015.10 - 2016.9

    System name:マッチングプランナープログラム「探索試験」

    Awarding organization:科学技術振興機構

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\1690000 ( Direct Cost: \1300000 、 Indirect Cost:\390000 )

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  • 触覚センシング用BiFeO3非鉛圧電体・NiCrひずみゲージ薄膜積層Ti-MEMSカンチレバー構造の作製

    2015.7 - 2016.6

    System name:研究助成

    Awarding organization:公益財団法人村田学術振興財団

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\1450000

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  • Si-MEMS集積センサを用いた近接・触覚複合計測法の開発

    2015.1 - 2015.12

    System name:A-STEP(研究成果最適展開支援プログラム)フィージビリティスタディステージ探索タイプ

    Awarding organization:科学技術振興機構

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\1690000 ( Direct Cost: \1300000 、 Indirect Cost:\390000 )

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  • MEMS触覚センサを用いた定量的質感評価法

    2014.7 - 2015.3

    System name:研究開発費

    Awarding organization:(一財)エヌ・エス知覚科学振興会

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\850000 ( Direct Cost: \850000 )

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  • 熱反応性イオンエッチング法によるチタニウムおよびその合金のマイクロ加工

    2014.4 - 2016.3

    System name:科学技術研究費助成金

    Awarding organization:公益財団法人ユニオンツール育英奨学会

    安部 隆

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    Grant type:Competitive

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  • リポソームバイオ集積センサの診断チップ化基礎技術の構築

    2013.10 - 2017.3

    System name:科学研究費補助金, 基盤研究(A)

    Awarding organization:日本学術振興会

    野田 実

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    Grant type:Competitive

    Grant amount:\1625000 ( Direct Cost: \1250000 、 Indirect Cost:\375000 )

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  • 非鉛圧電体薄膜を用いた省エネルギー型マイクロ触覚センサの開発

    2013.7 - 2015.1

    System name:試験研究費助成金

    Awarding organization:公益財団法人内田エネルギー科学振興財団

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\450000

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  • 単一MEMSセンサ素子による近接覚・触覚計測手法

    2013.4 - 2015.3

    System name:科学研究費補助金, 挑戦的萌芽研究

    Awarding organization:日本学術振興会

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\3250000 ( Direct Cost: \2500000 、 Indirect Cost:\750000 )

    研究代表者らはMEMSプロセスで作製したカンチレバーを用いた垂直力と剪断力を同時に検知できる多軸触覚センサの研究を行ってきた。このセンサの高周波でのインピーダンスを測定したところ、物体が接触していなくてもセンサ表面との距離に応じてインピーダンスが増加することを見出した。
    本申請ではこの物体接近による高周波インピーダンス変化の原理を明らかにし、近接覚を備えた超触覚センサの実現の可能性を探るため、(1) インピーダンス周波数特性測定と等価回路分析、(2) 物体接近による電場変化解析と検知手法の検討、(3) 近接覚・触覚一体型センサの設計と試作を行う。

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  • 高品質非鉛圧電体薄膜を用いたロボット用MEMS触覚センサの開発

    2013.4 - 2015.1

    System name:研究助成

    Awarding organization:NSKメカトロニクス技術高度化財団

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\2000000

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  • MEMSカンチレバー型多軸触覚センサを用いた物体表面テクスチャ計測法

    2011.12 - 2012.7

    System name:A-STEP(研究成果最適展開支援プログラム)フィージビリティスタディステージ探索タイプ

    Awarding organization:科学技術振興機構

    寒川 雅之

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    Authorship:Principal investigator  Grant type:Competitive

    Grant amount:\1690000 ( Direct Cost: \1300000 、 Indirect Cost:\390000 )

    MEMSプロセスにより作製したマイクロカンチレバーをエラストマに埋め込んだ構造の小型多軸触覚センサにより、つるつる・ザラザラといった物体表面のテクスチャを計測する技術を開発した。本技術は印加された力の大きさと方向を検知できる触覚センサを対象物表面に押し付けて走査することにより、センサと対象物間に働く反力や摩擦力の変化を計測し、その変化から物体表面のテクスチャ(質感・触感)を複合的に評価できる。例えば、走査した時の触覚センサの出力変化から紙の摩擦係数や凹凸の違い等を識別できる。

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  • ナノメカニカルセンサー技術を用いた褥瘡管理用評価装置の開発

    2011.2 - 2011.12

    System name:平成22 年度(経済危機対応・地域活性化予備費事業)戦略的基盤技術高度化支援事業・研究加速枠

    Awarding organization:経済産業省・関東経済産業局

    縄田 厚

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    Grant type:Competitive

    Grant amount:\5672100 ( Direct Cost: \5156550 、 Indirect Cost:\515550 )

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  • シリコン集積センサ構造リポソームインタクト固定化バイオセンサ技術の安定化・高度化

    2010.4 - 2013.3

    System name:科学研究費補助金, 基盤研究(B)

    Awarding organization:日本学術振興会

    野田 実

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    Grant type:Competitive

    Grant amount:\325000 ( Direct Cost: \250000 、 Indirect Cost:\75000 )

    本年度申請研究では前回科研(基盤B2007-2009)から進めてきたリポソームバイオセンシング技術・センサの精度・性能を一層向上、安定化させるとともに、リポソーム系バイオ材料を基盤としたタンパク質等重要バイオ分子の検出・動的挙動の評価を一層進展させてきた。さらに、新しい検知原理(特に電子デバイス工学観点に基づく)を構築していくことにも注力した。

    その結果、特にリポソーム固定化漏れ電流センサにて、1)タンパク質変性剤の新規適用によりリポソーム・タンパク質間相互作用を1-2桁強増大(感度向上)できた。2)センサ出力の各種依存性(固定化リボソーム液滴体積、リポソーム濃度、対象タンパク質濃度)と検知安定性の関係、安定性最適化の指針が得られた。3)科研費新規導入設備によるセンサ検出部固定化バイオ液滴形成用プロセスの開発-液滴の定量制御(μLオーダー)、液滴形状格段安定化に着手、進展できた。さらに新しい検知原理としてリボソーム固定化バイオ(高周波:0.1G-数十GHz帯)インピーダンスセンサ(複数構造)の考察設計、試作、評価を行った結果、0.1M-100MHz(0.1GHz)までのインピーダンスセンサではCole-Coleプロット評価が有効であり上記各種依存性(固定化リポソーム液滴体積、リポソーム濃度、対象タンパク質濃度)をRC(抵抗-容量)電気等価回路解析から半定量的に検出する状況に至った。

    0.1G-20GHzの領域ではプレーナ線路構造での高周波線路透過損失、位相シフト量がバイオ液滴の誘電率変化に対応して変化することが3次元電磁界解析とSパラメータ実測から判明し、両者は定量的にもほぼ対応した。

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  • MEMS技術による新しい医療診断用超音波プローブデバイスの開発

    2009.11 - 2010.3

    System name:平成21年度戦略的基盤技術高度化支援事業(平成21 年度補正予算事業)

    Awarding organization:経済産業省・近畿経済産業局

    李 昇穆

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    Grant type:Competitive

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  • 磁場印加レーザアブレーションによる強磁性・強誘電性BiFeO3系薄膜作製と評価

    2009.4 - 2012.3

    System name:科学研究費補助金, 基盤研究(B)

    Awarding organization:日本学術振興会

    奥山 雅則

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    Grant type:Competitive

    Grant amount:\1560000

    キュリー点、ネール点が高く室温で強誘電性と強磁性を併せ持つマルチフェロイックの代表的物質としてBiFeO_3(BFO)があり、デバイス応用の観点からも魅力ある電子材料である。さらに、申請者等によりレーザアブレーション法により薄膜作製が行われ166μC/cm^2という巨大な自発分極を持つこと(PZTやPbTiO_3の約1.5倍)が明らかにされた。しかし、磁性は反平行にスピンが並ぶため反強磁性でスピンのキャンティングにより小さな磁化しか持たない。そこで、磁場印加レーザアブレーション法により作製し、スピンを部分的に反平行以外に変えたり、Feの一部をCoで置きかえることにより、優れた強誘電性を保持しつつ強磁性の増大を図ることとした。

    まず、レーザアブレーション装置内のターゲットと基板ホルダーを取り囲むように円筒型超伝導磁石を設置し、0-0.4Tの磁場を印加してPt/TiO_2/SiO_2/Si基板上にBFOおよびBiFe_<1-x>Co_xO_3(BFCO)薄膜を作製した。磁場の増加とともに薄膜の堆積速度は上がり、0.4Tで磁場無に比べ約5倍となった。また(010)ピークは低角度側にシフト、膜厚方向に伸びていた。BFCO膜では、分極ヒステリシスが得られ、残留分極は磁場無で60μC/cm^2であったが、0.4Tの磁場印加では90μC/cm^2まで増大した。磁気ヒステリシスも得られ、飽和磁化は磁場無で5.1emu/cm^3であったが、0.4Tの磁場印加では7.4emu/cm^3まで増大した。今後、2T程度の据置型電磁石も準備し、可変強磁場を用いた研究進展も期待したい。

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  • 器用な産業用ロボット用の集積多軸触覚センサの研究開発

    2008.10 - 2010.3

    System name:地域イノベーション創出研究開発事業

    Awarding organization:経済産業省・近畿経済産業局

    野間 春生

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    Grant type:Competitive

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  • ナノ薄膜技術を応用したロボットのための集積多軸触覚センサの開発

    2005.11 - 2008.9

    System name:ナノテク先端部材実用化研究開発

    Awarding organization:新エネルギー・産業技術総合開発機構

    野間 春生

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    Grant type:Competitive

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  • 先端通信技術を用いた高感度超音波立体視センサ

    2005.7 - 2006.3

    System name:JST先端計測分析技術・機器開発事業

    Awarding organization:科学技術振興機構

    谷口 研二

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    Grant type:Competitive

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Teaching Experience (researchmap)

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Teaching Experience

  • 機械工学演習

    2022
    Institution name:新潟大学

  • 感性ロボットシステム特論

    2021
    Institution name:新潟大学

  • 設計製図III

    2020
    Institution name:新潟大学

  • 機械工学実験III

    2020
    Institution name:新潟大学

  • 機械工学実験IV

    2020
    Institution name:新潟大学

  • 設計製図IV

    2020
    Institution name:新潟大学

  • 先端研究入門

    2020
    Institution name:新潟大学

  • 工学リテラシー入門(力学分野)

    2018
    Institution name:新潟大学

  • 数物演習

    2017
    Institution name:新潟大学

  • 機械工学概論

    2017
    Institution name:新潟大学

  • リメディアル演習

    2017
    Institution name:新潟大学

  • ロボット工学

    2017
    Institution name:新潟大学

  • 物理工学実験

    2017
    Institution name:新潟大学

  • マイクロロボティクス論

    2016
    Institution name:新潟大学

  • くらしを支える機械システム工学

    2016
    Institution name:新潟大学

  • 感性ロボットシステム特論

    2016
    -
    2018
    Institution name:新潟大学

  • 設計製図II

    2015
    -
    2018
    Institution name:新潟大学

  • 機械数学

    2015
    -
    2016
    Institution name:新潟大学

  • リメディアル演習(機械数理)

    2015
    -
    2016
    Institution name:新潟大学

  • 機械工学実験I

    2014
    Institution name:新潟大学

  • 卒業研究

    2013
    Institution name:新潟大学

  • 機械工学実験II

    2013
    Institution name:新潟大学

  • 英文輪読II

    2013
    Institution name:新潟大学

  • 英文輪読I

    2013
    Institution name:新潟大学

  • 卒業研修

    2013
    Institution name:新潟大学

  • 材料生産システム特定研究Ⅱ

    2013
    -
    2020
    Institution name:新潟大学

  • 機械科学セミナーⅡ

    2013
    -
    2020
    Institution name:新潟大学

  • 材料生産システム特定研究Ⅰ

    2013
    -
    2020
    Institution name:新潟大学

  • 機械科学セミナーⅠ

    2013
    Institution name:新潟大学

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Social Activities

  • わたしたちの未来とマイクロマシン

    Role(s): Lecturer

    新潟明訓高等学校  2021年度進学セミナー①  2021.6

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  • マイクロ触覚センサチップを用いた触感のデータ化

    Role(s): Lecturer

    新潟大学地域創生推進機構  産学U-goフェスタ in 旭町キャンパス  2019.11

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  • マイクロマシン~小さな機械が実現する未来世界~

    Role(s): Lecturer

    長野県赤穂高等学校  大学等模擬講義  2019.9

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    Audience: High school students

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  • Transducers2019参加報告

    Role(s): Lecturer

    センシング技術応用研究会  第13回GST分科会  2019.7

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  • マイクロセンサのIoT、ロボット、ヘルスケアへの応用

    Role(s): Lecturer

    (公財)にいがた産業創造機構 テクノプラザ  第2回ナノテク研究センター活用セミナー~新市場の開拓に向けたフレキシブルデバイス技術最前線~  NICOテクノプラザ  2019.1

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    Audience: Company

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  • 触覚センシングによる触感の可視化

    Role(s): Lecturer

    新潟大学地域創生推進機構  新大産学交流フェスタ2018  2018.11

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  • 触覚センシングによる触感の可視化

    Role(s): Organizing member

    燕三条ものづくりメッセ  2018.10

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  • わたしたちの未来とマイクロマシン

    Role(s): Lecturer

    栃木翔南高等学校  翔南一日大学  栃木翔南高等学校  2018.9

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    Audience: High school students

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  • 医療・ヘルスケア・感性計測用センサの小型化・高機能化と応用展開

    Role(s): Lecturer

    R&D支援センター  商工情報センター(カメリアプラザ) 9F 会議室  2018.7

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    Audience: Company

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  • 自動車の快適性向上・高級感演出に向けた五感・感性センシング技術と感性評価

    Role(s): Lecturer

    ISS産業科学システムズ  2018.7

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    Audience: Company

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  • ~感性の定量評価と再現のためのセンサ技術~ 五感センシングの技術現状と複合感覚・質感評価への展開

    Role(s): Lecturer

    サイエンス&テクノロジー  きゅりあん 6F 中会議室  2018.3

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    Audience: Researchesrs, Company

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  • 五感・感性センシングの基礎とMEMSを用いた触覚センシング技術

    Role(s): Lecturer

    情報機構  2018.2

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    Audience: Researchesrs, Company

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  • MEMS触覚センサによる質感の評価と定量化

    Role(s): Lecturer

    技術情報協会  質感の認知メカニズムと計測、定量評価手法  2017.11

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  • わたしたちの未来とマイクロマシン

    Role(s): Lecturer

    新潟第一高等学校  2017.11

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  • わたしたちの未来とマイクロマシン

    Role(s): Lecturer

    長野県諏訪二葉高等学校  2017.10

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    Audience: High school students

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  • MEMS触覚センサとその応用展開

    Role(s): Lecturer

    電気学会圧電MEMS調査専門委員会  第5回講演会  2017.8

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    Audience: Researchesrs, Company

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  • 「Transducers2017参加報告」~センサ全般

    Role(s): Lecturer

    センシング技術応用研究会  第10回GST分科会  2017.7

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    Audience: Scientific

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  • 医療・ヘルスケア向けセンサ

    Role(s): Lecturer

    ジャパンマーケティングサーベイ  ヘルスケアセンサの最新開発動向  2017.6

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    Audience: Company

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  • IoT時代を志向した医療・ヘルスケア・感性評価向けセンサの基礎とMEMS技術を用いた小型化・高性能化

    Role(s): Lecturer

    情報機構  2017.6

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    Audience: Company

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  • 接触力・光・温度複合MEMSセンサによる触り心地・見た目・温もりを含む質感計測

    Role(s): Lecturer

    新潟大学地域創生推進機構・新潟大学東京イノベーションクラブ  平成29年度 第1回新潟大学シーズプレゼンテーション(新潟大学首都圏懇話会)  2017.4

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    Audience: Company

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  • MEMS触覚センサの開発と物体表面質感の計測、識別への応用

    Role(s): Lecturer

    技術情報協会  触覚センサの高感度センシングと応用技術  2017.4

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    Audience: Company

    近年、製品に高級感や上質感を付与するための質感のデザインが注目されるようになってきています。質感は極めて感性的な概念であり、従来は人間による主観的な評価が中心でしたが、より定量性や再現性のある計測手法が求められています。本講座では、MEMS技術を用いて作製した多軸接触力・光・温度に対して複合的に感度を持つ超小型センサの開発と、それを用いた人間が感じるのに近い質感の定量的評価手法の研究についてご紹介いたします。

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  • 医療・ヘルスケア・感性計測用センサの小型化・高機能化と応用展開

    Role(s): Lecturer

    R&D支援センター  2017.3

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  • 入門 医療・ヘルスケア・感性計測向けセンサ~基礎からMEMS応用まで~

    Role(s): Lecturer

    株式会社トリケップス  2017.3

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    Audience: Company, Governmental agency

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  • 光・ひずみ・温度複合MEMSセンサとその物体表面質感計測への応用

    Role(s): Lecturer

    日本ゴム協会東海支部  ウェアラブルセンサへのエラストマーの応用と現状の技術課題・将来展望  名古屋市工業研究所 第1会議室  2017.1

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    Audience: Researchesrs, Company

    MEMS構造をエラストマーに埋め込んだ構造の小型センサにより、さまざまな材質の見た目や触感を含んだ人間の感覚に近い質感を定量的に計測する手法について紹介する。

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  • 見た目や触り心地・温もりを含んだ感性的な質感を計測する小型センサデバイス

    Role(s): Demonstrator

    国立研究開発法人科学技術振興機構 国立研究開発法人新エネルギー・産業技術総合開発機構  イノベーション・ジャパン-大学見本市  2016.8

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  • わたしたちの未来とマイクロマシン

    Role(s): Lecturer

    栃木県立栃木高等学校  平成28年度SS発展研究「学問探求講義」  栃木県立栃木高等学校  2016.7

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    Audience: High school students

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  • 一つのセンサで冷温感・触感・見た目を含む質感を測る技術

    Role(s): Lecturer

    科学技術振興機構、新潟大学、新潟薬科大学  ライフイノベーション 新技術説明会  2016.6

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    Audience: Company, Media

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  • 医療・ヘルスケアセンシング・生体計測技術とMEMSによる小型化・高性能化技術・例

    Role(s): Lecturer

    産業科学システムズ  2016.6

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  • 入門 医療・ヘルスケア向けセンサ ~基礎からMEMS応用まで~

    Role(s): Lecturer

    株式会社トリケップス  2016.5

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    Audience: Researchesrs, Company

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  • 医療・ヘルスケア向けセンサの基礎・構成とMEMS技術を用いた小型化・高性能化技術

    Role(s): Lecturer

    株式会社情報機構  2016.4

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    Audience: Researchesrs, Company

    超少子高齢化の進展により、我が国では医療や福祉分野での課題が山積しています。医療費の増加を抑制するためには、身体の状態を日常的にモニタリングし、病気に陥る前の段階で予防医療措置により、健康寿命を増進することがカギとなります。また、過疎化の中で限られた医療資源を活かすためには、遠隔地からの医師による診断や相談、治療の発展が望まれます。これらの実現のためには、健康に関する様々な情報を収集するセンシング技術が不可欠です。
    そこで、本セミナーでは、このような用途に向けたセンサの検出原理や基礎技術について紹介するとともに、MEMS技術を用いた小型化、高性能化のための最新の事例について解説します。

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  • MEMSカンチレバー構造を用いた多機能センサデバイスとその応用

    Role(s): Lecturer

    にいがたナノ基盤技術実践会  平成27年度 第2回 「にいがたナノ基盤技術実践会」講演会  (公財)にいがた産業創造機構 テクノプラザ2階 会議室(長岡市新産4-1-9)  2015.12

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    Audience: Researchesrs, Company

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  • わたしたちの未来とマイクロマシン

    Role(s): Lecturer

    平成27年度 白河高校1学年対象 新潟大学出前講義  2015.10

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    Audience: High school students

    我が国が抱える現代の様々な技術的・社会的な課題と、それを克服した先にある未来の生活や医療、産業等について一緒に考えながら、現在と未来をつなぐカギとなるマイクロマシン技術とその役割について概説します。

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  • MEMS微細加工技術と多機能小型触覚センサ

    Role(s): Lecturer

    新潟大学、佐渡産業創造塾、(株)第四銀行、新潟大学産学地域連携推進機構協力会  新潟大学地域懇談会(佐渡会場)/第5回佐渡産業創造塾  佐渡市役所 大会議室 〒952-1209 佐渡市千種232  2014.12

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    Audience: Researchesrs, Company

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  • 半導体・MEMSを用いた近接覚・触覚コンボセンサ

    Role(s): Lecturer

    科学技術振興機構、国立六大学連携コンソーシアム(金沢大学、熊本大学、千葉大学、長崎大学,岡山大学、新潟大学)  国立六大学連携コンソーシアム新技術説明会  JST東京本部別館ホール(東京・市ヶ谷)  2014.11

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    Audience: Company

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  • わたしたちの未来とマイクロマシン

    Role(s): Lecturer

    青森県立弘前中央高等学校  平成26年度「大学模擬講義」  青森県立弘前中央高等学校  2014.10

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    Audience: High school students

    我が国が目指す10~20年後の都市,生活,医療,工場及び環境についての未来ビジョンを見ながら,その実現の鍵となるマイクロマシン技術の役割について概説します。

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  • わたしたちの未来とマイクロマシン

    Role(s): Lecturer

    白河高校1学年対象 新潟大学出前講義  福島県立白河高等学校  2014.9

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    Audience: High school students

    我が国が目指す10~20年後の都市,生活,医療,工場及び環境についての未来ビジョンを見ながら,その実現の鍵となるマイクロマシン技術の役割について概説します。

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  • 低消費電力MEMSセンサ(Transducers2013報告)

    Role(s): Lecturer

    センシング技術応用研究会  第4回グリーンシステム技術分科会  常翔学園大阪センター301室  2013.7

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    Audience: Researchesrs, Company

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  • ロボット時代のための集積化多軸触覚センサ

    Role(s): Lecturer

    大阪府立産業技術総合研究所  産技研技術セミナー 次世代ロボットに不可欠なセンサ技術とその応用  たかつガーデン 2F コスモス, 大阪  2008.12

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    Audience: Researchesrs, Company

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Media Coverage

  • 材質・見た目まとめて測定 新潟大など小型センサー Newspaper, magazine

    日本経済新聞社  日経産業新聞  2016.7

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  • 新潟大と立命館大、触覚と近接覚を測れるセンサー開発-ロボハンド向けに提案へ Newspaper, magazine

    日刊工業新聞社  日刊工業新聞  新技術・新製品  2014.10

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    新潟大学工学部の寒川雅之助教と立命館大学情報理工学部の野間春生教授は、触覚と近接覚の両方を測れるセンサーを開発した。ロボットの指先に付けると対象物と指先の距離や対象物をつかむハンドの握力、表面の質感を一つのセンサーで計測できる。果物や動物など柔らかく、形が一定でないものをつかむロボットへの採用を提案する。

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