記述言語：日本語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.144.111

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担当区分：最終著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Wiley  

This paper describes an improved process for controlling the initial deflection structure of cantilever‐type MEMS tactile sensors. By using residual stress, deposition sequence, and metal layer patterns, the initial deflection of the cantilever was successfully aligned to the same initial deflection with micron accuracy and 97% yield in a simpler and easier process than previous processes. This enables a reduction in the number of processes and flexible control of deflection, which is expected to improve yield and shorten fabrication time. © 2024 Institute of Electrical Engineer of Japan and Wiley Periodicals LLC.

DOI： 10.1002/tee.23989

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Institute of Electrical Engineers of Japan (IEE Japan)  

DOI： 10.1541/ieejsmas.144.6

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Institute of Electrical Engineers of Japan (IEE Japan)  

DOI： 10.1541/ieejsmas.144.2

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

DOI： 10.1109/sensors56945.2023.10325048

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担当区分：最終著者,　責任著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.143.251

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掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

DOI： 10.1109/biosensors58001.2023.10281079

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掲載種別：研究論文（学術雑誌）  

Parkinson's disease (PD) is characterized by dopaminergic cell loss and the formation of Lewy bodies, of which the main component is aggregated and fibrillized α -synuclein (aSyn). Recent studies suggested that ultratrace amounts of aSyn aggregates are also present in biofluid specimens, and they can serve as a biomarker for PD. Because aSyn has been shown to possess a prion-like property, we attempted to enhance the sensitivity and specificity of a cantilever microsensor to detect aSyn aggregates by exploiting the properties of self-templating assembly and lipid interaction on the surface of liposome-immobilized cantilever sensor. We found that the liposome-immobilized cantilever sensor was able to successfully detect aSyn fibrils at a very low concentration (100 pg/mL), and the addition of aSyn monomers, which were converted into fibrils in the presence of aSyn aggregates and further acted as a template for fibrillization, lowered the detection limit to 10 pg/mL. The sensitivity of this cantilever sensor was comparable to or slightly superior to that of enzyme-linked immunosorbent assay (ELISA). Moreover, the lag time for the detection of aSyn fibrils has been significantly reduced to 100-120 min, compared to the tens of hours needed in conventional ELISA, real-time quaking-induced conversion (RT-QuIC), and protein misfolding cyclic amplification (PMCA) assays. Finally, preliminary measurements of aSyn aggregates showed the possibilities of discriminating serum from PD and non-PD patients. The liposome-immobilized cantilever sensor could serve as a promising tool for the early or preclinical diagnosis of PD.

DOI： 10.1109/JSEN.2023.3272659

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担当区分：最終著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Wiley  

DOI： 10.1002/tee.23813

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掲載種別：研究論文（学術雑誌）   出版者・発行元：AIP Publishing  

Thickness shear mode (TSM) resonators consisting of metal films and quartz plates are widely used for sensor applications such as film thickness monitoring, force sensors, and odor sensors. However, the current sensor geometry prevents further improvements in its sensitivity and stability. Thinning the plate is necessary for high sensitivity, and advanced fabrication technologies are required for their commercialization. The solution is to use a support substrate to increase the mechanical strength, which can guide the transmittance of the electric field. Herein, we report a TSM resonator bonded to a support substrate. An AT-cut quartz resonator with a floating electrode on the top side was bonded to the support substrate. Two excitation electrodes were placed under the substrate. The support substrates evaluated in this study included borosilicate glass, Z-cut quartz crystals, and AT-cut quartz crystal plates. The quartz crystal resonator (QCR) bonded to the AT-cut quartz crystal plate and positioned at 90° to the crystallographic x-axis shows an excellent temperature coefficient of frequency of −60 ± 14 ppb/°C for a temperature range 11–40 °C. The proposed method reduces temperature sensitivity to 1/4 or less compared to that without a substrate. Furthermore, the resonator could be used as a quartz crystal microbalance. The proposed method may inspire further high-frequency QCR-based biochemical chips or various sensor applications with TSM resonators.

DOI： 10.1063/5.0132804

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

DOI： 10.1109/SENSORS52175.2022.9967179

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担当区分：最終著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Wiley  

DOI： 10.1002/ecj.12369

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その他リンク： https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12369

担当区分：最終著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Fuji Technology Press Ltd.  

We previously reported a microelectromechanical system tactile sensor with elastomer-embedded microcantilevers. The sensor enabled the gripping control of soft objects by a robotic hand and acquisition of the object surface texture data. However, sensitivity improvement for more precise control and better texture information acquisition is desired. Here, the cantilever size and the sensor’s strain-gauge arrangement were redesigned, resulting in a sensor with significantly improved sensitivity. In addition, we report the sensitivity dependence on the cantilever size.

DOI： 10.20965/jrm.2022.p0677

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担当区分：最終著者,　責任著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.142.91

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担当区分：最終著者,　責任著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.142.85

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担当区分：最終著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Wiley  

DOI： 10.1002/eej.23370

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その他リンク： https://onlinelibrary.wiley.com/doi/full-xml/10.1002/eej.23370

記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Wiley  

DOI： 10.1002/ecj.12352

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その他リンク： https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12352

記述言語：日本語   掲載種別：研究論文（学術雑誌）   出版者・発行元：電気学会  

DOI： 10.1541/ieejsmas.142.17

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1002/eej.23356

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その他リンク： https://onlinelibrary.wiley.com/doi/full-xml/10.1002/eej.23356

担当区分：最終著者,　責任著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.141.343

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掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.141.279

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：Institute of Electrical and Electronics Engineers Inc.  

A method for the contactless endpoint detection of gold etching using a quartz-based capacitive detector is reported herein. To design a microfabrication process, the etch rates of materials to be used must be determined to control the etch depth. However, the etch rate changes gradually when the etching solution is used repeatedly. An endpoint and/or etch rate detection method is required to ensure process repeatability in a manufacturing environment. This method should be contactless because the etchants for metals are typically highly corrosive. In this study, a 32 MHz quartz-crystal oscillator is used to detect changes in the concentration of specific ions. The developed method can detect nanometer-order thickness changes during gold etching.

DOI： 10.1109/Transducers50396.2021.9495749

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掲載種別：研究論文（学術雑誌）   出版者・発行元：Wiley  

DOI： 10.1002/ecj.12317

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その他リンク： https://onlinelibrary.wiley.com/doi/full-xml/10.1002/ecj.12317

記述言語：日本語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.141.103

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記述言語：日本語   掲載種別：研究論文（学術雑誌）   出版者・発行元：電気学会  

DOI： 10.1541/ieejsmas.140.349

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担当区分：最終著者,　責任著者   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.140.272

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.140.251

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担当区分：最終著者,　責任著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.140.228

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記述言語：日本語   出版者・発行元：公益社団法人 応用物理学会  

DOI： 10.11470/jsapmeeting.2020.2.0_1725

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1002/bit.27380

Web of Science

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その他リンク： https://onlinelibrary.wiley.com/doi/full-xml/10.1002/bit.27380

記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Fuji Technology Press Ltd.  

In the study, we investigated a detection method of partial contact of an object owing to curved or uneven surface of the contact object by a tactile sensor. The sensor is developed using three microcantilevers embedded in a polydimethylsiloxane (PDMS) bump. First, three bumps were employed to place a bump for each cantilever. It was possible to detect a contact position because the resistance change in the strain gauge on the cantilever under each bump significantly depended on the contact/non-contact state of each bump. Second, a tactile sensor with high-density arrangement of microcantilevers was used to detect partial or tilted contact situations. The results indicated that the output of a tactile sensor with high-density arrangement of microcantilevers reflected partial or tilted contact. It is suggested that a tactile sensor with multiple bumps and high-density microcantilevers allows for more dexterous gripping control based on the shape of the object and contact angle.

DOI： 10.20965/jrm.2020.p0297

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Wiley-Liss Inc.  

In this study, we developed a detachable self-heated-stage suitable for high-speed processing of titanium by thermally assisted reactive ion etching (TRIE). The detachable self-heated stage was designed based on simulation results. The temperature of the stage increases rapidly within 10 minutes with low radio frequency (RF) power, because of the low thermal capacitance. The etch rates of titanium and titanium alloy by the TRIE improved compared with those of titanium and titanium alloy by a regular RIE. In addition, the replacement of the developed stage with another stage became easier than the previous stage.

DOI： 10.1002/ecj.12227

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担当区分：最終著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）  

添付ファイル： revisedmanuscript2.pdf

DOI： 10.1016/j.sna.2019.111774

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掲載種別：研究論文（国際会議プロシーディングス）  

We newly examined a self-templating effect of prionoid protein on a liposome-immobilized cantilever sensor in order to detect a trace amount of α-synuclein fibril as a biomarker molecule for Parkinson Disease. The developed sensor significantly decreased the detection threshold down to several hundreds of fM and its measuring time to a few hours, and could be applied in a clinical setting.

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掲載種別：研究論文（国際会議プロシーディングス）  

We have newly confirmed a selective detection of amyloid beta (Aβ) in human serum with its dynamic behavior by a strain gauge cantilever sensor immobilizing liposome incorporated with cholesterol. We examined the effect of incorporating cholesterol in the liposome in order to decrease the interaction between the liposomes and many proteins in human serum. The result implied that cholesterol suppress the interaction because of stabilizing effect in the lipid membrane [1]. Thus we concluded that we were able to detect Aβ, especially the state of its aggregation and fibrillization, in human serum by the cantilever sensor immobilizing liposome incorporated with cholesterol.

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担当区分：最終著者,　責任著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）  

添付ファイル： 電気学会論文誌-最終原稿.pdf

DOI： 10.1541/ieejsmas.139.375

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.139.341

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

DOI： 10.1109/SENSORS43011.2019.8956615

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記述言語：日本語   出版者・発行元：公益社団法人 応用物理学会  

DOI： 10.11470/jsapmeeting.2019.2.0_2837

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.139.169

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：Institute of Electrical and Electronics Engineers Inc.  

We have developed cantilever-type MEMS tactile sensors with the PDMS elastomer that are sensitive to force and light, and shown that it can measure complex tactile senses. However, it is difficult for this sensor to detect correct response in liquid such as water or ethanol because of luck of resistances to these solutions. Therefore, we employ the fluoropolymer as the elastomer material instead of the PDMS in this work. Consequently, it is demonstrated that the tactile sensor with fluoropolymer can detect force and light successfully in water and ethanol in exactly as detection in air.

DOI： 10.1109/TRANSDUCERS.2019.8808646

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担当区分：最終著者,　責任著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）  

添付ファイル： 触覚センサによる多層柔軟物モデルの計測と有限要素解析-最終.pdf

DOI： 10.1541/ieejsmas.139.149

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掲載種別：研究論文（国際会議プロシーディングス）  

In this work, for the first time, chronological behavior of α-synuclein (aSyn) as causative agent for Parkinson Disease has been measured by phospholipid liposome-immobilized cantilever microsensor. Our goal is to detect aggregated, not a monomeric, forms of aSyn in its initial stage, as it is most toxic in patient's cerebrospinal fluid (CSF). The aSyn aggregates in phosphate buffered saline (PBS) were successfully detected compared to CSF of healthy person. With a developed temperature stabilization method at room temperature, which was stabilized within +/- 0.2/ °C, aSyn aggregation was detected down to 100 pM.

DOI： 10.1109/TRANSDUCERS.2019.8808657

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

DOI： 10.1541/ieejsmas.139.81

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記述言語：日本語   出版者・発行元：公益社団法人 応用物理学会  

DOI： 10.11470/jsapmeeting.2019.1.0_2531

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

本研究ではコンパクトな微小液滴モニタリングセンサを開発した。このセンサはマイクロ流体回路と水晶振動子を組み合わせた静電容量型センサである。このセンサを用いてマイクロ液滴の生成とモニタリングに成功した。センサの感度向上のためセンシングキャパシタを最適化し、周波数応答を増大させた。NaCl水溶液濃度を最適化したセンシングキャパシタを用いて計測し、その結果から、2周波数を用いることで高ダイナミックレンジでの計測が可能であることを示した。

DOI： 10.1002/ecj.12128

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担当区分：筆頭著者,　責任著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）  

温暖化による気候変動で重大な水害が増大している。水害の早期警報のためには、源流域を含む河川流域全体の多点・広域における水位モニタリングが必要である。しかし、従来のセンシングシステムはコストの問題があり小河川への設置が進んでいない。本研究では、ミリ波レーダとLPWAネットワークを用いた低コストで非接触な河川水位センシングシステムを提案する。試作センサは2.56%の平均誤差率で距離が計測可能であり、荒天の際を含む実際の河川で水位モニタリングが可能であった。さらに、さまざまな河川形態においてこのセンサにより水位モニタリングが可能であることが示された。

添付ファイル： 電気学会論文誌 最終提出原稿.pdf

DOI： 10.1541/ieejsmas.138.461

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

本論文はコンパクトな微小液滴モニタリングセンサの開発に関するものである。このセンサはマイクロ流体回路と水晶振動子を組み合わせた静電容量型センサである。このセンサにおいて微小液滴の生成とモニタリングに成功した。また、センサの感度向上のためセンシング用キャパシタを最適化し、これにより周波数応答の増大が可能である。最適化したセンシング用キャパシタを用いて、NaCl水溶液の濃度を計測した。計測結果から、2つの周波数を用いることで、高ダイナミックレンジでの計測を可能とした。

DOI： 10.1541/ieejsmas.138.382

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担当区分：最終著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：John Wiley and Sons Inc.  

In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed single element MEMS sensor which can detect proximity, contact, and slipping to skillful gripping of the object. This MEMS sensor can detect proximity as impedance change of Si substrate by reflected light from the object due to the photoconductive effect. In addition, both normal and shear load can be also detected as resistance change of strain gage on cantilevers located threefold symmetry and embedded in polydimethylsiloxane (PDMS). By attaching the sensor on the electromotive manipulator, accurate control of gripping force was enabled by feedback of the sensor output.

DOI： 10.1002/eej.23098

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担当区分：最終著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：MDPI AG  

In this paper, in order to perform delicate and advanced grip control like human, a proximity and tactile combination sensor using miniaturized microcantilevers one-fifth the size of previous one as the detection part was newly developed. Microcantilevers were arranged with higher spatial density than in previous works and an interdigitated array electrode to enhance light sensitivity was added. It is found that the interdigitated array electrode can detect light with 1.6 times higher sensitivity than that in previous works and the newly fabricated microcantilevers have enough sensitivity to applied normal and shear loads. Therefore, more accurate detection of proximity distance and spatial distribution of contact force become available for dexterous gripping control to prevent 'overshooting', 'force control error', and 'slipping'.

DOI： 10.3390/mi9060301

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担当区分：最終著者,　責任著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）  

本研究では光とひずみに感度を持つMEMS触覚センサにより、ポリオキシメチレン樹脂の加工表面の評価を行った。センサ出力が樹脂の表面プロファイルと摩擦特性と相関を持つことが確認され、さらにこのセンサにより樹脂の表面色の違いも検知可能であることが示された。

添付ファイル： 光・ひずみ複合触覚センサを用いたポリオキシメチレン樹脂の表面形状・色計測による質感評価　最終原稿.pdf

DOI： 10.1541/ieejsmas.138.250

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担当区分：最終著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：M Y U Scientific Publishing Division  

Measurements of the surface texture of objects, including optical and tactile features, using a multimodal micro-electromechanical systems (MEMS) sensor are reported in this paper. The proposed MEMS sensor has two functions in its structure: light sensitivity of the MOS structure in the Si substrate and force sensitivity of the strain resistance gauge on microcantilevers embedded in the elastomer. Deflection of the cantilever, induced by an applied force, can be detected as a DC resistance change of the strain gauge film, which depends on the tactile texture including hardness, thickness, and surface roughness of the object. On the other hand, reflected light from the object, detected as AC impedance change at 5 MHz, depends on the color of the object. It is confirmed that the resistance and impedance changes correlate with the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that the surface texture of the object, including optical and tactile features, can be characterized using a single MEMS sensor.

添付ファイル： SS-1786-accepted.pdf

DOI： 10.18494/SAM.2018.1786

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：M Y U Scientific Publishing Division  

Quartz crystal microbalances (QCMs) have found applications as popular chemical and biological sensing tools. However, their current device geometry prevents their commercialization for industrial use. In this study, we propose a new disposable QCM sensor with an electrode only on the sensing side, making it suitable for sensor mounting. In this sensor system, the excitation electrode is positioned on a glass plate separate from the QCM. Such electrode configurations are suitable for sensor applications in flow cell systems in preference to common QCM systems because QCM mounting on the flow cell and the electrical interconnections between the QCM and the oscillation circuit are simple. The optimized configurations of the electrode diameter, separation distance, and orientation relative to the crystallographic x-axis of the plate are revealed for the first time. The proposed QCM can be applied to realize a disposable QCM-based biochip or hazardous gas sensor located inside a flow tube.

DOI： 10.18494/SAM.2018.1712

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Wiley-Liss Inc.  

This paper describes development of self-heated stage suitable for thermal reactive ion etching (TRIE) of the functional metals. TRIE was evaluated using both experiments and simulations for etching functional metals. The self-heated stage was designed based on the simulation results. TRIE employs a self-heated stage which is thermally insulated aluminum plate as the etching stage of a regular RIE apparatus. The stage temperature increases rapidly within 10 min and etch rate does not depend on process time. TRIE technique was used to etch various kinds of functional metals: Ti, Mo, Ta, Nb, and Ti alloy (Ti-6Al-4V). It did improve the etching rate of these materials greatly.

DOI： 10.1002/ecj.12046

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

液体濃度を計測するための非接触モニタリング技術を開発した。このセンサは2つのセンシングキャパシタと水晶発振回路からなる。2種類の周波数により同時に誘電性と導電性変化を計測することに成功した。よって、幅広い周波数帯を用いることで、液体をその物理化学的特性に合わせて計測することが可能である。本研究では、切削油の濃度のモニタリングに成功した。提案したセンサはさまざまな液体モニタリングへの使用が期待できる。

DOI： 10.1541/ieejsmas.138.37

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：Institute of Electrical and Electronics Engineers Inc.  

Recent studies have proposed a model using the supervised neural-network (NN) as the haptic model. However, this model has the problem in expressing human tactile sense. Therefore, we constructed a haptic stage model based on the model of human-tactile sense and cognitive process. Our NN-based model consists of supervised and unsupervised stages. Using surface-scanning results from our trial micro-tactile sensor, we confirmed the material-identification problem with our model. A conventional full conventional NN(CNN) model achieved a 98.0% correct identification rate for 28 materials
our model achieved a rate of 67.2%. Our model employed typically is deepening because we used the convolutional process in all layers, therefore, we consider that our learning result lost local features on each material, and then identification rate was declined as result.

DOI： 10.1109/ICSENS.2017.8234173

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

本論文は機能性メタルの熱反応性イオンエッチング(TRIE)に適した自己加熱式試料台の開発について述べている。機能性メタルのエッチングについて熱反応性イオンエッチングを実験とシミュレーションで評価した。自己加熱式試料台はシミュレーション結果に基づいて設計された。一般のRIE装置のエッチング試料台として、熱的に絶縁されたアルミプレートからなる自己加熱式試料台を用いた。試料台の温度は10分以内に急速に上昇し、エッチング速度はプロセス時間に依存しない。TRIE技術を様々な機能性メタル(Ti、Mo、Ta、Nb、Ti合金(Ti-6Al-4V)のエッチングに用いることで、これらの材料のエッチング速度が飛躍的に改善された。

DOI： 10.1541/ieejsmas.137.262

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：Institute of Electrical and Electronics Engineers Inc.  

In this study, a thermally assisted reactive-ion etching (TRIE) technique using a 3D self-heated stage as the etching stage in a conventional reactive-ion etcher was developed and applied to a large size wafer. The 3D stage was designed based on simulation results and its heating characteristics on application of RF power were evaluated. Results indicated that the temperature of the etching stage increased rapidly to 350 °C, but maintained a distribution of ≤ 4 °C. Its application to various minor metals (Ti, Ti 6Al-4V, Ta, Nb, and Mo) was investigated. The resultant etch rates substantially increased with the use of the 3D self-heated cathode in a conventional reactive-ion etcher.

DOI： 10.1109/TRANSDUCERS.2017.7994289

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：Institute of Electrical and Electronics Engineers Inc.  

In this paper, we have demonstrated usefulness of the electromotive manipulator system with a developed MEMS sensor to skillful gripping of various objects. This MEMS sensor is responsive to light with the photoconductive effect in Si and force with resistance change in the strain gauge layer on microcantilever structures, as a result, the sensor can detect both proximity and contact. In addition, since the cantilevers are located three-fold symmetry, the direction of applied force can also be detected. It is demonstrated that the proposed manipulator system with the developed sensor can grip not only rigid bodies but also gripping flexible objects.

DOI： 10.1109/TRANSDUCERS.2017.7994254

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：Institute of Electrical and Electronics Engineers Inc.  

In this paper, we report that texture measurement of warm/cool and fluffiness sensations of various fabrics has been carried out by a multimodal MEMS sensor. This MEMS sensor can detect force as resistance change of strain gauge on micro-cantilever and light as impedance change of Si layer by the photoconductive effect, respectively. The sensor can also detect a temperature drop by heat transfer from the sensor to the contact object as resistance change of the strain gauge and impedance change of Si. It is demonstrated that warm/cool and fluffiness sensations of fabrics can be evaluated by the measured results of the proposed MEMS sensor depending on temperature drop and contact force.

添付ファイル： PID4721655.pdf

DOI： 10.1109/TRANSDUCERS.2017.7994058

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

本論文では水晶振動子微小天秤(QCM)法を用いた小型熱重量分析センサを提案した。火星の土壌サンプル中の物理吸着水量や土壌成分を計測するため、QCMに集積化したマイクロヒータの加熱電極形状を最適化した。次に、真空環境中におけるQCMの加熱特性を評価した。その結果、電極の温度は300℃まで加熱された。最適化されたQCMは低消費電力で優れた加熱特性を持つことを見出した。

DOI： 10.1541/ieejsmas.137.180

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担当区分：最終著者,　責任著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）  

本論文では、物体の器用な把持のための、開発した近接、接触、滑りを検知可能な単一素子MEMSセンサを用いた電動マニピュレーションシステムの有用性を示した。このMEMSセンサは物体から反射された光による光導電効果で起きる、Si基板のインピーダンス変化として近接を検知している。さらに、3回対称に配置され、PDMSに埋め込まれたカンチレバー上のひずみゲージの抵抗変化により、垂直荷重及び剪断荷重も検知可能である。このセンサを電動マニピュレータに取り付けることで、センサ出力のフィードバックにより把持力の精細な制御が可能であった。

添付ファイル： 07E_03.pdf

DOI： 10.1541/ieejsmas.137.212

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：ELSEVIER SCIENCE SA  

In this paper, a simple fabrication method for a Gaussian-shaped quartz crystal resonator was developed based on the surface tension of the photoresist. First, the photoresist profile on a quartz wafer was changed to a lens shape by the photoresist reflow. By changing the viscocity of the photoresist with propylene glycol monomethyl ether acetate, the photoresist profile on the quartz wafer was adjusted to create a Gaussian shape. Finally, the Gaussian-shaped QCR was fabricated by transferring the shape onto the quartz wafer using a reactive ion etching. (C) 2017 Elsevier B.V. All rights reserved.

DOI： 10.1016/j.sna.2017.04.019

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担当区分：最終著者,　責任著者   記述言語：日本語   掲載種別：研究論文（学術雑誌）  

我々は繊細な物体のスマートなマニピュレーションのために、単一素子で近接と多軸接触力を検知可能なセンサを開発している。今回は近接センシングにおける環境ノイズを低減するために、変調プローブ光を用いた測定手法について報告する。白色LEDをプローブ光として、150 Hzで明滅させた。本手法により、センサ出力が電源や照明からの環境ノイズを含んでいる場合でも、近接距離を150 Hzの周波数成分として分離できることを示した。

添付ファイル： 05E_05.pdf

DOI： 10.1541/ieejsmas.137.146

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：WILEY-V C H VERLAG GMBH  

Accumulating evidence suggests that interaction between amyloid- (A) and cell membrane is crucial to the pathogenesis of Alzheimer's disease (AD), and thus an increasing understanding of the impact of membrane composition on A-membrane interaction becomes essential for the mechanism elucidation of A-membrane interaction and the early diagnosis of AD. In this work, electrically neutral phosphatidylcholine (PC) as the most major class of membrane phospholipids, including 1,2-dipalmitoyl-sn-glycero-3-phosphocholine (DPPC), 1,2-distearoyl-sn-glycero-3-phosphocholine (DSPC), 1-palmitoyl-2-oleoyl-sn-glycero-3-phosphocholine (POPC), and A(1-40) as the most common amyloid protein were selected as the research subjects, and a developed cantilever-based biosensor, on which liposomes comprised of PC lipids were immobilized, was applied to characterize in real time the interactions between A(1-40) and membranes comprised of PC lipids with different hydrophobic acyl chains, and to evaluate the effect of cholesterol incorporated in membrane on A-membrane interaction during the whole process of A(1-40) fibrillization. The results illustrate that the interaction between A(1-40) and PC membrane can be divided into three stages, which are related to the change in molecular states of A. More importantly, it is found that membranes comprised of PC lipids with shorter saturated acyl chains show higher interaction ability with A(1-40), and the incorporation of cholesterol into PC bilayer can remarkably accelerate and strengthen A(1-40)-membrane interaction. These results confirm that hydrophobicity is the main driving force for the interactions between A(1-40) and PC membranes. In return, the above results enlightened us to apply the current micro-cantilever immobilized with cholesterol-containing DPPC liposomes to challenge the detection of low-concentration A(1-40). This time 50-nM A(1-40) in aqueous solution has been effectively detected, suggesting that this proposed detection technique would contribute to A detection and early diagnosis of AD in the future.

DOI： 10.1002/elan.201600416

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：MYU, SCIENTIFIC PUBLISHING DIVISION  

In this study, thermally assisted reactive ion etching (TRIE) was evaluated by both experiments and simulations. TRIE employs a self-heated stage instead of the etching stage of a regular RIE apparatus. The self-heated stage was designed on the base of the simulation results, and its heating characteristics upon the application of radio frequency (RF) power were evaluated. The temperature of the stage increases rapidly within 10 min because of the low thermal capacitance of the stage. An etch rate of 0.6 mu m/min and an etch selectivity of about 30 were achieved for titanium etching with SF6 plasma. In addition, we also investigated the application of TRIE for various kinds of minor metals (Mo, Ta, Nb, and Ti alloy) for the first time and achieved higher etch rates and etch selectivities than those of regular reactive ion etching (RIE).

DOI： 10.18494/SAM.2017.1444

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担当区分：最終著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：MYU, SCIENTIFIC PUBLISHING DIVISION  

In this paper, we report on texture measurements for an object, including tactile, warm/cool, and light sensations using a multimodal micro-electromechanical systems (MEMS) sensor. This MEMS sensor can detect force as a resistance change of the strain gauge on a microcantilever and light as an impedance change of a Si layer by a photoconductive effect. The sensor, which was maintained near human body temperature using a heater, can also detect a temperature drop after heat transfer from the sensor to a contacted object as a resistance change of the strain gauge or an impedance change of the Si layer. In this work, three different materials (copper, acrylic, and wood) were chosen as the target objects for the measurement of surface texture, and they were characterized on the basis of the differences in sensor outputs in active sensing experiments (approaching and pressing of the sensor with a probe light) on the sensor surface. In the proximity process, the impedance change of the Si layer depends on the surface reflectivity of the objects. After the object is touched by the sensor surface, the impedance of the Si layer and the resistance of the strain gauge of the sensor increase with the change in temperature caused by heat transfer. Furthermore, the resistance of the strain gauge decreases with the deformation of the cantilever caused by the pressing force from each object. Therefore, it is demonstrated that surface texture including the mechanical, optical, and thermal characteristics of various materials can be evaluated by active sensing using the proposed MEMS multimodal sensor.

添付ファイル： SS-1443-galley proof.pdf

DOI： 10.18494/SAM.2017.1443

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担当区分：最終著者,　責任著者   記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Institute of Electrical Engineers of Japan  

Insulator and piezoelectric thin films were deposited on titanium substrate, and characterized for application in tough MEMS tactile sensors. The titanium substrate was polished by buffing before the deposition of the thin films. An Al2O3 thin film was deposited as an insulator and showed good insulation characteristics on the polished titanium substrate. Piezoelectric BiFeO3 thin films were prepared by RF sputtering. The XRD pattern of the BiFeO3 thin film on the titanium substrate shows the presence of the ferroelectric phase. The polarization-electric field curve also shows a ferroelectric hysteresis loop. The results show that insulator and piezoelectric thin film can be formed on titanium substrate.

添付ファイル： 01E_06_L.pdf

DOI： 10.1541/ieejsmas.137.46

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記述言語：日本語   出版者・発行元：一般社団法人 日本機械学会  

<p>In this Paper, we report output characterization of the proximity and tactile combination MEMS sensor for controlling manipulation of flexible objects. This sensor can detect proximity by the internal photoelectric effect in Si substrate and normal and shear loads as tactile information are detectable by deflection of cantilevers, which are fabricated on the substrate surface and embedded in the silicone elastomer. The proximity and tactile outputs from this sensor attached on the electromotive actuator depend on distance to the target object and normal load applied by gripping the object, respectively. Furthermore, sensor output with shear load applied by weight of gripped flexible object is measured and the improved control method for stable gripping control of flexible objects is discussed.</p>

DOI： 10.1299/jsmermd.2017.1A1-N02

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記述言語：日本語   出版者・発行元：一般社団法人 日本機械学会  

<p>This paper reports the development of wirelessly excited multi-channel QCM sensor for odor sensor applications. In this sensor, the excitation electrodes are positioned on a glass plate separate from the QCM. Such electrode configurations are suitable for odor sensor applications because the electrical interconnections between the QCM and the oscillation circuit are simple. We evaluated the dependence of the resonance frequency on the crystallographic orientation. We found out two vibrational modes that depends on each modulus of elasticity and the frequency responses of each mode are linear for mass loading.</p>

DOI： 10.1299/jsmermd.2017.1A1-K11

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：ELSEVIER SCIENCE SA  

The dynamic behavior of amyloid-beta protein (A beta) fibrillization on cell membrane is closely related to the progression of Alzheimers disease (AD). In this paper, we reports a new approach for real-time monitoring of the fibrillization process of A beta on lipid membrane using a miniaturized cantilever-based liposome biosensor, which contributes to the technology development of A beta label-free detection and the mechanism elucidation of A beta fibrillization on cell membrane. 1,2-Dipalmitoyl-sn-glycero-3-phosphocholine (DPPC) liposome as model cell membrane was immobilized on the cantilever surface and A beta(140) was selected as a target protein in this work. Liposome-A beta interaction is evaluated by detecting the resistance change rate of the strain gauge embedded in the cantilever, which is directly proportional to the deflection of cantilever. 24-h real-time monitoring result clearly shows chronological change in the resistance with the progress of A beta fibrillization on liposomes. Moreover, it is found that the extent of liposome-A beta interaction is closely dependent on the aggregate state and concentration of A beta but is less dependent on the type of used solvent (water or serum). It is indicated that DPPC liposome shows sufficient affinity and selectivity to A beta even in serum. In particular, a concentration of A beta as low as 1 mu M can be detected using the cantilever-based liposome biosensor. Furthermore, it is confirmed that this biosensor has a potential of recognizing different states of A beta. We expect that the cantilever-based liposome biosensor becomes an effective tool for accelerating amyloid related research and developing the early diagnosis approach of AD. (C) 2016 Elsevier B.V. All rights reserved.

添付ファイル： Characterization of Aβ Fibrillization.pdf

DOI： 10.1016/j.snb.2016.03.025

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

本論文では液体の物理化学的特性分析のための水晶発振回路を用いた最適化コンボセンサについて報告する。本センサはLFE(Lateral Field Excited)センサとACR(Antiparallel Coupled Resonator)センサを同一基板上に集積化することにより、機械的特性と電気的特性を同時に計測可能である。グルコース水溶液やNaCl水溶液の計測のために発振器の電極径を最適化した。さらに、グルコース水溶液やNaCl水溶液の濃度を最適化したセンサにより計測した。本センサは工業プラントにおける品質管理に用いることが期待される。

DOI： 10.1541/ieejsmas.136.343

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

本論文では微小液滴の計測を可能とする水晶発振回路を用いた液体濃度センサについて報告する。微小液滴のセンシングのためにセンシングキャパシタ(SC)の設計を電界が集中するように最適化した。本センサはSCと接続する水晶発振回路の高い安定性から高い感度を持つ。SCはシリコーンゴム中に埋め込まれている。SC電極間に発生する電界はゴム上に空間的に閉じ込められており、ゴムへ液体が接触することにより発振回路の周波数が変化するが、液体の量は変化にあまり影響しない。周波数変化は液体の電気的特性に関係しているので、液体の濃度が本センサにより計測可能である。本センサはファクトリーオートメーションへの応用が期待される。

DOI： 10.1541/ieejsmas.136.319

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：Institute of Electrical and Electronics Engineers Inc.  

A multifunctional tactile sensor which can detect approximation, contact, slipping, and surface texture of the target has been developed. The sensor is composed of multiple MEMS cantilevers fabricated on Si substrate embedded in PDMS, and can detect normal and shear forces. By indenting and sliding the sensor on the object surface, output depending on hardness, friction, and roughness, etc. can be obtained. Moreover, a function for detection of proximity was integrated monolithically through photo-sensitivity of Si substrate.

添付ファイル： INEC2014sohgawa-final.pdf

DOI： 10.1109/INEC.2014.7460417

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：MYU, SCIENTIFIC PUBLISHING DIVISION  

In this paper, a contactless sensor for the measurement of liquid concentration using a quartz oscillator is reported. An out-of-plane electric field distribution from a planar sensing capacitor (SC) is used for the noncontact sensor measurement of liquid concentration on a spacer. This sensor measures the changes in the capacitance of the SC by the changes in the frequency of the quartz oscillator. Because the capacitance is dependent on the relative permittivity and conductivity of the liquid sample on the spacer, it is pOssible to measure the concentration of the sample. The response is very stable because, in this sensor, the SC is incorporated into the quartz oscillator. Because the SC is in contact with the liquid sample instead of the quartz crystal resonator, the sensor has a high quality factor (approximately 30000). Moreover, this sensor can be used with a general integrated circuit (IC) and an electronic component at a low cost. The sensor is used for the noncontact measurements of liquid concentration.

DOI： 10.18494/SAM.2016.1262

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：WILEY-V C H VERLAG GMBH  

We have newly evaluated the interaction of lipid membrane with two different proteins of lysozyme and carbonic anhydrase from bovine (CAB) using a micro cantilever-based liposome biosensor with a new droplet-sealing structure. Herein 1,2-dipalmitoyl-sn-glycero-3-phosphocholine (DPPC) liposomes are used as model lipid membrane and are immobilized on the surface of cantilever. The interaction of DPPC liposome with the target protein causes deflection of the micro-cantilever, which can stably be detected by measuring the resistance change of the strain gauge. The resistance change dependent on time is used to evaluate the characteristic of liposome-protein interaction. The resistance of the cantilever-based biosensor increases monotonously with time in both of the two protein solutions. Especially, chronological resistance change depends markedly on both the concentration and species of target proteins. Finally, these results lead us to conclude that the cantilever-based liposome biosensor with the droplet-sealing structure facilitates the characterization of protein-membrane interaction. It also means that this biosensor is a promising candidate device for label-free detection of concentration and species of different target proteins.

DOI： 10.1002/elan.201500412

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

This paper reports mass sensitivity amplification in a Gaussian-shaped quartz crystal resonator (Gaussian-shaped QCR). To achieve amplification, a fabrication process for a Gaussian-shaped (not quasi-Gaussian) QCR was developed using photolithographic methods. Sensitivity amplification in the QCR was observed at the central portion. The mass response was three times higher than the theoretical value for gravimetric measurements of thin, uniform films. The optimized height of the shape, evaluated based on the Q factor, is higher than that of the convex shape. This resonator is expected to be applicable to mass measurement of various micro/nanoparticles.

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

In this paper, we report texture measurement of the fabrics by a multimodal MEMS sensor. This sensor has sensitivity to both multi-axial force vector and light. Therefore, we can evaluate tactile texture by force measurement and visual texture by light measurement. This sensor has a possibility for texture measurement with both visual and tactile information in substitution for the human sensory test. In this work, various fabrics were chosen as the target object and evaluated by sensory test method using 10 test subjects. The dependences of the sensor output on reflection of probe light, reactive force, and frictional force by active approaching and touching of the sensor to the object surface were also evaluated. As a result, it is demonstrated that there is a good correlation between the results of the human sensory test and features of visual and tactile sensor output.

添付ファイル： Evaluation Method of Fabrics by Visual and Tactile Texture Information using MEMS Combo Sensor 最終版.pdf

DOI： 10.1109/ICSENS.2016.7808624

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

DOI： 10.1109/ICSENS.2016.7808468

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC  

A micro-cantilever with thermally stable strain gauge of a NiCr thin film and a self-assembled monolayer was fabricated by surface micromachining. Liposomes, as biosensing molecules, were immobilized on its surface. To prevent evaporation of the water solvent, a reservoir made of polydimethylsiloxane around the micro-cantilever was fabricated and covered with a glass plate. The resistance of the strain gauge increases with time in the amyloid beta (A beta) solution, because the cantilever is bent downward caused by interaction between A beta and liposomes immobilized on the micro-cantilever surface. Moreover, resistance change depends on the interaction ability of A beta proteins with liposomes. It is therefore indicated that the fabricated static mode micro-cantilever sensor with immobilized liposomes can be used to detect A beta proteins.

添付ファイル： JSEN2470108.pdf

DOI： 10.1109/JSEN.2015.2470108

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

平面センシングキャパシタ(SC)の測定対象への漏れ電界を用いた非接触液体濃度センサを作製した。このセンサはSCの静電容量変化を水晶振動子の共振周波数変化として計測する。静電容量は液体の比誘電率や導電率に依存するため、濃度の計測が可能である。本手法では水晶振動子が液体に接しないため、Q値が非常に高く、また一般的なICや電子部品を用いて計測回路が構成できるため、低コストである。

DOI： 10.1541/ieejsmas.135.210

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

エラストマに埋め込んだマイクロカンチレバーを用いた圧電型触覚センサを提案し、これまでのピエゾ抵抗を用いた触覚センサに対して消費電力の低減を目指した。基板温度520℃、ガス圧力0.6 Paで高周波スパッタリングにより作製したBiFeO3薄膜(膜厚: 400 nm)は良好な圧電性を持ち、振動により300 mVの出力電圧を得ることができた。これにより、BiFeO3薄膜を用いて触覚センサへの外力印加によるマイクロカンチレバーの変位を検知できることを示した。

添付ファイル： 05E_02_3.pdf

DOI： 10.1541/ieejsmas.135.158

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：AMER INST PHYSICS  

In this work, the thermal reactive ion etching (TRIE) technique for etching hard-to-etch materials is presented. The TRIE technique employs a self-heated cathode and a thermally insulated aluminum plate is placed on the cathode of a regular reactive ion etching (RIE) system. By optimizing the beam size to support the sample stage, the temperature of the stage can be increased to a desired temperature without a cathode heater. The technique was used to etch a bulk titanium plate. An etch rate of 0.6 mu m/min and an etch selectivity to nickel of 100 were achieved with SF6 plasma. The proposed technique makes a regular RIE system a more powerful etcher without the use of chlorine gas, a cathode heater, and an inductively coupled plasma source. (C) 2015 AIP Publishing LLC.

DOI： 10.1063/1.4917193

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Institute of Electrical Engineers of Japan  

In this work, we present a new design involving a microheater-integrated quartz crystal microbalance (QCM) array for thermal desorption spectroscopy. Each QCM consists of two electrodes to excite thickness-shear-mode (TSM) vibrations on the crystal back side and one microheater to increase the temperature on the crystal front side. The resonance frequency was stable when a voltage was applied to the microheater. Carbon microparticles were coated on one of the QCMs for gas adsorption, and its frequency change during the temperature increase was calculated by subtracting the frequency change of an untreated QCM. The proposed QCM array was employed to separate ethanol from methanol. The separation was successful, as confirmed via thermal desorption spectra calculated by differentiating the resonance frequency change with respect to time.

DOI： 10.1541/ieejsmas.135.112

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

In this paper, a noncontact sensor for the measurement of liquid concentration using a quartz oscillator is reported. An out-of-plane electric field with a planer sensing capacitor (SC) is used for sensing a liquid on a spacer. This sensor measures the changes in the capacitance of the SC as the changes in the frequency of the quartz oscillator. The capacitance is dependent on the relative permittivity and the conductivity of the liquid sample on the spacer. Therefore, it is possible to measure the concentration of the sample. The response is very stable because in this sensor, the SC is incorporated into the quartz oscillator. Because the quartz crystal resonator is not contact with liquid, the proposed sensor has a high quality factor (approximately 30,000). Moreover, this sensor can be used with a general IC and an electronic component, with a low cost. The proposed sensor can be expected to be used for various kinds of liquid sensing applications.

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

Lead-free BiFeO3 thin films for tactile sensor using microcantilevers have been prepared on Pt and SrRuO3/Pt thin films on a SiO2 /Si substrate by RF sputtering, and the electrical characteristics have been optimized by controlling the substrate temperature, gas pressure, and oxygen partial pressure in deposition process. The BiFeO3 thin film (thickness: 300 nm) deposited on SrRuO3 (thickness: 80 nm) deposited at substrate temperature of 500 degrees C in gas pressure of 0.6 Pa and oxygen partial pressure of 0.24 Pa has good crystallinity, ferroelectricity, and piezoelectric property. Therefore, it is demonstrated that BiFeO3 thin film can be a good sensing material as a detection part of tactile sensor. Furthermore, a cantilever structure with piezoelectric capacitor and strain gauge has been fabricated and different time-dependent outputs from them can be obtained.

添付ファイル： IEEE-paper-final-sohgawaconverttoPDF.pdf

DOI： 10.1109/ICSENS.2015.7370483

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

The tactile and visual texture measurement by multimodal MEMS sensor is reported. This MEMS sensor has two function in a structure: force-sensitivity of resistance of microcantilevers embedded in the elastomer and light-sensitivity of a MOS structure on the Si substrate. Deflection of the cantilever induced by applied force depends on the tactile texture including hardness, thickness, and roughness of the object, and is detected as DC resistance change of the strain gauge film. On the other hand, incident light depends on the visual texture of the object, and is detected as AC impedance change at 5 MHz. It is confirmed that the resistance and impedance changes depend on the physical and optical properties of the object, respectively. Therefore, it has been demonstrated that multimodal texture can be characterized by a single MEMS sensor.

添付ファイル： PID3845957.pdf

DOI： 10.1109/ICSENS.2015.7370352

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：Institute of Electrical and Electronics Engineers Inc.  

A multimodal sensor with Si micro-cantilever embedded in PDMS elastomer for measurement of proximity and touch forces has been fabricated and characterized. DC resistance of the strain gauge on the cantilever changes in proportion to the indentation depth of the object. On the other hand, the AC (&gt
0:5 MHz) impedance including photo-sensitive component of Si increases with increase of distance between the sensor surface and the object because of decrease of light intensity reflected on the object surface. Moreover, the AC impedance is different between grounding and floating of the proximate object because of difference of distribution of electrostatic field between electrodes, so that it is suggested that proximity can be detected as the impedance change by light as well as the electric field.

添付ファイル： PID3327207.pdf

DOI： 10.1109/ICSENS.2014.6985362

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：Institute of Electrical and Electronics Engineers Inc.  

The surface texture of various materials has been characterized by tactile sensor with a micro-cantilever embedded in the PDMS elastomer. The maximum output (resistance of strain gauge on the cantilever) change of the sensor by indentation of the object on the sensor surface depends on the hardness or thickness of the object. Moreover, output change is asymmetric in a back-and-forth indentation test because of relaxation of deformation. On the other hand, the output increases rapidly at beginning of stepwise sliding of the sensor at the object surface because of static friction, and changes periodically corresponding to stick-slip oscillation or surface roughness after slipping. It is demonstrated that about 30 materials of papers, clothes, leathers, and plastic sheets, have been classified into 5 clusters by the principal component analysis using feature quantities extracted from the sensor outputs.

添付ファイル： PID3327209.pdf

DOI： 10.1109/ICSENS.2014.6985351

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：AMER INST PHYSICS  

In this work, a new design for a microheater combined with a quartz crystal microbalance (QCM) array for thermogravimetric analysis is presented. Each QCM consists of two electrodes to excite thickness-shear-mode vibrations and one microheater to increase the temperature on the crystal backside. In addition, all the electrode pads are patterned on the crystal backside, making the design of the QCM compact and user-friendly. Finally, the proposed QCM array was employed to separate ethanol from methanol. This was successfully achieved via thermal desorption spectra calculated by differentiating the frequency changes. (C) 2014 AIP Publishing LLC.

添付ファイル： Miniature quartz crystal-resonator-based thermogravimetric detector(著者校正).pdf

DOI： 10.1063/1.4894385

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

We have developed a micro-cantilever biosensor with embedded NiCr thin film strain gauge. Meanwhile, DPPC liposomes have been selected as sensing biomolecules to be immobilized on the surface of the micro-cantilever. The liposome-protein interaction was detected by measuring the resistance change rate of the strain gauge. In this work, a PDMS-based sealed reservoir structure was newly fabricated and added on the sensor to keep the target solution stable, where a long-time stable detection was achieved. The resistance of the cantilever-based biosensor increased with time in lysozyme or carbonic anhydrase from bovine (CAB) aqueous solution, and the characteristic of chronological resistance change varied with the concentration and kind of the proteins. It is expected that the micro-cantilever sensor with droplet-sealing structure can be used for bioassay of various proteins in future.

添付ファイル： IEEE SENSORS 2014 PROCEEDINGS.pdf

DOI： 10.1109/ICSENS.2014.6984997

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

A multifunctional tactile sensor which can detect approximation, contact, slipping, and surface texture of the target has been developed. The sensor is composed of multiple MEMS cantilevers fabricated on Si substrate embedded in PDMS, and can detect normal and shear forces. By indenting and sliding the sensor on the object surface, output depending on hardness, friction, and roughness, etc. can be obtained. Moreover, a function for detection of proximity was integrated monolithically through photo-sensitivity of Si substrate.

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

A tactile sensing system that measures normal and shear (triaxial) forces has been developed, and its characteristics such as linearity and crosstalk have been evaluated. Triaxial forces are estimated from the resistance changes of NiCr thin film strain gauge attached to three microcantilevers. The output voltage of the Wheatstone bridge that comprises a gauge film and three reference resistances is acquired using an A/D converter after amplification. Triaxial forces are calculated from the output voltages of three microcantilevers by simple matrix multiplication. Nonlinearity and crosstalk are less than 4% when the normal force applied is up to 1N and less than 10% when the shear force applied is up to 0.2N. Active touch sensing was demonstrated using an object having a striped profile measuring 0.1mm in height and 1mm in width. © 2014 The Institute of Electrical Engineers of Japan.

添付ファイル： IEEJ_Manuscript_proof.pdf

DOI： 10.1541/ieejsmas.134.58

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

デスクトップDRIE装置を用いたチタンの微細加工を行った。チタンのエッチング加工には高速排気特性が重要であり、少量のSF6ガスを用いて0.2 μm/min以上のエッチングレートを達成した。本手法の加工例として、蚊の針を模した微小針を作製し、精度の高い微細加工が可能であることを示した。チタンは優れた機械的特性と耐腐食性を持ち、MEMS材料として期待されており、本手法の3次元形状加工への応用が期待できる。

添付ファイル： 提出稿・デスクトップ型DRIE装置を用いたチタニウム微細加工.pdf

DOI： 10.1541/ieejsmas.134.96

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

単一のMEMSセンサを用いて近接と触覚の情報を検知できる新規手法について提案する。触覚情報はNiCrひずみゲージ薄膜の直流抵抗変化より得られる。一方、近接情報はLED光をプローブとして、そのSiウェハでの光吸収による交流インピーダンス変化により得られる。すなわち、直流と交流の計測を切り替えることで、計測した情報を選択することができる。実験の結果により、0から0.5 mmの押込みでほぼ線形な接触による出力が、0～50 mmの距離で非線形な近接出力が得られた。さらに、本センサの近接計測によりドーナツ形状の概形を計測することが出来た。

添付ファイル： Sensor-symp_IEEJ_final.pdf

DOI： 10.1541/ieejsmas.134.229

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

燃料電池への応用を視野においた水晶振動子メタノール濃度センサに関する数値計算と実験的検証を行った。このセンサは水晶振動子(QCR)と櫛形電極キャパシタ(IDC)から構成され、fF以下の微小容量変化を検知可能である。作製したセンサは0.008wt%の分解能でメタノール濃度を計測できる。本研究では、基板の厚みとメタノール濃度の範囲に対し最適なセンサデザインを調べた。本研究により、高分解能な静電容量センサを実現でき、様々な種類の静電容量型センサに応用することが期待できる。

DOI： 10.1541/ieejsmas.134.224

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

A miniature tactile sensor has been fabricated by connecting stress-sensitive part with an amplifier of integrated circuit through through-silicon-via (TSV) electrically. The sensitive part consists of three warped cantilevers with piezoresistive NiCr thin film which are prepared on a silicon-oninsulator wafer by the surface micromachining technique. The TSV connection can reduce noise of detected change of the piezoresistive output induced by wire between the sensitive part and the amplifier. Fabricated tactile sensor of 5 μ 5mm2 size has linear dependence of the output on both normal and shear forces. The output noise has been successfully decreased by 14 and 34% in the sensor using the TSVs compared with that using wires of 3 and 6mm lengths, respectively. © 2013 The Japan Society of Applied Physics.

添付ファイル： MN12071.pdf

DOI： 10.7567/JJAP.52.06GL08

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

Polycrystalline BiFeO3 (BFO) films on Pt/TiO2/ SiO2/Si substrate have been prepared by a pulsed laser deposition (PLD) method with various repetition rates. The X-ray diffraction (XRD) pattern observes single-phase perovskite structure with a small secondary phase. While the film-thickness is increased with increasing repetition rates, the grain size increases, and the leakage current reduces. Also, good polarization versus electric field (P-E) hysteresis loops of all polycrystalline BFO films were obtained at room temperature (RT). It is seen that the polarization value (Pr) practically remains almost constant for all the BFO films, and the coercive field (Ec) decreases with increasing the film thickness. © 2013 Copyright Taylor and Francis Group, LLC.

DOI： 10.1080/00150193.2013.842064

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

本論文ではひずみゲージ薄膜とSi傾斜マイクロカンチレバーを用いた触覚センサのアクティブタッチによる物体表面質感の計測方法について述べる。作製した触覚センサは約20μm以上の粗さを検知でき、紙幣の縞模様を検知可能である。また、硬さや摩擦係数、表面粗さといった性質の異なる様々な用紙を触覚センサの出力から識別した。センサを紙に押し付けて動かした時の抵抗変化から、紙の性質に依存した特徴量を定義し、それらを用いた主成分分析により紙を四種類のクラスタに分類できた。

添付ファイル： 電気学会論文誌投稿(レビュー)-ver13.pdf

DOI： 10.1541/ieejsmas.133.147

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

In this paper, we propose a single microheater combined quartz crystal microbalance array for thermal desorption spectroscopy. The each QCM has two electrodes for exciting thickness shear mode (TSM) vibrations on one side of the crystal and a double-spiral-shape heater on the other side. The resonance frequency is stable when a voltage was applied on the microheater. Carbon microparticles for gas adsorption were coated on one of the QCMs and the frequency change during temperature increase was extracted by subtracting the change of the other QCM. The proposed QCM array can monitor small mass changes at sub-ng level as a function of temperature. © 2013 IEEE.

DOI： 10.1109/Transducers.2013.6626745

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

We have fabricated the multi-axial tactile sensor which has micro-cantilevers with strain gauge film on Si embedded in hemispherical elastomer, and various kinds of papers have been identified by active touch. Transient responses of the resistance change have been obtained when the sensor was pushed and moved on various kinds of blank papers successively. Some features are extracted from the response by a principal component analysis and the papers are classified in several clusters. © 2013 IEEE.

添付ファイル： 1274.watanabe.jpn.pdf

DOI： 10.1109/Transducers.2013.6626941

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

A micro-cantilever with thermally stable strain gauge of a NiCr thin film and a self-assembled monolayer (SAM) was fabricated by surface micromachining and liposomes, as biosensing molecules, were immobilized on its surface. The resistance of the strain gauge increases with time in a biological protein (carbonic anhydrase from bovine: CAB) solution because the cantilever is bent downward by surface adsorption of CAB molecules. On the other hand, the resistance changes differently with the growth of another type protein, amyloid beta (A beta) fibrils. It is therefore demonstrated that the fabricated static mode micro-cantilever sensor can detect the interaction between the liposomes and the biological proteins.

添付ファイル： PID2894703.pdf

DOI： 10.1109/ICSENS.2013.6688340

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

Intensity and direction of normal and shear (3-axial) forces have been measured by using a tactile sensor with NiCr strain gauge film on 3 microcantilevers. Output voltage of the Wheatstone bridge which includes a gauge film is measured as digital signal after amplification. 3-axial forces are calculated from the output voltages of 3 microcantilevers every 100 ms. When normal force is applied from 0 to 1 N, the measurement errors of normal and shear forces are less than 50 mN and 10 mN, respectively. When shear force of 0.1 and 0.2 N is applied, the angle error of evaluated direction is less than 10 degrees.

添付ファイル： IEEE_Sensors_Proc_yokoyama_final.pdf

DOI： 10.1109/ICSENS.2013.6688401

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

Epitaxial BiFeO3 (BFO) thin films have been prepared on La-doped (001) SrTiO3 substrates (La-STO) by using magnetic-field-assisted pulsed laser deposition. X-ray diffraction patterns of the epitaxial BFO thin films prepared under magnetic fields of 0, 0. 1, and 0. 4 T show only (00ℓ) diffraction peaks without secondary phases. From the results of reciprocal space mapping for all epitaxial BFO thin films, (003) reflections show splitting spots, and asymmetric spots of (-103) and (103) reflections exhibit a rhombohedral structure. The microstructure of the epitaxial thin films was modified by the strength of magnetic field, and a columnar structure was shown in the film prepared under a high deposition rate for a magnetic field of 0. 4 T. The polarization versus electric field hysteresis loops were obtained at room temperature (RT) in all the epitaxial films; in particular, the remanent polarization for the epitaxial film prepared under a magnetic field of 0. 1 T was 46 μC/cm2 at RT while the current density was reduced in comparison with those of other epitaxial films. © 2013 The Korean Physical Society.

DOI： 10.3938/jkps.62.1041

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

Various kinds of papers have been identified by active touch of a multi-axial tactile sensor which has micro-cantilevers with strain gauge film on Si. When fine surface of the standard surface roughness scale and the printed stripe pattern on a banknote have been scanned by the tactile sensor, it allows to measure such fine roughness as a resistance change of the gauge film, and the triangular unevenness could be obtained down to 20 mu m. Transient responses of the resistance change have been obtained when the sensor was pushed and moved on various kinds of blank papers successively. Some features are extracted from the response by a principal component analysis and the papers are classified in four clusters.

添付ファイル： Technical paper.Watanabe(Osaka.Univ.,Jpn).pdf

DOI： 10.1109/WHC.2013.6548398

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

低雑音NiCr薄膜ひずみゲージとマイクロカンチレバー構造を用いた触覚センサを作製した。Cr含有率が75wt%のNiCr薄膜は極小の抵抗温度係数を持ち、これを用いて作製した触覚センサは垂直圧力と剪断力双方に線形な出力を示し、従来のものと比べ小さい雑音と温度ドリフトを実現した。これにより各軸の力を3～3.5kPaの誤差で計測でき、さらにロボットハンドの把持状態を滑り状態を含め高確率で識別できた。

添付ファイル： sohgawa-rev-111201.pdf

DOI： 10.1016/j.sna.2011.12.055

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：The Japan Society of Applied Physics  

磁場印加レーザアブレーション法を用いてPt/TiO2/SiO2/Si基板上に成膜したBiFeO3薄膜は単相ペロブスカイト構造を持ち、XRDパターンのピーク角度は磁場無で成膜した場合に比べると低角側にシフトしていた。また、円柱状で小さいグレインサイズの多結晶構造が得られ、この形状により、残留分極が50μC/cm2、圧電d33定数が100pm/Vと強誘電性や圧電性に影響が現れることがわかった。

DOI： 10.1143/JJAP.51.09MD05

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掲載種別：研究論文（国際会議プロシーディングス）  

Polycrystalline BiFeO3(BFO) thin films have been prepared on Pt/TiO2/SiO2/Si substrates by using a pulsed laser deposition (PLD) method under a magnetic field. The X-ray diffraction (XRD) pattern shows a single-phase perovskite structure with no secondary phases, and (010) and (020) peaks slightly shift to lower angles in comparison with those of a BFO thin film prepared without a magnetic field. A columnar structure and small grain size were observed and the leakage current is slightly high in comparison with that of a BFO thin film prepared without a magnetic field. A polarization versus electric field (P-E) hysteresis loop was obtained at RT and the polarization at zero electric field is 50 μC/cm2. Ferroelectric domain switching corresponding to up and down polarization states was confirmed. An enhanced piezoelectric coefficient (d33) of about 100 pm/V has been obtained at a certain point. Ferroelectric and piezoelectric properties were affected by a columnar microstructure formed by magnetic field application. © 2012 The Japan Society of Applied Physics.

DOI： 10.1143/JJAP.51.09MD05

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）  

添付ファイル： 球・円柱表面形状を用いた動的表面テクスチャ計測多軸触覚センサ.pdf

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

チップ積層により配線長を短くし、出力電圧の雑音を低減するため、触覚センサとIC増幅回路を集積化した。Auワイヤを用いた集積化により雑音を27.6mVから3.3mVに低減できた。これによりデバイスサイズ及び配線を削減し更なる高密度実装を可能とした。さらに、裏面へのIC増幅回路実装を可能とするためSi貫通電極を試作し、犠牲層エッチングプロセスとの整合性においてSi3N4を壁面絶縁層として用いることが有効であった。

添付ファイル： proceedings-sohgawa-rev-120530.pdf

DOI： 10.1557/opl.2012.1182

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

We have developed the tactile sensor using the microcantilevers with strain gauge film which can detect normal and shear forces simultaneously. In this work, the tactile sensor and the IC amplifier have been integrated heterogeneously to shorten the wire length by chip-on-chip stacking and reduce the noise in the output voltage. Standard deviation of the noise can be reduced from 27.6 mV to 3.3 mV by heterogeneous integration of the tactile sensor and the IC amplifier using Au wire bonding. By this heterogeneous integration, the device size and wiring numbers can be reduced, and installation of more sensors is allowed on fingertips of the robot. Moreover, through-silicon-via (TSV) holes were fabricated to mount an IC amplifier on the backside of the sensor chip, instead of using Au wires. Although TSV can be fabricated successfully, resistance to sacrificial etching process is problem. As a result, Si 3N4 used instead of SiO2 has improved insulation between TSVs. © 2012 Materials Research Society.

DOI： 10.1557/opl.2012.1182

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：Korean Institute of Electrical and Electronic Material Engineers  

Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/SiO&lt
inf&gt
2&lt
/inf&gt
and/or Si diaphragm fabricated using a micromachining technique
the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or Si:B piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor. © 2012 KIEEME.

DOI： 10.4313/TEEM.2012.13.5.215

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

0.4Tの磁場中でのレーザアブレーションによりBiFe0.9Co0.1O3(BFCO)薄膜をPt/TiO2/SiO2/Si基板上に成膜した。磁場無し成膜では350nm厚でグレイン状の形状を示すが、一方磁場中で成膜したBFCO膜は1μm厚で円柱状の結晶構造を示した。BFCO膜の漏れ電流密度は磁場無しの方が小さかった。どちらの場合でも80Kで飽和した分極ヒステリシスが得られ、また室温で弱い強磁性を示した。

DOI： 10.1143/JJAP.50.09NB03

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掲載種別：研究論文（学術雑誌）  

BiFe0.9Co0.1O3 (BFCO) films have been prepared on Pt/TiO2/SiO2/Si substrates with a magnetic field of 0.4 T by pulsed laser deposition. BFCO films prepared under magnetic field show a single-phase perovskite structure with a little secondary phase, and their (010) and (020) peaks shift to lower angles than those of the film prepared without magnetic field. The BFCO film of about 1 μm thickness shows a columnar structure, although the BFCO film of about 350nm prepared without magnetic field shows a grain like structure. The leakage current density of the BFCO film prepared under magnetic field is much lower than that of the BFCO film prepared without magnetic field. The saturated P-E hysteresis loops of both BFCO films are obtained at 80 K, and the M-H hysteresis loops of both BFCO films show a weak ferromagnetism behavior at room temperature. © 2011 The Japan Society of Applied Physics.

DOI： 10.1143/JJAP.50.09NB03

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）  

カンチレバー構造を作製することにより、熱膨張差で起きる熱変形により歪みが変化し、見かけ上の抵抗温度係数になる。エラストマに埋め込むことで低減できるが、エラストマ自体も熱膨張を起こすのでそれによる影響もあり、見かけの抵抗温度係数をゼロにするのは難く、熱膨張の少ないエラストマ材料を用いる必要がある。NiCr組成を最適化したターゲットを用いスパッタリング製膜することで、安定して抵抗温度係数を低減できるようになった。

添付ファイル： NiCrゲージ薄膜の抵抗温度係数低減によるカンチレバー型触覚センサの高分解能化　提出用.pdf

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：JAPAN SOC APPLIED PHYSICS  

A Tactile sensor system consisting of elements with three microcantilevers embedded in a cylindrical elastomer has been fabricated by micro electromechanical systems (MEMS) technology. These sensor small size (3 x 4 mm(2)) chips are mounted on a flexible sheet, and thus the fabricated sensor array can be set even on a curved surface. In addition, the spacial distribution of normal and shear forces is obtained when two kinds of objects (an acrylic hemisphere and a brass cylinder) come in contact with the fabricated sensor shifted laterally. The distribution results appropriately reflect the surface shape of the object and give the behavior of the forces vector. (c) 2011 The Japan Society of Applied Physics

DOI： 10.1143/JJAP.50.06GM02

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

A Tactile sensor system consisting of elements with three microcantilevers embedded in a cylindrical elastomer has been fabricated by micro electromechanical systems (MEMS) technology. These sensor small size (3 × 4mm2) chips are mounted on a flexible sheet, and thus the fabricated sensor array can be set even on a curved surface. In addition, the spacial distribution of normal and shear forces is obtained when two kinds of objects (an acrylic hemisphere and a brass cylinder) come in contact with the fabricated sensor shifted laterally. The distribution results appropriately reflect the surface shape of the object and give the behavior of the forces vector. © 2011 The Japan Society of Applied Physics.

添付ファイル： MN10112.pdf

DOI： 10.1143/JJAP.50.06GM02

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：JAPAN SOC APPLIED PHYSICS  

A tactile sensor array covered by a projected cylindrical elastomer has been designed and fabricated for crosstalk reduction among sensor elements caused by the lateral deformation of the elastomer. The analysis of elastomer deformation by the finite element method showed that the optimal thickness of the flat elastomer between cylinders and the substrate is 50-100 mu m, because the sensor structure has not only a low crosstalk but also a high robustness. A tactile sensor array having the flat elastomer of 70 mu m thickness has little crosstalk and high robustness. (c) 2011 The Japan Society of Applied Physics

DOI： 10.1143/JJAP.50.06GM08

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

A tactile sensor array covered by a projected cylindrical elastomer has been designed and fabricated for crosstalk reduction among sensor elements caused by the lateral deformation of the elastomer. The analysis of elastomer deformation by the finite element method showed that the optimal thickness of the flat elastomer between cylinders and the substrate is 50-100μm, because the sensor structure has not only a low crosstalk but also a high robustness. A tactile sensor array having the flat elastomer of 70 μm thickness has little crosstalk and high robustness. © 2011 The Japan Society of Applied Physics.

添付ファイル： MN10032.pdf

DOI： 10.1143/JJAP.50.06GM08

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記述言語：日本語   掲載種別：研究論文（学術雑誌）   出版者・発行元：計測自動制御学会  

垂直力と剪断力双方を検知できる、エラストマに埋め込まれた傾斜マイクロカンチレバー3つを用いた触覚アレイセンサを設計・作製した。このセンサの出力を用い、把持状態の識別が可能であることを確認した。ロボットハンドが対象物体に対し「非接触」、「加圧しつつ把持」、「一定の力で把持」、「滑り」という4種類の状態を2つのセンサ素子の出力を用いて精度良く識別できることを示した。

DOI： 10.9746/sicetr.47.40

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その他リンク： http://ci.nii.ac.jp/naid/10027787570

記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：ELSEVIER SCIENCE BV  

A tactile sensor has been fabricated using NiCr-thin-film strain gauge with low noise by surface micromachining and slippage has been detected by using the tactile sensor. NiCr alloy thin film of Cr: 75wt% has very low temperature coefficient of resistance (TCR) and is employed for suppressing the temperature noise and drift. The fabricated tactile sensor with NiCr thin film (Cr: 75wt%) has linear dependences of the resistance on normal and shear forces, and shows lower noise and temperature drift than that with conventional NiCr (Cr:20wt%). Normal and shear forces measured by fabricated sensor well coincide with applied forces with errors of 3-3.5 kPa. Moreover, detection of slippage between the robotic hand and an acrylic object was detected by using fabricated tactile sensor array, and slipping condition can be judged at the rate of 76.5%. (C) 2011 Published by Elsevier Ltd.

DOI： 10.1016/j.proeng.2011.12.156

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

Ferroelectric Bi1:1Fe1-xCoxO3 (BFCO) thin films with x = 0-0:3 have been prepared on Pt/Ti/SiO2/Si substrates by chemical solution deposition (CSD) using iterative rapid thermal annealing (RTA) in nitrogen and oxygen. The crystallization of the rhombohedral structure of BiFeO3 (BFO) is observed clearly in all thin films, and a monoclinic Bi2O3 phase is also observed and is markedly larger in Co-doped BFO thin films than in BFO thin films. An electric field of 2MV/cm is applied to the Bi1.1Fe0.9Co0.1O 3 thin film annealed in nitrogen at 520 °C without dielectric breakdown, but its polarization versus electric field (P-E) hysteresis loops are not saturated owing to its high leakage current density. The Bi1.1 Fe0.8Co0.2O3 thin film prepared at 520 °C in oxygen shows a very good saturation of P-E hysteresis loops at room temperature (RT) at the low leakage current of about 8:7 × 10 -3A/cm2 under a high electric field of 1.5MV/cm. The leakage current at a low electric field may be Ohmic emission at any temperature
however at a high electric field, it may be attributed to tunnel emission at 80 K and Schottky emission at RT. © 2010 The Japan Society of Applied Physics.

DOI： 10.1143/JJAP.49.09MB05

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）   出版者・発行元：一般社団法人映像情報メディア学会  

我々は,3つのマイクロカンチレバーをエラストマに埋め込んだ構造からなる超小型触覚センサの開発をしてきた.このセンサは圧力とせん断力を同時計測可能で高密度集積が可能であるという特徴を持つ.本稿ではこのセンサを用いたセンサアレイと隠れマルコフモデル(HMM)を用いた機械学習とを組み合わせ,ロボットハンドによる物体の把持状態識別手法として提案している.そして,実験の結果,従来用いられてきた単一のセンサによる識別手法に比較し,センサアレイを用いることにより一定の識別精度向上が実現された.

DOI： 10.11485/itetr.34.18.0_39

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：JAPAN SOC APPLIED PHYSICS  

Ferroelectric Bi1.1Fe1-xCoxO3 (BFCO) thin films with x = 0-0.3 have been prepared on Pt/Ti/SiO2/Si substrates by chemical solution deposition (CSD) using iterative rapid thermal annealing (RTA) in nitrogen and oxygen. The crystallization of the rhombohedral structure of BiFeO3 (BFO) is observed clearly in all thin films, and a monoclinic Bi2O3 phase is also observed and is markedly larger in Co-doped BFO thin films than in BFO thin films. An electric field of 2 MV/cm is applied to the Bi1.1Fe0.9Co0.1O3 thin film annealed in nitrogen at 520 degrees C without dielectric breakdown, but its polarization versus electric field (P-E) hysteresis loops are not saturated owing to its high leakage current density. The Bi1.1Fe0.8Co0.2O3 thin film prepared at 520 degrees C in oxygen shows a very good saturation of P-E hysteresis loops at room temperature (RT) at the low leakage current of about 8.7 x 10(-3) A/cm(2) under a high electric field of 1.5 MV/cm. The leakage current at a low electric field may be Ohmic emission at any temperature; however at a high electric field, it may be attributed to tunnel emission at 80 K and Schottky emission at RT. (C) 2010 The Japan Society of Applied Physics

DOI： 10.1143/JJAP.49.09MB05

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記述言語：日本語   掲載種別：研究論文（学術雑誌）  

これまで1素子に4つのカンチレバーを用いていたのを3つに減らした触覚センサを設計・作製した。傾斜カンチレバーはポリマー/NiCr/SiN/Siの積層構造を持ち、垂直力と剪断力はカンチレバーの変形によるNiCr薄膜の抵抗変化として検出する。作製した触覚センサは垂直力と剪断力双方に対して線形な抵抗変化を示した。さらに、3つのカンチレバーの抵抗変化から印加した垂直力と剪断力2軸の計3軸の力を求めることを可能とした。

添付ファイル： E部門誌投稿論文rev100217.pdf

DOI： 10.1541/ieejsmas.130.223

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記述言語：英語   出版者・発行元：一般社団法人日本機械学会  

We have designed and fabricated a tactile sensors array with three inclined micro-cantilevers on a single sensor embedded in elastomer. Each sensor element can detect both normal and shear stress. In this paper, we propose classification method of gripping status using sensor array and a machine learning algorithm. By integrating multiple sensor data using machine learning algorithm, our method allows to detect partial slipping on contact surface as an initial sign of slipping. Through experiments, we confirmed that our method achieves better classification ratio than existing methods using single sensor data.

DOI： 10.1299/jsmeicam.2010.5.351

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）   出版者・発行元：一般社団法人電子情報通信学会  

エラストマー内に埋め込まれたマイクロカンチレバー構造を用いた圧力と剪断力を同時に計測できる多軸触覚アレイセンサの設計・作製を行った.Cr/Si二層構造を用いることで,圧力・剪断力双方で変形する傾斜形状のカンチレバーを作製できた.傾斜カンチレバー構造はエラストマー内に破損や変形なしに埋め込むことができ,表面の柔らかい触覚センサを実現できた.対向したカンチレバーの垂直圧力印加に対する出力は同符号となり,一方剪断力印加に対しては異符号となったので,出力の和・差分を取ることで圧力・剪断力を分離して計測可能であることを示した.また,剪断力の方向については,印加した方向のカンチレバーの出力電圧は大きく,それと垂直な方向のカンチレバーは小さかったため,これらの出力から剪断力の方向を検知することができると考えられる.

添付ファイル： tecrep-sohgawa-rev.pdf

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）  

触覚センサの出力安定性はスパッタリングで成膜したNiCrを用いることで大きく改善できたが、さらなる安定化を目指してNiCrの組成比をコントロールすることで抵抗温度係数の低減を試みた。NiとCrのターゲットの面積比を変えることで様々な組成の薄膜を作製し、温度特性や結晶性等を調べた結果、Crの量が40～60%のときに温度係数が小さくなることが分かった。

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

Tactile sensor consisted of micro-cantilevers has been developed to detect both normal and shear stresses, and have human-friendly surface. NiCr thin film is used as strain gauge having low resistance drift, although Si piezo-resistance gauge shows the large resistance drift induced by large temperature coefficient of resistance (TCR) and its output is unstable. TCRs of NiCr films prepared by vacuum evaporation and sputtering (at RT and 600°C) are 0.054%, 0.082%, and 0.0065%, respectively, and are much lower than that of Si, 0.25%. As a result, reduction of resistance drift and stabilization of the sensor have been obtained by using NiCr thin gauge. © 2009 The Institute of Electrical Engineers of Japan.

添付ファイル： 2008_main_page.pdf

DOI： 10.1541/ieejsmas.129.411

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

Tactile array sensor of the micro-cantilevers embedded in the elastomer has been fabricated to detect normal and 2-axes shear stresses. It is demonstrated that tactile array sensor with 3 x 3 detective elements can be fabricated with excellent yield. The sensor element is sensitive to both normal and shear stresses applied on entire sensor surface. Moreover, it has good directional characteristics so that it is shown that magnitude and direction of shear stress can be obtained by difference of output voltages of adjacent sensor cantilevers. The sensor output has good reproducibility for multiple measurement. The output from sensor element drastically changes with shifting applying position of force. It is considered that we can obtain pressed position from distribution of output from sensor element array. ©2009 IEEE.

添付ファイル： PID857986.pdf

DOI： 10.1109/SENSOR.2009.5285509

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）  

これまでポリマー/Siカンチレバー型触覚センサの検知部としてはPtひずみゲージを用いていたが、抵抗の温度依存性が大きく出力に大きなドリフトが表れていた。そこで温度係数の小さいNiCr薄膜を用いて温度特性を改善し高分解能化を試みた。真空蒸着により作製したNiCrひずみゲージはバルク材料に比べれば大きいものの、Ptに比較すれば温度係数を1/3に低減できた。

添付ファイル： PHS-08-13.pdf

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

Cantilever-type tactile sensors of silicon-polymer beam structures were fabricated by surface micromachining and covering with elastomers. Two kinds of elastomers with different Young's modulus PDMS and urethane gel have been used to control deflection of the cantilevers and adjust the sensitivity cantilever-type tactile sensors. The resistance change of the sensor with PDMS has linear dependence on normal and shear stresses, but that of the sensor with urethane gel is nonliner to normal and shear stresses. However, the sensitivity of urethane gel type sensor is about 30 times larger than PDMS type sensor. © 2008 The Institute of Electrical Engineers of Japan.

添付ファイル： IEEJ E paper temp2.pdf

DOI： 10.1541/ieejsmas.128.193

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：MATERIALS RESEARCH SOC  

Tactile sensors of Si microcantilevers with a piezoresistive layer have been proposed for detection of both normal and shear stresses. Micro-cantilevers were fabricated by the surface micromachining of SOI wafers and were adequately inclined by controlling deflection with a Cr layer. The cantilevers were embedded in the PDMS elastomer to create a human-friendly surface. When a stress is applied to the surface of elastomer, the deformation of the cantilevers along with the elastomer is detected as a resistance change in the piezoresistive layer of the cantilevers. The piezoresistive response of the cantilever was analyzed by FEM calculations. The fabricated tactile sensor is sensitive to both normal and longitudinal shear stresses and its responses agree closely with the calculated value. Moreover, it has little sensitivity to shear stress in the transverse direction to the cantilever, which means that the tactile sensor can. distinguish the direction of shear stress. This sensor can be utilized for tactile sensing in human support robots.

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

垂直力・剪断力双方を検知するためのピエゾ抵抗層を形成したSiマイクロカンチレバーを用いた触覚センサを提案した。カンチレバーは表面マイクロマシニングで作製し、Cr層により適度な傾斜形状に制御した。外力がカンチレバーを埋め込んだエラストマ表面に印加された時、それに伴うカンチレバーの変形をピエゾ抵抗変化として検知する。作製した触覚センサは有限要素法による解析結果と同様、垂直力と剪断力双方に対し感度を持つ。

添付ファイル： rad93B69.pdf

DOI： 10.1557/PROC-1052-DD04-07

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）  

ロボット用多軸触覚センサを試作し評価した。有限要素法による解析に基づき、力検知用のSiピエゾ抵抗を設けたCr/Siカンチレバー構造を最適な傾斜形状に作製し、これをエラストマ中に埋め込むことでセンサ素子を完成した。作製したセンサ表面に垂直力と剪断力を印加したところ、どちらに対しても感度が得られ、多軸触覚センサが実現可能であることを示した。

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

Silicon-fluoropolymer beam structures for cantilever-type tactile sensors have been fabricated and characterized. Curvature shape and tip height of fabricated cantilever agree well with theoretical calculated results. The deposition condition of polymer layer has been optimized in terms of process yield and tip height. The optimal thickness and curing temperature are 4-5 mu m and 200 degrees C for 1.5 mu m thick Si, respectively. The response of the tactile sensor with PDMS elastomer has been investigated against pressure. Although resistance of the platinum strain gauge has large temperature drift, it is obviously proportional to pressure, so that it becomes evident that the pressure can be detected by tactile sensor embedded in the elastomer.

添付ファイル： PID370781.pdf

DOI： 10.1109/SENSOR.2007.4300420

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：MATERIALS RESEARCH SOC  

Cr/Si bilayer cantilevers for an integrated multi-axis tactile sensor were fabricated by Si surface micromachining process. Among the cantilevers with various shapes, the rectangular and semicircular cantilevers were deflected upward with good controllability. The maximum deflections were compared with those calculated by the finite element method. Calculated deflections of Cr/Si cantilevers agree considerably with the experimental results. So, it is considered that the analysis by finite element method is useful to optimize layer thickness and size to obtain Cr/Si bilayer cantilevers with accurate deflection.

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）  

集積化多軸触覚センサ用Cr/Si積層カンチレバーを表面マイクロマシニングプロセスで作製した。様々な平面形状の中から矩形および半円形のものが制御性良く上反り立体形状を形成できた。カンチレバーの最大高さは有限要素法による解析結果とよく一致した。この結果より、有限要素解析はCr/Si積層カンチレバーの精密な立体形状を得るための各層の厚みやサイズを最適化するのに有効であると分かった。

添付ファイル： MRSprocpublished.pdf

DOI： 10.1557/PROC-0969-W05-01

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：JAPAN SOC APPLIED PHYSICS  

Fixed oxide charges in HfO(2) thin films have been characterized by photoreflectance spectroscopy (PRS). HfO(2) films were deposited on Si by pulsed laser deposition (PLD) in N(2), O(2) and a Mixture of these gases. PRS spectral intensity decreases with increasing positive charge in a film. HfO(2) deposited in N(2) has larger positive charges than that deposited in O(2) because of smaller PRS spectral intensity of the former. It is confirmed by ArF laser irradiation that this positive charge is caused by oxygen defects in HfO(2). Moreover, the effects of rapid thermal annealing (RTA) on HfO(2)/Si have been evaluated by PRS. The PRS spectral intensity becomes maximum by RTA at 600 degrees C in N(2) or O(2) It is suggested that the suitable temperature for the RTA of the HfO(2)/Si structure prepared by PLD is 600 degrees C.

添付ファイル： paper-engrev.pdf

DOI： 10.1143/JJAP.44.2409

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記述言語：英語   掲載種別：学位論文（その他）  

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：KOREAN PHYSICAL SOC  

SrBi2Ta2O9 (SBT)/SiO2/Si structures have been characterized by photoreflectance spectroscopy (PRS) without electrode formation. SBT film was deposited on SiO2/n-Si by the metal-organic decomposition (MOD) method and annealed in O-2 atmosphere at 600degreesC. The voltage was applied by attaching ITO transparent electrodes during PRS measurement. The PRS spectral intensity of SBT/SiO2/Si structure has hysteresis characteristics as well as a C-V curve. Additionally, the spectral intensity gradually decreases with time, in a similar way to reduction of the capacitance. These results mean that the spectral intensity indicates the ferroelectricity of SBT film in SBT/SiO2/Si structure, so that it is considered that characterization of MFIS structure without electrode can be measured by PRS.

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：KOREAN PHYSICAL SOC  

High-k HfO2 thin films have been prepared mainly at 400degreesC in O-2 atmosphere by pulsed laser deposition (PLD), and defects in the film have been characterized by electron spin resonance (ESR). Two ESR peaks are found at 9 similar or equal to 2.003 and 2.006. The g similar or equal to 2.006 peak intensity is higher in the sample deposited at target-sample distance of 45 mm than in that deposited at 60 mm. This is because part of the substrate and the film are exposed to high-energy particles ablated during deposition and are hence damaged. Moreover, the peak at g similar or equal to 2.006 is related to the interface state density calculated from the high-frequency C - V curve. On the other hand, the peak at g similar or equal to 2.003 is related to the thickness of the interfacial layer, and thus may be attributed to defects in the interfacial layer.

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

レーザアブレーション法によりO2雰囲気中、400℃でHfO2薄膜を成膜し、ESRにより膜中の欠陥を評価した。g~2.006のピーク強度はターゲット-試料間の距離が近いほうが大きかった。これは基板や薄膜が成膜中に高エネルギーの粒子にさらされ、ダメージを受けたためである。さらにこのピークは界面準位密度にも関連している。一方、g~2.003のピークは界面層中の欠陥に起因するものと考えられる。

DOI： 10.3938/jkps.46.258

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

SrBi2Ta2O9(SBT)/SiO2/n-Si積層構造をphotoreflectance分光法(PRS)により電極形成なしに評価した。試料にITO電極を接触し電圧を印加しつつPRSを測定した。スペクトル強度は静電容量特性と同様のヒステリシス特性を持つ。さらに強度は静電容量の減少に伴い時間とともに減少した。この結果は積層構造中の強誘電性をPRSにより電極形成せず測定できることを示している。

添付ファイル： KJC-FE5_proc_sohgawa_rev.pdf

DOI： 10.3938/jkps.46.262

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）   出版者・発行元：一般社団法人電子情報通信学会  

High-kゲート絶縁膜としてが注目されているHfO_2膜の非接触測定フォトレフレクタンス(PRS)スペクトル強度を膜中電荷に対応づけ,種々の評価と比較検討された.フォトレフレクタンススペクトル強度はSi表面電界に比例するため,膜中に正の電荷が存在すると強度が減少することから膜中の電荷を評価することができる.使用したHfO_2膜はPulsed laser deposition(PLD)法によりSi基板上に酸素,窒素及びその混合ガス中で作製した.窒素中で作製したものは酸素雰囲気中で作製したものよりも多くの正電荷を含むと思われる.またArFエキシマレーザを照射することで正電荷が増加し,これは酸素が抜けたとに対応すると考えられる.また,raoid thermal annealing(RTA)による変化を調べたところ,600℃以上ではPRS信号強度が大きくなることが見られ,膜中電荷が減少したことを示している.

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）   出版者・発行元：一般社団法人電子情報通信学会  

Hf0_2薄膜をレーザーアブレーション法(PLD)により作製し,その電気的特性およびESRによる欠陥評価を行った.ESRスペクトルにはg&amp;sime;2.006,2.003付近に顕著な2つのピークが見いだされた.g&amp;sime;2.006のピークはPLD製膜時に雰囲気ガス圧力を下げる,またはターゲットー基板間距離を短くすることで小さくなる.PLD製膜においてアブレートされた飛来粒子の運動エネルギー小さくすることで基板ダメージが減少すると考えられることから,このピークは界面欠陥に起因すると考えられる.g&amp;sime;2.003付近のピークは,ArFエキシマレーザを照射することでピーク強度が増大し,異方性を持たない.また,製膜時の酸素分圧を大きくすることで大きくなり,界面遷移層かHf0_2膜中の酸素に関係した欠陥が原因と考えられる.

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

SrBi2Ta2O9(SBT)/SiO2/n-Si stacked structures have been characterized by photoreflectance spectroscopy (PRS). The spectrum near E1 critical point energy is enhanced by deposition of SBT film. Annealing effect of the spectral intensity corresponds to that of (115) peak in XRD pattern of SBT film. Moreover, the PRS intensity increases when SBT film is poled by negative voltage. These spectral changes depend on the Si surface potential increase induced by remanent polarizations in the SBT film. The Si surface potential increase is 0.05 eV for -3 V poling. Critical point energy was estimated by peak positions of the PRS and large tensile stress is increased by the poling. It has been found that the spectral intensity closely corresponds to the ferroelectricity of the SBT film.

添付ファイル： proceedings.pdf

DOI： 10.1080/00150190490452929

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）   出版者・発行元：一般社団法人電子情報通信学会  

次世代High-kゲート絶縁膜材料として期待されるHfO2薄膜をレーザアブレーション法により作製し、その電気的および光学的手法による評価を行った。基板温度および酸素分圧を変化させて製膜しI-V、C-V特性を解析したところ基板温度400℃で0.2Torrの酸素中で製膜することで界面準位密度の低減およびフラットバンドシフト量の改善がみられた。

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：KOREAN PHYSICAL SOC  

High-k thin films of ZrO2, PrOx of similar to10 nm thickness have been prepared by pulsed laser deposition, and characterized in microscopic structure and electrical properties. Crystallization is promoted in ZrO2 films deposited above 400 degreesC, but a significant XRD peak was not observed in the ZrO2 film grown below 400 degreesC. The leakage current is decreased by increasing growth temperature, but all equivalent-oxide thickness (EOT) obtained from accumulation capacitance of C-V characteristics becomes large. The films deposited at 400 degreesC were annealed at 400 degreesC in O-2 gas to reduce the leakage. The leakage current change to be small, but the EOTs become large. Oxygen radical annealing is carried out to reduced the leakage, and is effective for ZrO2 thin film. Oil the other hand. only small improvement is observed ill the PrOx films.

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

レーザアブレーション法で成膜したZrO2、PrOx薄膜の微細構造と電気特性を評価した。400℃以下で成膜したZrO2薄膜は結晶化しない。漏れ電流は成膜温度を上げるに伴い減少したが、静電容量特性から求めたSiO2換算膜厚は大きくなった。400℃で成膜した薄膜のO2中熱処理により漏れ電流は減少したが換算膜厚は増えた。O2ラジカル処理はZrO2の漏れ電流を減らすのに有効であったが、PrOxでは改善効果はわずかであった。

添付ファイル： kps.pdf

DOI： 10.3938/jkps.42.1357

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記述言語：英語   掲載種別：研究論文（学術雑誌）  

SiO2/Si基板上に強誘電性SrBi2Ta2O9(SBT)薄膜をレーザアブレーション法により成膜した。この強誘電体-絶縁膜-半導体構造中におけるSiO2/Si界面をphotoreflectance分光法(PRS)により非破壊で評価した。その結果、SBT成膜により引張応力が増加し、またその増加はSBT膜厚に依存する。さらに強誘電体薄膜に分極処理を行ったときに、処理電圧に比例して応力が減少した。

DOI： 10.3938/jkps.42.1072

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：KOREAN PHYSICAL SOC  

SrBi2Ta2O9(SBT) thin film grown on SiO2/Si by a pulsed laser deposition was evaluated by photoreflectance spectroscopy (PRS) which is one of the non-destructive techniques to characterize an interface. The stress of a SiO2/Si interface of ferroelectric-insulator-semiconductor (FIS) structure has been evaluated by using this method. As a result, there is a tensile stress which is larger than that before deposition, and the stress becomes large according to increasing SBT thickness. Moreover, when ferroelectric thin film is poled, the stress becomes small with increase of the voltage.

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）   出版者・発行元：一般社団法人電子情報通信学会  

次世代High-kゲート絶縁膜材料として期待されているPrOxの薄膜をレーザーアプレーション法(PLD)により作製し、その電気的および光学的手法による評価を行った。試料は基板温度400℃で0.2 Torrの酸素雰囲気中で製膜し、特性改善のためにRTAによりポストアニールを行った。その結果、低温・短時間のアニールでは蓄積側の容量が増加することが見られたが、高温・長時間のアニールでは減少し、また高温では60秒の比較的短かい時間でも界面に遷移層が形成されることが分った。400℃の20秒および60秒のRTAでは膜中固定電荷は減少するものの界面準位は増加することが見られた。界面ストレスをフォトレフレクタンス分光法(PRS)により評価した。その結果、製膜直後は、Si/SiO_2より小さいが、600℃以上のアニールにより自然酸化膜と同じ程度の値となった。またPRSのピーク強度より界面に酸化層が形成されていることが示唆された。

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：IEEE  

High-k thin films of ZrO2, HfO2 PrOx, of similar to10 nm thickness have been prepared by pulsed laser deposition (PLD), and characterized in microscopic structure and electrical properties. Crystallization is promoted in ZrO2 films deposited above 400degreesC, but a significant XRD peak was not observed in the ZrO2 film grown below 400degreesC. Moreover, density of the film is confirmed to saturate above 400degreesC by grazing incident angle X-ray reflectance. The leakage current is decreased by increasing growth temperature, but an equivalent-oxide thickness (EOT) obtained from accumulation capacitance of C - V characteristics becomes large. HfO2 films show the similar behaviors to ZrO2 films. The films deposited at 400degreesC were annealed at 400degreesC in O-2 gas to reduce the leakage, but the EOTs become large. So, these films were irradiated with oxygen radical at the pressure of 10(-3) Pa both to prevent the growth of interfacial layer and to enhance the oxidation of only the films. Although the leakage of ZrO2 films can be reduced by oxygen radical irradiation, only small improvement is observed in the PrOx films.

添付ファイル： IFFF2002proc_kanashima.pdf

DOI： 10.1109/ISAF.2002.1195904

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）   出版者・発行元：一般社団法人電子情報通信学会  

次世代High-kゲート絶縁膜材料として期待されているPrO_xの薄膜をレーザーアブレーション法により作製し、その基礎物性評価を行った。界面遷移層の成長を防ぐため、室温において雰囲気ガスの導入なしに製膜を行い、界面層の成長がほとんどないPrO_x薄膜が作製されたが、ヒステリシス、リーク電流が大きかった。アニールによりこれらの特性は改善したが、界面層の成長は防ぐことができなかった。ターゲット基板間にマスクを挿入し製膜を行い、従来の酸素雰囲気中でのPLDと比べ比較的平坦な薄膜の作製に成功した。さらに、基板間距離60mmで製膜を行った薄膜においてもっとも優れた電気的特性が得られており、薄膜の特性にはアブレートされた粒子のエネルギーが関係していることが示唆された。

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記述言語：日本語   掲載種別：研究論文（大学，研究機関等紀要）   出版者・発行元：和歌山工業高等専門学校  

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）  

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）   出版者・発行元：一般社団法人電子情報通信学会  

次世代高誘電率ゲート酸化膜として、レーザアブレーションによりHigh-kのZrO_2薄膜を作製した。400℃の製膜において比較的平坦な非結晶薄膜が得られることを確認した。SiO_2換算膜厚(EOT)2.7nmのZrO_2に、ラジカル酸素アニール処理を施すことで蓄積容量の低下なくリーク電流密度を改善でき、1 MV/cm下において約1x10^&lt;-7&gt; A/cm^2を得た。高誘電体/Si界面についてフォトレフレクタンスにより調べたところ、Siの3.4eV付近のスペクトルのシフトを捉えることに成功した。MODで作製したZrO_2によるZrO_2/Si構造においてはSi表面の歪みが小さいことを示唆する結果を得た。

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記述言語：英語   掲載種別：研究論文（学術雑誌）   出版者・発行元：INST PURE APPLIED PHYSICS  

Strain and stress at the Si surface have been studied by photoreflectance (PR) spectroscopy. A Si diaphragm structure has been fabricated in order to produce the surface strain caused by N-2 gas pressure which changes the PR spectra of the Si diaphragm. The transition energy obtained from the PR peak energy of approximately 3.4 eV is proportional to the surface stress, which is calculated by elastic analysis. Additionally, PR spectroscopy was applied to measure stress at the interface between the Si and thermal oxide. As the SiO2 growth temperature increases, the interface stress decreases. From our experimental results, it is considered that PR spectroscopy is effective as a contactless and nondestructive monitoring technique for Si surface stress.

DOI： 10.1143/JJAP.40.2844

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：Institute of Electrical and Electronics Engineers Inc.  

In this paper, we have prepared ZrO2 and lanthanide oxide thin films by PLD (Pulsed Laser Deposition) method and characterized these electrical properties by using C-V and J-V characteristics and these interfacial properties by using PR spectroscopy.

添付ファイル： PROCEEDINGS-1.PDF

DOI： 10.1109/IWGI.2001.967576

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記述言語：英語   掲載種別：研究論文（国際会議プロシーディングス）   出版者・発行元：AMERICAN VACUUM SOCIETY NORTHERN CALIFORNIA CHAPTER  

Thin gate oxide charging damage has been studied by photoreflectance (PR) spectroscopy in MOS structure samples. Antenna-area-dependent oxide charging damage such as the generation of SiO2/Si interface states as well as that of electron trap sites in the oxides, has been also addressed by the decrease of the PR peak signal intensity from MOS capacitors, and also confirmed by the capacitance-voltage (C-V) characteristics.

DOI： 10.1109/PPID.2000.870621

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記述言語：日本語   掲載種別：研究論文（研究会，シンポジウム資料等）   出版者・発行元：一般社団法人電子情報通信学会  

Arプラズマ照射によってチャージングダメージを与えられたMOS試料に対してフォトレフレクタンス(PR)分光法による評価を試みた。MOS構造におけるチャージングダメージとしてSiO_2/Si界面準位密度の増加と酸化膜中への電子捕獲が考えられ、ライフタイム及び高周波C-V特性でこれらを確認した。界面準位は表面ポテンシャル及びPR信号強度を減少させ、膜中電子はPR信号強度を増加させるが、PR信号強度はプラズマ照射により急峻に減少することからPR分光評価は主にSiO_2/Si界面に与えられる界面準位の増加と電子捕獲の情報を与えると考えられる。

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記述言語：日本語   出版者・発行元：公益社団法人 応用物理学会  

DOI： 10.11470/jsapmeeting.2020.1.0_2524

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記述言語：日本語   掲載種別：記事・総説・解説・論説等（その他）  

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記述言語：日本語   掲載種別：記事・総説・解説・論説等（学術雑誌）  

DOI： 10.11413/nig.54.365

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：一般社団法人 電気学会  

DOI： 10.1541/ieejsmas.137.NL9_3

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DOI： 10.1541/ieejsmas.137.NL8_2

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記述言語：日本語   出版者・発行元：電気学会  

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記述言語：日本語   出版者・発行元：電気学会  

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記述言語：日本語   出版者・発行元：電気学会  

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記述言語：日本語   掲載種別：会議報告等   出版者・発行元：一般社団法人 電気学会  

DOI： 10.1541/ieejsmas.137.NL3_1

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記述言語：日本語   掲載種別：記事・総説・解説・論説等（商業誌、新聞、ウェブメディア）   出版者・発行元：[科学情報出版]  

高齢化社会において増加する要介護者にとって、褥瘡はそのQOLを著しく低下させる疾病である。その予防のための皮膚へのストレスリスク評価のため、我々は接触時の多軸方向の荷重を評価できるマイクロメカニカルセンサを開発している。本稿では、その概要とともに、センサへの増幅回路集積や貫通電極配線の採用による電磁ノイズ低減について解説した。

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記述言語：日本語   出版者・発行元：電気学会  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語  

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記述言語：日本語  

J-GLOBAL

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記述言語：日本語   掲載種別：記事・総説・解説・論説等（商業誌、新聞、ウェブメディア）   出版者・発行元：小峰工業出版  

添付ファイル： 寒川先生（化学８）.pdf

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記述言語：日本語   出版者・発行元：電気学会  

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記述言語：日本語  

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記述言語：日本語  

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記述言語：日本語  

J-GLOBAL

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記述言語：日本語   出版者・発行元：電気学会  

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記述言語：日本語   掲載種別：会議報告等   出版者・発行元：一般社団法人 電気学会  

DOI： 10.1541/ieejsmas.136.NL2_1

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This paper reports the sensitivity of cantilever biosensor with liposome as sensing biomolecules im-mobilized on the cantilever surface is improved by incorporating cholesterol in phospholipid mem-brane of DPPC liposome. We especially investigate whether incorporating cholesterol in the mem-brane is effective to influence and improve the sensitivity for Aβ protein as a causative agent of Alzheimer&#039;s disease (AD). Consequently, the sensitivity of the cantilever sensor is significantly im-proved as 50-nM Aβ(1-40) has been detected by the incorporation of cholesterol. This result implies that the sensor has the possibility to detect Aβ(1-40) in plasma of AD patients.

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記述言語：英語   出版者・発行元：ELSEVIER SCIENCE BV  

We have previously developed a NiCr strain-gauge cantilever-based biosensor with liposomes as sensing biomolecules immobilized on the cantilever surface to investigate time course of dynamic behaviour of amyloid-beta (1-40) protein on lipid membrane [1]. In this work, we attempt to improve effectively the sensitivity of the cantilever sensor by incorporating liposome with cholesterol to enhance A beta-membrane interaction. Consequently, the sensitivity of the biosensor is significantly improved as 50-nM A beta(1-40) has been detected. This result shows the possibility of detecting A beta(1-40) in plasma of Alzheimer's disease (AD) patients because A beta concentration in the plasma of AD patients is reported to be in the range from 75 to 100 nM [2]. (C) 2016 The Authors. Published by Elsevier Ltd.

DOI： 10.1016/j.proeng.2016.11.526

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   掲載種別：記事・総説・解説・論説等（商業誌、新聞、ウェブメディア）   出版者・発行元：化学工業社  

添付ファイル： 寒川先生（ケミ９）.pdf

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記述言語：日本語  

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記述言語：日本語   出版者・発行元：一般社団法人日本機械学会  

In this paper, we report the development of liquid concentration sensor using crystal oscillator circuit embedded in a robotic artificial skin. We optimized the shape of the sensing capacitor for sensing a small quantity of liquid locally. This sensor is composed of the sensing capacitor and quartz crystal resonator (QCR). The frequency of QCR changes by a liquid in contact with the artificial skin on the sensing capacitor. Because the frequency changes relate to the electrical characteristics (dielectric constant, conductivity) of the liquid, the sensor can measure the concentration of the liquid. This sensor is expected to be applied to a sensor embedded in the robotic artificial skin.

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記述言語：日本語   出版者・発行元：一般社団法人日本機械学会  

In this paper, we report the texture quantitative measurement using the miniature multi-axial tactile sensor with microcantilevers which are fabricated by MEMS technology and embedded in the elastomer. The Si microcantilevers are deformed by both normal and shear forces and the deflection of the cantilever can be detected as resistance change of a strain gauge. The resistance changes by active-touching (pushing and sliding) to the object have been characterized and they are correlated with hardness, thickness, and roughness of the object. The first component obtained by principal component analysis of the correlation matrix among the resistance changes shows the surface texture characteristics (roughness, smoothness, friction) of the object. On the other hand, the second principal component shows texture characteristics including both bulky and elastic feelings of the object.

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記述言語：日本語  

DOI： 10.1541/ieejsmas.135.NL5_3

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記述言語：日本語   出版者・発行元：電気学会  

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記述言語：日本語   掲載種別：記事・総説・解説・論説等（学術雑誌）  

添付ファイル： MEMS加工技術.pdf

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© 15CBMS-0001. This paper reports a new approach for label-free detection of Alzheimer&#039;s disease (AD)-causative agent, namely amyloid-beta protein (Aβ). We selected Aβ(1-40) as a target for detection using a strain-gauge cantilever-based biosensor with liposomes as sensing biomolecules immobilized on the cantilever surface. The Aβ(1-40) proteins at different stages of fibrillization process were prepared and detected, respectively. The result shows that characteristic of chronological change of the gauge resistance depends on the aggregation state of Aβ(1-40). Then time course of dynamic behaviour of Aβ(1-40) on liposome was investigated. The result clearly exhibits the fibrillization process of Aβ(1-40) on lipid membrane.

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記述言語：英語   出版者・発行元：ELSEVIER SCIENCE BV  

We have developed a strain-gauge cantilever-based biosensor with liposomes as model cell membrane immobilized on the cantilever surface to investigate time course of dynamic behavior of amyloid-beta (1-40) protein (A beta(1-40)) on lipid membrane. The results of this work clearly exhibit the characteristic of chronological change of the gauge resistance, which is closely related to the dependence of A beta-liposome interaction extent on the state of A beta during fibrillization and the type of lipid molecule. Therefore, it is considered that these results can adequately reflect the fibrillization process of A beta(1-40) on different kinds of lipid membranes. Meanwhile, it means that we are able to discriminate the molecular states of A beta and evaluate A beta fibrillization process using the cantilever-based liposome biosensor. (C) 2015 The Authors. Published by Elsevier Ltd.

DOI： 10.1016/j.proeng.2015.08.561

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：英語   出版者・発行元：Institute of Electrical Engineers of Japan  

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記述言語：日本語   出版者・発行元：Institute of Electrical Engineers of Japan  

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